CN204625831U - A kind of graphite heater - Google Patents
A kind of graphite heater Download PDFInfo
- Publication number
- CN204625831U CN204625831U CN201520276127.6U CN201520276127U CN204625831U CN 204625831 U CN204625831 U CN 204625831U CN 201520276127 U CN201520276127 U CN 201520276127U CN 204625831 U CN204625831 U CN 204625831U
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- China
- Prior art keywords
- graphite
- electrode leg
- heater
- heating element
- heater body
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Abstract
The utility model discloses a kind of graphite heater, it comprises heater body, electrode leg and the sidewall heating element being arranged on heater body sidewall, heater body cylindrically, the axial direction due of the cylindrical wall of heater body is evenly provided with the fluting arranging sidewall heating element, fine strip shape graphite is filled with in sidewall heating element, heater body has two pieces of symmetrical graphite cakes to extend in the same way to be provided with electrode leg mounting plate, electrode leg is by mutually vertical and form the side plate of L shape and transverse slat forms, electrode leg is fixedly connected with electrode leg mounting plate through side plate by isostatic pressing formed graphite screw, also graphite paper is provided with between electrode leg mounting plate and electrode leg side plate.The utility model has that hot distribution is reasonable, heat utilization rate is high, draws large size single crystal yield rate high, and electrode leg utilizes the waste material producing graphite heater to do, and cost is low, can effectively reduce the running cost of enterprise.
Description
Technical field
The utility model relates to a kind of machining graphite equipment, particularly a kind of graphite heater.
Background technology
In the preparation process of silicon crystal, its most of process is endothermic process, namely need outside supply heat because graphite have high temperature resistant, resistivity is high, intensity improves and the features such as increase along with temperature, therefore adopts graphite heater to provide heat required for preparation process.In use, owing to leaking the reason such as silicon or siliconising, cause heater electrode leg and Graphite Electrodes to be bonded together, heater resistance changes graphite heater, and then affects thermograde, makes well heater can not continue to use again.But the main body of well heater is still intact.Well heater graphite used is high-purity isostatic pressing formed graphite, and this kind of graphite mainly relies on import, expensive.Therefore this just causes the raising of enterprise cost.
Utility model content
For the defect that above-mentioned background technology exists, the utility model provides a kind of graphite heater.
For achieving the above object, the technical solution adopted in the utility model is: it comprises heater body, electrode leg and the sidewall heating element being arranged on heater body sidewall, described heater body cylindrically, the axial direction due of the cylindrical wall of heater body is evenly provided with the fluting arranging sidewall heating element, fine strip shape graphite is filled with in described sidewall heating element, described sidewall heating element downwards and extend internally and form the bottom heater of arc, described bottom heater and sidewall heating element form arc and dock, described heater body has two pieces of symmetrical graphite cakes to extend in the same way to be provided with electrode leg mounting plate, described electrode leg is by mutually vertical and form the side plate of L shape and transverse slat forms, electrode leg is fixedly connected with electrode leg mounting plate through side plate by isostatic pressing formed graphite screw, also graphite paper is provided with between described electrode leg mounting plate and electrode leg side plate.
Further, graphite is filled with in described bottom heater.
Preferably, the consistency of thickness of the graphite of filling in described bottom heater and sidewall heating element.
Further, graphite cushion block is filled with in the gap between described adjacent two pieces of graphite cakes.
Further, the transverse slat of described electrode leg is provided with connection hole.
The utility model has following beneficial effect: the utility model has that hot distribution is reasonable, heat utilization rate is high, draws large size single crystal yield rate high, electrode leg utilizes the waste material producing graphite heater to do, cost is low, can effectively reduce the running cost of enterprise.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is structural representation of the present utility model.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
As shown in Figure 1, the utility model comprises heater body 1, electrode leg 2 and is arranged on the sidewall heating element 8 of heater body 1 sidewall, and heater body 1 cylindrically.The axial direction due of the cylindrical wall of heater body 1 is evenly provided with the fluting 6 arranging sidewall heating element 8.Fine strip shape graphite is filled with in described sidewall heating element 8.Downwards and extend internally and form the bottom heater 9 of arc, described bottom heater, is filled with graphite in 9 to sidewall heating element 8.The consistency of thickness of described bottom heater 9 and the graphite of filling in sidewall heating element 8.
The utility model introduces type of heat layout principle in graphite heater design, by structure design that is sidewall heating element is downward and the bottom heater forming arc that extends internally, the effect that ring-shaped graphite well heater in original technology adds two well heaters of bottom heater can not only be reached, and the design before comparing, bottom is more easily heated, and has that hot distribution is reasonable, heat utilization rate is high, draw large size single crystal yield rate high under the basis maintaining conventional heater performance.
Heater body 1 has two pieces of symmetrical graphite cakes to extend to be provided with electrode leg mounting plate 3, electrode leg 2 is by mutually vertical and form the side plate of L shape and transverse slat forms, electrode leg 2 is fixedly connected with electrode leg mounting plate 3 through side plate by isostatic pressing formed graphite screw 4, graphite paper 5 is also provided with between described electrode leg mounting plate 3 and electrode leg 2 side plate, be filled with graphite cushion block 6 in gap between described adjacent two pieces of graphite cakes, the transverse slat of described electrode leg is provided with connection hole 7.
Graphite heater of the present utility model is that fresh processed electrode leg 2 processes again, first covers the difference of silicon area according to different heating device electrode leg 2, the part covered is got rid of by silicon, process the electrode leg 2 of corresponding size; Then measure the gap between every two pieces of graphite cakes, the graphite cushion block 6 of processing respective thickness, is then padded between each gap, is prevented in the course of processing, the distortion of heater body.Then cut out the graphite paper 5 of corresponding size, the thickness of graphite paper 5 is 2-5mm, is clipped between fresh processed electrode leg 2 and old heater body 1 by graphite paper 5, thus makes well heater conductivity good.Finally with uniform isostatic pressing formed graphite screw 4, fresh processed electrode leg 2 and heater body 1 are reconnected, and utilize corresponding cutter to be pruned away by graphite paper, with sand paper, bound fraction is carried out polished finish simultaneously.Thus reach well heater can continue use, cost-saving object.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (5)
1. a graphite heater, it is characterized in that: comprise heater body, electrode leg and the sidewall heating element being arranged on heater body sidewall, described heater body cylindrically, the axial direction due of the cylindrical wall of heater body is evenly provided with the fluting arranging sidewall heating element, fine strip shape graphite is filled with in described sidewall heating element, described sidewall heating element downwards and extend internally and form the bottom heater of arc, described bottom heater and sidewall heating element form arc and dock, described heater body has two pieces of symmetrical graphite cakes to extend in the same way to be provided with electrode leg mounting plate, described electrode leg is by mutually vertical and form the side plate of L shape and transverse slat forms, electrode leg is fixedly connected with electrode leg mounting plate through side plate by isostatic pressing formed graphite screw, also graphite paper is provided with between described electrode leg mounting plate and electrode leg side plate.
2. graphite heater according to claim 1, is characterized in that: be filled with graphite in described bottom heater.
3. graphite heater according to claim 2, is characterized in that: the consistency of thickness of the graphite of filling in described bottom heater and sidewall heating element.
4. graphite heater according to claim 1, is characterized in that: be filled with graphite cushion block in the gap between described adjacent two pieces of graphite cakes.
5. graphite heater according to claim 1, is characterized in that: the transverse slat of described electrode leg is provided with connection hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520276127.6U CN204625831U (en) | 2015-04-30 | 2015-04-30 | A kind of graphite heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520276127.6U CN204625831U (en) | 2015-04-30 | 2015-04-30 | A kind of graphite heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204625831U true CN204625831U (en) | 2015-09-09 |
Family
ID=54044877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520276127.6U Expired - Fee Related CN204625831U (en) | 2015-04-30 | 2015-04-30 | A kind of graphite heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204625831U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106319621A (en) * | 2016-09-22 | 2017-01-11 | 东莞市联洲知识产权运营管理有限公司 | Large-size czochralski silicon single crystal growth method |
| CN106637385A (en) * | 2015-10-30 | 2017-05-10 | 西安通鑫半导体辅料有限公司 | Cz (Czochralski) crystal heater convenient for temperature gradient regulation and Cz crystal method |
| CN109890091A (en) * | 2017-12-06 | 2019-06-14 | 北京机电工程研究所 | Graphite heating component, graphite heater for thermo-structural experiment |
| CN115125622A (en) * | 2022-05-23 | 2022-09-30 | 平顶山市博翔碳素有限公司 | Graphite heater and single crystal furnace comprising same |
-
2015
- 2015-04-30 CN CN201520276127.6U patent/CN204625831U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106637385A (en) * | 2015-10-30 | 2017-05-10 | 西安通鑫半导体辅料有限公司 | Cz (Czochralski) crystal heater convenient for temperature gradient regulation and Cz crystal method |
| CN106319621A (en) * | 2016-09-22 | 2017-01-11 | 东莞市联洲知识产权运营管理有限公司 | Large-size czochralski silicon single crystal growth method |
| CN109890091A (en) * | 2017-12-06 | 2019-06-14 | 北京机电工程研究所 | Graphite heating component, graphite heater for thermo-structural experiment |
| CN115125622A (en) * | 2022-05-23 | 2022-09-30 | 平顶山市博翔碳素有限公司 | Graphite heater and single crystal furnace comprising same |
| CN115125622B (en) * | 2022-05-23 | 2024-03-26 | 平顶山市博翔碳素有限公司 | Graphite heater and contain single crystal growing furnace of graphite heater |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170323 Address after: 423000 Chenzhou City, Hunan province Suxian District Bai Lu Tang Zhen Lin Yi Da Dao Ping Tian standard factory enterprise service center room 711 Patentee after: Hunan Guosheng graphite Technology Co. Ltd. Address before: 350400 Pingtan City, Fuzhou Province Tan Tan Town, Fujian, Lane nine, No. 35 Patentee before: Lin Qianfeng |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150909 Termination date: 20210430 |