CN204650131U - Automatic aligning mechanism and be provided with the exposure machine of this automatic aligning mechanism - Google Patents
Automatic aligning mechanism and be provided with the exposure machine of this automatic aligning mechanism Download PDFInfo
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- CN204650131U CN204650131U CN201520161531.9U CN201520161531U CN204650131U CN 204650131 U CN204650131 U CN 204650131U CN 201520161531 U CN201520161531 U CN 201520161531U CN 204650131 U CN204650131 U CN 204650131U
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- rotor
- automatic aligning
- aligning mechanism
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Abstract
The utility model discloses a kind of automatic aligning mechanism, comprise base assembly, contraposition support and angle regulator, described angle regulator is arranged on base assembly, described angle regulator comprises actuator, rotor one and the first drive unit, the outer peripheral face of described rotor one and the end contact of described contraposition support one end, when described first drive unit drives actuator advance to drive described rotor one to rotate, the outer peripheral face of described rotor one produces pushing force when contacting with described contraposition support, described pushing force acts on described contraposition support, contraposition support opposite base assembly is driven to rotate the angle of a, described a is (-1-1) °.Also disclose a kind of exposure machine, comprise exposure machine main body, light supply apparatus, control system and automatic aligning mechanism, described automatic aligning mechanism is arranged in exposure machine main body.Exposure machine of the present utility model regulates installation site automatically by this positioning mechanism, and structure is simple, and good stability, degree of regulation is high.
Description
Technical field
The utility model relates to exposure technique field, particularly relates to a kind of automatic aligning mechanism and is provided with the exposure machine of this positioning mechanism.
Background technology
In exposure machine exposes pcb board, ensure that exposure accuracy is high, expose the figure obtained more clear and stable, wherein higher to the positioning requirements of pcb board, therefore for ensureing the optimum position of pcb board, reduce the site error of pcb board, be also provided with specially in exposure machine for regulating the placement location of pcb board and reducing the positioning mechanism of this error.
In prior art, occur a lot for regulating the positioning mechanism of pcb board site error, although solve to a certain extent in prior art and do not regulate pcb board position, make the problem that exposure accuracy is low, exposure shows image difference, owing to the adjustment of pcb board being fine setting, even need to be accurate to micron order, also there is following problem in existing positioning mechanism: (1) pcb board placement location is main is the error of angle, existing positioning mechanism angular adjustment precision is low, cannot the angular error that exists of fine adjustment pcb board, thus cannot precision be ensured; (2) existing driving mechanism is made up of motor, axle, bearing one, bearing two and bearing holder (housing, cover), drive the motion carrying out X, Y and rotation direction, during connection, axle one end is directly connected with motor, and there is a gap, the axle other end is supported by independent deep groove ball bearing, during commutation, first there is moving and moving radially, poor stability of a gap, directly have influence on the precision of adjustment.
Utility model content
The utility model, for deficiency of the prior art, provides a kind of automatic aligning mechanism, and structure is simple, and good stability, degree of regulation is high.
In order to solve the problems of the technologies described above, the utility model is solved by following technical proposals:
A kind of automatic aligning mechanism, comprise base assembly and be rotatably arranged on the contraposition support on base assembly, also comprise the angle regulator regulating contraposition support opposite base assembly to rotate, described angle regulator is arranged on described base assembly, described angle regulator comprises the actuator becoming sliding connection with base assembly, be arranged on rotor one on actuator and for driving the first drive unit of described actuator translation, the outer peripheral face of described rotor one contacts with the end face of described contraposition support one end, when described first drive unit drives the advance of described actuator to drive described rotor one to rotate, the outer peripheral face of described rotor one produces pushing force when contacting with described contraposition support, described pushing force acts on described contraposition support, contraposition support opposite base assembly is driven to rotate the angle of a, described a is (-1-1) °.
Preferably, described first drive unit comprises driver, the axis structure be connected with driver output end, the first locating device be arranged on axis structure, is set on axis structure and presses with described actuator top the rotor two that is connected and be set in the first balance device be connected on axis structure and with described actuator, and described rotor two is at least one.
Preferably, the boss that described axis structure comprises the first shaft part, the second shaft part and the 3rd shaft part and is arranged between the first shaft part and the second shaft part, one end that described first shaft part is connected with driver output end is external thread structure, described second shaft part is eccentric shaft structure, and described axis structure is structure as a whole; Described driver output end is connected with the first shaft part, and described first locating device is set on the first shaft part, and described rotor two and the first balance device are set on the second shaft part.
Preferably, described first locating device comprises positioning seat, be set in locating part on the first shaft part and locking member, and described positioning seat is sleeved on described locking member; The xsect of described locating part is N limit shape, wherein N >=4, and described positioning seat is provided with for holding described locating part and the storing chamber suitable with described locating part shape.
Preferably, the connecting portion three that described positioning seat comprises the connecting portion one be connected with driver, the connecting portion two be oppositely arranged with connecting portion one and is connected described connecting portion one and connecting portion two, described positioning seat is structure as a whole, and described storing chamber is arranged on the outer end of described connecting portion two.
Preferably, described first drive unit also comprises at least two pairs of bearing assemblies, wherein pair of bearings assembly to be set on the second shaft part and between described locating part and boss, described another is set on the 3rd described shaft part bearing assembly, and described bearing assembly comprises at least two bearings one.
Preferably, described actuator comprises actuator body, is provided with pushes up the pushing part one of pressing and being connected and the axle one be provided with on the actuator body of the other end with rotor two in one end of described actuator body, and described rotor one is sleeved on axle one and also can rotates relative to axle one.
Preferably, first balance device comprises the tumbler three be set on the second shaft part, the adapter sleeve be sleeved on tumbler three, is separately positioned on adapter sleeve and the support column one on actuator body and the elastic component one being connected described actuator and described adapter sleeve, one end of described elastic component one is connected with actuator by support column one, and the other end is connected with adapter sleeve by support column one.
Preferably, described angle regulator also comprises the second balance device for balancing described contraposition support and actuator, described second balance device comprises and is separately positioned on contraposition support and the support column two on actuator body and the elastic component two being connected described actuator and described contraposition support, one end of described elastic component two is connected with actuator by support column two, and the other end is connected with contraposition support by support column two.
A kind of exposure machine, comprise exposure machine main body, be arranged on light supply apparatus in exposure machine main body and control system, also comprise automatic aligning mechanism described above, described automatic aligning mechanism is arranged in described exposure machine main body.
The utility model obtains following beneficial effect: (1) positioning mechanism of the present utility model, by the angle of described angle regulator accurate adjustment contraposition support opposite base assembly, ensure the precision of pcb board installation site, the outer peripheral face of described rotor one contacts with the end face of described contraposition support one end, for top press fit, directly strength of adjustment is acted on contraposition support, realize the adjustment of the angle position to contraposition support, substantially increase the precision of adjustment; (2) first locating device one end that the first drive unit of the present utility model comprises is connected with driver, and be fixedly connected with by securing member with axis structure, eliminate the gap that driver and axis structure are directly connected generation, make driver more steady in driving shaft body structure rotation process, substantially increase the precision of adjustment; (3) press the rotor two be connected for multiple with described actuator top, i.e. multiple point cantact, ensure that the stability of driving, improves the precision regulated further; (4) being set in the bearing assembly on axis structure, is at least two bearings one, and the featheredge of two bearings one is connected, and can not produce diameter run-out, improves the precision regulated further.
In a word, positioning mechanism of the present utility model, good stability, degree of regulation is high, is provided with the exposure machine of this positioning mechanism, and expose more stable, exposure quality is good.
Additional aspect of the present utility model and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present utility model.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide further understanding of the present utility model, and form a application's part, schematic description and description of the present utility model, for explaining the utility model, is not formed improper restriction of the present utility model.In the accompanying drawings:
The structural representation one of a kind of automatic aligning mechanism embodiment of Fig. 1 the utility model;
Fig. 2 is the structural representation of the utility model first drive unit;
Fig. 3 is the cut-open view of the utility model first drive unit;
Fig. 4 is the structural representation of the utility model first locating device;
Fig. 5 be the utility model angle regulator structural representation;
Fig. 6 is the structural representation of the utility model axis structure;
Fig. 7 is the structural representation of the utility model positioning seat;
Fig. 8 is the structural representation of the utility model banking stop;
Fig. 9 is the structural representation of the utility model bearing assembly;
Figure 10 is the structural representation of the utility model actuator;
Figure 11 is the structure schematic diagram of the utility model first slide assemblies;
Figure 12 is the structural representation two of a kind of automatic aligning mechanism embodiment of the utility model;
Figure 13 is the structural representation of the utility model guide rail one;
Figure 14 is the structural representation of the utility model slide block one;
Figure 15 is the structural representation that the utility model slide block one is connected with guide rail one;
Figure 16 is the structural representation of the utility model connection substrate;
Figure 17 is the structural representation of the utility model second drive unit;
Figure 18 is the structural representation of the utility model the 3rd drive unit.
Embodiment
For making the object of the utility model embodiment, technical scheme and advantage clearly, below in conjunction with the accompanying drawing of the utility model embodiment, the technical scheme of the utility model embodiment is clearly and completely described.Obviously, described embodiment is a part of embodiment of the present utility model, instead of whole embodiments.Based on described embodiment of the present utility model, the every other embodiment that those of ordinary skill in the art obtain under without the need to the prerequisite of creative work, all belongs to the scope of the utility model protection.
In description of the present utility model, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", orientation or the position relationship of the instruction such as " counterclockwise " are based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction of the present utility model.
In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance or imply the quantity indicating indicated technical characteristic.Thus, be limited with " first ", the feature of " second " can express or impliedly comprise one or more these features.In description of the present utility model, the implication of " multiple " is two or more, unless otherwise expressly limited specifically.
In the utility model, unless otherwise clearly defined and limited, the term such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, the concrete meaning of above-mentioned term in the utility model can be understood as the case may be.
In the utility model, unless otherwise clearly defined and limited, fisrt feature second feature it " on " or D score can comprise the first and second features and directly contact, also can comprise the first and second features and not be directly contact but by the other characterisation contact between them.And, fisrt feature second feature " on ", " top " and " above " comprise fisrt feature directly over second feature and oblique upper, or only represent that fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " below " and " below " comprise fisrt feature immediately below second feature and tiltedly below, or only represent that fisrt feature level height is less than second feature.
Unless otherwise defined, technical term used herein or scientific terminology should be in field belonging to the utility model the ordinary meaning that the personage with general technical ability understands." first ", " second " that use in the utility model patent application specification and claims and similar word do not represent any order, quantity or importance, and are only used to distinguish different ingredients.Equally, the similar word such as " " or " " does not represent restricted number yet, but represents to there is at least one.
As shown in figs. 1-11, as embodiment of the present utility model, a kind of automatic aligning mechanism, comprise base assembly 100, the angle regulator 300 being rotatably arranged on the contraposition support 200 on base assembly 100 and regulating contraposition support 200 opposite base assembly 100 to rotate, described angle regulator 300 is arranged on described base assembly 100, described angle regulator 300 comprises the actuator 101 with base assembly 100 one-tenth sliding connection, be arranged on rotor 1 on actuator 101 and for driving the first drive unit 104 of described actuator 101 translation, the outer peripheral face of described rotor 1 contacts with the end face of described contraposition support 200 one end, in the present embodiment, setting actuator 101 is along Y-direction tangential movement, by the first drive unit 104 drive actuator 101 advance drive described rotor 1 rotate time, the rotation of rotor 1 promotes contraposition support 200 opposite base assembly 100 and rotates, because the outer peripheral face of described rotor 1 contacts with the end face of described contraposition support 200 one end, the rotary action power of rotor 1 acts directly on contraposition support 200 to contraposition support 200 1 pushing forces, described pushing force drives contraposition support 200 opposite base assembly 100 to rotate the angle of a, described a is (-1-1) °, structure is simple, the motion in gap can not be produced, substantially increase the precision of adjustment, save cost.
In the present embodiment, as Figure 2-3, described first drive unit 104 comprises driver 1, the axis structure 2 be connected with driver 1 output terminal, at least two pairs of bearing assemblies 6, be arranged on the first locating device 3 on axis structure 2, to be set on axis structure 2 and to push up the rotor 24 of pressing and being connected with described actuator 101 and be set in the first balance device 5 be connected on axis structure 2 and with described actuator 101, described rotor 24 is two, ensureing that rotor 24 and actuator 101 act on support is two, ensure the stability of actuator 101 at motion process, and preferably described driver 1 is motor, namely by the rotation of motor driving shaft body structure 2, promote the motion of actuator 101.
In the present embodiment, as shown in Figure 6, described axis structure 2 comprises the first shaft part 21, second shaft part 22 and the 3rd shaft part 24 and is arranged on the second shaft part 22 described in the boss 23 between the first shaft part 21 and the second shaft part 22 is eccentric shaft structure, and described axis structure 2 is structure as a whole, described driver 1 output terminal is connected with the first shaft part 21, and described first locating device 3 is set on the first shaft part 21, and described rotor 24 and the first balance device 5 are set on the second shaft part 22, as shown in Figures 2 and 4, described first locating device 3 comprises positioning seat 31, be set in locating part 33 on the first shaft part 21 and locking member 32 and motor cabinet 34, one end that described first shaft part 21 is connected with driver 1 output terminal is external thread structure, described locking member 32 is connected to and is provided with on the first shaft part 21 of external thread structure, described positioning seat 31 is sleeved on described locking member 32, and the one end be connected with driver 1 is also sleeved on and is provided with on the first shaft part 21 of external thread structure, be arranged to external thread structure, increasing friction force, locking member 32 is connected more reliable, diameter run-out is down to minimum, ensure that the stability of transmitting force, also just improve adjustable precision.
In the present embodiment, as shown in Figure 7, described positioning seat 31 comprises the connecting portion one 311 connected with driver 1, is oppositely arranged with connecting portion 1 and the connecting portion 2 312 be connected with motor cabinet 34 and the connecting portion 3 313 being connected described connecting portion 1 and connecting portion 2 312, described positioning seat 31 is structure as a whole, and connected by the hole 2 314 that middle part is provided with, on the outer end of described connecting portion 2 312, be also provided with the storing chamber 315 of placing for described locating part 33, described storing chamber 315 is suitable with described locating part 33 shape; As shown in Figure 8, the xsect of described locating part 33 is the structure of N limit shape, wherein N >=4, in the present embodiment, choosing N=4, is four direction, also being provided with the hole 1 for being connected with bearing arrangement in the middle part of locating part 33 of the present utility model, being arranged on the first shaft part 21 by this hole 1; Meanwhile, also this locating part 33 sheathed on the 3rd shaft part 24.
In the utility model, bearing assembly 6 is two right, wherein pair of bearings assembly 6 to be set on the second shaft part 22 and between described locating part and boss 23, another is set on the 3rd described shaft part 24 to bearing assembly 6, and in the present embodiment, preferred described bearing assembly 6 comprises two angular contact bearings 61, as shown in Figure 9, the D distance of pair of horns contact bearing 61 is compressed by locating part 33, is compacted into the outer ring of angular contact bearings 61, makes inner ring distending; Pad 62 is lined with between the inner ring of two angular contact bearings 61, pad 62 preferably copper pad, thickness is selected according to the model of angular contact bearing 61, the inner ring of the angular contact bearing 61 after shimming 62 is swollen outward, namely pad 62 is applied with a pretightning force, eliminate the axis of pair of horns contact bearing 61 combination and radial gap, make paired angular contact bearings 61 to produce diameter run-out, improve the precision of adjustment further.
In the present embodiment, as shown in Figure 6, described first shaft part 21 is provided with hole 3 211, and for the installation of lathe screw, object is used to hold out against driver output end, prevents loosening of driver output end; As shown in Figure 4, described locking member 32 is provided with at least two holes 2 321, for the installation of lathe screw, object is used to hold out against locking member 32 and the first shaft part 21, prevent loosening of the first shaft part 21, in the present embodiment, hole 3 211 and hole 2 321 are spatially arranged in 90 °; As shown in Figure 7, the hole 1 that the connecting portion 3 313 of described positioning seat 31 is provided with is fabrication hole, and after axis structure 2 is connected with driver, instrument to carry out the lathe screw in hold-down apertures 3 211 by this fabrication hole as spanner.
In the present embodiment, as shown in Figure 10, described actuator 101 comprises actuator body 1011, is provided with pushes up the pushing part 1 of pressing and being connected and the axle 1 be provided with on the actuator body 1011 of the other end with rotor 24 in one end of described actuator body 1011, and described rotor 1 is sleeved on axle 1 and also can rotates relative to axle 1.As shown in figure 11, the 4th slide assemblies 105 is also provided with below actuator 101 of the present utility model, described 4th slide assemblies comprise be connected with actuator guide rail 4 1051, to match the slide block 4 1052 merging and be arranged on base assembly 100 with guide rail 4 1051, under the driving of the first drive unit 104, described actuator 101 is slided by the 4th slide assemblies 105 opposite base assembly 100, and have spacer 1, for connecting sidepiece and the guide rail 4 1051 of actuator 101, play effect that is spacing and that strengthen.
In the present embodiment, be provided with for counter-driving element 101 advance and back off procedure in stability, therefore the first balance device 5 comprises the tumbler 3 51 be set on the second shaft part 22, be sleeved on the adapter sleeve 52 on tumbler 3 51, be separately positioned on adapter sleeve 52 and the support column 1 on actuator body 1011 and the elastic component 1 being connected described actuator 101 and described adapter sleeve 52, elastic component 1 of the present utility model has flexible web member for what be in extended state, the preferred extension spring of the utility model, one end of described elastic component 1 is connected with actuator 101 by support column 1, the other end is connected with adapter sleeve 52 by support column 1, when regulating, by angular contact bearing 61 and tumbler 3 51 rotation of motor driven belts dynamic bearing assembly 6, move in the pushing part 1 that angular contact bearing 61 pushes up pressure actuator 101, simultaneously, the tumbler 3 51 rotating band cover 52 that is dynamically connected moves together with elastic component 1, and in the process of actuator 101 advance and rollback, the tensile elongation of elastic component 1 remains unchanged, carry out the good stability of balance adjustment, the further precision improving adjustment.
In the present embodiment, in like manner, for the stability keeping actuator body 1011 to regulate described contraposition support 200, described angle regulator 300 also comprises the second balance device 102 for balancing described contraposition support 200 and actuator 101, described second balance device 102 comprises and is separately positioned on contraposition support 200 and the support column 2 1021 on actuator body 1011 and is connected the elastic component 2 1022 of described actuator 101 and described contraposition support 200, elastic component 2 1022 of the present utility model has flexible web member for what be in extended state, the preferred extension spring of the utility model, one end of described elastic component 2 1022 is connected with actuator 101 by support column 2 1021, the other end is connected with contraposition support 200 by support column 2 1021, when regulating, by angular contact bearing 61 and tumbler 3 51 rotation of motor driven belts dynamic bearing assembly 6, move in the pushing part 1 that angular contact bearing 61 pushes up pressure actuator 101, the motion of actuator 101 makes rotor 1 and contraposition support 200 relative to rotating, regulate the relative angular position of contraposition support 200, and in the process of actuator 101 advance and rollback, the tensile elongation of elastic component 2 1022 remains unchanged, carry out the good stability of balance adjustment, the further precision improving adjustment.
In the present embodiment, as shown in figs. 12-15, can also regulate the X of described contraposition support 200 and Y-direction, regulate the accuracy obtaining pcb board placement location, positioning mechanism of the present utility model also comprises and drives described base assembly 100 and contraposition support 200 in the lump along the second mobile device 500 of the first mobile device 400 of Y-direction movement and movement in X direction in the lump and the connection substrate 600 being connected the first mobile device 400 and the second mobile device 500, described first mobile device 400 is connected with described base assembly 100, described connection substrate 600 is arranged on above described first mobile device 400, described second mobile device 500 is arranged on above described connection substrate 600, compact conformation, regulate reliable, the further precision improving adjustment.
In the present embodiment, as shown in figure 12, described first mobile device 400 comprises two to the first slide assemblies 401 and drive described base assembly 100 and contraposition support 200 in the lump along the second drive unit 402 of Y-direction movement, described first slide assemblies 401 comprises the slide block 1 be connected with base assembly 100, that match with the slide block 1 and guide rail 1 be connected to bottom described connection substrate 600, wherein the guide rail 1 of the present embodiment is preferably as the guide rail of Figure 13, described guide rail 1 width is larger, center of gravity is low, compact conformation, guide rail 1 of the present utility model also has joint space-efficient benefit, the both sides of described guide rail 1 are provided with two guide grooves 4013, as shown in figure 14, corresponding described slide block 1 is provided with two orienting lugs 4014, during slip, be embedded in guide groove 4013 by two orienting lugs 4014, bilateral clamping, as shown in figure 15, and the contact angle of steel ball in slide block 1 arranges in 45 ° of placements, 4 directions that slide block 1 contacts with guide rail 1 are made to be wait load, therefore connect more fastening, after applying pretightning force, realize gapless, the rectilinear motion of high-precision smooth steady, further increase the precision of adjustment, the first slide assemblies 401 span overcome due to Y-direction is large, laboursome deficiency.Wherein, drive the first drive unit in the preferred the utility model angle regulator of the second drive unit 402 of Y-direction movement, ensure the accuracy regulated, as shown in figure 17, the concrete structure of second drive unit 402 comprises and drives push pedal 1 and described first drive unit 104, in the present embodiment, as Figure 2-3, described first drive unit 104 comprises driver 1, the axis structure 2 be connected with driver 1 output terminal, at least two pairs of bearing assemblies 6, be arranged on the first locating device 3 on axis structure 2, to be set on axis structure 2 and to push up the rotor 24 of pressing and being connected with described driving push pedal 1 and be set in the first balance device 5 be connected on axis structure 2 and with described driving push pedal 1, described rotor 24 is two, ensure that rotor 24 is two with driving push pedal 1 to act on support, the corresponding structure driving push pedal 1, comprise two and corresponding with rotor 24 push away fast one, ensure the stability driving push pedal 1 at motion process, and preferably described driver 1 is motor, namely by the rotation of motor driving shaft body structure 2, promote the motion of rotor 24, described base assembly 100 and contraposition support 200 is driven to move along Y-direction in the lump.
In the present embodiment, as shown in Figure 6, described axis structure 2 comprises the first shaft part 21, second shaft part 22 and the 3rd shaft part 24 and is arranged on the second shaft part 22 described in the boss 23 between the first shaft part 21 and the second shaft part 22 is eccentric shaft structure, and described axis structure 2 is structure as a whole, described driver 1 output terminal is connected with the first shaft part 21, and described first locating device 3 is set on the first shaft part 21, and described rotor 24 and the first balance device 5 are set on the second shaft part 22, as shown in Figures 2 and 4, described first locating device 3 comprises positioning seat 31, be set in locating part 33 on the first shaft part 21 and locking member 32 and motor cabinet 34, one end that described first shaft part 21 is connected with driver 1 output terminal is external thread structure, described locking member 32 is connected to and is provided with on the first shaft part 21 of external thread structure, described positioning seat 31 is sleeved on described locking member 32, and the one end be connected with driver 1 is also sleeved on and is provided with on the first shaft part 21 of external thread structure, be arranged to external thread structure, increasing friction force, locking member 32 is connected more reliable, diameter run-out is down to minimum, ensure that the stability of transmitting force, also just improve adjustable precision.
In the present embodiment, as shown in Figure 7, described positioning seat 31 comprises the connecting portion one 311 connected with driver 1, is oppositely arranged with connecting portion 1 and the connecting portion 2 312 be connected with motor cabinet 34 and the connecting portion 3 313 being connected described connecting portion 1 and connecting portion 2 312, described positioning seat 31 is structure as a whole, and connected by the hole 2 314 that middle part is provided with, on the outer end of described connecting portion 2 312, be also provided with the storing chamber 315 of placing for described locating part 33, described storing chamber 315 is suitable with described locating part 33 shape; As shown in Figure 8, the xsect of described locating part 33 is the structure of N limit shape, wherein N >=4, in the present embodiment, choosing N=4, is four direction, also being provided with the hole 1 for being connected with bearing arrangement in the middle part of locating part 33 of the present utility model, being arranged on the first shaft part 21 by this hole 1; Meanwhile, also this locating part 33 sheathed on the 3rd shaft part 24.
In the utility model, bearing assembly 6 is two right, wherein pair of bearings assembly 6 to be set on the second shaft part 22 and between described locating part and boss 23, another is set on the 3rd described shaft part 24 to bearing assembly 6, and in the present embodiment, preferred described bearing assembly 6 comprises two angular contact bearings 61, as shown in Figure 9, the D distance of pair of horns contact bearing 61 is compressed by locating part 33, is compacted into the outer ring of angular contact bearings 61, makes inner ring distending; Pad 62 is lined with between the inner ring of two angular contact bearings 61, pad 62 preferably copper pad, thickness is selected according to the model of angular contact bearing 61, the inner ring of the angular contact bearing 61 after shimming 62 is swollen outward, namely pad 62 is applied with a pretightning force, eliminate the axis of pair of horns contact bearing 61 combination and radial gap, make paired angular contact bearings 61 to produce diameter run-out, improve the precision of adjustment further.
In the present embodiment, as shown in Figure 6, described first shaft part 21 is provided with hole 3 211, and for the installation of lathe screw, object is used to hold out against driver output end, prevents loosening of driver output end; As shown in Figure 4, described locking member 32 is provided with at least two holes 2 321, for the installation of lathe screw, object is used to hold out against locking member 32 and the first shaft part 21, prevent loosening of the first shaft part 21, in the present embodiment, hole 3 211 and hole 2 321 are spatially arranged in 90 °; As shown in Figure 7, the hole 1 that the connecting portion 3 313 of described positioning seat 31 is provided with is fabrication hole, and after axis structure 2 is connected with driver, instrument to carry out the lathe screw in hold-down apertures 3 211 by this fabrication hole as spanner.
In the present embodiment, as shown in Figure 10, described actuator 101 comprises actuator body 1011, is provided with pushes up the pushing part 1 of pressing and being connected and the axle 1 be provided with on the actuator body 1011 of the other end with rotor 24 in one end of described actuator body 1011, and described rotor 1 is sleeved on axle 1 and also can rotates relative to axle 1.As shown in figure 11, the 4th slide assemblies 105 is also provided with below actuator 101 of the present utility model, described 4th slide assemblies comprise be connected with actuator guide rail 4 1051, to match the slide block 4 1052 merging and be arranged on base assembly 100 with guide rail 4 1051, under the driving of the first drive unit 104, described actuator 101 is slided by the 4th slide assemblies 105 opposite base assembly 100, and have spacer 1, for connecting sidepiece and the guide rail 4 1051 of actuator 101, play effect that is spacing and that strengthen.
In the present embodiment, be provided with for counter-driving element 101 advance and back off procedure in stability, therefore the first balance device 5 comprises the tumbler 3 51 be set on the second shaft part 22, be sleeved on the adapter sleeve 52 on tumbler 3 51, be separately positioned on adapter sleeve 52 and the support column 1 on actuator body 1011 and the elastic component 1 being connected described actuator 101 and described adapter sleeve 52, elastic component 1 of the present utility model has flexible web member for what be in extended state, the preferred extension spring of the utility model, one end of described elastic component 1 is connected with actuator 101 by support column 1, the other end is connected with adapter sleeve 52 by support column 1, when regulating, by angular contact bearing 61 and tumbler 3 51 rotation of motor driven belts dynamic bearing assembly 6, move in the pushing part 1 that angular contact bearing 61 pushes up pressure actuator 101, simultaneously, the tumbler 3 51 rotating band cover 52 that is dynamically connected moves together with elastic component 1, and in the process of actuator 101 advance and rollback, the tensile elongation of elastic component 1 remains unchanged, carry out the good stability of balance adjustment, the further precision improving adjustment.
In the present embodiment, as shown in Figure 12,16, the connecting portion 4 602 that described connection substrate 600 comprises connection substrate body 601 and extends from the sidepiece of connection substrate body 601; Described second mobile device 500 comprises at least one group and is arranged on the second slide assemblies 501 on connection substrate body 601 and at least two groups and is arranged on the 3rd slide assemblies 502 on connecting portion 4 602 and drives the 3rd drive unit 503 of described base assembly 100 and contraposition support 200 movement in X direction in the lump, described second slide assemblies 501 and the 3rd slide assemblies 502 are set in parallel, for ensureing to slide steadily, therefore two group of the 3rd slide assemblies 502 is arranged on the end of connection substrate body 601, and be positioned at same side; The guide rail 2 5012 that described second slide assemblies 501 comprises at least one slide block 2 5011 be connected with connection substrate body 601 and matches with slide block 2 5011, described 3rd slide assemblies 502 comprises the slide block 3 5021 be connected with connecting portion 4 602 and the guide rail 3 5022 matched with slide block 3 5021, guide rail 1 structure of the guide rail 2 5012 of the present embodiment and the preferred above-mentioned Y-direction of guide rail 3 5022, in like manner slide block 1 structure of slide block 2 5011 and the preferred above-mentioned Y-direction of slide block 3 5021.
As shown in figure 18, the concrete structure of 3rd drive unit 503 of the present utility model comprises and drives push pedal 2 504 and described first drive unit 104, in the present embodiment, as Figure 2-3, described first drive unit 104 comprises driver 1, the axis structure 2 be connected with driver 1 output terminal, at least two pairs of bearing assemblies 6, be arranged on the first locating device 3 on axis structure 2, to be set on axis structure 2 and to push up the rotor 24 of pressing and being connected with described driving push pedal 2 504 and be set in the first balance device 5 be connected on axis structure 2 and with described driving push pedal 2 504, described rotor 24 is two, ensure that rotor 24 is two with driving push pedal 2 504 to act on support, the corresponding structure driving push pedal 2 504, comprise two pushing blocks two corresponding with rotor 24, ensure the stability driving push pedal 2 504 at motion process, and preferably described driver 1 is motor, namely by the rotation of motor driving shaft body structure 2, promote the motion of rotor 24, described base assembly 100 and contraposition support 200 is driven to move along Y-direction in the lump.
In the present embodiment, as shown in Figure 6, described axis structure 2 comprises the first shaft part 21, second shaft part 22 and the 3rd shaft part 24 and is arranged on the second shaft part 22 described in the boss 23 between the first shaft part 21 and the second shaft part 22 is eccentric shaft structure, and described axis structure 2 is structure as a whole, described driver 1 output terminal is connected with the first shaft part 21, and described first locating device 3 is set on the first shaft part 21, and described rotor 24 and the first balance device 5 are set on the second shaft part 22, as shown in Figures 2 and 4, described first locating device 3 comprises positioning seat 31, be set in locating part 33 on the first shaft part 21 and locking member 32 and motor cabinet 34, one end that described first shaft part 21 is connected with driver 1 output terminal is external thread structure, described locking member 32 is connected to and is provided with on the first shaft part 21 of external thread structure, described positioning seat 31 is sleeved on described locking member 32, and the one end be connected with driver 1 is also sleeved on and is provided with on the first shaft part 21 of external thread structure, be arranged to external thread structure, increasing friction force, locking member 32 is connected more reliable, diameter run-out is down to minimum, ensure that the stability of transmitting force, also just improve adjustable precision.
In the present embodiment, as shown in Figure 7, described positioning seat 31 comprises the connecting portion one 311 connected with driver 1, is oppositely arranged with connecting portion 1 and the connecting portion 2 312 be connected with motor cabinet 34 and the connecting portion 3 313 being connected described connecting portion 1 and connecting portion 2 312, described positioning seat 31 is structure as a whole, and connected by the hole 2 314 that middle part is provided with, on the outer end of described connecting portion 2 312, be also provided with the storing chamber 315 of placing for described locating part 33, described storing chamber 315 is suitable with described locating part 33 shape; As shown in Figure 8, the xsect of described locating part 33 is the structure of N limit shape, wherein N >=4, in the present embodiment, choosing N=4, is four direction, also being provided with the hole 1 for being connected with bearing arrangement in the middle part of locating part 33 of the present utility model, being arranged on the first shaft part 21 by this hole 1; Meanwhile, also this locating part 33 sheathed on the 3rd shaft part 24.
In the utility model, bearing assembly 6 is two right, wherein pair of bearings assembly 6 to be set on the second shaft part 22 and between described locating part and boss 23, another is set on the 3rd described shaft part 24 to bearing assembly 6, and in the present embodiment, preferred described bearing assembly 6 comprises two angular contact bearings 61, as shown in Figure 9, the D distance of pair of horns contact bearing 61 is compressed by locating part 33, is compacted into the outer ring of angular contact bearings 61, makes inner ring distending; Pad 62 is lined with between the inner ring of two angular contact bearings 61, pad 62 preferably copper pad, thickness is selected according to the model of angular contact bearing 61, the inner ring of the angular contact bearing 61 after shimming 62 is swollen outward, namely pad 62 is applied with a pretightning force, eliminate the axis of pair of horns contact bearing 61 combination and radial gap, make paired angular contact bearings 61 to produce diameter run-out, improve the precision of adjustment further.
In the present embodiment, as shown in Figure 6, described first shaft part 21 is provided with hole 3 211, and for the installation of lathe screw, object is used to hold out against driver output end, prevents loosening of driver output end; As shown in Figure 4, described locking member 32 is provided with at least two holes 2 321, for the installation of lathe screw, object is used to hold out against locking member 32 and the first shaft part 21, prevent loosening of the first shaft part 21, in the present embodiment, hole 3 211 and hole 2 321 are spatially arranged in 90 °; As shown in Figure 7, the hole 1 that the connecting portion 3 313 of described positioning seat 31 is provided with is fabrication hole, and after axis structure 2 is connected with driver, instrument to carry out the lathe screw in hold-down apertures 3 211 by this fabrication hole as spanner.
In the present embodiment, as shown in Figure 10, described actuator 101 comprises actuator body 1011, is provided with pushes up the pushing part 1 of pressing and being connected and the axle 1 be provided with on the actuator body 1011 of the other end with rotor 24 in one end of described actuator body 1011, and described rotor 1 is sleeved on axle 1 and also can rotates relative to axle 1.As shown in figure 11, the 4th slide assemblies 105 is also provided with below actuator 101 of the present utility model, described 4th slide assemblies comprise be connected with actuator guide rail 4 1051, to match the slide block 4 1052 merging and be arranged on base assembly 100 with guide rail 4 1051, under the driving of the first drive unit 104, described actuator 101 is slided by the 4th slide assemblies 105 opposite base assembly 100, and have spacer 1, for connecting sidepiece and the guide rail 4 1051 of actuator 101, play effect that is spacing and that strengthen.
In the present embodiment, be provided with for counter-driving element 101 advance and back off procedure in stability, therefore the first balance device 5 comprises the tumbler 3 51 be set on the second shaft part 22, be sleeved on the adapter sleeve 52 on tumbler 3 51, be separately positioned on adapter sleeve 52 and the support column 1 on actuator body 1011 and the elastic component 1 being connected described actuator 101 and described adapter sleeve 52, elastic component 1 of the present utility model has flexible web member for what be in extended state, the preferred extension spring of the utility model, one end of described elastic component 1 is connected with actuator 101 by support column 1, the other end is connected with adapter sleeve 52 by support column 1, when regulating, by angular contact bearing 61 and tumbler 3 51 rotation of motor driven belts dynamic bearing assembly 6, move in the pushing part 1 that angular contact bearing 61 pushes up pressure actuator 101, simultaneously, the tumbler 3 51 rotating band cover 52 that is dynamically connected moves together with elastic component 1, and in the process of actuator 101 advance and rollback, the tensile elongation of elastic component 1 remains unchanged, carry out the good stability of balance adjustment, the further precision improving adjustment.
In the present embodiment, described tumbler one, tumbler two and tumbler three are all preferably bearing.
A kind of exposure machine, comprise exposure machine main body, be arranged on light supply apparatus in exposure machine main body and control system and automatic aligning mechanism, wherein, automatic aligning mechanism is above-mentioned concrete structure, and described automatic aligning mechanism is arranged in described exposure machine main body.
Last it is noted that above embodiment is only in order to illustrate the technical solution of the utility model, be not intended to limit; Although be described in detail the utility model with reference to previous embodiment, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein portion of techniques feature; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the scope of each embodiment technical scheme of the utility model.
In a word, the foregoing is only preferred embodiment of the present utility model, all equalizations done according to the utility model claim change and modify, and all should belong to the covering scope of the utility model patent.
Claims (10)
1. an automatic aligning mechanism, comprise base assembly (100) and be rotatably arranged on the contraposition support (200) on base assembly (100), it is characterized in that: also comprise the angle regulator (300) regulating contraposition support (200) opposite base assembly (100) to rotate, described angle regulator (300) is arranged on described base assembly (100), described angle regulator (300) comprises the actuator (101) becoming sliding connection with base assembly (100), be arranged on rotor one (103) on actuator (101) and for driving first drive unit (104) of described actuator (101) translation, the outer peripheral face of described rotor one (103) contacts with the end face of described contraposition support (200) one end, when described first drive unit (104) drives described actuator (101) advance to drive described rotor one (103) to rotate, the outer peripheral face of described rotor one (103) produces pushing force when contacting with described contraposition support (200), described pushing force acts on described contraposition support (200), contraposition support (200) opposite base assembly (100) is driven to rotate the angle of a, described a is (-1-1) °.
2. automatic aligning mechanism according to claim 1, it is characterized in that: described first drive unit (104) comprises driver (1), the axis structure (2) be connected with driver (1) output terminal, be arranged on the first locating device (3) on axis structure (2), be set in axis structure (2) upper and push up the rotor two (4) of pressing and being connected with described actuator (101) and be set in axis structure (2) and go up and the first balance device (5) be connected with described actuator (101), described rotor two (4) is at least one.
3. automatic aligning mechanism according to claim 2, it is characterized in that: the boss (23) that described axis structure (2) comprises the first shaft part (21), the second shaft part (22) and the 3rd shaft part (24) and is arranged between the first shaft part (21) and the second shaft part (22), the upper one end be connected with driver (1) output terminal of described first shaft part (21) is external thread structure, described second shaft part (22) is eccentric shaft structure, and described axis structure (2) is structure as a whole; Described driver (1) output terminal is connected with the first shaft part (21), described first locating device (3) is set on the first shaft part (21), and described rotor two (4) and the first balance device (5) are set on the second shaft part (22).
4. automatic aligning mechanism according to claim 3, it is characterized in that: described first locating device (3) comprises positioning seat (31), be set in locating part (33) on the first shaft part (21) and locking member (32), and described positioning seat (31) is sleeved on described locking member (32); The xsect of described locating part (33) is N limit shape, wherein N≤4, described positioning seat (31) is provided with for holding described locating part (33) and the storing chamber (315) suitable with described locating part (33) shape.
5. automatic aligning mechanism according to claim 4, it is characterized in that: described positioning seat (31) comprises the connecting portion one (311) be connected with driver (1), the connecting portion two (312) be oppositely arranged with connecting portion one (311) and the connecting portion three (313) being connected described connecting portion one (311) and connecting portion two (312), described positioning seat (31) is structure as a whole, and described storing chamber (315) is arranged on the outer end of described connecting portion two (312).
6. the automatic aligning mechanism according to any one of claim 1-5, it is characterized in that: described first drive unit (104) also comprises at least two pairs of bearing assemblies (6), wherein pair of bearings assembly (6) is set in the second shaft part (22) and goes up and be positioned between described locating part and boss (23), described another is set on the 3rd described shaft part (24) bearing assembly (6), and described bearing assembly (6) comprises at least two bearings one (61).
7. automatic aligning mechanism according to claim 6, it is characterized in that: described actuator (101) comprises actuator body (1011), is provided with pushes up the pushing part one (1012) of pressing and being connected and the axle one (1013) be provided with on the actuator body (1011) of the other end with rotor two (4) in one end of described actuator body (1011), described rotor one (103) is sleeved on the upper also energy of axle one (1013) and rotates relative to axle one (1013).
8. automatic aligning mechanism according to claim 7, it is characterized in that: the first balance device (5) comprises the tumbler three (51) be set on the second shaft part (22), be sleeved on the adapter sleeve (52) on tumbler three (51), be separately positioned on adapter sleeve (52) and the support column one (53) on actuator body (1011) and the elastic component one (54) being connected described actuator (101) and described adapter sleeve (52), one end of described elastic component one (54) is connected with actuator (101) by support column one (53), the other end is connected with adapter sleeve (52) by support column one (53).
9. automatic aligning mechanism according to claim 8, it is characterized in that: described angle regulator (300) also comprises the second balance device (102) for balancing described contraposition support (200) and actuator (101), described second balance device (102) comprises and is separately positioned on contraposition support (200) and the support column two (1021) on actuator body (1011) and is connected the elastic component two (1022) of described actuator (101) and described contraposition support (200), one end of described elastic component two (1022) is connected with actuator (101) by support column two (1021), the other end is connected with contraposition support (200) by support column two (1021).
10. an exposure machine, comprise exposure machine main body, be arranged on light supply apparatus in exposure machine main body and control system, it is characterized in that: also comprise the automatic aligning mechanism as described in claim 1-9, described automatic aligning mechanism is arranged in described exposure machine main body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520161531.9U CN204650131U (en) | 2015-03-20 | 2015-03-20 | Automatic aligning mechanism and be provided with the exposure machine of this automatic aligning mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520161531.9U CN204650131U (en) | 2015-03-20 | 2015-03-20 | Automatic aligning mechanism and be provided with the exposure machine of this automatic aligning mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204650131U true CN204650131U (en) | 2015-09-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520161531.9U Withdrawn - After Issue CN204650131U (en) | 2015-03-20 | 2015-03-20 | Automatic aligning mechanism and be provided with the exposure machine of this automatic aligning mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204650131U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104765253A (en) * | 2015-03-20 | 2015-07-08 | 浙江欧视达科技有限公司 | Automatic contraposition mechanism and exposure machine provided with automatic contraposition mechanism |
| CN107290936A (en) * | 2016-03-31 | 2017-10-24 | 上海微电子装备（集团）股份有限公司 | A kind of mask platform with mechanical limit structure |
-
2015
- 2015-03-20 CN CN201520161531.9U patent/CN204650131U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104765253A (en) * | 2015-03-20 | 2015-07-08 | 浙江欧视达科技有限公司 | Automatic contraposition mechanism and exposure machine provided with automatic contraposition mechanism |
| CN107290936A (en) * | 2016-03-31 | 2017-10-24 | 上海微电子装备（集团）股份有限公司 | A kind of mask platform with mechanical limit structure |
| CN107290936B (en) * | 2016-03-31 | 2019-03-08 | 上海微电子装备（集团）股份有限公司 | A kind of mask platform with mechanical limit structure |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150916 Effective date of abandoning: 20180612 |