CN204556542U - A kind of pyrolytic graphite crystal optical splitter for X fluorescence spectrum analyser - Google Patents

A kind of pyrolytic graphite crystal optical splitter for X fluorescence spectrum analyser Download PDF

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CN204556542U
CN204556542U CN201520256522.8U CN201520256522U CN204556542U CN 204556542 U CN204556542 U CN 204556542U CN 201520256522 U CN201520256522 U CN 201520256522U CN 204556542 U CN204556542 U CN 204556542U
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pyrolytic graphite
graphite crystal
optical splitter
fluorescence spectrum
spectrum analyser
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余正东
孟强
张军涛
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Beijing Bandwise Technology Development Co Ltd
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Beijing Bandwise Technology Development Co Ltd
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Abstract

The utility model discloses a kind of pyrolytic graphite crystal optical splitter for X fluorescence spectrum analyser, the outgoing collimator assembly comprising incident collimator assembly, the light-splitting box assembly be connected with described incident collimator assembly and be connected with described light-splitting box assembly.The optical splitter of P, S element for X fluorescence spectrum analyser of the present utility model, adopt pyrolytic graphite crystal as dispersion and concentrating element, because pyrolytic graphite crystal has large light harvesting solid angle and high integrated reflectivity, under the same measurement environment of fixing road wavelength dispersion X fluorescence analyser and measuring condition, increase exponentially fixing road wavelength dispersion X fluorescence analyser to the sensitivity of P, S element, reduce and detect lower limit, thus improve the overall performance of instrument, expand the range of application of fixing road wavelength dispersion X fluorescence analyser.

Description

A kind of pyrolytic graphite crystal optical splitter for X fluorescence spectrum analyser
Technical field
The utility model relates to technical field of measuring equipment, specifically, relates to the field of precision instruments of quantitative test material chemical analysis, particularly relates to a kind of pyrolytic graphite crystal optical splitter for X fluorescence spectrum analyser.
Background technology
The vacuum measurement room periphery of simultaneous determination of multielement type X fluorescence spectrometer (hereinafter referred to as co-shaping WDXRFS) has installed several fixed element light splitters.The element light splitter of each employing flat crystal (hereinafter referred to as optical flat), is made up of incident collimator assembly, the light-splitting box assembly be connected with incident collimator assembly afterbody, the outgoing collimator assembly that is connected with light-splitting box assembly.Sent respective characteristic X-ray by the different elements in sample after the x-ray bombardment of X-ray tube, its wavelength is different.Shown in Figure 1, these X ray project analyzing crystal in light-splitting box assembly on the surface by the slit of a collimating apparatus tube end and pipe internal channel with θ angle, wavelength X is wherein only had to meet Bragg formula: (n is diffraction number of times to n λ=2dSin θ, be generally 1, d is interplanar distance) elemental characteristic X ray could to be split crystal reflection and focusing with same θ angle, and enter detector by the slit of secondary collimator assembly end and be detected.The content of this element in calculation sample is got final product according to the intensity of this kind of detected elemental characteristic X ray.Be split because its wavelength does not meet Bragg formula crystal and exit slit tube wall of the characteristic X-ray of other element absorbs.
As everyone knows, phosphorus (P), the content of sulphur (S) element in a lot of materials of the industries such as glass, building materials, Di Kuang, metallurgy are very low, have even lower than several ppm (abbreviation of part per million, represent 1,000,000/).Existing 200W simultaneous determination of multielement type X fluorescence spectrometer adopts the element light splitter of germanium flat crystal (hereinafter referred to as optical flat), its no matter from counting rate, sensitivity, detect lower limit and all can not reach the requirement detecting trace.
Utility model content
Therefore, the technical problems to be solved in the utility model is to overcome defect of the prior art, thus a kind of pyrolytic graphite crystal optical splitter for X fluorescence spectrum analyser is provided, counting rate, sensitivity can be improved, reduce and detect lower limit, improve instrument performance, expansion instrument is in the range of application of the industries such as glass, building materials, Di Kuang, metallurgy.
To achieve these goals, a kind of pyrolytic graphite crystal optical splitter for X fluorescence spectrum analyser of the present utility model, the outgoing collimator assembly comprising incident collimator assembly, the light-splitting box assembly be connected with described incident collimator assembly and be connected with described light-splitting box assembly; Described incident collimator assembly comprises the incident body forming incidence channel, is provided with entrance slit parallel-plate in described incident body; Described outgoing collimator assembly comprises the outgoing body forming exit channel, is provided with exit slit parallel-plate in described outgoing body; Described light-splitting box assembly comprises box body and is installed on the pyrolytic graphite crystal assembly in box body, and described pyrolytic graphite crystal assembly comprises crystal bracket and is positioned at the pyrolytic graphite crystal on crystal bracket; The optical axis of described incidence channel and exit channel is equal with emergence angle with the incident angle formed between described pyrolytic graphite crystal respectively and equal the diffraction angle of P element or S elemental characteristic X ray simultaneously.
The optical axis of described incidence channel and exit channel is respectively by the center of described box body.
Described pyrolytic graphite crystal is plane crystal.
Described outgoing collimating apparatus is provided with X-ray detector away from the end of described box body.
Described X-ray detector is flow-gas proportional counter.
Distance between the center of described pyrolytic graphite crystal and entrance slit parallel-plate, exit slit parallel-plate is 0.3 ~ 1mm.
Described pyrolytic graphite crystal assembly also comprises the incident angle regulating device for being adjusted incident angle by adjustment crystal holder angle.
The slit width regulating device for adjusting entrance slit width is also provided with in described incident body.
Described crystal bracket is provided with rotating shaft mechanism, described crystal bracket can be made to rotate around described rotating shaft mechanism by described incident angle regulating device.
P for X fluorescence spectrum analyser of the present utility model, the optical splitter of S element, adopt pyrolytic graphite crystal as dispersion and concentrating element, because pyrolytic graphite crystal has large light harvesting solid angle and high integrated reflectivity, at the same measurement environment of fixing road wavelength dispersion X fluorescence analyser and measuring condition (same equipment, same pipe voltage tube current, measure same class sample) under, increase exponentially fixing road wavelength dispersion X fluorescence analyser to P, the sensitivity of S element, reduce and detect lower limit, thus improve the overall performance of instrument, expand the range of application of fixing road wavelength dispersion X fluorescence analyser.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
In figure, Reference numeral is expressed as:
The incident collimator assembly of 1-; 2-light-splitting box assembly; 3-outgoing collimator assembly; 4-pyrolytic graphite crystal assembly; The incident body of 11-; 12-entrance slit parallel-plate; 13-slit width regulating device; 21-box body; 31-outgoing body; 32-exit slit parallel-plate; 41-pyrolytic graphite crystal; 42-crystal bracket; 42a-rotating shaft mechanism; 300-X ray detector.
Embodiment
In Wavelength dispersion type spectrometer system, optical splitter is the critical component obtaining elemental characteristic X-ray spectrum to be measured.Due to laser plasma x-ray source photon flux significantly lower than synchrotron radiation source photon flux and ray is directive isotropic radiation, so, be sought after having large light harvesting solid angle and the optical element of high integrated reflectivity, the utility model adopts pyrolytic graphite crystal to do dispersion and concentrating element can meet above-mentioned requirements.
Pyrolytic graphite crystal is Novel carbon material, that high-purity carbon hydrogen is under certain furnace pressure, the RESEARCH OF PYROCARBON of the higher crystalline orientation that the graphite matrix of 1800 DEG C ~ 2000 DEG C goes out through chemical vapor deposition, it has high density (2.20g/cm), (impurity content (0.0002%) and heat, electricity, magnetic, Mechanical Property Anisotropy, still can maintain the vacuum tightness of 10mmHg to high-purity at about 1800 DEG C.Because pyrolytic graphite crystal is substructure, so very high integrated reflectivity can be provided, and pyrolytic graphite crystal film also can be arranged on arbitrary shape mould on form the optical element of arbitrary shape.
Below by way of the drawings and specific embodiments, the utility model is described in further detail.
The present embodiment provides a kind of pyrolytic graphite crystal optical splitter for X fluorescence spectrum analyser, as shown in Figure 1, incident collimator assembly 1, the light-splitting box assembly 2 be connected with described incident collimator assembly 1 and the outgoing collimator assembly 3 be connected with described light-splitting box assembly 2 is comprised.
Described incident collimator assembly 1 comprises the incident body 11 forming incidence channel, and described incident body 11 is provided with entrance slit parallel-plate 12, and for regulating the slit width regulating device 13 of entrance slit width.
Incident light enters incident body 11, after the entrance slit being formed at described entrance slit parallel-plate 12, enters light-splitting box assembly 2.Described slit width regulating device 13 can regulate slit width, has reached suitable result of use.
Described outgoing collimator assembly 3 comprises the outgoing body 31 forming exit channel, and described outgoing body 31 is provided with exit slit parallel-plate 32.
Described light-splitting box assembly, comprises box body 21 and is installed on the pyrolytic graphite crystal assembly 4 in box body 21, and described pyrolytic graphite crystal assembly 4 comprises crystal bracket 42 and is positioned at the pyrolytic graphite crystal 41 on crystal bracket 42.
The plane of illumination of described pyrolytic graphite crystal 41 is plane, namely described pyrolytic graphite crystal 41 is plane crystal, the optical axis of described incidence channel and exit channel is equal with emergence angle with the incident angle formed between described pyrolytic graphite crystal respectively and equal the diffraction angle of P element or S elemental characteristic X ray, and the optical axis of described incidence channel and exit channel is respectively by the center of described box body.
In described outgoing collimating apparatus, the end of described box body is provided with X-ray detector, described X-ray detector can be closed proportional counter.
Distance between the center of described pyrolytic graphite crystal 41 and entrance slit parallel-plate 12, exit slit parallel-plate 32 is ~ 210mm.
Described pyrolytic graphite crystal assembly 4 also comprises the incident angle regulating device 43 for being adjusted incident angle by adjustment crystal bracket 42 angle.
Described crystal bracket 42 is provided with rotating shaft mechanism 42a, described crystal bracket 42 can be made to rotate around described rotating shaft mechanism 42a by described incident angle regulating device 43.
Obviously, above-described embodiment is only for clearly example being described, and the restriction not to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without the need to also giving all embodiments.And thus the apparent change of extending out or variation be still among the protection domain that the utility model creates.

Claims (9)

1. for a pyrolytic graphite crystal optical splitter for X fluorescence spectrum analyser, it is characterized in that: the outgoing collimator assembly comprising incident collimator assembly, the light-splitting box assembly be connected with described incident collimator assembly and be connected with described light-splitting box assembly; Described incident collimator assembly comprises the incident body forming incidence channel, is provided with entrance slit parallel-plate in described incident body; Described outgoing collimator assembly comprises the outgoing body forming exit channel, is provided with exit slit parallel-plate in described outgoing body; Described light-splitting box assembly comprises box body and is installed on the pyrolytic graphite crystal assembly in box body, and described pyrolytic graphite crystal assembly comprises crystal bracket and is positioned at the pyrolytic graphite crystal on crystal bracket; The optical axis of described incidence channel and exit channel is equal with emergence angle with the incident angle formed between described pyrolytic graphite crystal respectively and equal the diffraction angle of P element or S elemental characteristic X ray simultaneously.
2. as claimed in claim 1 for the pyrolytic graphite crystal optical splitter of X fluorescence spectrum analyser, it is characterized in that: the optical axis of described incidence channel and exit channel is respectively by the center of described box body.
3., as claimed in claim 1 for the pyrolytic graphite crystal optical splitter of X fluorescence spectrum analyser, it is characterized in that: described pyrolytic graphite crystal is plane crystal.
4., as claimed in claim 1 for the pyrolytic graphite crystal optical splitter of X fluorescence spectrum analyser, it is characterized in that: described outgoing collimating apparatus is provided with X-ray detector away from the end of described box body.
5., as claimed in claim 4 for the pyrolytic graphite crystal optical splitter of X fluorescence spectrum analyser, it is characterized in that: described X-ray detector is flow-gas proportional counter.
6. as claimed in claim 1 for the pyrolytic graphite crystal optical splitter of X fluorescence spectrum analyser, it is characterized in that: the distance between the center of described pyrolytic graphite crystal and entrance slit parallel-plate, exit slit parallel-plate is 0.3 ~ 1mm.
7. the pyrolytic graphite crystal optical splitter for X fluorescence spectrum analyser as described in any one of claim 1-6, is characterized in that: described pyrolytic graphite crystal assembly also comprises the incident angle regulating device for being adjusted incident angle by adjustment crystal holder angle.
8. the pyrolytic graphite crystal optical splitter for X fluorescence spectrum analyser as described in any one of claim 1-6, is characterized in that: in described incident body, be also provided with the slit width regulating device for adjusting entrance slit width.
9. the pyrolytic graphite crystal optical splitter for X fluorescence spectrum analyser as described in any one of claim 1-6, it is characterized in that: described crystal bracket is provided with rotating shaft mechanism, described crystal bracket can be made to rotate around described rotating shaft mechanism by described incident angle regulating device.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112292593A (en) * 2018-04-20 2021-01-29 奥图泰(芬兰)公司 X-ray fluorescence analyzer and method for performing X-ray fluorescence analysis
CN112313503A (en) * 2018-04-20 2021-02-02 奥图泰(芬兰)公司 X-ray fluorescence analyzer system and method for performing X-ray fluorescence analysis on an element of interest in a slurry
CN112313505A (en) * 2018-04-20 2021-02-02 奥图泰(芬兰)公司 X-ray fluorescence analyzer and method for performing X-ray fluorescence analysis
CN112313506A (en) * 2018-04-20 2021-02-02 奥图泰(芬兰)公司 X-ray fluorescence analyzer with multiple measurement channels and method for performing X-ray fluorescence analysis

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112292593A (en) * 2018-04-20 2021-01-29 奥图泰(芬兰)公司 X-ray fluorescence analyzer and method for performing X-ray fluorescence analysis
CN112313503A (en) * 2018-04-20 2021-02-02 奥图泰(芬兰)公司 X-ray fluorescence analyzer system and method for performing X-ray fluorescence analysis on an element of interest in a slurry
CN112313505A (en) * 2018-04-20 2021-02-02 奥图泰(芬兰)公司 X-ray fluorescence analyzer and method for performing X-ray fluorescence analysis
CN112313506A (en) * 2018-04-20 2021-02-02 奥图泰(芬兰)公司 X-ray fluorescence analyzer with multiple measurement channels and method for performing X-ray fluorescence analysis
CN112313503B (en) * 2018-04-20 2024-07-05 美卓奥图泰芬兰有限公司 X-ray fluorescence analyzer system and method for performing an X-ray fluorescence analysis of an element of interest in a slurry
CN112292593B (en) * 2018-04-20 2024-10-25 美卓奥图泰芬兰有限公司 X-ray fluorescence analyzer and method for performing an X-ray fluorescence analysis
CN112313506B (en) * 2018-04-20 2024-10-25 美卓奥图泰芬兰有限公司 X-ray fluorescence analyzer with multiple measuring channels and method for performing an X-ray fluorescence analysis

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