CN204546807U - The scribing machine of a kind of Real-Time Monitoring tool temperature and wear intensity - Google Patents

The scribing machine of a kind of Real-Time Monitoring tool temperature and wear intensity Download PDF

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Publication number
CN204546807U
CN204546807U CN201520197353.5U CN201520197353U CN204546807U CN 204546807 U CN204546807 U CN 204546807U CN 201520197353 U CN201520197353 U CN 201520197353U CN 204546807 U CN204546807 U CN 204546807U
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CN
China
Prior art keywords
axis
cooling device
blade
motor
scribing machine
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Withdrawn - After Issue
Application number
CN201520197353.5U
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Chinese (zh)
Inventor
王晶
白玉贵
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Light Microelectronics Equipment Co Ltd Of Shenyang China
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Light Microelectronics Equipment Co Ltd Of Shenyang China
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Priority to CN201520197353.5U priority Critical patent/CN204546807U/en
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Withdrawn - After Issue legal-status Critical Current
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Abstract

The utility model discloses a kind of scribing machine monitoring blade temperature and wear intensity in real time, and scribing machine comprises X-axis, Y-axis, Z axis, main shaft variable-frequency motor and frame thereof, the first cooling device, the second cooling device, infrared thermometry device, first, second laser scanning inspection device; Described X-axis is provided with the first movable motor, and Y-axis is provided with the second movable motor, and Z axis is provided with the third line and walks motor; Described main shaft variable-frequency motor front end is installed with the first cooling device and blade successively; The frame of described main shaft variable-frequency motor is connected with first, second, third movable motor on X-axis, Y-axis, Z axis; In the frame of described main shaft variable-frequency motor, upset is connected with U-shaped fixed mount, and this U-shaped fixed mount other end is provided with the second cooling device, the second laser scanning imaging checkout gear, infrared thermometry device and laser level calibrating installation by calibration walking mechanism and calibration motor.Blade longer service life of the present utility model, good cutting effect.

Description

The scribing machine of a kind of Real-Time Monitoring tool temperature and wear intensity
Technical field
The utility model relates to the processing equipment field of the material such as a kind of semi-conducting material or glass, piezoelectric ceramics, sapphire, is the scribing machine of a kind of Real-Time Monitoring tool temperature and wear intensity specifically.
Background technology
The working mechanism of scribing machine is high-rate cutting, is exactly that main shaft drives the blade of High Rotation Speed to carry out cutting-up to processed device.In the cutting-up process of scribing machine, blade and processed device can produce a large amount of heat, blade and processed device temperature are raised, too high temperature can have a strong impact on cutting-up quality, and greatly shorten the service life of blade, in order to the temperature of blade and processed device, need to spray cooling medium to cool it to blade and processed device in cutting-up process.Scribing machine is a kind of precise machining equipment being cardinal principle with the wheel grinding of High Rotation Speed, and machining accuracy during its work is by outside the precision of equipment self and effects of process parameters, and an important factor is exactly wearing and tearing and the damaged degree of cutter.If the wearing and tearing of cutter or damaged degree over-limit condition, cutting-up effect and precision all can be greatly affected, and even all cause damage to equipment or processing object.
Cutter cooling device on existing scribing machine only can spray cooling medium to the axial side of blade, and cooling effect is not ideal enough; There is not been reported for the scribing machine of a kind of real-time monitoring tool temperature and wear intensity.
Utility model content
The technical problems to be solved in the utility model, object is to provide the scribing machine that a kind of structure is simple, cooling effect better monitors tool temperature and wear intensity in real time.
The utility model for the technical scheme realizing its object and adopt is:
Can monitor a scribing machine for blade temperature and wear intensity in real time, scribing machine comprises X-axis, Y-axis, Z axis, main shaft variable-frequency motor and frame thereof, the first cooling device, the second cooling device, infrared thermometry device, first, second laser scanning inspection device;
Described X-axis is provided with the first movable motor, and Y-axis is provided with the second movable motor, and Z axis is provided with the third line and walks motor;
Described main shaft variable-frequency motor front end is installed with the first cooling device and blade successively;
The frame of described main shaft variable-frequency motor is connected with first, second, third movable motor on X-axis, Y-axis, Z axis;
In the frame of described main shaft variable-frequency motor, upset is connected with U-shaped fixed mount, and the depressed part of this U-shaped fixed mount is provided with the first laser scanning imaging checkout gear and laser vertical calibrating installation;
This U-shaped fixed mount other end is provided with the second cooling device, infrared thermometry device, the second laser scanning imaging checkout gear and laser level calibrating installation by calibration walking mechanism and calibration motor.
The utility model has the advantages that:
The cutter cooling device of the utility model scribing machine can spray cooling medium respectively to the both sides of blade, and cooling effectiveness is higher, and cooling effect is better.
The utility model scribing machine there is blade temperature-detecting device, the temperature of Real-Time Monitoring blade, and then perform strong cold control, cooling effect obtains and greatly improves, the longer service life of blade
The utility model tool surface abrasion detection structure, the wear intensity of Real-Time Monitoring cutter, and then control cutting-tool's used life, technology prompting changing blade, to ensure cutting effect.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the second laser scanning inspection apparatus structure schematic diagram of the present utility model.
Fig. 3 is the first cooling device structural representation of the present utility model.
Fig. 4 is the second cooling device structural representation of the present utility model.
Detailed description of the invention
In conjunction with Figure of description, the utility model is further described.
As Figure 1-4, can monitor a scribing machine for blade temperature and wear intensity in real time, scribing machine comprises X-axis 1, Y-axis 2, Z axis 3, main shaft variable-frequency motor 5 and frame thereof 4, first cooling device 6, second cooling device 9, infrared thermometry device 16, first laser scanning inspection device 13, second laser scanning inspection device 12;
Described X-axis 1 is provided with the first movable motor, and Y-axis 2 is provided with the second movable motor, and Z axis 3 is provided with the third line and walks motor;
Described main shaft variable-frequency motor 5 front end turning cylinder 8 is installed with the first cooling device 6 and blade 7 successively;
The frame 4 of described main shaft variable-frequency motor 5 is connected with first, second, third movable motor on X-axis 1, Y-axis 2, Z axis 3;
In the frame 4 of described main shaft variable-frequency motor 5, upset is connected with U-shaped fixed mount 15, and the recess of this U-shaped fixed mount 15 is provided with the first laser scanning imaging checkout gear 13 and laser vertical calibrating installation 14;
This U-shaped fixed mount 15 other end is provided with the second cooling device 9, infrared thermometry device 16, second laser scanning imaging checkout gear 12 and laser level calibrating installation 10 by calibration walking mechanism 11 and calibration motor.
Described main shaft variable-frequency motor 5 is connected with main control system 17; First, second, third movable motor on X-axis 1, Y-axis 2, Z axis 3 is connected with main control system 17; First cooling device 6 is connected with main control system 17 with the second cooling device 9; Infrared thermometry device 16 is connected with main control system 17 with first, second laser scanning imaging checkout gear 13,12; Laser level calibrating installation 10 and calibration motor are connected with main control system 17.
Described first cooling device 6 is ring dish spray structure, and the diameter of this ring dish spray structure is less than blade 7 diameter, by high-pressure water pipe by the back side after cold water injection to blade 7.
Described second cooling device 9 is disk spray structure, and the diameter of this disk spray structure is the half of blade 7 diameter, by high-pressure water pipe by coolant injection on blade 7 front surface.
Described infrared thermometry device 16 is arranged on the second laser scanning imaging checkout gear 12, detects the temperature on blade 7 surface, the temperature information detected is passed to main control system 17.
Described laser level calibrating installation 10 is arranged on the second cooling device 9 central shaft;
Described second laser scanning imaging checkout gear 12 is arranged on top fan-shaped scanning blade 7 wear information of the second cooling device 9, and this wear information is passed to main control system 17.
The utility model control system is made up of industrial computer and axle card, and reliability is high.X-axis adopts driven by servomotor, and speed-regulating range width, operates steadily.Y-axis adopts line slideway, ball-screw and grating feedback closed-loop control, error free accumulation, accurate positioning.Z axis adopts line slideway and ball-screw-transmission mode, accurate positioning.First, second laser scanning imaging checkout gear, with self-cleaning function, is made up of continuous zoom microscope and high definition CCD, clear and intuitive.
Below be only preferred embodiment of the present utility model; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the utility model principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.

Claims (6)

1. can monitor a scribing machine for blade temperature and wear intensity in real time, it is characterized in that: scribing machine comprises X-axis, Y-axis, Z axis, main shaft variable-frequency motor and frame thereof, the first cooling device, the second cooling device, infrared thermometry device, the first laser scanning inspection device, the second laser scanning inspection device;
Described X-axis is provided with the first movable motor, and Y-axis is provided with the second movable motor, and Z axis is provided with the third line and walks motor;
Described main shaft variable-frequency motor front end is installed with the first cooling device and blade successively;
The frame of described main shaft variable-frequency motor is connected with first, second, third movable motor on X-axis, Y-axis, Z axis;
In the frame of described main shaft variable-frequency motor, upset is connected with U-shaped fixed mount, and the depressed part of this U-shaped fixed mount is provided with the first laser scanning imaging checkout gear and laser vertical calibrating installation;
This U-shaped fixed mount other end is provided with the second cooling device, infrared thermometry device, the second laser scanning imaging checkout gear and laser level calibrating installation by calibration walking mechanism and calibration motor.
2. the scribing machine monitoring blade temperature and wear intensity in real time according to claim 1, is characterized in that:
Described main shaft variable-frequency motor is connected with main control system; First, second, third movable motor on X-axis, Y-axis, Z axis is connected with main control system; First cooling device is connected with main control system with the second cooling device; Infrared thermometry device is connected with main control system with first, second laser scanning imaging checkout gear; Laser level calibrating installation and calibration motor are connected with main control system.
3. the scribing machine monitoring blade temperature and wear intensity in real time according to claim 1, is characterized in that:
Described first cooling device is ring dish spray structure, and the diameter of this ring dish spray structure is less than blade diameter, by high-pressure water pipe by the back side after cold water injection to blade.
4. the scribing machine monitoring blade temperature and wear intensity in real time according to claim 1, is characterized in that:
Described second cooling device is disk spray structure, and the diameter of this disk spray structure is the half of blade diameter, by high-pressure water pipe by coolant injection on blade front surface.
5. the scribing machine monitoring blade temperature and wear intensity in real time according to claim 1, is characterized in that:
Described infrared thermometry device is arranged on the second laser scanning imaging checkout gear, detects the temperature of blade face, the temperature information detected is passed to main control system.
6. the scribing machine monitoring blade temperature and wear intensity in real time according to claim 1, is characterized in that:
Described laser level calibrating installation is arranged on the second cooling device central shaft;
Described second laser scanning imaging checkout gear is arranged on the top fan-shaped scanning blade abrasion information of the second cooling device, and this wear information is passed to main control system.
CN201520197353.5U 2015-04-02 2015-04-02 The scribing machine of a kind of Real-Time Monitoring tool temperature and wear intensity Withdrawn - After Issue CN204546807U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520197353.5U CN204546807U (en) 2015-04-02 2015-04-02 The scribing machine of a kind of Real-Time Monitoring tool temperature and wear intensity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520197353.5U CN204546807U (en) 2015-04-02 2015-04-02 The scribing machine of a kind of Real-Time Monitoring tool temperature and wear intensity

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104708726A (en) * 2015-04-02 2015-06-17 沈阳华夏光微电子装备有限责任公司 Dicing saw capable of monitoring temperature and abrasion degree of cutter in real time and control method
CN110480850A (en) * 2019-07-29 2019-11-22 武汉华星光电技术有限公司 Cutter device and its operating method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104708726A (en) * 2015-04-02 2015-06-17 沈阳华夏光微电子装备有限责任公司 Dicing saw capable of monitoring temperature and abrasion degree of cutter in real time and control method
CN110480850A (en) * 2019-07-29 2019-11-22 武汉华星光电技术有限公司 Cutter device and its operating method

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C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20150812

Effective date of abandoning: 20160824

C25 Abandonment of patent right or utility model to avoid double patenting