CN204741008U - Novel heating plate and cavity location frock - Google Patents
Novel heating plate and cavity location frock Download PDFInfo
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- CN204741008U CN204741008U CN201520364144.5U CN201520364144U CN204741008U CN 204741008 U CN204741008 U CN 204741008U CN 201520364144 U CN201520364144 U CN 201520364144U CN 204741008 U CN204741008 U CN 204741008U
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- cavity
- heating plate
- support
- top shoe
- fixed
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Abstract
The utility model provides a novel heating plate and cavity location frock, includes the support, under bracing, positioning pin, top shoe and lower slider. Triangle -shaped's the support of going up is connected with the under bracing through positioning pin. The top shoe is fixed on last the support, and lower slider is fixed on the under bracing. The end that go up to support be equipped with with the cavity in surface contact meet touch multitouch on. The end of under bracing is equipped with the lower touch multitouch of connecing with the outer surface contact of heating plate. The utility model discloses compact structure is reasonable, because the location center is implemented respectively to two location frocks about adopting, realizes cavity and the endocentric purpose of heating plate, satisfies equipment fixing post heating dish and keeps endocentric novel structure with the cavity. The center of two frocks is fixed a position through positioning pin, and then cavity and the endocentric mesh of heating plate can be satisfied to satisfy the operation requirement, guarantee the stability of technology.
Description
Technical field: the utility model relates to the center location structure of a kind of heating plate and cavity, especially a kind of Novel heating dish and cavity positioning tool, be mainly used in semiconductor equipment
Background technology: in semiconductor equipment, when equipment is installed, cavity needs to keep concentric with heating plate.Such equipment could realize the uniformity of the deposition of wafer surface film when doing technique, ensure the stability of technique.If decentraction when cavity and heating plate are installed, does unsteadiness during technique.So, the result of process deposits is not easy to.
Utility model content: for above-mentioned the deficiencies in the prior art, the utility model provides a kind of Novel heating dish and cavity positioning tool.
For achieving the above object, the technical solution adopted in the utility model is: a kind of Novel heating dish and cavity positioning tool, comprise support, lower support, alignment pin, top shoe and sliding block.Leg-of-mutton upper support is connected with lower support by alignment pin.Top shoe is fixed on and supports, and sliding block is fixed in lower support.The end of upper support is provided with the upper contact block contacted with cavity inner surface.The end of lower support is provided with the lower contact block with heating plate exterior surface.
Preferably, described top shoe is bolted on passing through and supports.
Preferably, be bolted in lower support under described sliding block passes through.
The utility model compact conformation is reasonable, owing to adopting upper and lower two positioning tools to implement the centre of location respectively, realizes the object that cavity is concentric with heating plate, and after meeting equipment installation, heating plate keeps concentric new structure with cavity.Located the center of two frocks by alignment pin, and then the cavity object concentric with heating plate can be met, to meet instructions for use, ensure the stability of technique.
Accompanying drawing illustrates:
Fig. 1 is structural representation of the present utility model.
Embodiment:
Below in conjunction with the accompanying drawing in the utility model embodiment, to the technical scheme in the utility model embodiment carry out clear, intactly describe, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
As shown in Figure 1: a kind of Novel heating dish and cavity positioning tool, comprise support 1, lower support 6, alignment pin 2, top shoe 3 and sliding block 9.Leg-of-mutton upper support 1 is connected with lower support 6 by alignment pin 2.Top shoe 3 is fixed in upper support 1 by upper bolt 4, and sliding block 9 pieces is fixed in lower support 6 by lower bolt 8.The end of upper support 1 is provided with the upper contact block 5 contacted with cavity inner surface.The end of lower support 6 is provided with the lower contact block 7 with heating plate exterior surface.
When equipment is installed, cavity and heating plate is needed to keep concentric.First the lower support 6 of mounting tool the latter half location heating plate, then installs sliding block 9, lower contact block 7 is fully contacted with heating plate outer surface with the inner surface of sliding block 9, and then the lower bolt 8 of locking makes frock the latter half concentric with heating plate.Then the upper support 1 of mounting tool the first half and top shoe 3, make contact block 5 fully contact with cavity inner surface with the outer surface of top shoe 3, and then the upper bolt 4 of locking makes frock the first half concentric with cavity.Finally insert alignment pin 2, realize frock the first half concentric with the latter half, and then reach the cavity object concentric with heating plate.Both fix heating plate with one heart afterwards.So just ensure that heating plate is concentric with cavity after installing, to meet instructions for use, ensure the stability of technique.
Claims (3)
1. Novel heating dish and a cavity positioning tool, is characterized in that: comprise support, lower support, alignment pin, top shoe and sliding block; Leg-of-mutton upper support is connected with lower support by alignment pin, top shoe is fixed on and supports, sliding block is fixed in lower support, and the end of upper support is provided with the upper contact block contacted with cavity inner surface, and the end of lower support is provided with the lower contact block with heating plate exterior surface.
2. a kind of Novel heating dish as claimed in claim 1 and cavity positioning tool, is characterized in that: described top shoe is bolted on passing through and supports.
3. a kind of Novel heating dish as claimed in claim 1 and cavity positioning tool, is characterized in that: be bolted in lower support under described sliding block passes through.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520364144.5U CN204741008U (en) | 2015-05-29 | 2015-05-29 | Novel heating plate and cavity location frock |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520364144.5U CN204741008U (en) | 2015-05-29 | 2015-05-29 | Novel heating plate and cavity location frock |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204741008U true CN204741008U (en) | 2015-11-04 |
Family
ID=54422731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520364144.5U Active CN204741008U (en) | 2015-05-29 | 2015-05-29 | Novel heating plate and cavity location frock |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204741008U (en) |
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2015
- 2015-05-29 CN CN201520364144.5U patent/CN204741008U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |
|
| CP03 | Change of name, title or address |