CN204694447U - Based on the vacuum ultraviolet light source test macro of vacuum chamber - Google Patents
Based on the vacuum ultraviolet light source test macro of vacuum chamber Download PDFInfo
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- CN204694447U CN204694447U CN201520131373.2U CN201520131373U CN204694447U CN 204694447 U CN204694447 U CN 204694447U CN 201520131373 U CN201520131373 U CN 201520131373U CN 204694447 U CN204694447 U CN 204694447U
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Abstract
The utility model belongs to ultraviolet source technical field of measurement and test, is specially a kind of vacuum ultraviolet light source test macro based on vacuum chamber.This test macro, comprises a vacuum chamber, vacuum pump, lamp bracket and UV radiation testing apparatus etc.Vacuum chamber adopts metal material to make, and inside surface carries out Darkening process; Vacuum chamber is connected with vacuum pump by flange, there are a gas filling valve and an air release simultaneously, the gas that high pure nitrogen, argon gas etc. do not absorb ultraviolet and vacuum ultraviolet can be filled in vacuum chamber, and be equipped with the probe of the Pirani gauge measuring low vacuum, the ionization gauge measuring condition of high vacuum degree and measurement water vapour, oxygen content; Vacuum chamber flange encapsulates the water pipe of water bath with thermostatic control to control the cold junction temperature of light source; Uv radiation intensity meter and optical fiber is adopted to measure vacuum ultraviolet and more than 200nm UV radiation; Flange joint is stitched, composition combined test system, the relative spectral power distributions of all kinds of vacuum ultraviolet light source of Simultaneously test, absolute radiation power and radiation efficiency with the incidence of vacuum monochromator.
Description
Technical field
The utility model belongs to ultraviolet source technical field of measurement and test, is specifically related to a kind of vacuum ultraviolet light source test macro based on vacuum chamber.
Background technology
In current production, life, uviol lamp all plays an important role in various fields.Ultraviolet photo-biological effect can be used for sterilizing, after bacterium is subject to Ultraviolet radiation, causes DNA chain break or variation, causes bacterial death or lose fertility.Ultraviolet disinfection is used for the medium such as air, water, milk, beverage, and many occasions such as classroom, office, laboratory, workshop and hospital.Ultraviolet is also widely used in body-care, and appropriate ultraviolet irradiation has desirable influence to human body viscera and immune system, but excessive ultraviolet can cause the disease of skin such as erythema.The ultraviolet physiatrics developed at present can treat psoriasis and rickets, diminishes inflammation.Ultraviolet fluorescent effect can be used for the chemical analysis of inorganic elements and organic substance, the trace element in food hygiene and the detection of objectionable impurities, the monitoring of product quality in industrial production, the sample analysis in the detection of mineral deposit.Ultraviolet Photochemical effects can be used for duplicating, ink solidification, semiconductor material photoetching, macromolecule material aging test and isotopic separation etc.High-power ultraviolet source can produce Radiant UV Power, facility compact in limited volume, and use cost is lower.The product of external existing all kinds of ultraviolet source, has large-scale application in urban drinking water, plumbing and air disinfection field.
In order to test the UV radiation efficiency of all kinds of ultraviolet source, Keitz in 1971 propose by irradiance calculate radiation power formula (Keitz H A E. Light Calculations and measurements [M]. London, UK:Macmillan and Co Ltd, 1971.)
,
Be referred to as now Keitz formula.Suppose that ultraviolet source is lambert's body line source, measured light length is
l, luminescent center aimed at by irradiance meter, and luminescent center to irradiance meter distance is
d, irradiance meter to line source the semiapex angle opened be
α, can by uv radiation intensity with this formula
ecalculate radiation power
p.
Many overseas enterprises and research institution have all adopted Keitz formula and have measured 254 nm radiation power and radiation efficiencies thereof of low pressure mercury lamp, have proved that accuracy of measurement is high, can greatly simplified measurement process (Lawal O, Dussert B, Howarth C,
et al. Proposed method for measurement of the output of monochromatic (254 nm) low pressure UV lamps [J].
iUVA News, 2008,
10(1): 14-17.), many ultraviolet source manufactures and application enterprise recommend to adopt Keitz formula to test 254 nm UV radiation of low pressure mercury lamp recently.
According to the Measures compare (Zhang Yuan distributed radiancy method, Keitz formula, line source and column source being calculated to radiation power, Sun Minghua, Zhu Shaolong, etc. measure the Keitz method [J] of low pressure mercury lamp 254 nm radiant energy flux. Fudan Journal (natural science edition), 2010
49(2): 262-265.), measuring distance is worked as
dwith the positive column length of tested lamp
lbetween pass be 2.5
l<
d<4
lin scope, the error of Keitz method and distributed radiancy meter method is less than 1%, and accuracy is very high, and this method only needs to measure the normal direction irradiance at lamp center, convenient and swift, substitutional theorem radiancy meter method can measure the radiation power of low pressure mercury lamp.
Keitz formula for the measurement of Excimer lamp UV radiation efficiency, and obtain international endorsement (Zhuang X B, Han Q Y, Zhang H J,
et al. The efficiency of coaxial KrCl
*excilamps [J].
journal of Physics D:Applied Physics, 2010,
43(20): 205202,9pp.) (Han Q Y, An R J, Lister G,
et al. Radiation characteristics of coaxial KrBr
*excilamps based on a dielectric barrier discharge [J].
journal of Physics D:Applied Physics, 2013,
46(50): 505203,10pp.).
But wavelength is less than the vacuum ultraviolet of 200 nm, as 185 nm spectral lines of low pressure mercury lamp and 172 nm spectral lines of xenon excimer lamp, cannot test at normal atmospheric environment, because the oxygen in air understands strong absorption vacuum ultraviolet thus have a strong impact on the precision of test.Therefore need a kind of vacuum ultraviolet power test equipment easy and simple to handle, be used for meeting the test request of vacuum ultraviolet light source absolute radiation power.
Summary of the invention
The purpose of this utility model is to provide a kind of oxygen and water vapour of can preventing to the strong absorption of vacuum ultraviolet, and can measure the vacuum ultraviolet light source test macro of the spectrum of vacuum ultraviolet and other ultraviolets, radiation power and radiation efficiency simultaneously.
The vacuum ultraviolet light source test macro that the utility model provides, based on vacuum chamber, it comprises a vacuum chamber main body, vacuum pump, lamp bracket and UV radiation testing apparatus etc., can be used for the vacuum ultraviolet power of measure linear ultraviolet source and radiation efficiency.Wherein:
Described vacuum chamber main body adopts metal material to make, and shape is right cylinder or round platform, can be vertical (namely axes normal is in surface level), also can be horizontal (namely axis being parallel is in surface level); The inside surface of vacuum chamber carries out Darkening process; The door of vacuum chamber is the withstand voltage curve form such as spherical crown or parabola; Vacuum chamber is equipped with several flanges, a gas filling valve, an air release.
Described vacuum chamber is connected with vacuum pump by flange; Described vacuum pump can be one or more mechanical pump, diffusion pump, molecular pump etc. separately or tandem working.
The gas filling valve of described vacuum chamber is connected with compressed gas cylinder or gas source pipeline by pipeline, can fill the gas that high pure nitrogen, argon gas etc. do not absorb ultraviolet and vacuum ultraviolet in vacuum chamber.
UV radiation testing apparatus comprises some uv radiation intensity meters, optical fiber, vacuum monochromator;
Described lamp bracket is positioned at vacuum chamber, can be fixed lamp bracket; Also can be revolving can the lamp bracket of various lamp, can by many linear light sources successively rotary alignment probe and optical fiber.
In the utility model, described vacuum chamber is equipped with watch window, and window material to tolerate the ultraviolet cut-on type quartz glass of 1 atmospheric pressure negative pressure, hard glass or tempered glass.
In the utility model, described vacuum chamber is equipped with the Pirani gauge measuring low vacuum, the ionization gauge measuring condition of high vacuum degree and measures the probe of water vapour, oxygen content.
In the utility model, the flange of described vacuum chamber can be used for assembling some multi-core aviation plugs, for realizing the electrical connection inside and outside vacuum chamber.
In the utility model, the flange of described vacuum chamber can be used for the water pipe encapsulating water bath with thermostatic control, thus controls the cold junction temperature of the ultraviolet source in vacuum chamber.
In the utility model, described vacuum chamber is provided with several detection windows, places the probe of uv radiation intensity meter or be furnished with optical fiber outside window; When measuring the vacuum ultraviolet of wavelength 200 below nm, the material of detection window adopts magnesium fluoride crystal, pops one's head in or needs between optical fiber and window to vacuumize or keep nitrogen or argon atmosphere; When measuring the UV radiation of wavelength 200 more than nm, window material is quartz glass, is in the air of normal temperature and pressure around probe or optical fiber.
In the utility model, described vacuum chamber is provided with several slide valves detection mouth, and described detection mouth and uv radiation intensity meter are popped one's head in or filled nitrogen or argon gas between optical fiber; Open slide valve during measurement, vacuum-ultraviolet light shines directly into probe or optical fiber head.
The Darkening process of described vacuum chamber inside surface can be the light absorbents such as pitch-dark, carborundum powder, silver powder, the CNT of coating vacuum-resistant ultraviolet irradiation.
Described vacuum chamber is built with several uv radiation intensity meters probe or optical fiber head.
Before described optical fiber head, the optical device such as cosine correcting sheet, collimation lens can be installed.
Described vacuum chamber can directly with the incidence seam Flange joint of vacuum monochromator, composition combined test system, the relative spectral power distributions of Simultaneously test vacuum ultraviolet light source, absolute radiation power and radiation efficiency.
Accompanying drawing explanation
Fig. 1 is the front view of vacuum chamber of the present utility model.
Fig. 2 is the partial sectional view in the A-A direction of vacuum chamber of the present utility model.
Fig. 3 is the left view of vacuum chamber of the present utility model.
Fig. 4 is the right view of vacuum chamber of the present utility model.
Fig. 5 is the rear view of vacuum chamber of the present utility model.
Number in the figure: 1-vacuum chamber; 2-handle; 3-stainless steel door; 4-Pirani gauge; 5-VUV Irradiation degree meter probe testing window; 6-uv radiation intensity meter probe testing window; 7-ionization gauge; 8-gas filling valve; 9-four-core aviation plug; 10-view window; 11-four-core aviation plug; 12-air release; 13-mechanical pump flange; 14-eight core aviation plugs; 15 ~ 17-backup flange; 18-test optical fiber window flange; 19-water inlet pipe flange; 20-rising pipe flange; 21-view window; 22-water prode; 23-oxygen probe; 31-probe peripheral region; 32-uv radiation intensity meter is popped one's head in; 33 ~ 34-probe closure fange; 35-measurement window; 36 ~ 37-round platform cross section.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described further.Described embodiment is only section Example of the present utility model.Do not make other all embodiments of creative achievement based on the embodiment in the utility model, all belong to protection domain of the present utility model.
From Fig. 1, Fig. 3, Fig. 4, the utility model embodiment shown in Fig. 5 is known, main body based on the vacuum ultraviolet light source test macro of vacuum chamber is the vacuum chamber 1 of a right cylinder stainless steel material, side is provided with can open closable parabola stainless steel door 3, unclamp handle 2 door to be opened, test ultraviolet source is put into vacuum chamber, the service condition of Keitz formula to be met: the vertical range at light source luminescent center of popping one's head in is at least 2.5 times of length of illumination, and the result that guarantee Keitz formula records is accurate when light source is installed; Be connected the wire of each bar electric power conductor of the normal need of work of ultraviolet source, the wire that electric current is provided for low pressure mercury lamp heated by electrodes and measurement electric field intensity connection electrostatic probe with eight core aviation plugs 14 by four-core aviation plug 9,11; For needing the low pressure mercury lamp controlling cold junction temperature, also at the outside surface of lamp, the water jacketing controlling cold junction temperature to be installed, water inlet pipe and rising pipe are by the flange 19,20 bottom vacuum chamber 1, be connected with the water bath with thermostatic control of outside, for not needing the ultraviolet source test controlling cold junction temperature, flange 19,20 is closed; The spectrum of probe source can be carried out by fixed fiber outside the testing window of vacuum chamber 1 flange in the bottom 18 encapsulation.Screw handle 2 and can close stainless steel door 3.The whole Darkening process of inside surface of vacuum chamber 1 inside surface and stainless steel door 3, to reduce the impact that reflected light produces irradiance measurement.
From the partial sectional view in the vacuum chamber A-A direction shown in Fig. 2, for the probe measuring vacuum ultraviolet, must adopt the structure shown in Fig. 2, the coupling part 36,37 of measurement window and vacuum chamber 1 is truncated cone-shaped cross section; Above round platform, area is less, enough lays uv radiation intensity meter probe 32, can reduce the diameter of the magnesium fluoride crystal 35 of detection window like this, reduce costs; Round platform lower opening is comparatively large, ensures that the UV radiation of whole light source transmitting can be detected in the visual field of probe 32; Region 31 around probe 32 be vacuum state or nitrogen or argon atmosphere, uses flange 33,34 closed region 31, by O circle compression measurement window 35(magnesium fluoride crystal), prevent oxygen to the absorption of vacuum ultraviolet, guarantee the accurate of measurement data.When measuring the UV radiation of wavelength 200 more than nm, measurement window 35 uses quartz glass plectane, and the air of 31, region around probe 32 needs that the temperature remains within the normal range normal pressure, flange 34, by O circle compression measurement window 35, can not need flange 33.
In FIG, the main body 1 of vacuum chamber needs to connect outside mechanical pump by flange 13, selects the mechanical pump of suitable pumping speed and enough thick pump-line, in 30 minutes, vacuum chamber internal gas pressure can be evacuated to <10 Pa; Then be filled with the nitrogen of certain air pressure by gas filling valve 8, then be vented (this is gas scrubbing); Through 2-3 gas washing, be finally filled with 1 atmospheric nitrogen, make pressure inside and outside vacuum chamber remain on equilibrium state, reduce the atmospheric pressure that whole device is subject to poor, reduce atmosphere to the impact of light source works state; After test terminates, open air release 12, in vacuum chamber, return to normal temperature and pressure atmospheric condition gradually.In experimental test procedures, the Pirani gauge 4 using vacuum chamber 1 top to install measures low vacuum, uses ionization gauge 7 to measure condition of high vacuum degree, and the water prode 22 that side is installed and oxygen probe 23 measure water vapour in vacuum chamber and oxygen content.
In FIG, the front of vacuum chamber 1 and the centre of stainless steel door 3 are equipped with watch window 10,21 respectively, and window material can be withstand voltage is 1 atmospheric tempered glass or ultraviolet cut-on type quartz glass.The effect of watch window is in measuring process, and tester can observe the working condition of all parts in vacuum chamber at any time, can make reply in time if any abnormal, and energy relay testing personnel are from the injury of UV radiation.Assemble 2 backup flange 15,16 on the left side of vacuum chamber 1, assemble 1 backup flange 17 bottom vacuum chamber 1, these flanges are all closed, can as connecing electricity, connecing for subsequent use of other demands such as molecular pump.
Test experiments carries out in vacuum chamber 1.Before test, first ultraviolet source is fixed on lamp bracket, keeps lamp level.Vacuum chamber 1 top test window 5,6 can be placed the uv radiation intensity meter of measurement two kinds of different wave lengths, probe and light source are in same plane, the vertical range of probe and light source
dthe tested length of light source must be greater than
l2.5 times, with radiation illuminometer main frame read probe signal, by data line connect computer preserve, utilize Keitz formula can with measure radiant illumination
ecalculate radiation power
p
， （1）
Wherein
α,
βprobe to measured light two ends the semiapex angle opened.
Optical fiber is fixed on outside the observation window 18 bottom vacuum chamber 1, and optical fiber head aims at the normal direction of fluorescent tube, connects spectrometer, and data are transferred to computer and carry out processing and preserve, then by the radiation power that Keitz formula method measures
pthe full spectrum that spectrometer records is calibrated, the radiation power of each bar spectral line can be obtained
， （2）
Wherein,
p λ0
being the wavelength utilizing Keitz formulae discovery to obtain is
λ 0radiation power,
e λ0
that spectrometer records wavelength and is
λ 0radiant illumination,
e λ being the wavelength that spectrometer records is
λradiant illumination,
p λ being wavelength is
λthe radiation power of spectral line.
Lamp current
iread by reometer, by the length of illumination of oscilloscope measurement lamp potential difference (PD) and calculate electric field intensity
ε, the power input of unit of account length positive column
i ε, in conjunction with the radiation power measuring each bar spectral line obtained, each bar spectral line percentage in power input can be calculated
, （3）
Wherein
for the wavelength that the light source of unit length sends
λthe radiation power at place.
Claims (10)
1. based on a vacuum ultraviolet light source test macro for vacuum chamber, it is characterized in that: comprise a vacuum chamber, vacuum pump, UV radiation testing apparatus and lamp bracket, wherein:
Described vacuum chamber metal material is made, and shape is right cylinder or round platform; The inside surface of vacuum chamber carries out Darkening process; The door of vacuum chamber is spherical crown or parabolic shape; Vacuum chamber is equipped with several flanges, gas filling valve, an air release;
Vacuum chamber is connected with vacuum pump by a flange;
The gas filling valve of vacuum chamber is connected with compressed gas cylinder or gas source pipeline by pipeline, for filling the gas that high pure nitrogen, argon gas do not absorb ultraviolet and vacuum ultraviolet in vacuum chamber;
Described UV radiation testing apparatus comprises some uv radiation intensity meters, optical fiber, vacuum monochromator;
Described lamp bracket is positioned at vacuum chamber, for fixed or rotary, and can by many linear light sources successively rotary alignment probe and optical fiber.
2. according to the vacuum ultraviolet light source test macro based on vacuum chamber according to claim 1, it is characterized in that: described vacuum chamber is equipped with watch window, window material to tolerate the ultraviolet cut-on type quartz glass of 1 atmospheric pressure negative pressure, hard glass or tempered glass.
3. according to the vacuum ultraviolet light source test macro based on vacuum chamber described in claim 1 or 2, it is characterized in that: described vacuum chamber is equipped with the Pirani gauge measuring low vacuum, the ionization gauge measuring condition of high vacuum degree and measures the probe of water vapour, oxygen content.
4. according to the vacuum ultraviolet light source test macro based on vacuum chamber according to claim 3, it is characterized in that: the flange of described vacuum chamber for assembling some multi-core aviation plugs, thus realizes the electrical connection inside and outside vacuum chamber.
5. according to the vacuum ultraviolet light source test macro based on vacuum chamber according to claim 4, it is characterized in that: the water pipe of a flange encapsulation water bath with thermostatic control of described vacuum chamber, thus control the cold junction temperature of the ultraviolet source in vacuum chamber.
6., according to the vacuum ultraviolet light source test macro based on vacuum chamber described in claim 1,2,4 or 5, it is characterized in that: described vacuum chamber is provided with several detection windows, place the probe of uv radiation intensity meter outside window or be furnished with optical fiber; When measuring the vacuum ultraviolet of wavelength 200 below nm, the material of detection window adopts magnesium fluoride crystal, pops one's head in or vacuumizes between optical fiber and window or keep nitrogen or argon atmosphere; When measuring the UV radiation of wavelength 200 more than nm, window material is quartz glass, is in the air of normal temperature and pressure around probe or optical fiber.
7. according to the vacuum ultraviolet light source test macro based on vacuum chamber described in claim 1,2,4 or 5, it is characterized in that: described vacuum chamber is provided with several slide valves detection mouth, and detection mouth and uv radiation intensity meter are popped one's head in or fill nitrogen or argon gas between optical fiber; Open slide valve during measurement, vacuum-ultraviolet light shines directly into probe or optical fiber head.
8. according to the vacuum ultraviolet light source test macro based on vacuum chamber described in claim 1,2,4 or 5, it is characterized in that: the Darkening process of described vacuum chamber inside surface is the one applying following light absorbent: pitch-dark, carborundum powder, silver powder or the CNT of vacuum-resistant ultraviolet irradiation.
9. according to the vacuum ultraviolet light source test macro based on vacuum chamber according to claim 7, it is characterized in that: cosine correcting sheet, collimation lens optical device are installed before described optical fiber head.
10. according to the vacuum ultraviolet light source test macro based on vacuum chamber described in claim 1,2,4 or 5, it is characterized in that: described vacuum chamber is directly with the incidence seam Flange joint of vacuum monochromator, composition combined test system, the relative spectral power distributions of Simultaneously test vacuum ultraviolet light source, absolute radiation power and radiation efficiency.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104776980A (en) * | 2015-03-07 | 2015-07-15 | 复旦大学 | Vacuum ultraviolet light source testing system based on vacuum chamber |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104776980A (en) * | 2015-03-07 | 2015-07-15 | 复旦大学 | Vacuum ultraviolet light source testing system based on vacuum chamber |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151007 Termination date: 20170307 |
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| CF01 | Termination of patent right due to non-payment of annual fee |