CN204643854U - Reduction furnace and nozzle assembly thereof - Google Patents
Reduction furnace and nozzle assembly thereof Download PDFInfo
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- CN204643854U CN204643854U CN201520271068.3U CN201520271068U CN204643854U CN 204643854 U CN204643854 U CN 204643854U CN 201520271068 U CN201520271068 U CN 201520271068U CN 204643854 U CN204643854 U CN 204643854U
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- adapter coupling
- tail rod
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Abstract
The utility model provides a kind of reduction furnace and nozzle assembly thereof, wherein, nozzle assembly comprises the spray tube (20) be communicated with the air inlet port (11) on the base plate of reduction furnace (10) and the shower nozzle (50) away from air inlet port (11) one end being arranged on spray tube (20), spray tube (20) is arranged on the position that air inlet port (11) sentences adjustment shower nozzle (50) rotationally, and shower nozzle (50) comprising: pedestal (51); Tail rod (52), tail rod (52) is located in pedestal (51); Drainage rotor (55), drainage rotor (55) is along the axially movable of tail rod (52) and be rotatably set on tail rod (52), and the periphery of drainage rotor (55) is provided with multiple sidespin runner (56).The technical solution of the utility model can solve reducing furnace spray nozzle of the prior art effectively can not ensure silicon rod diameter uniformity and silicon deposition rates, affects the problem of the surface quality of silicon rod.
Description
Technical field
The utility model relates to reduction furnace technical field, in particular to a kind of reduction furnace and nozzle assembly thereof.
Background technology
Produce in the reduction furnace of polysilicon at Siemens Method, usually by the trichlorosilane (SiHCl of certain proportioning
3) and hydrogen (H
2) gas mixture sprays into from the inlet mouth bottom reduction furnace, vapour phase reduction reaction occurs in reduction furnace, and the silicon (Si) that reaction generates is deposited directly to the silicon wicking surface in stove.Along with reaction continue carry out, silicon rod constantly grows and finally reaches product requirement.In reaction process, bottom reduction furnace, the growth quality of the distribution of process gas in stove to polycrystalline silicon rod has material impact.
At present, the polycrystalline silicon reducing furnace adopted in production of polysilicon comprise 12 to rod, 18 to rod, 24 to rod, 36 to rod with 48 to models such as rods.When chassis of reducing furnace Design and manufacture, need to drive pore on chassis, and tap into tracheae in the bottom of air inlet port.Due to the complex structure on chassis, and the thickness of chassis base plate is large, perforate difficulty on chassis.Therefore, the position of opening of the spout of the nozzle in inlet pipe is arranged on once determining just substantially cannot change.Meanwhile, the jet mode of nozzle is fixed, and cannot meet the requirement of each run duration of polycrystalline silicon reducing furnace.Reduction furnace for the production of time, due to the setting of said nozzle, enter the process gas in stove and easily produce situation pockety at the growth district of silicon rod, cause the thickness rangeability of silicon rod larger, thus silicon rod diameter uniformity and silicon deposition rates can not be ensured, affect the surface quality of silicon rod.
Utility model content
Main purpose of the present utility model is to provide a kind of reduction furnace and nozzle assembly thereof, can not ensure silicon rod diameter uniformity and silicon deposition rates, affect the problem of the surface quality of silicon rod to solve reducing furnace spray nozzle of the prior art.
To achieve these goals, according to an aspect of the present utility model, provide a kind of nozzle assembly of reduction furnace, comprise the spray tube be communicated with the air inlet port on the base plate of reduction furnace and the shower nozzle away from air inlet port one end being arranged on spray tube, spray tube is arranged on air inlet position rotationally to adjust the position of shower nozzle, and shower nozzle comprises: pedestal; Tail rod, tail rod is located in pedestal; Drainage rotor, drainage rotor is rotatably on the guide bar sheathed along the axially movable of tail rod, and the periphery of drainage rotor is provided with multiple sidespin runner.
Further, pedestal comprises the conduction part that interior diameter increases from the bottom to top gradually.
Further, pedestal also comprises the constant following current portion of interior diameter, and following current portion is positioned at the below of conduction part.
Further, sidespin runner to rotate top to drainage rotor with pre-fixed angle of altitude from the bottom of drainage rotor.
Further, the bus of the internal surface of drainage rotor is hyperbolic line, para-curve, oval camber line or involute urve.
Further, nozzle assembly also comprises the switching part for connecting spray tube and base plate, and switching part comprises: adapter coupling, and adapter coupling is arranged on air inlet position rotationally, and spray tube is arranged on adapter coupling; Mount pad, is fixedly installed on base plate, and adapter coupling is arranged on mount pad rotationally; Web member, is arranged between adapter coupling and mount pad, and connects adapter coupling and mount pad.
Further, web member is fixedly installed in mount pad, web member has the first through hole, adapter coupling has the second through hole, switching part also comprises the lock piece be located in the first through hole and the second through hole, and lock piece has to be made rotating unlocked position between adapter coupling and web member and make latched position fixing between adapter coupling and web member.
Further, nozzle assembly also comprises stop nut, and tail rod is provided with outside screw, and the outside screw that stop nut is engaged in tail rod is positioned at above drainage rotor.
Further, nozzle assembly also comprises backstop platform, and backstop platform is arranged on the bottom of tail rod, backstop platform is connected with the supporting leg be fixed on pedestal.
According to another aspect of the present utility model, provide a kind of reduction furnace, comprise nozzle assembly, nozzle assembly is said nozzle assembly.
Application the technical solution of the utility model, the air inlet position on the base plate of reduction furnace arranges spray tube rotationally, at spray tube, one end of air inlet port is provided with shower nozzle.Before reduction furnace work, can according to the requirement of specifically producing processing condition, the rotational angle of spray tube and length are adjusted, thus the adjustment position of shower nozzle on reduction furnace base plate.Meanwhile, shower nozzle comprises along the axially movable of tail rod and drainage rotor rotatably, and the periphery of drainage rotor is provided with multiple sidespin runner.Said structure can regulate gas velocity and the gases affect region of ejection automatically according to the size of process gas air input.The nozzle assembly of the application can make to enter the process gas in reduction furnace and be uniformly distributed at the growth district of silicon rod, effectively improves silicon rod diameter uniformity and silicon deposition rates, improves the surface quality of silicon rod.
Accompanying drawing explanation
The Figure of description forming a application's part is used to provide further understanding of the present utility model, and schematic description and description of the present utility model, for explaining the utility model, is not formed improper restriction of the present utility model.In the accompanying drawings:
Fig. 1 shows the structural representation of the embodiment according to nozzle assembly of the present utility model;
Fig. 2 shows the structural representation of the shower nozzle of the nozzle assembly of Fig. 1;
Fig. 3 shows multiple nozzle assembly working positions schematic diagram of the nozzle assembly of Fig. 1; And
Fig. 4 shows the structural representation of the web member of the nozzle assembly of Fig. 1.
Wherein, above-mentioned accompanying drawing comprises the following drawings mark:
L, spray tube length; 10, base plate; 11, air inlet port; 20, spray tube; 30, switching part; 31, adapter coupling; 311, the second through hole; 312, tube stub; 313, choke; 32, mount pad; 33, web member; 331, the first through hole; 332, gusset; 34, lock piece; 35, fastener; 40, silicon rod; 50, shower nozzle; 51, pedestal; 52, tail rod; 53, backstop platform; 54, supporting leg; 55, drainage rotor; 56, sidespin runner; 57, stop nut.
Embodiment
It should be noted that, when not conflicting, the embodiment in the application and the feature in embodiment can combine mutually.Below with reference to the accompanying drawings and describe the utility model in detail in conjunction with the embodiments.
As depicted in figs. 1 and 2, the nozzle assembly of the reduction furnace of the present embodiment comprises the spray tube 20 be communicated with the air inlet port 11 on the base plate 10 of reduction furnace and the shower nozzle 50 away from air inlet port 11 one end being arranged on spray tube 20.Spray tube 20 is arranged on the position that air inlet port 11 sentences adjustment shower nozzle 50 rotationally.Shower nozzle 50 comprises pedestal 51, tail rod 52 and drainage rotor 55.Wherein, tail rod 52 is located in pedestal 51.Drainage rotor 55 is along the axially movable of tail rod 52 and be rotatably set on tail rod 52, and the periphery of drainage rotor 55 is provided with multiple sidespin runner 56.
The nozzle assembly of application the present embodiment, air inlet port 11 place on the base plate 10 of reduction furnace arranges spray tube 20 rotationally, at spray tube 20, one end of air inlet port 11 is provided with shower nozzle 50.Before reduction furnace work, can according to the requirement of specifically producing processing condition, the rotational angle of spray tube 20 and length are adjusted, thus the adjustment position of shower nozzle 50 on reduction furnace base plate 10.Meanwhile, shower nozzle 50 comprises along the axially movable of tail rod 52 and drainage rotor 55 rotatably, and the periphery of drainage rotor 55 is provided with multiple sidespin runner 56.Said structure can regulate gas velocity and the gases affect region of ejection automatically according to the size of process gas air input.The nozzle assembly of the present embodiment can make to enter the process gas in reduction furnace and be uniformly distributed at the growth district of silicon rod, effectively improves silicon rod diameter uniformity and silicon deposition rates, improves the surface quality of silicon rod.
As shown in Figure 2, in the nozzle assembly of the present embodiment, pedestal 51 comprises the constant following current portion of interior diameter and to be positioned at above following current portion and the conduction part that increases gradually from the bottom to top of interior diameter.The inversed taper platform structure of perforate centered by drainage rotor 55, drainage rotor 55 to be axially movably set on tail rod 52 and to be positioned at pedestal 51 along tail rod 52, the periphery of drainage rotor 55 is provided with multiple sidespin runner 56, the cross section of sidespin runner 56 can be rectangle or circle, the quantity of sidespin runner 56 is 3-8, to rotate the top to drainage rotor 55 with the predetermined elevation angle from the bottom of drainage rotor 55.The bus of the internal surface of drainage rotor 55 can be hyperbolic line, para-curve, oval camber line or involute urve, and the side bottom of drainage rotor 55 carries out chamfered, is beneficial to gas flow.
As shown in Figure 2, in the nozzle assembly of the present embodiment, nozzle assembly also comprises stop nut 57 and backstop platform 53.Tail rod 52 is provided with outside screw, and the outside screw that stop nut 57 is engaged in tail rod 52 is positioned at above drainage rotor 55.Backstop platform 53 is arranged on the bottom of tail rod 52, backstop platform 53 is connected with the supporting leg 54 be fixed on pedestal 51.The outside screw that stop nut 57 is engaged in tail rod 52 is positioned at above drainage rotor 55, and for regulating the lifting height of drainage rotor 55, and backstop platform 53 can ensure that drainage rotor 55 can not drop out tail rod 52 under airless.
Particularly, at reduction furnace initial operating stage, process gas air input is less, first enters the following current portion of shower nozzle 50 from spray tube 20.Because following current portion diameter is less than the interior diameter of spray tube 20, gas has in the gas speed in following current portion and increases definitely.After gas enters the conduction part on top, the speed of gas increases further.Under the drive of gas, drainage rotor 55 rotates with given pace, and the gas that shower nozzle 50 is sprayed enters in body of heater in outward turning mode and forms sidespin air-flow.Sidespin air-flow can be expanded effectively laterally, expands the range of influence of charge air flow, and makes furnace interior overall flow field trend evenly.Meanwhile, owing to leaving certain interval inside drainage rotor 55 He outside tail rod 52, there is fraction from here through forming central fluidizing gas.Central fluidizing gas can arrive body of heater top preferably, maintains the gas supply of body of heater middle and upper part.Now, because tolerance is less, the operation height of drainage rotor 55 is in tail rod 52 bottom, and now drainage rotor 55 is little with the gap inside pedestal 51, and gas actual internal area is minimum, thus ensures speed of giving vent to anger.
Run mid-term at reduction furnace, air input increases gradually, and drainage rotor 55 rises, and the operation height of drainage rotor 55 is at the middle part of tail rod 52, and gas actual internal area increases, thus maintains certain speed of giving vent to anger.
Run the later stage at reduction furnace, drainage rotor 55 rises to the top of tail rod 52, and gas actual internal area is maximum, and gas velocity increase is less, and the jet-stream wind of bottom is concentrated, and is conducive to the homoepitaxial of polysilicon rod.Proved by test, shower nozzle 50 can improve polycrystalline silicon rod surface quality effectively, and the thickness controlling silicon rod main body changes within 10%.
As shown in figures 1 and 3, in the present embodiment, spray tube 20 is mainly used in controlling the adjustment position of shower nozzle 50 in reduction furnace.It should be noted that, spray tube length L can adjust the requirement of shower nozzle 50 position according in concrete technology condition.
In addition, the shower nozzle 50 in the present embodiment with between spray tube 20 for being threaded, also make dismounting convenient while ensureing the stability of shower nozzle 50 long-time running under furnace high-temperature.Certainly, in other embodiments unshowned in the drawings, the mode of connection between shower nozzle 50 with spray tube 20 is not limited to be threaded, and can be also other forms of mode of connection, such as, weld, sells connection etc.
As shown in Figure 1, in the nozzle assembly of the present embodiment, nozzle assembly also comprises the switching part 30 for connecting spray tube 20 and base plate 10, and switching part 30 comprises adapter coupling 31.Wherein, adapter coupling 31 is arranged on air inlet port 11 place rotationally, and spray tube 20 is arranged on adapter coupling 31.By the adapter coupling 31 of switching part 30, spray tube 20 and base plate 10 are linked together, make connection more firm, and said structure can avoid spray tube 20 to be directly connected with base plate 10, more convenient when making replacing spray tube 20.In the present embodiment, preferably, spray tube 20 is arranged on the sidewall of adapter coupling 31.It is more convenient that said structure makes spray tube 20 rotate, and can prevent spray tube 20 from bending, and effectively extends the work-ing life of spray tube 20.
As shown in Figure 1, in the nozzle assembly of the present embodiment, switching part 30 also comprises mount pad 32, is fixedly installed on base plate 10.Adapter coupling 31 is arranged on mount pad 32 rotationally.Be arranged on by adapter coupling 31 on mount pad 32, mount pad 32 is fixedly installed on air inlet port 11 place on base plate 10, and the inner circumferential sidewall of the rotation of adapter coupling 31 to air inlet port 11 can be avoided like this to cause wearing and tearing.Meanwhile, air inlet port 11 place that mount pad 32 is fixedly installed on base plate 10 can ensure to have good stopping property between nozzle assembly and air inlet port 11.In the present embodiment, mount pad 32 in a tubular form, the outer circumferential side wall bottom it has screw thread, for being threaded between above-mentioned mount pad 32 and the air inlet port 11 of base plate 10.In other embodiments unshowned in the drawings, the mode of connection between mount pad 32 with air inlet port 11 is not limited to be threaded, and can be also other forms of mode of connection, such as, weld, sells connection etc.
As shown in Figure 1, in the nozzle assembly of the present embodiment, switching part 30 also comprises web member 33, is arranged between adapter coupling 31 and mount pad 32, and connects adapter coupling 31 and mount pad 32.Said structure is rotatable on mount pad 32 to realize adapter coupling 31 for connecting adapter coupling 31 and mount pad 32.
As shown in Figure 1, in the nozzle assembly of the present embodiment, web member 33 is fixedly installed in mount pad 32, web member 33 has the first through hole 331, adapter coupling 31 has the second through hole 311, switching part 30 also comprises the lock piece 34 be located in the first through hole 331 and the second through hole 311, and lock piece 34 has to be made rotating unlocked position between adapter coupling 31 and web member 33 and make latched position fixing between adapter coupling 31 and web member 33.In the present embodiment, the inner circumferential sidewall on mount pad 32 top has internal thread, the outer circumferential side wall of the bottom of web member 33 has the outside screw with above-mentioned screw-internal thread fit, namely above-mentioned mount pad 32 with between web member 33 for being threaded.In other embodiments unshowned in the drawings, the mode of connection between mount pad 32 with web member 33 is not limited to be threaded, and can be also other forms of mode of connection, such as, weld, sells connection etc.
As shown in figures 1 and 3, particularly, before reduction furnace work, first the mount pad 32 in nozzle assembly is fixed on reduction furnace air inlet port 11, then web member 33 is arranged in mount pad 32., adapter coupling 31 is connected with spray tube 20 meanwhile, and lock piece 34 is located in the first through hole 331 of web member 33 and the second through hole 311 of adapter coupling 31.Now, lock piece 34 is positioned at unlocked position, according to the position distribution of silicon rod 40 and concrete production requirement, can rotate arbitrarily the angle of spray tube 20 to make spray tube 20 away from the arrival predetermined position, one end of air inlet port 11.After this, lock piece 34 is made to be positioned at latched position with fixed connecting piece 33 and adapter coupling 31.Finally shower nozzle 50 is arranged on spray tube 20 one end away from air inlet port 11.In order to ensure air inlet air-flow under the stability of nozzle assembly, can in the junction of mount pad 32 and the air inlet port 11 of base plate 10, the junction of adapter coupling 31 and mount pad 32, spray tube 20 and adapter coupling 31 the position such as junction carry out spot welding and fix.After nozzle assembly uses for some time, if there is the phenomenon of blocking, carry out cleaned and changed after nozzle assembly entirety can being pulled down.
In the present embodiment, the first through hole 331 of web member 33 is threaded hole, and lock piece 34 is bolt, and lock piece 34 can be tightened with fixed connecting piece 33 and adapter coupling 31.In other embodiments unshowned in the drawings, lock piece 34 is not limited to bolt, also can be other forms of lock piece.
As shown in Figure 1, in the nozzle assembly of the present embodiment, in the pipe of spray tube 20, in sectional area, the open area of web member 33 inside and the pipe of mount pad 32, sectional area is all equal.In reduction furnace working process, after air-flow enters from reduction furnace air inlet port 11, successively through reduction furnace air inlet port 11, mount pad 32, web member 33, adapter coupling 31 and spray tube 20, finally form high velocity air by shower nozzle 50 and enter in reduction furnace.In the pipe arranging spray tube 20, in sectional area, the open area of web member 33 inside and the pipe of mount pad 32, sectional area is all equal, can effectively prevent air-flow from shaking.It should be noted that, in the pipe of above-mentioned spray tube 20, sectional area is the cross-sectional area of the gas channel of the inwall formation of spray tube 20, and in the pipe of above-mentioned mount pad 32, sectional area is the cross-sectional area of the gas channel of the inwall formation of mount pad 32.
As shown in Figure 4, in the present embodiment, in a tubular form, the top of web member 33 has the first through hole 331 in the bottom of web member 33, and the top of web member 33 is undertaken being connected to form gas channel by 4 to 6 gussets 332 with between bottom.In the present embodiment, the quantity of gusset 332 is preferably 4.In other embodiments unshowned in the drawings, web member 33 is not limited to said structure, also can be the web member of other structures.
As shown in Figure 1, in the nozzle assembly of the present embodiment, the sidewall of adapter coupling 31 has tube stub 312, for being threaded between tube stub 312 with spray tube 20.Said structure is convenient to dismounting, and structure is simple, is easy to realize.In the present embodiment, between tube stub 312 with spray tube 20 for being threaded.In other embodiments unshowned in the drawings, the mode of connection between tube stub 312 with spray tube 20 is not limited to be threaded, and can be also other forms of mode of connection, such as, weld, sells connection etc.
As shown in Figure 1, in the nozzle assembly of the present embodiment, the diapire of adapter coupling 31 has choke 313, choke 313 is nested in mount pad 32.The choke 313 be nested in mount pad 32 can play the effect of location to adapter coupling 31.
As shown in Figure 1, in the nozzle assembly of the present embodiment, switching part 30 also comprises the fastener 35 be arranged between web member 33 and mount pad 32.Fastener 35 can be reinforced web member 33.
As shown in Figure 1, in the present embodiment, the top of mount pad 32 has female end, and the choke 313 on adapter coupling 31 and fastener 35 are all positioned at above-mentioned female end.Said structure is convenient to the location between adapter coupling 31, web member 33 and mount pad 32.
Present invention also provides a kind of reduction furnace, the embodiment (not shown) according to the reduction furnace of the application has said nozzle assembly.Owing to adopting said nozzle assembly, the silicon rod diameter uniformity in reduction furnace and silicon deposition rates can be improved.
From above description, can find out, the utility model the above embodiments achieve following technique effect: before reduction furnace work, the optional position on reduction furnace base plate can be adjusted in the position of shower nozzle by nozzle assembly of the present utility model effectively, and it is more convenient to make to change shower nozzle, increases nozzle assembly and use handiness.Meanwhile, shower nozzle can regulate gas velocity and the gases affect region of ejection automatically according to the size of process gas air input.The nozzle assembly of the application can make to enter the process gas in reduction furnace and be uniformly distributed at the growth district of silicon rod, effectively improves silicon rod diameter uniformity and silicon deposition rates, improves the surface quality of silicon rod.
The foregoing is only preferred embodiment of the present utility model, be not limited to the utility model, for a person skilled in the art, the utility model can have various modifications and variations.All within spirit of the present utility model and principle, any amendment done, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.
Claims (10)
1. the nozzle assembly of a reduction furnace, it is characterized in that, comprise the spray tube (20) be communicated with the air inlet port (11) on the base plate of reduction furnace (10) and the shower nozzle (50) away from described air inlet port (11) one end being arranged on described spray tube (20), described spray tube (20) is arranged on the position that described air inlet port (11) sentences the described shower nozzle of adjustment (50) rotationally, and described shower nozzle (50) comprising:
Pedestal (51);
Tail rod (52), described tail rod (52) is located in described pedestal (51);
Drainage rotor (55), described drainage rotor (55) is along the axially movable of described tail rod (52) and be rotatably set on described tail rod (52), and the periphery of described drainage rotor (55) is provided with multiple sidespin runner (56).
2. nozzle assembly according to claim 1, is characterized in that, described pedestal (51) comprises the conduction part that interior diameter increases from the bottom to top gradually.
3. nozzle assembly according to claim 2, is characterized in that, described pedestal (51) also comprises the constant following current portion of interior diameter, and described following current portion is positioned at the below of described conduction part.
4. nozzle assembly according to claim 1, is characterized in that, described sidespin runner (56) rotates the top of extremely described drainage rotor (55) from the bottom of described drainage rotor (55) with pre-fixed angle of altitude.
5. nozzle assembly according to claim 1, is characterized in that, the bus of the internal surface of described drainage rotor (55) is hyperbolic line, para-curve, oval camber line or involute urve.
6. nozzle assembly according to claim 1, it is characterized in that, described nozzle assembly also comprises the switching part (30) for connecting described spray tube (20) and described base plate (10), and described switching part (30) comprising:
Adapter coupling (31), described adapter coupling (31) is arranged on described air inlet port (11) place rotationally, and described spray tube (20) is arranged on described adapter coupling (31);
Mount pad (32), is fixedly installed on described base plate (10), and described adapter coupling (31) is arranged on described mount pad (32) rotationally;
Web member (33), is arranged between described adapter coupling (31) and described mount pad (32), and connects described adapter coupling (31) and described mount pad (32).
7. nozzle assembly according to claim 6, it is characterized in that, described web member (33) is fixedly installed in described mount pad (32), described web member (33) has the first through hole (331), described adapter coupling (31) has the second through hole (311), described switching part (30) also comprises the lock piece (34) be located in described first through hole (331) and described second through hole (311), described lock piece (34) has to be made rotating unlocked position between described adapter coupling (31) and described web member (33) and makes latched position fixing between described adapter coupling (31) and described web member (33).
8. nozzle assembly according to claim 1, it is characterized in that, described nozzle assembly also comprises stop nut (57), described tail rod (52) is provided with outside screw, and the outside screw that described stop nut (57) is engaged in described tail rod (52) is positioned at described drainage rotor (55) top.
9. nozzle assembly according to claim 1, it is characterized in that, described nozzle assembly also comprises backstop platform (53), described backstop platform (53) is arranged on the bottom of described tail rod (52), described backstop platform (53) is connected with the supporting leg (54) be fixed on described pedestal (51).
10. a reduction furnace, comprises nozzle assembly, it is characterized in that, the nozzle assembly of described nozzle assembly according to any one of claim 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520271068.3U CN204643854U (en) | 2015-04-29 | 2015-04-29 | Reduction furnace and nozzle assembly thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520271068.3U CN204643854U (en) | 2015-04-29 | 2015-04-29 | Reduction furnace and nozzle assembly thereof |
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| CN204643854U true CN204643854U (en) | 2015-09-16 |
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| CN201520271068.3U Active CN204643854U (en) | 2015-04-29 | 2015-04-29 | Reduction furnace and nozzle assembly thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106865551A (en) * | 2017-03-24 | 2017-06-20 | 亚洲硅业（青海）有限公司 | For 48 pairs of nozzles of rod polycrystalline silicon reducing furnace |
| CN107626464A (en) * | 2017-10-12 | 2018-01-26 | 中冶焦耐(大连)工程技术有限公司 | A kind of feeding device of magnetic-suspension high-speed atomizer |
| CN109592686A (en) * | 2018-12-21 | 2019-04-09 | 亚洲硅业（青海）有限公司 | Adjusting method for the feed pipe of reduction furnace, reduction furnace and feed pipe aperture |
| CN114105147A (en) * | 2021-12-17 | 2022-03-01 | 亚洲硅业(青海)股份有限公司 | Polycrystalline silicon reduction furnace |
-
2015
- 2015-04-29 CN CN201520271068.3U patent/CN204643854U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106865551A (en) * | 2017-03-24 | 2017-06-20 | 亚洲硅业（青海）有限公司 | For 48 pairs of nozzles of rod polycrystalline silicon reducing furnace |
| CN106865551B (en) * | 2017-03-24 | 2017-12-19 | 亚洲硅业（青海）有限公司 | Nozzle for 48 pairs of rod polycrystalline silicon reducing furnaces |
| CN107626464A (en) * | 2017-10-12 | 2018-01-26 | 中冶焦耐(大连)工程技术有限公司 | A kind of feeding device of magnetic-suspension high-speed atomizer |
| CN107626464B (en) * | 2017-10-12 | 2024-06-07 | 中冶焦耐(大连)工程技术有限公司 | Feeding device of magnetic suspension high-speed atomizer |
| CN109592686A (en) * | 2018-12-21 | 2019-04-09 | 亚洲硅业（青海）有限公司 | Adjusting method for the feed pipe of reduction furnace, reduction furnace and feed pipe aperture |
| CN109592686B (en) * | 2018-12-21 | 2019-10-25 | 亚洲硅业（青海）有限公司 | Adjusting method for the feed pipe of reduction furnace, reduction furnace and feed pipe aperture |
| CN114105147A (en) * | 2021-12-17 | 2022-03-01 | 亚洲硅业(青海)股份有限公司 | Polycrystalline silicon reduction furnace |
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