CN204686671U - The abradant lapping liquid retracting device of a kind of silicon single crystal flake - Google Patents
The abradant lapping liquid retracting device of a kind of silicon single crystal flake Download PDFInfo
- Publication number
- CN204686671U CN204686671U CN201520357281.6U CN201520357281U CN204686671U CN 204686671 U CN204686671 U CN 204686671U CN 201520357281 U CN201520357281 U CN 201520357281U CN 204686671 U CN204686671 U CN 204686671U
- Authority
- CN
- China
- Prior art keywords
- lapping liquid
- tank
- circulation
- supplied
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
The abradant lapping liquid retracting device of a kind of silicon single crystal flake, the transfer pump comprising lapping liquid filtering tank, circulation-supplied tank and be arranged in circulation-supplied tank, lapping liquid in circulation-supplied tank is flowed to grinder by the feed pipe with control valve by transfer pump, the lapping liquid that grinder is discharged flows in lapping liquid filtering tank, and the tank mouth place of lapping liquid filtering tank is provided with and filters the screen pack of lapping liquid, be also provided with in described circulation-supplied tank for being drawn in circulation-supplied tank through the lapping liquid filtered in lapping liquid filtering tank and carrying out the mixing pump that is uniformly mixed.The utility model by reusing after mixing with the lapping liquid in circulation-supplied tank after used lapping liquid filtration, thus achieve the recycling of lapping liquid, reduce the use cost about about 15% of lapping liquid, meanwhile, the impact of lapping liquid on grinding effect of recycling is reduced to greatest extent.
Description
Technical field
The utility model relates to the grinding step of silicon single crystal flake in semicon industry, specifically the abradant lapping liquid retracting device of a kind of silicon single crystal flake.
Background technology
The grinding technics main purpose of silicon single crystal flake removes in slice processing operation, the surface damage layer that silicon slice surface produces because of cutting, and make silicon chip have certain geometric accuracy.The silicon chip being at present less than 200mm for diameter often adopts twin grinding technology to carry out twin grinding processing to silicon chip, adding utilization of hour erratic star wheel (Carrier) is placed between the upper lower millstone of twin grinder by silicon chip, add suitable hydro-abrasion material (slurry), make the planetary motion that silicon chip is relative along with erratic star wheel does, and twin grinding processing is carried out to silicon chip segmentation acceleration, pressurization, need to add hydro-abrasion material while grinding, hydro-abrasion material (mill liquid) is primarily of frosted (alumina powder), pure water and suspending agent composition.In prior art, the hydro-abrasion material prepared directly discharges after a procedure, and the PWA of obtaining liq abrasive series abrasive dust cost very high (about 40 yuan/Kg), this considerably increases production cost.
Utility model content
The high problem of production cost that rear direct discharge causes is being ground for solving lapping liquid in prior art, the utility model provides the abradant lapping liquid retracting device of a kind of silicon single crystal flake, carry out recovery by this device to used lapping liquid also again to utilize, thus saved lapping liquid, reduce production cost.
The utility model is the technical scheme solving the problems of the technologies described above employing: the abradant lapping liquid retracting device of a kind of silicon single crystal flake, comprise lapping liquid filtering tank, circulation-supplied tank and the transfer pump be arranged in circulation-supplied tank, lapping liquid in circulation-supplied tank is flowed to grinder by the feed pipe with control valve by transfer pump, the lapping liquid that grinder is discharged flows in lapping liquid filtering tank, and the tank mouth place of lapping liquid filtering tank is provided with the screen pack filtering lapping liquid, also be provided with in described circulation-supplied tank for being drawn in circulation-supplied tank through the lapping liquid filtered in lapping liquid filtering tank and carrying out the mixing pump that is uniformly mixed.
The top of described circulation-supplied tank is provided with depression, and lapping liquid filtering tank is arranged in this depression, and its top is concordant with the top of circulation-supplied tank, and the bottom of lapping liquid filtering tank is provided with through hole, and the liquid sucting port of mixing pump is communicated with this through hole.
Described feed pipe is provided with the discharging tube of valve, one end of discharging tube is connected to the position between transfer pump and control valve, and the other end passes into lapping liquid and discards pond.
Beneficial effect: the utility model by reusing after mixing with the lapping liquid in circulation-supplied tank after used lapping liquid filtration, thus achieves the recycling of lapping liquid, reduces the use cost about about 15% of lapping liquid; Simultaneously, reduce the impact of lapping liquid on grinding effect of recycling to greatest extent, experiment proves, this device is taked to produce, TTV value can be stably produced and be all less than 1 micron, surface is good, 4,5,6 inches of silicon single crystal abrasive sheets that same dish removal amount difference is less than 2 microns, and product percent of pass is up to more than 99%.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
Reference numeral: 1, circulation-supplied tank, 2, transfer pump, 3, feed pipe, 4, lapping liquid filtering tank, 5, screen pack, 6, mixing pump, 7, discharging tube.
Detailed description of the invention
As shown in the figure, the abradant lapping liquid retracting device of a kind of silicon single crystal flake, comprise lapping liquid filtering tank 4, circulation-supplied tank 1 and the transfer pump 2 be arranged in circulation-supplied tank 1, time initial, circulation-supplied tank 1 is built with the lapping liquid of new preparation, and do not fill, general about 3/4, lapping liquid in circulation-supplied tank 1 is flowed to grinder by the feed pipe 3 with control valve by transfer pump 2, the lapping liquid that grinder is discharged flows in lapping liquid filtering tank 4, and the tank mouth place of lapping liquid filtering tank 4 is provided with the screen pack 5 filtering lapping liquid, periodic cleaning screen pack and lapping liquid filtering tank 4, also be provided with for being drawn in circulation-supplied tank 1 through the lapping liquid filtered in lapping liquid filtering tank 4 and carrying out the mixing pump 6 that is uniformly mixed in described circulation-supplied tank 1, lapping liquid in the lapping liquid of suction and circulation-supplied tank 1 mixes by mixing pump 6.
Be more than basic embodiment of the present utility model, can do on above basis and further improve or limit:
As, the top of described circulation-supplied tank 1 is provided with depression, and lapping liquid filtering tank 4 is arranged in this depression, and its top is concordant with the top of circulation-supplied tank 1, and the bottom of lapping liquid filtering tank 4 is provided with through hole, and the liquid sucting port of mixing pump 6 is communicated with this through hole;
And for example, described feed pipe 3 is provided with the discharging tube 7 of valve, one end of discharging tube 7 is connected to the position between transfer pump 2 and control valve, the other end passes into lapping liquid and discards pond, after recycling a period of time (as 6-8h), close the control valve on feed pipe 3, open discharging tube 7, make the lapping liquid in circulation-supplied tank 1 be drained into lapping liquid through discharging tube 7 to discard in pond, and in this pond, discarded lapping liquid is processed;
For another example, circulation-supplied tank 1 top has opening, so that overhaul mixing pump 6 wherein and transfer pump 2, safeguard, is also convenient to clean cycle charging-tank 1 simultaneously.
Claims (3)
1. the abradant lapping liquid retracting device of silicon single crystal flake, it is characterized in that: comprise lapping liquid filtering tank (4), circulation-supplied tank (1) and the transfer pump (2) be arranged in circulation-supplied tank (1), lapping liquid in circulation-supplied tank (1) is flowed to grinder by the feed pipe (3) with control valve by transfer pump (2), the lapping liquid that grinder is discharged flows in lapping liquid filtering tank (4), and the tank mouth place of lapping liquid filtering tank (4) is provided with the screen pack (5) filtering lapping liquid, also be provided with in described circulation-supplied tank (1) for being drawn in circulation-supplied tank (1) through the lapping liquid filtered in lapping liquid filtering tank (4) and carrying out the mixing pump (6) that is uniformly mixed.
2. the abradant lapping liquid retracting device of a kind of silicon single crystal flake according to claim 1, it is characterized in that: the top of described circulation-supplied tank (1) is provided with depression, lapping liquid filtering tank (4) is arranged in this depression, and its top is concordant with the top of circulation-supplied tank (1), the bottom of lapping liquid filtering tank (4) is provided with through hole, and the liquid sucting port of mixing pump (6) is communicated with this through hole.
3. the abradant lapping liquid retracting device of a kind of silicon single crystal flake according to claim 1, it is characterized in that: the discharging tube (7) described feed pipe (3) being provided with valve, one end of discharging tube (7) is connected to the position between transfer pump (2) and control valve, and the other end passes into lapping liquid and discards pond.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520357281.6U CN204686671U (en) | 2015-05-29 | 2015-05-29 | The abradant lapping liquid retracting device of a kind of silicon single crystal flake |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520357281.6U CN204686671U (en) | 2015-05-29 | 2015-05-29 | The abradant lapping liquid retracting device of a kind of silicon single crystal flake |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204686671U true CN204686671U (en) | 2015-10-07 |
Family
ID=54227009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520357281.6U Expired - Fee Related CN204686671U (en) | 2015-05-29 | 2015-05-29 | The abradant lapping liquid retracting device of a kind of silicon single crystal flake |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204686671U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105364495A (en) * | 2015-12-01 | 2016-03-02 | 东莞市民特英电子有限公司 | Mirror-surface polishing machine integrating milling with grinding |
| CN105563675A (en) * | 2015-12-17 | 2016-05-11 | 浙江昊能光电有限公司 | Mortar cylinder |
-
2015
- 2015-05-29 CN CN201520357281.6U patent/CN204686671U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105364495A (en) * | 2015-12-01 | 2016-03-02 | 东莞市民特英电子有限公司 | Mirror-surface polishing machine integrating milling with grinding |
| CN105563675A (en) * | 2015-12-17 | 2016-05-11 | 浙江昊能光电有限公司 | Mortar cylinder |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204686671U (en) | The abradant lapping liquid retracting device of a kind of silicon single crystal flake | |
| CN201755522U (en) | Silicon carbide micro-powder decarburizing device | |
| CN203663998U (en) | Device for separating scrap iron in SiC grinding fluid | |
| CN104203497B (en) | Grinding-material renovation process | |
| CN202062311U (en) | Sand pulp circulating device of piezoid grinding machine | |
| CN102659116A (en) | Trichlorosilane synthesis gas dust removal method | |
| CN103657170A (en) | Pressurized filtering device | |
| CN103521346A (en) | Separation floatation technology with copper and molybdenum bulk concentrate regrinding omitted | |
| CN101811088B (en) | Method for grading inside overflow of silicon carbide super micro powder | |
| CN202528330U (en) | Cooling liquid recycling device of wire cutter | |
| CN105776220B (en) | A kind of preparation method of lapping liquid boron carbide powder | |
| CN202606078U (en) | Novel lapping liquid mixing tank | |
| CN203418438U (en) | Jet-flow polishing machine | |
| CN204911811U (en) | Flotation of crystal silicon piece cutting sword material removes carbon system | |
| CN208865719U (en) | A kind of big flow eccentric disc type sand mill | |
| CN207655237U (en) | A kind of Environmental Protective Water-paint sand mill | |
| CN104647200A (en) | Grinding machine with grinding liquid filtering device | |
| CN102952621B (en) | Silicon wafer cutting and grinding waste recovery processing method and equipment thereof | |
| CN207309685U (en) | Grinder with filtration apparatus | |
| CN204912019U (en) | Farine remove device in carborundum cutting sword material | |
| CN208912202U (en) | A kind of brown corundum abrasive section sand device | |
| CN209207257U (en) | A kind of grinding fluid for grinding machine recycling device | |
| CN201988503U (en) | Sieving device for alumina abrasive | |
| CN204454606U (en) | Silicon carbide and silica flour slurry eddy flow washing system in a kind of crystal silicon waste mortar for wire cutting | |
| CN204522488U (en) | The preliminary press filtration liquid separation system of a kind of crystal silicon waste mortar for wire cutting |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151007 Termination date: 20170529 |