CN204525189U - A kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device - Google Patents

A kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device Download PDF

Info

Publication number
CN204525189U
CN204525189U CN201520075765.1U CN201520075765U CN204525189U CN 204525189 U CN204525189 U CN 204525189U CN 201520075765 U CN201520075765 U CN 201520075765U CN 204525189 U CN204525189 U CN 204525189U
Authority
CN
China
Prior art keywords
abrasive flow
ultrasonic
phase abrasive
solid
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201520075765.1U
Other languages
Chinese (zh)
Inventor
计时鸣
陈凯
苏林杰
金明生
赵军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang University of Technology ZJUT
Original Assignee
Zhejiang University of Technology ZJUT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang University of Technology ZJUT filed Critical Zhejiang University of Technology ZJUT
Priority to CN201520075765.1U priority Critical patent/CN204525189U/en
Application granted granted Critical
Publication of CN204525189U publication Critical patent/CN204525189U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The utility model discloses a kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device, reverse ultrasonic generator is arranged on abrasive Flow direction contrary, and be on the position of 60 degree of angles with abrasive Flow direction, will forward supersonic generator to be arranged on abrasive Flow direction identical, and be on the position of 60 degree of angles with abrasive Flow direction, utilize reverse ultrasonic generator and forward ultrasonic generator produce reverse ultrasonic wave and forward ultrasonic wave respectively, reverse ultrasonic wave and forward ultrasonic wave cause micro-dimension bubble to be crumbled and fall to the micro-dimension bubble compression near workpiece machining surface in the abrasive Flow medium containing micro-dimension bubble, reverse micro laser wave that is a kind of and abrasive Flow direction contrary can be produced when micro-dimension bubble is crumbled and fall, micro laser wave makes regional area in abrasive Flow produce very large pressure thus produce micro-explosion effect, thus increase the action time of abrasive particle and workpiece, increase substantially the polishing efficiency of abrasive Flow.

Description

A kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device
Technical field
The utility model relates to soft flow surface grinding and polishing field, in particular, relates to a kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device.
Background technology
At high-technology fields such as modern photoelectronics, computer science and membrane sciences, need to realize super smooth surface processing Ultrasmooth Surface Manufacturing at precision optics part and functional crystal material surface, such as soft x-ray optics system, laser gyro speculum, high-density wavelength division multiplexer, superlaser speculum, function optics, optical window, K9 glass Ultra-precision Turning etc.
The liquid-solid two-phase soft abrasive fluid polishing that early stage occurs is for theoretical foundation with the turbulent flow of abrasive Flow, based on mutual collision between abrasive particle and the collision between abrasive particle and wall, dynamic analysis is carried out to abrasive particle, utilize in Turbulent Flow Field that abrasive particle is to the shear action of wall, to the wall of workpiece, coarse place carries out precise polished processing.
Gas-liquid-solid three-phase abrasive Flow polishing processing method be by micro-dimension bubble in certain proportion Homogeneous phase mixing enter the novel fluid polishing medium formed in liquid-solid two-phase abrasive Flow, turbulent flow is formed at processing work upper surface, the microburst mechanism utilizing bubble wherein to crumble and fall to produce promotes the more efficient as-machined workpiece surface of abrasive particle, reaches the effect of efficiently workpiece being carried out to polishing.
At present, the mode that runner adopts single entrance, list exports that gas-liquid-solid three-phase abrasive Flow polishing is used, fluid flows into from the entrance of runner, and outlet is flowed out, and is finally back to abrasive Flow storage bin.According to the process principle of three-phase abrasive Flow, must form turbulent flow to the abrasive Flow that workpiece is processed in runner, in turbulent flow, the randomness of grain motion is conducive to interface disorder, until realize surface of the work without instrument minute surface level processing effect.Based on the experimental status in early stage, there is following shortcoming in the processing flow channel that simple single input exports: 1. the pressure of booster pump or flow lower time, the flow velocity of the gas-liquid-solid three-phase abrasive Flow that booster pump exports can not reach the minimum speed of turbulization, the abrasive Flow in abrasive particle runner is caused to be in laminar condition, and then the probability causing the micro-dimension bubble in abrasive Flow to be crumbled and fall is very low, processing effect is not obvious; 2. the flow velocity of booster pump output abrasive Flow reaches the minimum speed forming turbulent flow in runner, bubble may be crumbled and fall under the disturbance of turbulent flow, but can not crumble and fall with higher probability in the region near surface of the work, and then can not the obvious processing effect of forming region, cause the efficiency of work pieces process not high.
Utility model content
The purpose of this utility model is to solve workpiece polishing effect unconspicuous problem when prior art utilizes abrasive Flow to carry out polishing to surface of the work, provides a kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing method and device.
The utility model is achieved through the following technical solutions above-mentioned purpose:
A kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device, comprise forward ultrasonic generator, reverse ultrasonic generator, three-phase abrasive Flow runner, flow passage cover plate and base, three-phase abrasive Flow runner is fixed on base, flow passage cover plate is fixed on three-phase abrasive Flow runner, outlet and the porch of three-phase abrasive Flow runner are equipped with screwed pipe, are provided with the groove of mounting strap polishing workpiece in three-phase abrasive Flow runner;
Described reverse ultrasonic generator comprises ultrasonic transducer, planar rondure piston type emitting head, fixed flange and the dish that is tightly connected, described ultrasonic transducer connects planar rondure piston type emitting head, described planar rondure piston type emitting head is by an inclined side of the dish connecting passage cover plate that is tightly connected, ultrasonic wave to be launched by planar rondure piston type emitting head and is entered in three-phase abrasive Flow runner by described ultrasonic transducer, the flow direction of the gas-liquid-solid three-phase abrasive Flow in described three-phase abrasive Flow runner and above-mentioned hyperacoustic direction contrary and be 60 degree of angles; Described ultrasonic transducer is fixed on base by fixed flange;
Described forward ultrasonic generator structure is consistent with reverse ultrasonic generator, forward ultrasonic generator is contained on the another one inclined side of flow passage cover plate, forward ultrasonic generator and reverse ultrasonic generator is symmetrical and the two is 60 degree of angles.
Further, institute's fixed flange is fixed on base by fixture.
Further, be tightly connected described in dish and flow passage cover plate be tightly connected by O RunddichtringO.
Further, described ultrasonic transducer by planar rondure piston type emitting head launch the elastic mechanical vibration wave of ultrasonic wave to be frequency be 20kHz.Above-mentioned ultrasonic wave can produce compression to solid wherein or cavitation bubble in three-phase abrasive Flow Propagation process, cavitation bubble may be crumbled and fall in compression process, a kind of reverse micro laser wave angled with three-phase abrasive Flow can be produced when it is crumbled and fall, make regional area have very large pressure thus produce micro-explosion effect.
Further, three-phase abrasive Flow be uniformly mixed to form with micro-dimension bubble by liquid-solid two phase abrasive Flow mix abrasive fluid, described micro-dimension bubble to be diameter the be cavitation bubble of 1 ~ 100 μm, described micro-dimension bubble is produced by micro-nano airlift pump and Homogeneous phase mixing enters in liquid-solid two phase abrasive Flow.
Further, described fixed flange comprises stamper and sub-disk, is provided with plastic spacer between sub-disk and ultrasonic transducer, is provided with rubber shock-absorbing packing ring between stamper and ultrasonic transducer.Significantly reduce hyperacoustic transmission loss by plastic spacer and rubber shock-absorbing packing ring, and then ensure the integrality of ultrasonic transducer output ultrasonic wave.
A kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing method, for ultrasonic applications in gas-liquid-solid three-phase abrasive Flow polishing, comprise the steps: reverse ultrasonic generator to be arranged on gas-liquid-solid three-phase abrasive Flow direction contrary, and be on the position of 60 degree of angles with gas-liquid-solid three-phase abrasive Flow direction, will forward supersonic generator to be arranged on gas-liquid-solid three-phase abrasive Flow direction identical, and be on the position of 60 degree of angles with gas-liquid-solid three-phase abrasive Flow direction, utilize reverse ultrasonic generator and forward ultrasonic generator produce reverse ultrasonic wave and forward ultrasonic wave respectively, reverse ultrasonic wave and forward ultrasonic wave cause micro-dimension bubble to be crumbled and fall to the micro-dimension bubble compression near workpiece machining surface in the gas-liquid-solid three-phase abrasive Flow medium containing micro-dimension bubble, reverse micro laser wave that is a kind of and gas-liquid-solid three-phase abrasive Flow direction contrary can be produced when micro-dimension bubble is crumbled and fall, micro laser wave makes regional area in gas-liquid-solid three-phase abrasive Flow produce very large pressure thus produce micro-explosion effect, and by the component that micro-explosion effect produces vertically downward, impetus is accelerated downwards to the abrasive particle generation around micro-dimension bubble, and then increase substantially contact probability and the active force at described gas-liquid-solid three-phase abrasive Flow and the protruding peak of workpiece machining surface, the component flowing to contrary with gas-liquid-solid three-phase abrasive Flow simultaneously surrounding and watching that detonation produces can play relative retardation effect to abrasive particle, increases the contact action time of abrasive particle and workpiece machining surface.
Further, described reverse ultrasonic wave and forward hyperacoustic power and frequency carry out manual control by external circuits and control system, and then can the speed that crumble and fall of micro-dimension bubble in manual control gas-liquid-solid three-phase abrasive Flow, improve the crumble and fall probability of micro-dimension bubble near workpiece machining surface place.The active force that can prevent from micro-dimension bubble from crumbling and fall further producing excessive or too small time surface of the work is destroyed or working (machining) efficiency low, thus improve micro-dimension bubble and crumble and fall to the beneficial effect of processing.
The beneficial effects of the utility model are:
Ultrasonic wave promotes micro-dimension bubble to crumble and fall and then the effect that produces micro-explosion effect is applied in abrasive Flow polishing by 1 in fluid media (medium), two component that micro-explosion action effect produces, vertical stress component is for improving contact probability and the active force at abrasive particle and the protruding peak of workpiece machining surface, reverse horizontal component can form relative retardation effect to abrasive particle, increase the action time of abrasive particle and workpiece, increase substantially the polishing efficiency of abrasive Flow.
Forward ultrasonic generator and the reverse ultrasonic generator of 2 device employings are that 60 degree of angles are symmetrical, in three-phase abrasive Flow runner, frequency is taken in respectively identical from both direction, the ultrasonic wave that power is different, superpose in hyperacoustic confluence, micro-dimension bubble major part is concentrated near workpiece machining surface crumble and fall, improve the processing effect to workpiece.
3 utilize gas-liquid-solid three-phase abrasive Flow repeatedly to carry out polishing to processing work surface in polishing system, the utilization ratio of gas-liquid-solid three-phase abrasive Flow can be improved, and effectively can filter processing residue to reduce sewage discharge, realize clean processing, economize energy, environmental protection.
Accompanying drawing explanation
Fig. 1 is the schematic flow sheet of a kind of ultrasonic assistant gas-liquid-solid three-phase of the utility model abrasive Flow polishing processing method.
Fig. 2 is the structural representation of a kind of ultrasonic assistant gas-liquid-solid three-phase of the utility model abrasive Flow polishing processing device.
Fig. 3 is ultrasonic transducer ultrasonic transformer and fixed flange assembly structure sectional view.
Fig. 4 is three-phase abrasive Flow runner and planar rondure piston type emitting head assembly structure sectional view.
In figure, 1-base, 2-three-phase abrasive Flow runner, 3-fixture, 4-sub-disk, 5-lower lock block, 6-piezo ceramic element, 7-pretightning force screw, 8-upper holder block, 9-electrode member, 10-ultrasonic transformer, 11-stamper, 12-planar rondure piston type emitting head, 13-flow passage cover plate, 14-workpiece, 15-micro-dimension bubble, 16-gas-liquid-solid three-phase abrasive Flow, 17-are tightly connected dish, 18-screwed pipe, 19-plastic spacer, 20-rubber shock-absorbing packing ring.
Detailed description of the invention
Below in conjunction with accompanying drawing, the utility model is described in further detail:
With reference to accompanying drawing 1 ~ 4, a kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing method, concrete technical thought can be described below: in three-phase abrasive Flow runner 2, injected the gas-liquid-solid three-phase abrasive Flow 16 being in turbulence state by the screwed pipe 18 in polishing processing device, open ultrasonic transducer simultaneously, external circuits and control system is utilized to regulate described ultrasonic transducer to launch hyperacoustic power and frequency, take out workpiece 14 after continuous firing certain hour to measure, draw processing effect conclusion.Wherein, under the adjustment of external circuits and control system, in conjunction with the processing effect that measuring workpieces 14 draws, many experiments, makes ultrasonic wave reach the best micro-dimension bubble accelerated in three-phase abrasive Flow and to crumble and fall the effect of speed, finally draft experiment processing technology.
Described reverse ultrasonic wave and forward hyperacoustic power and frequency carry out manual control by external circuits and control system, and then can the speed that crumble and fall of micro-dimension bubble in manual control gas-liquid-solid three-phase abrasive Flow 16, improve the crumble and fall probability of micro-dimension bubble 15 near workpiece 14 finished surface place.The active force that can prevent from micro-dimension bubble from crumbling and fall further producing excessive or too small time make workpiece 14 surface breakdown or working (machining) efficiency low, thus improve micro-dimension bubble 15 and crumble and fall to the beneficial effect of processing.
A kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device involved by such scheme, comprise forward ultrasonic generator, reverse ultrasonic generator, three-phase abrasive Flow runner 2, flow passage cover plate 13 and base 1, three-phase abrasive Flow runner 2 is fixed on base 1, flow passage cover plate 13 is fixed on three-phase abrasive Flow runner 2, outlet and the porch of three-phase abrasive Flow runner 2 are equipped with screwed pipe 18, are provided with the groove of mounting strap polishing workpiece in three-phase abrasive Flow runner 2, described reverse ultrasonic generator comprises ultrasonic transducer, planar rondure piston type emitting head 12, fixed flange and the dish 17 that is tightly connected, described ultrasonic transducer connects planar rondure piston type emitting head 12, described planar rondure piston type emitting head 12 is by an inclined side of the dish 17 connecting passage cover plate 13 that is tightly connected, ultrasonic wave transmitting enters in three-phase abrasive Flow runner 2 by planar rondure piston type emitting head 12 by described ultrasonic transducer, the flow direction of the gas-liquid-solid three-phase abrasive Flow in described three-phase abrasive Flow runner 2 and above-mentioned hyperacoustic direction contrary and in 60 degree of angles, described ultrasonic transducer is fixed on base 1 by fixed flange, described forward ultrasonic generator structure is consistent with reverse ultrasonic generator, forward ultrasonic generator is contained on the another one inclined side of flow passage cover plate 13, forward ultrasonic generator and reverse ultrasonic generator is symmetrical and the two is 60 degree of angles.
Institute's fixed flange is fixed on base 1 by fixture 3.
Described dish 17 and the flow passage cover plate 13 of being tightly connected is tightly connected by O RunddichtringO.
Described supersonic generator comprises ultrasonic transformer 10, lower lock block 5, piezo ceramic element 6, electrode member 9, pretightning force screw 7 and upper holder block 8, lower lock block 5 and upper holder block 8 are located at the two ends of piezo ceramic element 6 and are fixed by pretightning force bolt 7, electrode member 9 connects piezo ceramic element 6, one end of lower lock block 5 connects planar rondure piston type emitting head 12 by ultrasonic transformer 10, and fixed flange is fixed on ultrasonic transformer 10.
Described ultrasonic transducer by planar rondure piston type emitting head 12 launch the elastic mechanical vibration wave of ultrasonic wave to be frequency be 20kHz.Above-mentioned ultrasonic wave can produce compression to solid wherein or cavitation bubble in three-phase abrasive Flow Propagation process, cavitation bubble may be crumbled and fall in compression process, a kind of reverse micro laser wave angled with three-phase abrasive Flow can be produced when it is crumbled and fall, make regional area have very large pressure thus produce micro-explosion effect.
Three-phase abrasive Flow be uniformly mixed to form with micro-dimension bubble by liquid-solid two phase abrasive Flow mix abrasive fluid, described micro-dimension bubble to be diameter the be cavitation bubble of 1 ~ 100 μm, described micro-dimension bubble is produced by micro-nano airlift pump and Homogeneous phase mixing enters in liquid-solid two phase abrasive Flow.
Described fixed flange comprises stamper 11 and sub-disk 4, is provided with plastic spacer 19 between sub-disk 4 and ultrasonic transducer, is provided with rubber shock-absorbing packing ring 20 between stamper 11 and ultrasonic transducer.Significantly reduce hyperacoustic transmission loss by plastic spacer 19 and rubber shock-absorbing packing ring 20, and then ensure the integrality of ultrasonic transducer output ultrasonic wave.
Above-described embodiment is preferred embodiment of the present utility model; it is not the restriction to technical solutions of the utility model; as long as without the technical scheme that creative work can realize on the basis of above-described embodiment, all should be considered as falling within the scope of the rights protection of the utility model patent.

Claims (6)

1. a ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device, it is characterized in that: comprise forward ultrasonic generator, reverse ultrasonic generator, three-phase abrasive Flow runner (2), flow passage cover plate (13), with base (1), three-phase abrasive Flow runner (2) is fixed on base (1), flow passage cover plate (13) is fixed on three-phase abrasive Flow runner (2), the outlet of three-phase abrasive Flow runner (2) and porch are equipped with screwed pipe (18), the groove of mounting strap polishing workpiece is provided with in three-phase abrasive Flow runner (2),
Described reverse ultrasonic generator comprises ultrasonic transducer, planar rondure piston type emitting head (12), fixed flange and the dish (17) that is tightly connected, described ultrasonic transducer connects planar rondure piston type emitting head (12), described planar rondure piston type emitting head (12) is by an inclined side of dish (17) the connecting passage cover plate (13) that is tightly connected, ultrasonic wave transmitting enters in three-phase abrasive Flow runner (2) by planar rondure piston type emitting head (12) by described ultrasonic transducer, the flow direction of the gas-liquid-solid three-phase abrasive Flow in described three-phase abrasive Flow runner (2) and above-mentioned hyperacoustic direction contrary and in 60 degree of angles, described ultrasonic transducer is fixed on base (1) by fixed flange,
Described forward ultrasonic generator structure is consistent with reverse ultrasonic generator, forward ultrasonic generator is contained on the another one inclined side of flow passage cover plate (13), forward ultrasonic generator and reverse ultrasonic generator is symmetrical and the two is 60 degree of angles.
2. a kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device according to claim 1, is characterized in that: institute's fixed flange is fixed on base (1) by fixture (3).
3. a kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device according to claim 1, is characterized in that: described in be tightly connected dish (17) and flow passage cover plate (13) be tightly connected by O RunddichtringO.
4. a kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device according to claim 1, is characterized in that: described ultrasonic transducer by planar rondure piston type emitting head (12) launch the elastic mechanical vibration wave of ultrasonic wave to be frequency be 20kHz.
5. a kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device according to claim 1, it is characterized in that: three-phase abrasive Flow be uniformly mixed to form with micro-dimension bubble by liquid-solid two phase abrasive Flow mix abrasive fluid, described micro-dimension bubble to be diameter the be cavitation bubble of 1 ~ 100 μm, described micro-dimension bubble is produced by micro-nano airlift pump and Homogeneous phase mixing enters in liquid-solid two phase abrasive Flow.
6. a kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device according to claim 1, it is characterized in that: described fixed flange comprises stamper (11) and sub-disk (4), plastic spacer (19) is installed between sub-disk (4) and ultrasonic transducer, rubber shock-absorbing packing ring (20) is installed between stamper (11) and ultrasonic transducer.
CN201520075765.1U 2015-02-03 2015-02-03 A kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device Expired - Fee Related CN204525189U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520075765.1U CN204525189U (en) 2015-02-03 2015-02-03 A kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520075765.1U CN204525189U (en) 2015-02-03 2015-02-03 A kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device

Publications (1)

Publication Number Publication Date
CN204525189U true CN204525189U (en) 2015-08-05

Family

ID=53739240

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201520075765.1U Expired - Fee Related CN204525189U (en) 2015-02-03 2015-02-03 A kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device

Country Status (1)

Country Link
CN (1) CN204525189U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104786155A (en) * 2015-02-03 2015-07-22 浙江工业大学 Ultrasonic assisted gas-liquid-solid three-phase abrasive particle flow polishing processing method and device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104786155A (en) * 2015-02-03 2015-07-22 浙江工业大学 Ultrasonic assisted gas-liquid-solid three-phase abrasive particle flow polishing processing method and device

Similar Documents

Publication Publication Date Title
CN104786155A (en) Ultrasonic assisted gas-liquid-solid three-phase abrasive particle flow polishing processing method and device
CN104786154B (en) A kind of ultrasonic cavitation bubble aids in fluid polishing processing method and device
US9725690B2 (en) Fluid dynamic sonic separator
CN105617542B (en) Method for controlling movement of micro-bubbles by using ultrasonic waves
CN204525190U (en) A kind of ultrasonic assistant three-phase abrasive Flow polishing processing device
CN112720273A (en) Ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system
CN103785311B (en) Micro-nano bubble generator
CN107983429B (en) Wideband type surface acoustic wave sorting chip based on bionic substrate
RU2015116893A (en) SEPARATION TECHNOLOGY USING ACOUSTOPHORESIS USING MULTIDIMENSIONAL STANDING WAVES
CN104786153A (en) Reverse ultrasonic assisted gas-liquid-solid three-phase abrasive particle flow polishing processing method and device
CN105364641A (en) Micro semi-ring female die array-mode lapping and polishing method and device
CN204525189U (en) A kind of ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device
CN204525191U (en) Reverse ultrasonic assistant gas-liquid-solid three-phase abrasive Flow polishing processing device
CN108838747A (en) A kind of focus ultrasonic fluid oscillation polishing system based on acoustic lens
CN104786156B (en) A kind of ultrasonic assistant three-phase abrasive Flow polishing processing device
CN104942662A (en) Ultrasonic-vibration-assisted fiber array end face polishing device
CN103753405A (en) Ultrasonic reinforced abrasive water jet machining device
CN204525192U (en) A kind of ultrasonic cavitation bubble auxiliary fluid polishing processing device
CN114952635A (en) Ultrasonic cavitation assisted submerged pulsating gas jet polishing system
CN111152139A (en) Separated phase-control cavitation enhanced abrasive particle micro-jet polishing system
CN205462171U (en) Piezoelectricity drive microfluid reaction chip based on focus surface acoustic wave
CN105521750A (en) Piezoelectric driven microfluid reaction chip based on FSAW (focusing surface acoustic wave)
Zhang et al. Research on abrasive water jet polishing of silicon carbide based on fluid self-excited oscillation pulse characteristics
Ling et al. Development of a hydraulically controlled piston-pressurized pulsed water jet device and its application potential for hard rock breaking
CN110681330A (en) Device and method for regulating and controlling morphology and pore structure of microparticles

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150805

Termination date: 20200203

CF01 Termination of patent right due to non-payment of annual fee