CN204613076U - A kind of for the thin liquid film in-situ testing device under microcorrosion atmosphere - Google Patents

A kind of for the thin liquid film in-situ testing device under microcorrosion atmosphere Download PDF

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Publication number
CN204613076U
CN204613076U CN201520200936.9U CN201520200936U CN204613076U CN 204613076 U CN204613076 U CN 204613076U CN 201520200936 U CN201520200936 U CN 201520200936U CN 204613076 U CN204613076 U CN 204613076U
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China
Prior art keywords
reaction chamber
gas
liquid film
proving installation
situ
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CN201520200936.9U
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Chinese (zh)
Inventor
李晓刚
易盼
肖葵
董超芳
吴俊升
丁康康
王旭
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University of Science and Technology Beijing USTB
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University of Science and Technology Beijing USTB
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Abstract

The utility model belongs to material corrosion studying technological domain, particularly relate to a kind of can the proving installation of electrochemical in-situ under real-time in-situ observation sample corrosion macro morphology under single or polycomponent minimum gas and thin liquid film, described proving installation comprises reaction chamber, microcorrosion gas is to gas system, thin liquid film corrosion test reactive system, electrochemical in-situ test macro, original position pattern acquisition system, be to provide a kind of for the thin liquid film in-situ testing device under microcorrosion atmosphere, solve somewhat expensive in equipment use process in the past, operate lengthy and jumbled, device precision is low, source of the gas is single, pattern and electrochemical in-situ is not had to observe the problem be coupled, realize a kind of structure simple, easy to operate, polycomponent source of the gas, pattern and electrochemical in-situ observe thin liquid film environment measuring device in the microcorrosion atmosphere of the high precision ppb level be coupled.

Description

A kind of for the thin liquid film in-situ testing device under microcorrosion atmosphere
Technical field
The utility model belongs to material corrosion studying technological domain, particularly relate to a kind of can the proving installation of electrochemical in-situ under real-time in-situ observation sample corrosion macro morphology under single or polycomponent minimum gas and thin liquid film.
Background technology
Along with the continuous innovation of electronic technology, electronic devices and components just develop by leaps and bounds towards miniaturization, integrated, multi-functional direction.Electronic devices and components generally work in semi-enclosed atmospheric environment, are inevitably subject to ambient atmosphere humidity, pollutant (NO x, SO 2, H 2s, Cl -), the impact of the environmental factor such as dust, cause the thickness of thin liquid film with condition of work dynamic change, even present distribution that is discontinuous or microlayer model form, this just means the electrochemical process under normally a kind of unstable state thin liquid film of material corrosion.This unstable state thin liquid film can make a significant impact metal erosion inefficacy, serious threat electron device and even whole device systems reliability of operation and security.
Relatively less about the in-situ corrosion research under thin liquid film in microcorrosion atmosphere at present, this is limited to the concentration of thin liquid film reaction unit, pattern original-position collecting device and minimum gas to a great extent.Traditional minimum gas air distributing device controls gas concentration by single mass flowmeter, and this is often difficult to the exact concentration determining minimum gas in reaction chamber, and operating process is very lengthy and jumbled.Common thin liquid film reaction unit is difficult to be formed the liquid film being less than 100 μm, and this causes itself and the situation of material in real atmosphere environment to have bigger difference, cannot real simulation material corrosion failure behaviour.In addition, basic at present do not have pattern in-situ observation and electrochemical in-situ in microcorrosion atmosphere to test the device intercoupled.
Summary of the invention
The purpose of this utility model is to provide a kind of for the thin liquid film in-situ testing device under microcorrosion atmosphere, solve in the past somewhat expensive in equipment use process, operate lengthy and jumbled, device precision is low, source of the gas is single, do not have pattern and electrochemical in-situ to observe the problem be coupled, and realizes that a kind of structure is simple, easy to operate, polycomponent source of the gas, pattern and electrochemical in-situ observe thin liquid film environment measuring device in the microcorrosion atmosphere of the high precision ppb level (minimum 10ppb) be coupled.
In order to realize above object, the technical solution adopted in the utility model is:
A kind of for the thin liquid film in-situ testing device under microcorrosion atmosphere, it is characterized in that, described proving installation comprises reaction chamber, microcorrosion gas to gas system, thin liquid film corrosion test reactive system, electrochemical in-situ test macro, original position pattern acquisition system; Stainless steel casing is enclosed with outside described reaction chamber, described microcorrosion gas is connected on reaction chamber to gas system and thin liquid film corrosion test reactive system, described electrochemical in-situ test macro is positioned at reaction chamber, and described original position pattern acquisition system is fixed on reaction chamber.
Preferentially, described microcorrosion gas comprises cylinder package, minimum gas concentration detector assembly and mass flowmeter assembly to gas system, described thin liquid film corrosion test reactive system comprises humiture probe, heating tube, industrial humidifier, described electrochemical in-situ test macro comprises U-lag, electrochemical workstation, and described original position pattern acquisition system comprises lifting table, microscope, bulb group; It is inner that described minimum gas concentration detector assembly, heating tube, U-lag, lifting table are positioned at described reaction chamber, it is outside that described cylinder package, electrochemical workstation, industrial humidifier are positioned at stainless steel casing, described microscope, bulb group are positioned at outside reaction chamber, stainless steel casing, and described humiture probe is fixed on reaction chamber.
Preferentially, described U-lag places sample, described U-lag one end is working electrode and auxiliary electrode, and the other end is contrast electrode, and described working electrode, auxiliary electrode are connected with electrochemical workstation respectively with contrast electrode.
Preferentially, described microscope rotates freely, and is positioned at below U-lag for regulating the described lifting table of the distance of microscope and U-lag.
Preferentially, be connected for regulating the temperature of reaction chamber inside and the described heating tube of humidity, industrial humidifier to pop one's head in described humiture.
Preferentially, described cylinder package is connected by mass flowmeter assembly with minimum gas concentration detector assembly, and described minimum gas concentration detector assembly is positioned on reaction chamber, and described cylinder package mass flowmeter assembly, to be positioned at stainless steel casing outside.
Preferentially, described proving installation also comprises exhaust gas recovery system, and described exhaust gas recovery system comprises fan blower, except gas cylinder, described fan blower, except gas cylinder is positioned at outside described stainless steel casing, is connected with described reaction chamber.
Preferentially, be positioned at described stainless steel casing outside and connect a storage display system, described storage display system connects described microscope and electrochemical workstation.
Preferentially, the range of adjustment of described reaction indoor temperature and humidity is respectively 10-50 DEG C, 20%-98% RH.
Preferentially, described reaction chamber is that organic glass is formed.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation for the thin liquid film in-situ testing device under microcorrosion atmosphere that the utility model relates to.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the utility model is explained in further detail.Should be appreciated that specific embodiment described herein only for explaining the utility model, and be not used in restriction the utility model.
On the contrary, the utility model is contained any by the substituting of making on marrow of the present utility model and scope of defining of claim, amendment, equivalent method and scheme.Further, in order to make the public have a better understanding to the utility model, in hereafter details of the present utility model being described, detailedly describe some specific detail sections.Do not have the description of these detail sections can understand the utility model completely for a person skilled in the art yet.
The utility model relates to a kind of for the thin liquid film in-situ testing device under microcorrosion atmosphere, the dusty gas environmental test standard-required in can be up to state standards (GB), IEC standard.Have that precision is high, structure is simple, small and exquisite, cost is low, pollute the advantages such as little, easy to operate; More can carry out real-time in-situ observation to the electrochemical process of sample in microcorrosion gas and erosion profile change.Describedly comprise reaction chamber, microcorrosion gas to gas system, thin liquid film corrosion test reactive system, electrochemical in-situ test macro, original position pattern acquisition system and exhaust gas recovery system for the thin liquid film in situ detection device under microcorrosion atmosphere, described reaction chamber outer wrap has stainless steel casing.
Microcorrosion gas comprises cylinder package, mass flowmeter assembly, minimum gas concentration detector assembly to gas system.Wherein said cylinder package comprises the first gas cylinder 1, second gas cylinder 2, 3rd gas cylinder 3 and the 4th gas cylinder 4, described mass flowmeter assembly comprises the first mass flowmeter 5, second mass flowmeter 6, 3rd mass flowmeter 7, 4th mass flowmeter 8, described minimum gas concentration detector assembly comprises the first minimum gas concentration detector 9, second minimum gas concentration detector 10, 3rd minimum gas concentration detector 11, 4th minimum gas concentration detector 12, described first gas cylinder 1, second gas cylinder 2, 3rd gas cylinder 3 and the 4th gas cylinder 4 respectively with corresponding described first minimum gas concentration detector 9, second minimum gas concentration detector 10, 3rd minimum gas concentration detector 11, 4th minimum gas concentration detector 12 is connected, by described first minimum gas concentration detector 9, second minimum gas concentration detector 10, 3rd minimum gas concentration detector 11, 4th minimum gas concentration detector 12 testing result feeds back to described first mass flowmeter 5 respectively, second mass flowmeter 6, 3rd mass flowmeter 7, 4th mass flowmeter 8, described first mass flowmeter 5, second mass flowmeter 6, 3rd mass flowmeter 7, 4th mass flowmeter 8 is the mass flowmeters with pressure maintaining valve, the minimum gas concentration regulating described reaction chamber corresponding by pressure maintaining valve.Described minimum gas concentration detector assembly is connected in described reaction chamber.In described cylinder package, mass flowmeter assembly, minimum gas concentration detector assembly, each gas cylinder, mass flowmeter are identical with the quantity of minimum gas concentration detector, quantity really normal root is correlated with according to the kind of the minimum gas of concrete testing requirements, it can be a kind of minimum gas, also can be multiple, in conjunction with the specific embodiment of the utility model and Figure of description, the quantity of each assembly corresponding gas cylinder, mass flowmeter and minimum gas concentration detector is 4, is not limited to the quantity of the utility model requirement.
Thin liquid film corrosion test reactive system comprises humiture probe 15, heating tube 14, industrial humidifier 13, and described humiture probe 15 is connected on reaction chamber with industrial humidifier 13, and described heating tube 14 is positioned at reaction chamber inside.For regulating the inner humiture of reaction chamber, temperature regulating range is 10-50 DEG C, the range of adjustment of humidity is at 20%-98% RH, described heating tube 14, industrial humidifier 13 and humiture are popped one's head in and 15 to be connected, can to be popped one's head in by humiture temperature, the humidity of 15 detection reaction rooms, result according to detecting regulates industrial humidifier 13, heating tube 14, thus automatically controls temperature, the humidity of reaction chamber.
Described electrochemical in-situ test macro comprises U-lag 16, electrochemical workstation 17, and described U-lag 16 is positioned at reaction chamber inside, and it is outside that described electrochemical workstation 17 is positioned at stainless steel casing.Described U-lag 16 places sample, described U-lag 16 one end is working electrode and auxiliary electrode, the other end is contrast electrode, described working electrode, auxiliary electrode and contrast electrode are connected with electrochemical workstation 17 respectively, under certain humidity, specimen surface can adsorb formation one deck thin liquid film, change the humidity of reaction chamber, and then different-thickness thin liquid film can be formed, described electrochemical workstation 17 is fed back to by described working electrode, auxiliary electrode and contrast electrode, thus the in-situ test of the Study of the Realization sample under different-thickness thin liquid film environment.
Described original position pattern acquisition system comprises bulb group 21, lifting table 19, microscope 20, described lifting table 19 is positioned at the below of the U-lag 16 of reaction chamber, regulate the upper-lower position of U-lag 16, described microscope position 20 is outside described reaction chamber, in stainless steel casing, both can take pictures in real time to sample erosion profile, also there is camera function.Described microscope 20 and the distance on described U-lag 16 between sample are by described lifting table 19 up-down adjustment.Described microscope 20 can move by left-right and front-back, to reach best shooting visual angle.When taking pictures, described reaction room brilliancy regulates by described bulb group 21.
Described exhaust gas recovery system comprises fan blower 23, except gas cylinder 22, described fan blower 23 be positioned at outside stainless steel casing except gas cylinder 22, be connected with described reaction chamber by pipeline, after off-test, by the 23 pairs of reaction chamber gas transmissions of described fan blower, the tail gas after test being carried out filtered and recycled enters except gas cylinder 22, remove harmful gas wherein, as H 2s, SO 2, NO xdeng.
Be positioned at described stainless steel casing outside and place a storage display system 18, described storage display system 18 is connected with electrochemical workstation 17 with described microscope 20, realize the real-time in-situ test of sample Electrochemistry Information and the change of home position observation sample erosion profile, and store.

Claims (10)

1. one kind for the thin liquid film in-situ testing device under microcorrosion atmosphere, it is characterized in that, described proving installation comprises reaction chamber, microcorrosion gas to gas system, thin liquid film corrosion test reactive system, electrochemical in-situ test macro, original position pattern acquisition system; Stainless steel casing is enclosed with outside described reaction chamber, described microcorrosion gas is connected on reaction chamber to gas system and thin liquid film corrosion test reactive system, described electrochemical in-situ test macro is positioned at reaction chamber, and described original position pattern acquisition system is fixed on reaction chamber.
2. proving installation according to claim 1, it is characterized in that, described microcorrosion gas comprises cylinder package, minimum gas concentration detector assembly and mass flowmeter assembly to gas system, described thin liquid film corrosion test reactive system comprises humiture probe, heating tube, industrial humidifier, described electrochemical in-situ test macro comprises U-lag, electrochemical workstation, and described original position pattern acquisition system comprises lifting table, microscope, bulb group; It is inner that described minimum gas concentration detector assembly, heating tube, U-lag, lifting table are positioned at described reaction chamber, it is outside that described cylinder package, electrochemical workstation, industrial humidifier are positioned at stainless steel casing, described microscope, bulb group are positioned at outside reaction chamber, stainless steel casing, and described humiture probe is fixed on reaction chamber.
3. proving installation according to claim 2, it is characterized in that, described U-lag places sample, described U-lag one end is working electrode and auxiliary electrode, the other end is contrast electrode, and described working electrode, auxiliary electrode are connected with electrochemical workstation respectively with contrast electrode.
4. proving installation according to claim 3, is characterized in that, described microscope rotates freely, and is positioned at below U-lag for regulating the described lifting table of the distance of microscope and U-lag.
5. proving installation according to claim 4, is characterized in that, popping one's head in described humiture for regulating the temperature of reaction chamber inside and the described heating tube of humidity, industrial humidifier is connected.
6. proving installation according to claim 5, it is characterized in that, described cylinder package is connected by mass flowmeter assembly with minimum gas concentration detector assembly, described minimum gas concentration detector assembly is positioned on reaction chamber, and it is outside that described cylinder package mass flowmeter assembly, mass flowmeter assembly are positioned at stainless steel casing.
7. proving installation according to claim 6, it is characterized in that, described proving installation also comprises exhaust gas recovery system, and described exhaust gas recovery system comprises fan blower, except gas cylinder, described fan blower, except gas cylinder is positioned at outside described stainless steel casing, to be connected with described reaction chamber.
8. proving installation according to claim 7, is characterized in that, be positioned at described stainless steel casing outside and connect a storage display system, described storage display system connects described microscope and electrochemical workstation.
9. proving installation according to claim 8, is characterized in that, the range of adjustment of described reaction indoor temperature and humidity is respectively 10-50 DEG C, 20%-98%RH.
10. proving installation according to claim 1, is characterized in that, described reaction chamber is that organic glass is formed.
CN201520200936.9U 2015-04-03 2015-04-03 A kind of for the thin liquid film in-situ testing device under microcorrosion atmosphere Expired - Fee Related CN204613076U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104777093A (en) * 2015-04-03 2015-07-15 北京科技大学 In-situ testing device for thin liquid film under trace corrosive-gas atmosphere

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104777093A (en) * 2015-04-03 2015-07-15 北京科技大学 In-situ testing device for thin liquid film under trace corrosive-gas atmosphere

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Granted publication date: 20150902

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