CN204536687U - A kind of production line of one side ITO structure product - Google Patents
A kind of production line of one side ITO structure product Download PDFInfo
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- CN204536687U CN204536687U CN201520128816.2U CN201520128816U CN204536687U CN 204536687 U CN204536687 U CN 204536687U CN 201520128816 U CN201520128816 U CN 201520128816U CN 204536687 U CN204536687 U CN 204536687U
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Abstract
The utility model discloses a kind of production line of one side ITO structure product, comprise the rinse bath connected successively by transmission order, gluing room, baking vessel, exposure room, developing room, baking machine, etching chamber and striping room, it is characterized in that: described baking machine comprises apparatus body, conveying mechanism is provided with in apparatus body, heating arrangements, cooling body, the cavity of apparatus body is divided between preheating zone by transmission order by described heating arrangements successively, between flat-temperature zone, between cooling area, wherein adopt spaced apart 6 blocks of infrared heating plates and 5 pieces of electric boiling plates between flat-temperature zone, described conveying mechanism is be positioned at the conveyer mechanism under each interval heating plate, described cooling body be positioned between cooling area after blast-cold blower fan.The utility model, by installation infrared heating plate in baking machine, can ensure the solidification completely of photoresist, avoids the phenomenon occurring burr after etching, thus improves the yields of product, and can improve production speed, to realize scale of mass production.
Description
Technical field
The utility model relates to LCDs production field, more specifically, relates to a kind of production line of one side ITO structure product.
Background technology
In today of new and high technology fast development, electronic product updates frequently, and this type of producer must be grown with each passing hour could commercially gain a place." speed, quality, cost " is the problem that each enterprise is paying close attention to, in quality, when domestic manufacturer is numerous, client is to the precision of product, line-spacing, the isoparametric requirement in line limit becomes higher, needs to carry out more perfectly improving and can taking the good opportunity to related process flow process for this reason.One side ITO structure product is the product that whole TP industry inner structure is comparatively simple, production procedure is few, but graphic structure is complicated, and lines are intensive, cannot solidify completely, occur burr after causing etching at normal solid roasting rear section photoresistance.The problem of line burr can cause line weight uneven, thus ITO circuit resistance is uneven, causes product function to test the phenomenon occurring NG.Simultaneously due to the problem of line burr, make yield ubiquity lower, throughput rate is slow, and scale of mass production difficulty is large, therefore, needs badly and improves the production line of one side ITO, thus realize the scale of mass production of one side ITO structure product.
Summary of the invention
For solving the problem, the utility model provides a kind of production line of one side ITO structure product, and solving part photoresistance by installation infrared heating plate in baking machine cannot completely crued problem, thus improves the yield producing one side ITO structure product.
For achieving the above object, the technical solution of the utility model is: a kind of production line of one side ITO structure product, comprise the rinse bath connected successively by transmission order, gluing room, baking vessel, exposure room, developing room, baking machine, etching chamber and striping room, it is characterized in that: described baking machine comprises apparatus body, conveying mechanism is provided with in apparatus body, heating arrangements, cooling body, the cavity of apparatus body is divided between preheating zone by transmission order by described heating arrangements successively, between flat-temperature zone, between cooling area, 2 pieces of electric boiling plates are adopted between described preheating zone, spaced apart 6 blocks of infrared heating plates and 5 pieces of electric boiling plates are adopted between flat-temperature zone, 2 pieces of electric boiling plates are adopted between cooling area, described conveying mechanism is be positioned at the conveyer mechanism under each interval heating plate, described cooling body be positioned between cooling area after blast-cold blower fan.
Described apparatus body cavity inner wall adopts vacuum insulation panel.
Described apparatus body corresponds to each interval and be respectively equipped with corresponding maintenance conditions door.
Described apparatus body is provided with the controller be connected with each heating plate.
The beneficial effects of the utility model are: due to infrared hot plate quick heating, heat from inside to outside, and the large and homogeneous temperature of heating surface (area) (HS, can shorten set time, and save the energy, enhance productivity.Therefore, by installation infrared heating plate in baking machine, the solidification completely of photoresist can be ensured, avoid the phenomenon occurring burr after etching, thus improve the yields of product, and production speed can be improved, realize scale of mass production, simultaneously because the price of infrared heating plate is more expensive, by adopting infrared heating plate and the spaced apart mode of electric boiling plate, also can suitably control cost.
Accompanying drawing explanation
Fig. 1 is the schematic flow sheet of one side ITO structure product line.
Fig. 2 is the rough schematic view in each interval of baking machine.
Fig. 3 is the structural representation between baking machine flat-temperature zone.
In figure, between 1-rinse bath, 2-gluing room, 3-baking vessel, 4-exposure room, 5-developing room, 6-baking machine, 7-etching chamber, 8-striping room, 61-preheating zone, between 62-flat-temperature zone, between 63-cooling area, 64-travelling belt, 621-electric boiling plate, 622-infrared heating plate.
Embodiment
As shown in Figure 1, a kind of production line of one side ITO structure product, it comprises the rinse bath 1 connected successively by transmission order, gluing room 2, baking vessel 3, exposure room 4, developing room 5, baking machine 6, etching chamber 7 and striping room 8, as Fig. 2, shown in Fig. 3, described baking machine comprises controller and apparatus body, conveying mechanism is provided with in apparatus body, heating arrangements, cooling body, three intervals are divided in described apparatus body cavity, to be respectively between preheating zone 61, between flat-temperature zone 62, between cooling area 63, first product is entered between preheating zone by conveying mechanism, again between flat-temperature zone, export out from baking machine by eventually passing cooling body between cooling area, each interval is provided with some blocks of hot plates, 2 pieces of electric boiling plates are adopted between preheating zone, temperature rises one by one, 2 pieces of electric boiling plates are adopted between cooling area, temperature declines one by one, electric boiling plate 621 and infrared heating plate 622 is adopted between flat-temperature zone, both spaced installations, comprise 5 pieces of electric boiling plates and 6 blocks of infrared heating plates.Spaced mounting means can keep the stability of temperature, and product is fully heated, and reaches completely crued effect, by adopting infrared heating plate thus shortening the set time to product, improves product yield and production efficiency.Described conveying mechanism is travelling belt conveying mechanism, and travelling belt 64 is positioned under hot plate, and ito glass is between travelling belt 64 and hot plate.Temperature, the speed of described controller controllable device body, regulate the distance between hot plate and travelling belt.Described apparatus body inside cavities wall adopts vacuum insulation panel, prevents hot-fluid from leaking.Described apparatus body is provided with several maintenance conditions doors.Described cooling body is blast-cold blower fan, is arranged on baking machine exit.
Because baking machine is mainly in order to allow the surface of ito glass solidify completely, and the complicacy of the figure of one side ITO makes to be difficult to photomask surface glue to solidify completely in the bake process of leading portion thus it is bad to cause line edge after the etching can produce burr shape, need to solidify completely glass surface photoresist, can be improved the baking temperature of photoresist and time by raising, but 15 blocks of hot plates are electric boiling plate in existing baking machine, wherein have at least 4 pieces and be in the effect heating up and lower the temperature, that really plays constant temperature baking effect has 11 blocks of hot plates, need glass baking number minute under these 11 blocks of hot plates, baking machine hot plate temperature must be raised, speed significantly reduces, the production production capacity of production line will be had a strong impact on like this, baking machine is made to become production short slab, therefore, the utility model is reequiped baking machine on the basis that original solidification is toasted, the mode of electric boiling plate and the spaced heated baking of infrared hot plate is adopted to carry out Post RDBMS to product, to obtain the effect improving product yields and throughput rate.
Claims (4)
1. the production line of an one side ITO structure product, comprise the rinse bath connected successively by transmission order, gluing room, baking vessel, exposure room, developing room, baking machine, etching chamber and striping room, it is characterized in that: described baking machine comprises apparatus body, conveying mechanism is provided with in apparatus body, heating arrangements, cooling body, the cavity of apparatus body is divided between preheating zone by transmission order by described heating arrangements successively, between flat-temperature zone, between cooling area, 2 pieces of electric boiling plates are adopted between described preheating zone, spaced apart 6 blocks of infrared heating plates and 5 pieces of electric boiling plates are adopted between flat-temperature zone, 2 pieces of electric boiling plates are adopted between cooling area, described conveying mechanism is be positioned at the conveyer mechanism under each interval heating plate, described cooling body be positioned between cooling area after blast-cold blower fan.
2. the production line of one side ITO structure product according to claim 1, is characterized in that: described apparatus body cavity inner wall adopts vacuum insulation panel.
3. the production line of one side ITO structure product according to claim 1, is characterized in that: described apparatus body corresponds to each interval and be respectively equipped with corresponding maintenance conditions door.
4. the production line of one side ITO structure product according to claim 1, is characterized in that: described apparatus body is provided with the controller be connected with each heating plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520128816.2U CN204536687U (en) | 2015-03-06 | 2015-03-06 | A kind of production line of one side ITO structure product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520128816.2U CN204536687U (en) | 2015-03-06 | 2015-03-06 | A kind of production line of one side ITO structure product |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204536687U true CN204536687U (en) | 2015-08-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520128816.2U Expired - Fee Related CN204536687U (en) | 2015-03-06 | 2015-03-06 | A kind of production line of one side ITO structure product |
Country Status (1)
| Country | Link |
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| CN (1) | CN204536687U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107329378A (en) * | 2017-09-01 | 2017-11-07 | 东莞通华液晶有限公司 | A kind of high-precision ITO photoetching processes |
| CN108037644A (en) * | 2017-12-29 | 2018-05-15 | 河源市力友显示技术有限公司 | A kind of ultra-thin ito glass production line and production method |
-
2015
- 2015-03-06 CN CN201520128816.2U patent/CN204536687U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107329378A (en) * | 2017-09-01 | 2017-11-07 | 东莞通华液晶有限公司 | A kind of high-precision ITO photoetching processes |
| CN108037644A (en) * | 2017-12-29 | 2018-05-15 | 河源市力友显示技术有限公司 | A kind of ultra-thin ito glass production line and production method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150805 Termination date: 20180306 |
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| CF01 | Termination of patent right due to non-payment of annual fee |