CN204637919U - Exhaust treatment system and dry quarter equipment - Google Patents
Exhaust treatment system and dry quarter equipment Download PDFInfo
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- CN204637919U CN204637919U CN201520337479.8U CN201520337479U CN204637919U CN 204637919 U CN204637919 U CN 204637919U CN 201520337479 U CN201520337479 U CN 201520337479U CN 204637919 U CN204637919 U CN 204637919U
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Abstract
In the exhaust treatment system provided at the utility model and dry quarter equipment, respectively the air inlet of exhaust gas processing device and the gas concentration of exhaust outlet are detected by Tail gas measuring device, thus realize accurately judging to the treatment effect of exhaust gas processing device.Further, exhaust treatment system adopts the exhaust gas processing device be arranged in series, even if find the process result degrades of exhaust gas processing device, also filtrate need not be changed immediately, only need allow other exhaust gas processing device participation work of series connection, thus extend the replacement cycle of filtrate, and the air inlet of exhaust gas processing device is connected with nitrogen inlet, pass into nitrogen to exhaust gas processing device and not only can improve treatment effect, and the loss of vavuum pump can be reduced.
Description
Technical field
The utility model relates to tail gas disposal technique field, particularly a kind of exhaust treatment system and dry quarter equipment.
Background technology
Etching technics is the process removing unwanted material by method that is chemical or physics selectively from substrate surface, wherein dry etching (Dry Etching), hereinafter referred to as dry quarter, there is good anisotropic etching and live width control, be widely used in microelectric technique.
The tail gas that dry carving technology produces, often containing poisonous and harmful element, needs to process.Therefore, existing dry quarter, equipment comprised exhaust gas processing device usually, for dry quarter equipment tail gas process to reach discharge standard, thus reduce the pollution to air.Please refer to Fig. 1, it is the structural representation of equipment at existing dry quarter.As shown in Figure 1, existing dry quarter, equipment 10 comprised: dryly carve chamber 110, vavuum pump 120 and exhaust gas processing device 130; One end of described vavuum pump 120 110 to be connected with chamber at described dry quarter, and the other end of described vavuum pump 120 is connected with the air inlet of described exhaust gas processing device 120; The tail gas that described dry quarter, chamber 110 produced is delivered to described exhaust gas processing device 130 via described vavuum pump 120, is outwards discharged after described exhaust gas processing device 120 processes by the exhaust outlet of described exhaust gas processing device 120.
At present, described exhaust gas processing device 130 is generally Dry Adsorption formula exhaust gas processing device, namely absorbs Tail Gas with specific chemical substance (filtrate).In vent gas treatment process, filtrate can lose efficacy gradually, therefore needs periodic replacement.
But in actual production process, whether filtrate was lost efficacy and can only be differentiated by the color of filtrate, and this discriminant approach reliability is lower.Therefore, the exhaust gas processing device 130 adopted at present accurately cannot judge its vent gas treatment effect.And, the filtrate of described exhaust gas processing device 130 in vent gas treatment process due to tail gas generation chemical reaction, become Powdered from original graininess, thus cause pressure at expulsion to rise, and then affect vent gas treatment effect.
Utility model content
The purpose of this utility model be to provide a kind of exhaust treatment system and dry quarter equipment, the problem that cannot accurately judge with the vent gas treatment effect solving equipment at dry quarter in prior art.
For solving the problems of the technologies described above, the utility model provides a kind of exhaust treatment system, for dry quarter equipment exhausting tail gas process, described exhaust treatment system comprises: Tail gas measuring device, exhaust gas processing device and control system;
Described exhaust gas processing device has an air inlet and an exhaust outlet, and described air inlet and exhaust outlet are all connected with described Tail gas measuring device, and described Tail gas measuring device is connected with described control system.
Optionally, in described exhaust treatment system, described control system comprises: the first magnetic valve, the second magnetic valve, the 3rd magnetic valve and controller;
The folding of described first magnetic valve, the second magnetic valve and the 3rd magnetic valve controls by described controller.
Optionally, in described exhaust treatment system, described first magnetic valve is arranged between described Tail gas measuring device and the air inlet of described exhaust gas processing device, described second magnetic valve is arranged between described Tail gas measuring device and the exhaust outlet of described exhaust gas processing device, and described 3rd magnetic valve is arranged on the exhaust outlet of described exhaust gas processing device.
Optionally, in described exhaust treatment system, also comprise: process gas checkout gear and nitrogen inlet;
Described process gas checkout gear is connected with described controller, whether is in production status for detecting dry quarter equipment;
Described nitrogen inlet is connected with the air inlet of described exhaust gas processing device, for passing into nitrogen to described exhaust gas processing device;
A check valve is provided with between the air inlet of described nitrogen inlet and described exhaust gas processing device.
The utility model also provides a kind of exhaust treatment system, for dry quarter equipment exhausting tail gas process, described exhaust treatment system comprises:
Tail gas measuring device, the first exhaust gas processing device, the second exhaust gas processing device and control system;
Described first exhaust gas processing device and the second exhaust gas processing device all have an air inlet and an exhaust outlet, the exhaust outlet of described first exhaust gas processing device is connected with the air inlet of described second exhaust gas processing device, the exhaust outlet of described second exhaust gas processing device is connected with the air inlet of described first exhaust gas processing device, described first exhaust gas processing device is all connected with described Tail gas measuring device with exhaust outlet with the air inlet of the second exhaust gas processing device, and described Tail gas measuring device is connected with described control system.
Optionally, in described exhaust treatment system, described control system comprises: the first magnetic valve, the second magnetic valve, the 3rd magnetic valve, the 4th magnetic valve, the 5th magnetic valve, the 6th magnetic valve, the 7th magnetic valve, the 8th magnetic valve and controller;
The folding of described first magnetic valve, the second magnetic valve, the 3rd magnetic valve, the 4th magnetic valve, the 5th magnetic valve, the 6th magnetic valve, the 7th magnetic valve and the 8th magnetic valve controls by described controller.
Optionally, in described exhaust treatment system, between the first air inlet that described first magnetic valve is arranged at described first exhaust gas processing device and Tail gas measuring device, between the first row gas port that described second magnetic valve is arranged at described first exhaust gas processing device and Tail gas measuring device, described 3rd magnetic valve is arranged on the first row gas port of described first exhaust gas processing device, between the first row gas port that described 4th magnetic valve is arranged at described first exhaust gas processing device and the second air inlet of the second exhaust gas processing device;
Between the second air inlet that described 5th magnetic valve is arranged at described second exhaust gas processing device and Tail gas measuring device, between the second exhaust port that described 6th magnetic valve is arranged at described second exhaust gas processing device and Tail gas measuring device, described 7th magnetic valve is arranged in the second exhaust port of described second exhaust gas processing device, between the first row gas port that described 8th magnetic valve is arranged at described first exhaust gas processing device and the second air inlet of the second exhaust gas processing device.
Optionally, in described exhaust treatment system, also comprise: process gas checkout gear, the first nitrogen inlet and the second nitrogen inlet;
Described process gas checkout gear is connected with described controller, whether is in production status for detecting dry quarter equipment;
Described first nitrogen inlet is connected with the first air inlet of described first exhaust gas processing device, for passing into nitrogen to described first exhaust gas processing device;
Described second nitrogen inlet is connected with the second air inlet of described second exhaust gas processing device, for passing into nitrogen to described second exhaust gas processing device.
Optionally, in described exhaust treatment system, between described first nitrogen inlet and the first air inlet and between described second nitrogen inlet and the second air inlet, be provided with a check valve.
Accordingly, the utility model also provide a kind of dry quarter equipment, described dry quarter, equipment comprised: dryly carve chamber, vavuum pump and exhaust treatment system as above;
One end of described vavuum pump is connected with chamber at described dry quarter, and the other end of described vavuum pump is connected with exhaust treatment system;
The tail gas that described dry quarter, chamber produced is delivered to described exhaust treatment system via described vavuum pump, and through the backward outer discharge of described exhaust treatment system process.
In the exhaust treatment system provided in the utility model embodiment and dry quarter equipment, respectively the air inlet of exhaust gas processing device and the gas concentration of exhaust outlet are detected by Tail gas measuring device, thus realize accurately judging to the treatment effect of described exhaust gas processing device.Further, described exhaust treatment system adopts the exhaust gas processing device be arranged in series, even if find the process result degrades of exhaust gas processing device, also filtrate need not be changed immediately, only need allow other exhaust gas processing device participation work of series connection, thus extend the replacement cycle of filtrate, and the air inlet of exhaust gas processing device is connected with nitrogen inlet, pass into nitrogen to exhaust gas processing device and not only can improve treatment effect, and the loss of vavuum pump can be reduced.
Accompanying drawing explanation
Fig. 1 be prior art dry quarter equipment structural representation;
Fig. 2 is the structural representation of the exhaust treatment system of the utility model embodiment one;
Fig. 3 is the structural representation of the exhaust treatment system of the utility model embodiment two.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments to the exhaust treatment system that the utility model proposes and dry quarter equipment be described in further detail.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts the form that simplifies very much and all uses non-ratio accurately, only in order to object that is convenient, aid illustration the utility model embodiment lucidly.
[embodiment one]
Please refer to Fig. 2, it is the structural representation of the exhaust treatment system of the utility model embodiment one.As shown in Figure 2, described exhaust treatment system 200 for dry quarter equipment exhausting tail gas process, described exhaust treatment system 200 comprises: Tail gas measuring device 220, exhaust gas processing device 240 and control system; Described exhaust gas processing device 240 has air inlet 241 and an exhaust outlet 242, and described air inlet 241 and exhaust outlet 242 are all connected with described Tail gas measuring device 220, and described Tail gas measuring device 220 is connected with described control system.
Concrete, described control system comprises the first magnetic valve 261, second magnetic valve 262, the 3rd magnetic valve 363 and controller 260, and the folding of described first magnetic valve 261, second magnetic valve 262 and the 3rd magnetic valve 363 controls by described controller 260.As shown in Figure 2, described first magnetic valve 261 is arranged between described Tail gas measuring device 220 and the air inlet 241 of described exhaust gas processing device 240, described second magnetic valve 262 is arranged between described Tail gas measuring device 220 and the exhaust outlet 242 of described exhaust gas processing device 240, described 3rd magnetic valve 243 is arranged on the exhaust outlet 242 of described exhaust gas processing device 240, for controlling the folding of described exhaust outlet 242.
When needing the treatment effect confirming described exhaust gas processing device 240, open described first magnetic valve 261 and the second magnetic valve 262 by described controller 260, and close described 3rd magnetic valve 243.When not needing the treatment effect confirming described exhaust gas processing device 240, described 3rd magnetic valve 243 is in normally open, and described first magnetic valve 261 and the second magnetic valve 262 are in normally off.
When described first magnetic valve 261 is in opening, the gas concentration A of described Tail gas measuring device 220 pairs of air inlets 241 detects, and testing result is sent to described controller 260.When described second magnetic valve 262 is in opening, the gas concentration B of described Tail gas measuring device 220 pairs of exhaust outlets 242 detects, and testing result is sent to described controller 260.Described controller 260 contrasts after receiving the gas concentration A of described the air inlet 241 and gas concentration B of exhaust outlet 242, thus obtains the treatment effect of described exhaust gas processing device 240.
In the present embodiment, described exhaust gas processing device 240 is Dry Adsorption formula exhaust gas processing device, and described exhaust gas processing device 240 realizes vent gas treatment by filtrate absorption toxic and harmful.
Control coefrficient K is set with, for judging the replacement cycle of filtrate in described exhaust gas processing device 240 in described controller 260.As A-B > K, then judge that the filtrate of described exhaust gas processing device 240 did not lose efficacy; As A-B≤K, then judge that the filtrate of described exhaust gas processing device 240 lost efficacy.
Please continue to refer to Fig. 2, described exhaust treatment system 200 also comprises process gas checkout gear 280 and nitrogen inlet 281, the output of described process gas checkout gear 280 is connected with described controller 260, for detecting the production status of equipment at dry quarter, described nitrogen inlet 281 is connected with the air inlet 241 of described exhaust gas processing device 240, for passing into nitrogen, between described nitrogen inlet 281 and the air inlet 241 of described exhaust gas processing device 240, be provided with a check valve 268.
As shown in Figure 2, process gas (being namely in production status) is had in equipment when described process gas checkout gear 280 detects dry quarter, described check valve 268 opened by described controller 260, and the nitrogen that described nitrogen inlet 281 is carried enters exhaust gas processing device 240 by described air inlet 241.Have process gas (being namely in nonproductive state) dry quarter in equipment when described process gas checkout gear 280 does not detect, described controller 260 cuts out described check valve 268, stops supplying nitrogen.
When dry quarter, equipment was started working, the gas concentration of tail gas can be diluted to described exhaust gas processing device 240 supplying nitrogen, and increase gas pressure, thus reach the object of abundant adsorption filtration, improve vent gas treatment effect.
In the present embodiment, Tail gas measuring device 220 is provided with in described exhaust treatment system 200, respectively the air inlet 241 of described exhaust gas processing device 240 and the gas concentration of exhaust outlet 242 are detected by Tail gas measuring device 220, thus accurately judge the treatment effect of described exhaust gas processing device 240.Further, in described exhaust treatment system 200, be provided with nitrogen inlet 281, by described nitrogen inlet 281 to described Tail gas measuring device 220 supplying nitrogen, vent gas treatment effect can be improved.
[embodiment two]
Please refer to Fig. 3, it is the structural representation of the exhaust treatment system of the utility model embodiment two.As shown in Figure 3, described exhaust treatment system 300 for dry quarter equipment exhausting tail gas process, described exhaust treatment system 300 comprises: Tail gas measuring device 320, first exhaust gas processing device 340, second exhaust gas processing device 350 and control system; Described first exhaust gas processing device 340 and the second exhaust gas processing device 350 all have an air inlet and an exhaust outlet, the exhaust outlet of described first exhaust gas processing device 340 is connected with the air inlet of described second exhaust gas processing device 350, the exhaust outlet of described second exhaust gas processing device 350 is connected with the air inlet of described first exhaust gas processing device 340, described first exhaust gas processing device 340 is all connected with described Tail gas measuring device 320 with exhaust outlet with the air inlet of the second exhaust gas processing device 350, and described Tail gas measuring device 320 is connected with described control system.
Concrete, as shown in Figure 3, described first exhaust gas processing device 340 has the first air inlet 341 and first row gas port 342, described second exhaust gas processing device 350 has the second air inlet 351 and second exhaust port 352, described control system comprises the first magnetic valve 361, second magnetic valve 362, 3rd magnetic valve 363, 4th magnetic valve 364, 5th magnetic valve 365, 6th magnetic valve 366, 7th magnetic valve 367, 8th magnetic valve 368 and controller 360, described first magnetic valve 361, second magnetic valve 362, 3rd magnetic valve 363, 4th magnetic valve 364, 5th magnetic valve 365, 6th magnetic valve 366, the folding of the 7th magnetic valve 367 and the 8th magnetic valve 368 controls by described controller 360.
Wherein, between the first air inlet 341 that described first magnetic valve 361 is arranged at described first exhaust gas processing device 340 and Tail gas measuring device 320, between the first row gas port 342 that described second magnetic valve 362 is arranged at described first exhaust gas processing device 340 and Tail gas measuring device 320, described 3rd magnetic valve 343 is arranged on the first row gas port 342 of described first exhaust gas processing device 340, for controlling the folding of described first row gas port 342.Between the second air inlet 351 that described 5th magnetic valve 365 is arranged at described second exhaust gas processing device 350 and Tail gas measuring device 320, between the second exhaust port 352 that described 6th magnetic valve 366 is arranged at described second exhaust gas processing device 350 and Tail gas measuring device 320, described 7th magnetic valve 347 is arranged in the second exhaust port 352 of described second exhaust gas processing device 350, for controlling the folding of described second exhaust port 352.
Described 4th magnetic valve 364 is arranged between the first row gas port 342 of described first exhaust gas processing device 340 and the second air inlet 351 of the second exhaust gas processing device 350, carries to described second exhaust gas processing device 350 for the tail gas after controlling described first exhaust gas processing device 340 process.Described 8th magnetic valve 364 is arranged between the first row gas port 342 of described first exhaust gas processing device 340 and the second air inlet 351 of the second exhaust gas processing device 350, carries to described first exhaust gas processing device 340 for the tail gas after controlling described second exhaust gas processing device 350 process.
The present embodiment and embodiment one difference are, described exhaust treatment system 300 is not only have an exhaust gas processing device, but comprise the exhaust gas processing device of two series connection.As shown in Figure 3, when the process result degrades of described first exhaust gas processing device 340, but when filtrate is also less than the replacement cycle, by described controller 360 the 3rd magnetic valve 343 cuts out and the 4th magnetic valve 364 is opened simultaneously, tail gas after described first exhaust gas processing device 340 process is entered in described second exhaust gas processing device 350 again process, extend the life cycle of filtrate in described first exhaust gas processing device 340 thus.
When needing the treatment effect confirming described first exhaust gas processing device 340, open described first magnetic valve 361, second magnetic valve 362 by described controller 360, and close described 3rd magnetic valve 343; When needing the treatment effect confirming described second exhaust gas processing device 350, open the 5th magnetic valve 365 and the 6th magnetic valve 366 by described controller 360, and close described 7th magnetic valve 347; When not needing the treatment effect confirming described first exhaust gas processing device 340 and the second exhaust gas processing device 350, described 3rd magnetic valve 343 and the 7th magnetic valve 347 are all in normally open, and described first magnetic valve 361, second magnetic valve 362, described 5th magnetic valve 365 and the 6th magnetic valve 366 are all in normally off.
When described first magnetic valve 361 is in opening, the gas concentration A1 of described Tail gas measuring device 320 to the first air inlet 341 of the first exhaust gas processing device 340 detects, and testing result is sent to described controller 360.When described second magnetic valve 362 is in opening, the gas concentration B1 of described Tail gas measuring device 320 to the first row gas port 342 of described first exhaust gas processing device 340 detects, and testing result is sent to described controller 360.Described controller 360 contrasts after receiving the gas concentration A1 of described first the air inlet 341 and gas concentration B1 of first row gas port 342, thus obtains the treatment effect of described first exhaust gas processing device 340.
When opening described 5th magnetic valve 365 by described controller 360, the gas concentration A2 of described Tail gas measuring device 320 to the second air inlet 351 of described second exhaust gas processing device 350 detects, and testing result is sent to described controller 360.When opening described 6th magnetic valve 366 by described controller 360, the gas concentration B2 of described Tail gas measuring device 320 to the second exhaust port 352 of described second exhaust gas processing device 350 detects, and testing result is sent to described controller 360.Described controller 360 contrasts after receiving the gas concentration A2 of described first the air inlet 341 and gas concentration B2 of first row gas port 342, thus obtains the treatment effect of described second exhaust gas processing device 350.
Control coefrficient K is set with, for judging the replacement cycle of filtrate in described first exhaust gas processing device 340 and the second exhaust gas processing device 350 in described controller 360.As A1-B1 > K, then judge that the filtrate of described first exhaust gas processing device 340 did not lose efficacy; As A1-B1≤K, then judge that the filtrate of described first exhaust gas processing device 340 lost efficacy.As A2-B2 > K, then judge that the filtrate of described second exhaust gas processing device 350 did not lose efficacy; As A2-B2≤K, then judge that the filtrate of described second exhaust gas processing device 350 lost efficacy.
Please continue to refer to Fig. 3, described exhaust treatment system 300 also comprises process gas checkout gear 380 and the first nitrogen inlet 381 and the second nitrogen inlet 382, the output of described process gas checkout gear 380 is connected with described controller 360, for detecting the production status of equipment at dry quarter, described first nitrogen inlet 381 is connected with the first air inlet 341 of described first exhaust gas processing device 340, the first check valve 368 is provided with between first air inlet 341 of described first nitrogen inlet 381 and described first exhaust gas processing device 340, described second nitrogen inlet 382 is connected with the second air inlet 351 of described second exhaust gas processing device 350, the second check valve 369 is provided with between second air inlet 351 of described second nitrogen inlet 382 and described second exhaust gas processing device 350.
As shown in Figure 3, when described process gas checkout gear 380 detect have process gas (being namely in production status) dry quarter in equipment time, described first check valve 368 opened by described controller 360, the nitrogen that described first nitrogen inlet 381 is carried enters the first exhaust gas processing device 340 by described first air inlet 341, described second check valve 369 opened by described controller 360 simultaneously, and the nitrogen that described second nitrogen inlet 382 is carried enters the second exhaust gas processing device 350 by described air inlet 342; When described process gas checkout gear 380 do not detect have process gas (being namely in nonproductive state) dry quarter in equipment time, described controller 360 cuts out described first check valve 368 and the second check valve 369, stop supplying nitrogen.
When dry quarter, equipment was started working, the gas concentration of tail gas can be diluted to described first exhaust gas processing device 340 and the second exhaust gas processing device 350 supplying nitrogen, and increase gas pressure, thus reach the object of abundant adsorption filtration, improve vent gas treatment effect.
In the present embodiment, by adopting two exhaust gas processing devices of connecting, realize double filtration, thus improve the utilization rate of filtrate.In view of stating invention thought, in other embodiments of the present utility model, can adopt the exhaust gas processing device of multiple series connection, the exhaust gas processing device of such as three or four series connection, realizes multi-filtering.Those skilled in the art can select the exhaust gas processing device of suitable quantity according to actual needs, do not limit at this.
Accordingly, the present embodiment additionally provides one equipment at dry quarter.Please continue to refer to Fig. 2 or Fig. 3, described dry quarter, equipment comprised: dryly carve chamber (not shown), vavuum pump (not shown) and exhaust treatment system as above, one end of described vavuum pump is connected with chamber at described dry quarter, the other end of described vavuum pump is connected with described exhaust treatment system, the tail gas that described dry quarter, chamber produced is delivered to described exhaust treatment system via described vavuum pump, and through the backward outer discharge of described exhaust treatment system process.
Wherein, described dry quarter, the exhaust treatment system of equipment can adopt single exhaust gas processing device, also can adopt two exhaust gas processing devices of connecting.As shown in Figure 2, described dry quarter equipment the single exhaust gas processing device of employing of exhaust treatment system, the air inlet of this exhaust gas processing device is connected with described vavuum pump, the tail gas that described dry quarter, chamber produced is delivered to described exhaust gas processing device via described vavuum pump and processes, and is outwards discharged after process by the exhaust outlet of described exhaust gas processing device.As shown in Figure 3, described dry quarter, the exhaust treatment system of equipment adopted two exhaust gas processing devices of connecting, i.e. the first exhaust gas processing device 340 and the second exhaust gas processing device 350, first air inlet 341 of described first exhaust gas processing device 340 is connected with a vavuum pump, second air inlet 351 of described second exhaust gas processing device 350 is connected with another vavuum pump, the tail gas that described dry quarter, chamber produced is delivered to described first exhaust gas processing device 340 via vavuum pump respectively and the second exhaust gas processing device 350 processes, outwards discharge respectively by the first row gas port 342 of described first exhaust gas processing device 340 and the second exhaust port 352 of the second exhaust gas processing device 350 after process.
Wherein, described first exhaust gas processing device 340 and the second exhaust gas processing device 350 can work simultaneously, also can work independently.If described first exhaust gas processing device 340 works independently, once find its vent gas treatment deleterious, the second exhaust gas processing device 350 being in off working state before can allowing participates in work, and by the tail gas after the outside emission treatment of the second exhaust port 352 of described second exhaust gas processing device 350, thus improve vent gas treatment effect, extend the life cycle of filtrate in described first exhaust gas processing device 340 simultaneously.Same, if described second exhaust gas processing device 350 works independently, once find its vent gas treatment deleterious, the first exhaust gas processing device 340 being in off working state before can allowing participates in work, and by the tail gas after the outside emission treatment of the first row gas port 342 of described first exhaust gas processing device 340, thus improve vent gas treatment effect, extend the life cycle of filtrate in described second exhaust gas processing device 350 simultaneously.
As shown in Figure 2 or Figure 3, be provided with nitrogen inlet in described exhaust treatment system, described nitrogen inlet is connected with the air inlet of exhaust gas processing device, can pass into nitrogen by nitrogen inlet to exhaust gas processing device.Pass into nitrogen to exhaust gas processing device at described dry quarter when equipment is in production status, not only can improve vent gas treatment effect, and the load of vavuum pump can be reduced, reduce the loss of described vavuum pump.
Test proves, adopt the exhaust treatment system 300 that the present embodiment provides, the loss of vavuum pump can reduce by 10%, and the replacement cycle of filtrate can extend 40%.
It should be noted that, in this description, each embodiment adopts the mode of going forward one by one to describe, and what each embodiment stressed is the difference with other embodiments, between each embodiment identical similar portion mutually see.
To sum up, in the exhaust treatment system provided in the utility model embodiment and dry quarter equipment, respectively the air inlet of exhaust gas processing device and the gas concentration of exhaust outlet are detected by Tail gas measuring device, thus realize accurately judging to the treatment effect of described exhaust gas processing device.Further, described exhaust treatment system adopts the exhaust gas processing device be arranged in series, even if find the process result degrades of exhaust gas processing device, also filtrate need not be changed immediately, only need allow other exhaust gas processing device participation work of series connection, thus extend the replacement cycle of filtrate, and described exhaust treatment system is provided with the nitrogen inlet be connected with the air inlet of described exhaust gas processing device, pass into nitrogen by described nitrogen inlet to described exhaust gas processing device and not only can improve treatment effect, and the loss of vavuum pump can be reduced.
Foregoing description is only the description to the utility model preferred embodiment; any restriction not to the utility model scope; any change that the those of ordinary skill in the utility model field does according to above-mentioned disclosure, modification, all belong to the protection domain of claims.
Claims (10)
1. an exhaust treatment system, for dry quarter equipment exhausting tail gas process, it is characterized in that, described exhaust treatment system comprises: Tail gas measuring device, exhaust gas processing device and control system;
Described exhaust gas processing device has an air inlet and an exhaust outlet, and described air inlet and exhaust outlet are all connected with described Tail gas measuring device, and described Tail gas measuring device is connected with described control system.
2. exhaust treatment system as claimed in claim 1, it is characterized in that, described control system comprises: the first magnetic valve, the second magnetic valve, the 3rd magnetic valve and controller;
The folding of described first magnetic valve, the second magnetic valve and the 3rd magnetic valve controls by described controller.
3. exhaust treatment system as claimed in claim 2, it is characterized in that, described first magnetic valve is arranged between described Tail gas measuring device and the air inlet of described exhaust gas processing device, described second magnetic valve is arranged between described Tail gas measuring device and the exhaust outlet of described exhaust gas processing device, and described 3rd magnetic valve is arranged on the exhaust outlet of described exhaust gas processing device.
4. exhaust treatment system as claimed in claim 1, is characterized in that, also comprise: process gas checkout gear and nitrogen inlet;
The output of described process gas checkout gear is connected with described controller, for detecting the production status of equipment at dry quarter;
Described nitrogen inlet is connected with the air inlet of described exhaust gas processing device, for passing into nitrogen to described exhaust gas processing device;
A check valve is provided with between the air inlet of described nitrogen inlet and described exhaust gas processing device.
5. an exhaust treatment system, for dry quarter equipment exhausting tail gas process, it is characterized in that, described exhaust treatment system comprises: Tail gas measuring device, the first exhaust gas processing device, the second exhaust gas processing device and control system;
Described first exhaust gas processing device and the second exhaust gas processing device all have an air inlet and an exhaust outlet, the exhaust outlet of described first exhaust gas processing device is connected with the air inlet of described second exhaust gas processing device, the exhaust outlet of described second exhaust gas processing device is connected with the air inlet of described first exhaust gas processing device, described first exhaust gas processing device is all connected with described Tail gas measuring device with exhaust outlet with the air inlet of the second exhaust gas processing device, and described Tail gas measuring device is connected with described control system.
6. exhaust treatment system as claimed in claim 5, it is characterized in that, described control system comprises: the first magnetic valve, the second magnetic valve, the 3rd magnetic valve, the 4th magnetic valve, the 5th magnetic valve, the 6th magnetic valve, the 7th magnetic valve, the 8th magnetic valve and controller;
The folding of described first magnetic valve, the second magnetic valve, the 3rd magnetic valve, the 4th magnetic valve, the 5th magnetic valve, the 6th magnetic valve, the 7th magnetic valve and the 8th magnetic valve controls by described controller.
7. exhaust treatment system as claimed in claim 6, it is characterized in that, between the first air inlet that described first magnetic valve is arranged at described first exhaust gas processing device and Tail gas measuring device, between the first row gas port that described second magnetic valve is arranged at described first exhaust gas processing device and Tail gas measuring device, described 3rd magnetic valve is arranged on the first row gas port of described first exhaust gas processing device, between the first row gas port that described 4th magnetic valve is arranged at described first exhaust gas processing device and the second air inlet of the second exhaust gas processing device;
Between the second air inlet that described 5th magnetic valve is arranged at described second exhaust gas processing device and Tail gas measuring device, between the second exhaust port that described 6th magnetic valve is arranged at described second exhaust gas processing device and Tail gas measuring device, described 7th magnetic valve is arranged in the second exhaust port of described second exhaust gas processing device, between the first row gas port that described 8th magnetic valve is arranged at described first exhaust gas processing device and the second air inlet of the second exhaust gas processing device.
8. exhaust treatment system as claimed in claim 5, is characterized in that, also comprise: process gas checkout gear, the first nitrogen inlet and the second nitrogen inlet;
Described process gas checkout gear is connected with described controller, whether is in production status for detecting dry quarter equipment;
Described first nitrogen inlet is connected with the first air inlet of described first exhaust gas processing device, for passing into nitrogen to described first exhaust gas processing device;
Described second nitrogen inlet is connected with the second air inlet of described second exhaust gas processing device, for passing into nitrogen to described second exhaust gas processing device.
9. exhaust treatment system as claimed in claim 8, is characterized in that, be provided with a check valve between described first nitrogen inlet and the first air inlet and between described second nitrogen inlet and the second air inlet.
10. dry quarter an equipment, it is characterized in that, comprising: dryly carve chamber, vavuum pump and exhaust treatment system as claimed in any one of claims 1-9 wherein;
One end of described vavuum pump is connected with chamber at described dry quarter, and the other end of described vavuum pump is connected with exhaust treatment system;
The tail gas that described dry quarter, chamber produced is delivered to described exhaust treatment system via described vavuum pump, and through the backward outer discharge of described exhaust treatment system process.
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| CN201520337479.8U CN204637919U (en) | 2015-05-22 | 2015-05-22 | Exhaust treatment system and dry quarter equipment |
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| CN201520337479.8U CN204637919U (en) | 2015-05-22 | 2015-05-22 | Exhaust treatment system and dry quarter equipment |
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| CN106237753A (en) * | 2016-09-18 | 2016-12-21 | 深圳沃海森科技有限公司 | It is beneficial to the gas purification drying system of comparison and detection |
| CN106440073A (en) * | 2016-09-18 | 2017-02-22 | 深圳沃海森科技有限公司 | Efficient household air treatment adjusting device |
| CN108008085A (en) * | 2017-12-26 | 2018-05-08 | 江西诺发科技有限公司 | The poison gas concentration monitoring device of diverse location in a kind of tail gas treatment device |
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2015
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106237753A (en) * | 2016-09-18 | 2016-12-21 | 深圳沃海森科技有限公司 | It is beneficial to the gas purification drying system of comparison and detection |
| CN106440073A (en) * | 2016-09-18 | 2017-02-22 | 深圳沃海森科技有限公司 | Efficient household air treatment adjusting device |
| CN108008085A (en) * | 2017-12-26 | 2018-05-08 | 江西诺发科技有限公司 | The poison gas concentration monitoring device of diverse location in a kind of tail gas treatment device |
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