A kind of cooling control system of temperature control device
Technical field
The utility model relates to cooling control system, is a kind of cooling control system of temperature control device specifically.
Background technology
At present when carrying out temperature to manufacture of semiconductor and controlling, mainly use special temperature control device, be mainly used in the semiconducter process processes such as ETCH (etching), PVD (physical vapour deposition (PVD)), CVD (chemical vapor deposition).Operationally, most factory's business water-cooling circulating system that adopts cools described temperature control device.Factory's business water-cooling circulating system is normally provided the factory Wu Shui of constant temperature by factory's business water supply equipment, factory's business water supply equipment is by factory's business water feed pipe connecting plate type heat interchanger, the factory's business water flowing into plate type heat exchanger cools the circulation fluid flowing through load in temperature control device, the factory Wu Shui that after cooling, temperature raises is got back in factory's business water supply equipment by factory's business water return pipe and lowers the temperature, plate type heat exchanger is flowed into again afterwards by factory's business water feed pipe, and so forth, the cooling to circulation fluid is realized.
Existing factory business water-cooling circulating system is for the power of temperature control device load, one invariable flow can be provided, also need temperature control device itself also to use a power to be not less than the well heater of bearing power, to ensure no matter temperature control device is in light condition or stress state can both stable operation simultaneously.Therefore, in actual production, along with the increase of bearing power, the heater power on temperature control device also needs corresponding increase.Which results in the appearance of following problem:
The increase of heater power can cause the revolution electric current of whole temperature control device to increase, and while increase temperature control device energy consumption, also makes the operational process of temperature control device there is potential safety hazard; Meanwhile, increasing heater power also needs to increase himself volume, causes whole temperature control device volume to become large, temperature control device is restricted in usage space.
Utility model content
For the defect existed in prior art, the purpose of this utility model is the cooling control system providing a kind of temperature control device, by regulating and controlling factory business discharge, low-power heating device can be used, realize control to high power load, the temperature control device revolution electric current avoiding causing because heater power is excessive, the increase of volume, thus reduce temperature control device energy consumption, improve the security and stability that temperature control device runs, reduce the restriction of temperature control device in usage space simultaneously.
For reaching above object, the technical scheme that the utility model is taked is:
A cooling control system for temperature control device, comprises factory's business water supply equipment 1 and plate type heat exchanger 4, is provided with factory's business water feed pipe 2 and factory's business water return pipe 5, it is characterized in that between factory's business water supply equipment 1 and plate type heat exchanger 4:
On factory's business water feed pipe 2, be at least provided with the first valve body 3 for controlling factory's business discharge,
The state that the control signal wire of the first valve body 3 is connected to temperature control device controller 6, first valve body 3 is controlled by temperature control device controller 6.
On the basis of technique scheme, described first valve body 3 is 2/2-way solenoid valve or two-way electronic valve.
On the basis of technique scheme, described first valve body 3 is two-bit triplet solenoid valve or electric T-shaped valve.
On the basis of technique scheme, one section of factory's business water feed pipe connects factory's business water supply equipment outlet and the first valve body 3 entrance, another section of factory's business water feed pipe connects the first valve body 3 and exports and plate type heat exchanger entrance, plate type heat exchanger outlet connects one end of factory's business water return pipe, and the other end of factory's business water return pipe connects factory's business water supply equipment entrance.
On the basis of technique scheme, when temperature control device is started working, the factory Wu Shui providing constant temperature also started working by factory's business water supply equipment 1 simultaneously, and factory's business water flows into the first valve body 3 entrance by factory's business water feed pipe 2;
If the first valve body 3 is 2/2-way solenoid valve, then: when 2/2-way closed electromagnetic valve, factory Wu Shui does not participate in cooling; When 2/2-way solenoid valve conduction, factory's business water flows into plate type heat exchanger 4 by 2/2-way electromagnetic valve outlet, participates in cooling with cooling circulation liquid, and the factory Wu Shui flowing through plate type heat exchanger 4 flows back to factory's business water supply equipment 1 through factory's business water return pipe 5 again;
If the first valve body 3 is two-way electronic valve, then: when the aperture of two-way electronic valve reduces, also reduced by factory's business discharge of two-way electronic valve outlet flow to plate type heat exchanger 4; When the aperture of two-way electronic valve increases, also increased by factory's business discharge of two-way electronic valve outlet flow to plate type heat exchanger 4, the factory Wu Shui flowing through plate type heat exchanger 4 flows back to factory's business water supply equipment 1 through factory's business water return pipe 5 again.
On the basis of technique scheme, if the first valve body 3 is 2/2-way solenoid valve, then: the state of 2/2-way solenoid valve is carried out periodicity by temperature control device controller 6 and controlled, periodic adjustment flows to factory's business discharge size of plate type heat exchanger 4, in each cycle, the first valve body 3 shut-in time is longer, amount of cooling water is less, and the first valve body 3 ON time is longer, and amount of cooling water is larger;
If the first valve body 3 is two-way electronic valve, then: the state of two-way electronic valve is controlled according to pre-set parameter by temperature control device controller 6, the aperture of the first valve body 3 is less, and amount of cooling water is less; The aperture of the first valve body 3 is larger, and amount of cooling water is larger.
On the basis of technique scheme, one section of factory's business water feed pipe connects factory's business water supply equipment outlet and the first valve body 3 entrance, another section of factory's business water feed pipe connects the first valve body 3 and exports and plate type heat exchanger entrance, plate type heat exchanger outlet connects one end of factory's business water return pipe, and the other end of factory's business water return pipe connects factory's business water supply equipment entrance;
On factory's business water feed pipe 2 between the first valve body 3 and factory's business water supply equipment 1, be provided with shunt pipe, shunt pipe is connected to factory's business water return pipe 5,
Shunt pipe is provided with the second valve body 7, and described second valve body 7 is the two-way valve body that can regulate aperture or carry out break-make control fast.
On the basis of technique scheme, the second valve body 7 can be solenoid valve, proportioning valve, throttling valve, butterfly valve, ball valve or variable valve;
Second valve body 7 can adopt Non-follow control, or the control signal wire of the second valve body 7 is connected to temperature control device controller 6, temperature control device controller 6 according to the state of pre-set state modulator second valve body 7,
By controlling the state of the second valve body 7, making factory Wu Shui be in the state of circulating all the time, reducing factory's business water to the impact of pipeline.
On the basis of technique scheme, one section of factory's business water feed pipe connects factory's business water supply equipment outlet and the first valve body 3 entrance a, another section of factory's business water feed pipe connects the first valve body 3 one and exports c and plate type heat exchanger entrance, plate type heat exchanger outlet connects one end of factory's business water return pipe, the other end of factory's business water return pipe connects factory's business water supply equipment entrance, and another outlet of the first valve body 3 b is connected to factory's business water return pipe by pipeline.
On the basis of technique scheme, when temperature control device is started working, the factory Wu Shui providing constant temperature also started working by factory's business water supply equipment 1 simultaneously, and factory's business water flows into the first valve body 3 entrance a by factory's business water feed pipe 2;
If the first valve body 3 is two-bit triplet solenoid valve, then: when the outlet c of two-bit triplet solenoid valve close, export b conducting time, factory Wu Shui do not participate in cooling; When outlet c conducting, the outlet b closedown of two-bit triplet solenoid valve, factory's business water flows into plate type heat exchanger 4 by two-bit triplet electromagnetic valve outlet c, participates in cooling, and the factory Wu Shui flowing through plate type heat exchanger 4 flows back to factory's business water supply equipment 1 through factory's business water return pipe 5 again;
If the first valve body 3 is electric T-shaped valve, then: when the outlet c aperture of electric T-shaped valve reduces, when outlet b aperture increases, the factory's business discharge participating in cooling reduces; When the outlet c aperture of electric T-shaped valve increases, when outlet b aperture reduces, the factory's business discharge participating in cooling increases, and the factory Wu Shui flowing through plate type heat exchanger 4 flows back to factory's business water supply equipment 1 through factory's business water return pipe 5 again;
Control the on off operating mode of two-bit triplet solenoid valve or the aperture of electric T-shaped valve by temperature control device controller 6, make factory Wu Shui be in the state of circulating all the time, avoid factory to be engaged in water to the impact of pipeline.
The cooling control system of temperature control device described in the utility model, by regulating and controlling factory business discharge, low-power heating device can be used, realize the control to high power load, the temperature control device revolution electric current avoiding causing because heater power is excessive, the increase of volume, thus reduce temperature control device energy consumption, improve the security and stability that temperature control device runs, reduce the restriction of temperature control device in usage space simultaneously, make temperature control device run more energy-conservation, more reliable, the wider model of range of application.
Accompanying drawing explanation
The utility model has following accompanying drawing:
The structural drawing of Fig. 1 the utility model embodiment 1.
The structural drawing of Fig. 2 the utility model embodiment 2.
The structural drawing of Fig. 3 the utility model embodiment 3.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail.
The cooling control system of temperature control device described in the utility model, comprising:
Factory's business water supply equipment 1 and plate type heat exchanger 4,
Factory's business water feed pipe 2 and factory's business water return pipe 5 is provided with between factory's business water supply equipment 1 and plate type heat exchanger 4,
On factory's business water feed pipe 2, be at least provided with the first valve body 3 for controlling factory's business discharge,
The state that the control signal wire of the first valve body 3 is connected to temperature control device controller 6, first valve body 3 is controlled by temperature control device controller 6.
On the basis of technique scheme, as shown in Figure 1, 2, described first valve body 3 is 2/2-way solenoid valve or two-way electronic valve.Or, can as shown in Figure 3, described first valve body 3 is two-bit triplet solenoid valve or electric T-shaped valve.
In embodiment illustrated in fig. 11, one section of factory's business water feed pipe connects factory's business water supply equipment outlet and the first valve body 3 entrance, another section of factory's business water feed pipe connects the first valve body 3 and exports and plate type heat exchanger entrance, plate type heat exchanger outlet connects one end of factory's business water return pipe, and the other end of factory's business water return pipe connects factory's business water supply equipment entrance.
In embodiment 1, when temperature control device is started working, the factory Wu Shui providing constant temperature also started working by factory's business water supply equipment 1 simultaneously, and factory's business water flows into the first valve body 3 entrance by factory's business water feed pipe 2;
If the first valve body 3 is 2/2-way solenoid valve, then: when 2/2-way closed electromagnetic valve, factory Wu Shui does not participate in cooling; When 2/2-way solenoid valve conduction, factory's business water flows into plate type heat exchanger 4 by 2/2-way electromagnetic valve outlet, participates in cooling with cooling circulation liquid, and the factory Wu Shui flowing through plate type heat exchanger 4 flows back to factory's business water supply equipment 1 through factory's business water return pipe 5 again;
If the first valve body 3 is two-way electronic valve, then: when the aperture of two-way electronic valve reduces, also reduced by factory's business discharge of two-way electronic valve outlet flow to plate type heat exchanger 4; When the aperture of two-way electronic valve increases, also increased by factory's business discharge of two-way electronic valve outlet flow to plate type heat exchanger 4, the factory Wu Shui flowing through plate type heat exchanger 4 flows back to factory's business water supply equipment 1 through factory's business water return pipe 5 again.
On the basis of technique scheme, in embodiment 1: if the first valve body 3 is 2/2-way solenoid valve, then: the state of 2/2-way solenoid valve is carried out periodicity by temperature control device controller 6 and controlled (cycle can be 3 ~ 10s), periodic adjustment flows to factory's business discharge size of plate type heat exchanger 4, in each cycle, the first valve body 3 shut-in time is longer, amount of cooling water is less, and the first valve body 3 ON time is longer, and amount of cooling water is larger;
If the first valve body 3 is two-way electronic valve, then: the state (aperture state) of two-way electronic valve is controlled according to pre-set parameter by temperature control device controller 6, and the aperture of the first valve body 3 is less, and amount of cooling water is less; The aperture of the first valve body 3 is larger, and amount of cooling water is larger.
In embodiment 1, when temperature control device is in light condition, reduces factory's business discharge size, reduce amount of cooling water; When temperature control device is in stress state, increases factory's business discharge size, improve amount of cooling water, ensureing which kind of state no matter temperature control device be in can both stable operation, realizes the object significantly reducing heater power.
In embodiment illustrated in fig. 22, one section of factory's business water feed pipe connects factory's business water supply equipment outlet and the first valve body 3 entrance, another section of factory's business water feed pipe connects the first valve body 3 and exports and plate type heat exchanger entrance, plate type heat exchanger outlet connects one end of factory's business water return pipe, and the other end of factory's business water return pipe connects factory's business water supply equipment entrance;
On factory's business water feed pipe 2 between the first valve body 3 and factory's business water supply equipment 1, be provided with shunt pipe, shunt pipe is connected to factory's business water return pipe 5,
Shunt pipe is provided with the second valve body 7, and described second valve body 7 is the two-way valve body that can regulate aperture or carry out break-make control fast, and such as the second valve body 7 can be solenoid valve, proportioning valve, throttling valve, butterfly valve, ball valve or variable valve,
Second valve body 7 can adopt Non-follow control, or the control signal wire of the second valve body 7 is connected to temperature control device controller 6, and temperature control device controller 6 is according to the state of pre-set state modulator second valve body 7.The control of the first valve body 3 is with embodiment 1.
In embodiment 2, compare with embodiment 1, be engaged in being connected in parallel a pipeline (shunt pipe) between water return pipe 5 at factory's business water feed pipe 2 and factory, before this pipeline need be positioned at the first valve body 3, pipeline is provided with the second valve body 7.
Second valve body 7 can be that solenoid valve, proportioning valve, throttling valve, butterfly valve, ball valve, variable valve etc. can regulate aperture or carry out the two-way valve body of break-make control fast.According to the difference selecting valve body, second valve body 7 can adopt Non-follow control, also temperature control device controller 6 can be adopted to control, and the control signal wire of the second valve body 7 is connected to temperature control device controller 6, and temperature control device controller 6 is according to the state of pre-set state modulator second valve body 7.
Embodiment 2 is substantially identical with the principle of work of embodiment 1, different places is while temperature control device controller 6 controls the first valve body 3, manually or temperature control device controller 6 control the state of the second valve body 7, make factory Wu Shui be in the state of circulating all the time, reduce factory's business water to the impact of pipeline.
In embodiment illustrated in fig. 33, one section of factory's business water feed pipe connects factory's business water supply equipment outlet and the first valve body 3 entrance a, another section of factory's business water feed pipe connects the first valve body 3 one and exports c and plate type heat exchanger entrance, plate type heat exchanger outlet connects one end of factory's business water return pipe, the other end of factory's business water return pipe connects factory's business water supply equipment entrance, and another outlet of the first valve body 3 b is connected to factory's business water return pipe by pipeline.
In embodiment 3, change the 2/2-way solenoid valve in embodiment 1,2 or two-way electronic valve into two-bit triplet solenoid valve or electric T-shaped valve.
The entrance a of the first valve body 3 connects one end of factory's business water feed pipe 2, and an outlet b of the first valve body 3 is parallel-connected on factory's business water return pipe 5, and an outlet c of the first valve body 3 connects plate type heat exchanger 4 entrance.The state of the first valve body 3 is controlled by temperature control device controller 6.
Embodiment 3 is substantially identical with the principle of work of embodiment 1, different places is the state being controlled the first valve body 3 by temperature control device controller 6, make factory Wu Shui be in the state of circulating all the time, comparatively embodiment 1, embodiment 3 can avoid factory to be engaged in water to the impact of pipeline.
In embodiment 3, when temperature control device is started working, the factory Wu Shui providing constant temperature also started working by factory's business water supply equipment 1 simultaneously, and factory's business water flows into the first valve body 3 entrance a by factory's business water feed pipe 2;
If the first valve body 3 is two-bit triplet solenoid valve, then: when the outlet c of two-bit triplet solenoid valve close, export b conducting time, factory Wu Shui do not participate in cooling; When outlet c conducting, the outlet b closedown of two-bit triplet solenoid valve, factory's business water flows into plate type heat exchanger 4 by two-bit triplet electromagnetic valve outlet c, participates in cooling, and the factory Wu Shui flowing through plate type heat exchanger 4 flows back to factory's business water supply equipment 1 through factory's business water return pipe 5 again;
If the first valve body 3 is electric T-shaped valve, then: when the outlet c aperture of electric T-shaped valve reduces, when outlet b aperture increases, the factory's business discharge participating in cooling reduces; When the outlet c aperture of electric T-shaped valve increases, when outlet b aperture reduces, the factory's business discharge participating in cooling increases, and the factory Wu Shui flowing through plate type heat exchanger 4 flows back to factory's business water supply equipment 1 through factory's business water return pipe 5 again;
Control the on off operating mode of two-bit triplet solenoid valve or the aperture of electric T-shaped valve by temperature control device controller 6, make factory Wu Shui be in the state of circulating all the time, avoid factory to be engaged in water to the impact of pipeline.
Compared to existing technologies, in factory, the outlet of business water feed pipe is provided with a solenoid valve or motorized valve to the cooling control system that the utility model provides, and regulates by the period of state of Controlling solenoid valve or motorized valve the factory's business discharge size flowing into plate type heat exchanger.Therefore, when temperature control device is in light condition, reduce the factory's business discharge flowing into plate type heat exchanger, a power only can be used much smaller than the well heater of bearing power, just can realize the stable operation of temperature control device; When temperature control device is in stress state, increases the factory's business discharge flowing into plate type heat exchanger, same low-power heating device can be used, the stable operation of temperature control device can be ensured equally.Avoid impact temperature control device caused because heater power is excessive, make temperature control device run more energy-conservation, more reliable, the wider model of range of application.In addition, this cooling control system also has the fast advantage of reaction velocity.
The content be not described in detail in this instructions belongs to the known prior art of professional and technical personnel in the field.