CN204696138U - A kind of drying unit of solar cell polycrystalline etching device - Google Patents

A kind of drying unit of solar cell polycrystalline etching device Download PDF

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Publication number
CN204696138U
CN204696138U CN201520427409.1U CN201520427409U CN204696138U CN 204696138 U CN204696138 U CN 204696138U CN 201520427409 U CN201520427409 U CN 201520427409U CN 204696138 U CN204696138 U CN 204696138U
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CN
China
Prior art keywords
air knife
heating tank
solar cell
drying unit
etching device
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Expired - Fee Related
Application number
CN201520427409.1U
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Chinese (zh)
Inventor
王伟兵
赵东
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Zhejiang Perlight Solar Co Ltd
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Zhejiang Perlight Solar Co Ltd
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Priority to CN201520427409.1U priority Critical patent/CN204696138U/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The utility model provides a kind of drying unit of solar cell polycrystalline etching device, belongs to mechanical device technical field.It solving after existing silicon chip of solar cell making herbs into wool can not the technical problem such as flash baking.Polycrystalline etching device has the delivery track of conveying silicon chip of solar cell, this drying unit comprises the heating tank with cavity, heating tank is connected to the air inlet pipe and escape pipe that can be connected with the cavity of heating tank, electrical heating wire is installed with in heating tank, the both sides up and down of delivery track are respectively equipped with air knife and lower air knife, escape pipe is connected with lower air knife with upper air knife, and escape pipe is also provided with pneumatic triple piece.This drying unit passes through in heating tank air heat, then upper air knife and lower air knife is entered into by escape pipe, hot blast is allowed to blow out the silicon chip of solar cell after purging cleaning again from the venthole of upper air knife and lower air knife, silicon chip of solar cell surface can be dried up fast water stain, ensure that the cleaning of silicon wafer after cleaning is dry.

Description

A kind of drying unit of solar cell polycrystalline etching device
Technical field
The utility model belongs to mechanical device technical field, relates to a kind of drying plant used in manufacture of solar cells process, particularly a kind of drying unit of solar cell polycrystalline etching device.
Background technology
In manufacture of solar cells manufactures, making herbs into wool matting is mainly used in processing silicon chip surface, the oils molecule of the silicon chip surface before silicon chip diffusion on manufacture of solar cells line, metal impurities, mechanical damage layer is removed by etching cleaning machine and makes pyramid matte.After the cleaning of polycrystalline etching cleaning machine, cell silicon chip needs to adopt compressed air to purge; to ensure that the silicon chip after cleaning reaches water stain-free, dry effect; but due to the reason such as compressed air purge time is limited; often there will be silicon chip surface has water stain; the phenomenon such as cannot not blow dryly, affect the product quality of next procedure.
China's patent (notification number: CN104088018A; Publication date: 2014-10-08) disclose a kind of cleaning method of fine-hair maring using monocrystalline silicon slice, by carrying out twice cleaning with the nitration mixture cleaning solution that hydrofluoric acid adds hydrochloric acid after monocrystalline making herbs into wool, hydrofluoric acid added hydrochloric acid cleaning and can effectively remove the principal metal impurities such as sodium ion, potassium ion first time, and removed the silica film of silicon chip surface; Second time hydrofluoric acid adds the hydrochloric acid cleaning further shallow coating metal impurity of cleaning silicon chip (metal impurities residual after first time cleaning), removes the silicon dioxide layer of silicon chip surface in addition, reaches effective dehydrating effect.Meanwhile, this invention also discloses a kind of monocrystalline etching device, by introducing hydrochloric acid pipeline and hydrofluoric acid pipeline in hydrochloric acid trough simultaneously, introduces hydrofluoric acid pipeline and hydrochloric acid pipeline in hydrofluoric acid groove simultaneously; Thus the mixed solution of hydrochloric acid and hydrofluoric acid can be obtained easily, conveniently carry out the cleaning method of above-mentioned fine-hair maring using monocrystalline silicon slice, dry after pure water cleaning.
Do not have special drying plant in above-mentioned patent, adopt traditional furnace drying method to be adopt cold wind blow or directly blow to silicon chip surface after electric-heating-wire-heating, inefficiency, non-uniform temperature, drying effect is poor, is difficult to the quality ensureing product.
Summary of the invention
The problems referred to above that the utility model exists for existing technology, there is provided a kind of drying unit of solar cell polycrystalline etching device, technical problem to be solved in the utility model is: how to dry fast and effectively after the silicon wafer wool making in manufacture of solar cells.
The utility model object realizes by following technical proposal:
A kind of drying unit of solar cell polycrystalline etching device, polycrystalline etching device has the delivery track of conveying silicon chip of solar cell, it is characterized in that, described drying unit comprises the heating tank with cavity, described heating tank is connected to the air inlet pipe and escape pipe that can be connected with the cavity of described heating tank, electrical heating wire is installed with in described heating tank, the both sides up and down of described delivery track are respectively equipped with air knife and lower air knife, described escape pipe is connected with lower air knife with described upper air knife, and described escape pipe is also provided with pneumatic triple piece.
Its principle is as follows: by heating the air blowing to silicon chip of solar cell surface in the technical program, drying efficiency can be improved, adopt heating tank to unify heating to air, the installation site of heating tank is relatively more flexible, is convenient to the mounting arrangement of solar cell polycrystalline etching device.By air inlet pipe, compressed air is compressed into heating tank to heat, then upper air knife and lower air knife is entered into by escape pipe, hot blast is allowed to blow out the silicon chip of solar cell after purging cleaning again from the venthole of upper air knife and lower air knife, silicon chip of solar cell surface can be dried up fast water stain, ensure that the cleaning of silicon wafer after cleaning is dry.
In the drying unit of above-mentioned solar cell polycrystalline etching device, described heating tank is horizontal tubular, described electrical heating wire along described heating tank axial distribution and be positioned at the middle part of described heating tank, described air inlet pipe is connected to one end of described heating tank, and described escape pipe is connected to the other end of described heating tank.Uniformity and the high efficiency of air heat in heating tank can be ensured like this.
In the drying unit of above-mentioned solar cell polycrystalline etching device, the upside of described delivery track is interval with air knife on some groups along the length direction of delivery track, air knife under the downside of described delivery track is interval with some groups along the length direction of delivery track, all upper air knives are all connected with lower air knife.By organizing air knife and lower air knife to silicon chip of solar cell upper and lower both sides continuous heating, efficiency is high, is heated evenly, good drying effect more.
In the drying unit of above-mentioned solar cell polycrystalline etching device, described drying unit also comprises controller, temperature sensor is provided with in described heating tank, described electrical heating wire is connected with control switch, and described temperature sensor, control switch and pneumatic triple piece all electrically connect with described controller.Set on the controller, when delivery track there being silicon chip of solar cell, pneumatic triple piece is opened, and the heated air in heating tank blows to silicon chip of solar cell two sides from the venthole of upper air knife and lower air knife, dries; By temperature sensor and control switch, the air themperature in guarantee heating tank is at 70 DEG C ~ 90 DEG C.
In the drying unit of above-mentioned solar cell polycrystalline etching device, described controller is singlechip controller or PLC.Singlechip controller has the advantages such as system configuration is simple, use convenience, reliability high-low voltage, low-power consumption; PLC has the advantages such as perfect in shape and function, reliability is high, antijamming capability is strong.
Compared with prior art, compared with prior art: compressed air is compressed into heating tank by air inlet pipe and heated by this drying unit, then upper air knife and lower air knife is entered into by escape pipe, hot blast is allowed to blow out the silicon chip of solar cell after purging cleaning again from the venthole of upper air knife and lower air knife, silicon chip of solar cell surface can be dried up fast water stain, ensure that the cleaning of silicon wafer after cleaning is dry.
Accompanying drawing explanation
Fig. 1 is the operation principle structural representation of this drying unit;
In figure, 1, polycrystalline etching device; 2, delivery track; 3, heating tank; 4, electrical heating wire; 5, upper air knife; 6, lower air knife; 7, pneumatic triple piece; 8, air inlet pipe; 9, escape pipe.
Embodiment
Be below specific embodiment of the utility model and by reference to the accompanying drawings, the technical solution of the utility model is further described, but the utility model be not limited to these embodiments.
As shown in Figure 1, polycrystalline etching device 1 has the delivery track 2 of conveying silicon chip of solar cell, this drying unit comprises the heating tank 3 with cavity, heating tank 3 is connected to the air inlet pipe 8 and escape pipe 9 that can be connected with the cavity of heating tank 3, electrical heating wire 4 is installed with in heating tank 3, the both sides up and down of delivery track 2 are respectively equipped with air knife 5 and lower air knife 6, and escape pipe 9 is connected with lower air knife 6 with upper air knife 5, and escape pipe 9 is also provided with pneumatic triple piece 7.
As shown in Figure 1, heating tank 3 in horizontal tubular, electrical heating wire 4 along heating tank 3 axial distribution and be positioned at the middle part of heating tank 3, air inlet pipe 8 is connected to one end of heating tank 3, and escape pipe 9 is connected to the other end of heating tank 3; The upside of delivery track 2 is interval with air knife 5 on some groups along the length direction of delivery track 2, and air knife 6 under the downside of delivery track 2 is interval with some groups along the length direction of delivery track 2, all upper air knives 5 are all connected with lower air knife 6.
By heating the air blowing to silicon chip of solar cell surface in the technical program, drying efficiency can be improved, adopt heating tank 3 pairs of air to unify heating, the installation site of heating tank 3 is relatively more flexible, is convenient to the mounting arrangement of solar cell polycrystalline etching device.By air inlet pipe 8, compressed air is compressed into heating tank 3 to heat, then upper air knife 5 and lower air knife 6 is entered into by escape pipe 9, hot blast is allowed to blow out the silicon chip of solar cell after purging cleaning again from the venthole of upper air knife 5 and lower air knife 6, silicon chip of solar cell surface can be dried up fast water stain, ensure that the cleaning of silicon wafer after cleaning is dry.
In the present embodiment, drying unit also comprises controller, is provided with temperature sensor in heating tank 3, and electrical heating wire 4 is connected with control switch, and temperature sensor, control switch and pneumatic triple piece 7 all electrically connects with controller.Set on the controller, when delivery track 2 there being silicon chip of solar cell, pneumatic triple piece 7 is opened, and the heated air in heating tank 3 blows to silicon chip of solar cell two sides from the venthole of upper air knife 5 and lower air knife 6, dries; By temperature sensor and control switch, the air themperature in guarantee heating tank 3 is at 70 DEG C ~ 90 DEG C; Controller is singlechip controller or PLC.Singlechip controller is preferably, the advantages such as system configuration is simple, use convenience, reliability high-low voltage, low-power consumption that it has in the present embodiment.
Specific embodiment described herein is only to the explanation for example of the utility model spirit.The utility model person of ordinary skill in the field can make various amendment or supplements or adopt similar mode to substitute to described specific embodiment, but can't depart from spirit of the present utility model or surmount the scope that appended claims defines.
Although more employ 1 herein, polycrystalline etching device; 2, delivery track; 3, heating tank; 4, electrical heating wire; 5, upper air knife; 6, lower air knife; 7, pneumatic triple piece; 8, air inlet pipe; 9, the term such as escape pipe, but do not get rid of the possibility using other term.These terms are used to be only used to describe and explain essence of the present utility model more easily; The restriction that they are construed to any one additional is all contrary with the utility model spirit.

Claims (5)

1. the drying unit of a solar cell polycrystalline etching device, polycrystalline etching device (1) has the delivery track (2) of conveying silicon chip of solar cell, it is characterized in that, described drying unit comprises the heating tank (3) with cavity, described heating tank (3) is connected to the air inlet pipe (8) and escape pipe (9) that can be connected with the cavity of described heating tank (3), electrical heating wire (4) is installed with in described heating tank (3), the both sides up and down of described delivery track (2) are respectively equipped with air knife (5) and lower air knife (6), described escape pipe (9) is connected with lower air knife (6) with described upper air knife (5), described escape pipe (9) is also provided with pneumatic triple piece (7).
2. the drying unit of a kind of solar cell polycrystalline etching device according to claim 1, it is characterized in that, described heating tank (3) is in horizontal tubular, described electrical heating wire (4) along described heating tank (3) axial distribution and be positioned at the middle part of described heating tank (3), described air inlet pipe (8) is connected to one end of described heating tank (3), and described escape pipe (9) is connected to the other end of described heating tank (3).
3. the drying unit of a kind of solar cell polycrystalline etching device according to claim 1 and 2, it is characterized in that, the upside of described delivery track (2) is interval with air knife on some groups (5) along the length direction of delivery track (2), air knife (6) under the downside of described delivery track (2) is interval with some groups along the length direction of delivery track (2), all upper air knives (5) are all connected with lower air knife (6).
4. the drying unit of a kind of solar cell polycrystalline etching device according to claim 1 and 2, it is characterized in that, described drying unit also comprises controller, described heating tank is provided with temperature sensor in (3), (4) are connected with control switch to described electrical heating wire, and described temperature sensor, control switch and pneumatic triple piece (7) all electrically connect with described controller.
5. the drying unit of a kind of solar cell polycrystalline etching device according to claim 4, it is characterized in that, described controller is singlechip controller or PLC.
CN201520427409.1U 2015-06-19 2015-06-19 A kind of drying unit of solar cell polycrystalline etching device Expired - Fee Related CN204696138U (en)

Priority Applications (1)

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CN201520427409.1U CN204696138U (en) 2015-06-19 2015-06-19 A kind of drying unit of solar cell polycrystalline etching device

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107356082A (en) * 2017-07-26 2017-11-17 昊诚光电(太仓)有限公司 A kind of drying unit and wool-weaving machine
CN107957184A (en) * 2017-10-25 2018-04-24 无锡琨圣科技有限公司 A kind of polysilicon chip cleaning and texturing machine drying unit
CN109841545A (en) * 2019-02-26 2019-06-04 镇江仁德新能源科技有限公司 A kind of black silicon fluff making device purged
CN112951949A (en) * 2021-01-26 2021-06-11 徐州中辉光伏科技有限公司 Texturing machine for processing silicon crystal battery

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107356082A (en) * 2017-07-26 2017-11-17 昊诚光电(太仓)有限公司 A kind of drying unit and wool-weaving machine
CN107957184A (en) * 2017-10-25 2018-04-24 无锡琨圣科技有限公司 A kind of polysilicon chip cleaning and texturing machine drying unit
CN109841545A (en) * 2019-02-26 2019-06-04 镇江仁德新能源科技有限公司 A kind of black silicon fluff making device purged
CN112951949A (en) * 2021-01-26 2021-06-11 徐州中辉光伏科技有限公司 Texturing machine for processing silicon crystal battery

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
PE01 Entry into force of the registration of the contract for pledge of patent right
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of utility model: Drying device of solar cell polycrystal making herbs into wool equipment

Effective date of registration: 20180518

Granted publication date: 20151007

Pledgee: Zhejiang Tailong commercial bank Taizhou branch of Limited by Share Ltd

Pledgor: Zhejiang Perlight Solar Co., Ltd.

Registration number: 2018330000113

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20151007

Termination date: 20200619