CN204522663U - Emission-control equipment - Google Patents
Emission-control equipment Download PDFInfo
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- CN204522663U CN204522663U CN201520086666.3U CN201520086666U CN204522663U CN 204522663 U CN204522663 U CN 204522663U CN 201520086666 U CN201520086666 U CN 201520086666U CN 204522663 U CN204522663 U CN 204522663U
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- air inlet
- inlet pipe
- adsorbent equipment
- valve
- heater
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Abstract
The utility model discloses a kind of emission-control equipment, this device comprises heater, adsorbent equipment, air inlet pipe and escape pipe; Wherein, air inlet pipe comprises the first air inlet pipe and the second air inlet pipe; Heater one end is communicated with adsorbent equipment, and the other end is communicated with the first air inlet pipe, and the import of the first air inlet pipe is provided with the first ball valve; Adsorbent equipment one end is communicated with the second air inlet pipe with heater simultaneously, and is provided with first-hand movable valve on the pipeline be communicated with the second air inlet pipe, and the other end of adsorbent equipment is communicated with escape pipe, and the outlet of escape pipe is provided with the second ball valve.The utility model is by the unlatching of the first ball valve and the closedown of first-hand movable valve, with the closedown of the first ball valve and the unlatching of first-hand movable valve, realize process and cleaning, a kind of production environment of safe, reliable, flexible, high property can be provided for operating personnel, can support personnel construction safety, the continuity of production can be ensured again.
Description
Technical field
The utility model relates to nitrogen trifluoride waste gas treatment technology, especially a kind of emission-control equipment.
Background technology
Nitrogen trifluoride (NF
3) be a kind of gas of colourless, odorless, stable in properties at normal temperatures, all can use in industries such as microelectronics, semiconductor, photoelectron, photovoltaics, be one of many gas of frequency of utilization.Nitrogen trifluoride is again a kind of toxicant simultaneously, has strong oxidizing property, kickback can occur, cause combustion explosion with reducing agent, especially in pipe conveying procedure, is breakneck when replacing steel cylinder.Its harmfulness brings huge stress to operating personnel, and thus very easily because manually-operated reason causes serious safety problem, the accident caused thus has according to statistics accounted for 18% of total accident.And also once there is NF at home
3the waste gas discharged in Renewal process fails process to the standard meeting environmental protection, and causes the case of casualties.Therefore, nitrogen trifluoride waste gas process is the needs of production safety, is also the needs of environmental protection.
To sum up, safety, reliable, production environment is always by Field Force is pursued flexibly, efficiently, and then can set out a kind of safe and reliable gas of nitrogen trifluoride supply and safe exhaust emission device is that support personnel is necessary safely.
Utility model content
The purpose of this utility model is to provide a kind of emission-control equipment, can for site operation personnel provide a kind of safety, reliable, flexibly, production environment efficiently, can the safety of support personnel's construction, the continuity of production can be ensured again.
The technical scheme that the utility model provides is as follows:
A kind of emission-control equipment, comprises heater, adsorbent equipment, air inlet pipe, escape pipe;
Described air inlet pipe comprises for carrying the first air inlet pipe of pending gas of nitrogen trifluoride and for carrying the second air inlet pipe of purge gas;
Described heater one end is communicated with described adsorbent equipment, and the other end is communicated with described first air inlet pipe, and the import of described first air inlet pipe is provided with the first ball valve;
Described adsorbent equipment one end is communicated with described second air inlet pipe with described heater simultaneously, and is provided with first-hand movable valve on the pipeline be communicated with described second air inlet pipe; The other end of described adsorbent equipment is communicated with described escape pipe, and the outlet of described escape pipe is provided with the second ball valve;
When the import of described first air inlet pipe is provided with described first ball valve unlatching, described first-hand movable valve is closed, pending gas of nitrogen trifluoride enters described heater, and after heating, flow into described adsorbent equipment, the gas through adsorption treatment exports from described escape pipe;
When the import of described first air inlet pipe is provided with described first ball valve closedown, during described first manual valve-opening, enter described adsorbent equipment for purge gas and carry out degree of depth purging, the gas purged out exports from described escape pipe.
The technical program, by being communicated with of heater and adsorbent equipment, be provided with again the first air inlet pipe and the second air inlet pipe simultaneously, pending gas of nitrogen trifluoride enters after heater heats from the first air inlet pipe, again through adsorption device adsorbs, the gaseous safety after heating and adsorption treatment is higher; And the second air inlet pipe is used for entering of purge gas, the purge gas entered like this can do the degree of depth to adsorbent equipment and purge, and the pernicious gas remained when preventing operating personnel from changing adsorbent equipment causes casualties.
Preferred further, described second air inlet pipe is communicated with described first air inlet pipe simultaneously, and described first-hand movable valve controls the connected state of described second air inlet pipe and described first air inlet pipe simultaneously.
This technology preferred version, by being communicated with of the second air inlet pipe and the first air inlet pipe, and the control of first-hand movable valve, when making pending gas of nitrogen trifluoride pass into heater, purge gas also can pass in heater simultaneously, can dilute like this to pending gas of nitrogen trifluoride.
Preferred further, the pipeline of described second air inlet pipe and described adsorbent equipment is provided with second-hand's movable valve simultaneously;
The pipeline being provided with described second-hand's movable valve is provided with the 3rd one-way cock;
When described first manual valve-opening, when described second-hand's movable valve is closed, described second air inlet pipe is communicated with described heater, and purge gas flows through described heater and described adsorbent equipment successively;
And/or;
When described first-hand movable valve and second-hand's movable valve are opened simultaneously, described second air inlet pipe is communicated with described adsorbent equipment, and purge gas flows through described second-hand's movable valve, described 3rd one-way cock and described adsorbent equipment successively.
This technology preferred version, by the unlatching of first-hand movable valve, and the closedown of the second valve, when purge gas is passed in heater, realize the first air inlet pipe to be cooled, prevent valve that pipeline is arranged overheated and cause damage, improve valve service life.And then also open by first-hand movable valve and second-hand's movable valve, realize purge gas and directly the degree of depth of adsorbent equipment is purged. simultaneously
Preferred further, the air inlet pipeline of described first air inlet pipe is provided with the first operated pneumatic valve further, and pending gas of nitrogen trifluoride flows through described first ball valve, described first operated pneumatic valve successively;
And/or;
Pipeline between described adsorbent equipment and described escape pipe is provided with the second operated pneumatic valve;
And/or;
The air inlet of described adsorbent equipment is provided with the 3rd ball valve.
This technology preferred version, by Stress control first operated pneumatic valve of gas, the opening and closing of the second operated pneumatic valve, and then realizes passing into and discharging of gas.And then the 3rd ball valve is set on the air inlet of adsorbent equipment again, whole treating apparatus can be opened and closed so effective and reasonablely, improve utilization rate, increase the service life.
Preferred further, between described first air inlet pipe and described escape pipe, connecting pipe is set, and connecting pipe described in this is arranged the 3rd operated pneumatic valve, the pending gas of nitrogen trifluoride that described 3rd operated pneumatic valve enters for controlling described first air inlet pipe, directly exports from described escape pipe.
This technology preferred version, by the 3rd operated pneumatic valve arranged on connecting pipe, when avoiding heater and adsorbent equipment to break down, whole device is stopped to continue to run, but directly discharged from escape pipe by the pending gas of nitrogen trifluoride entered when plant failure, and then prevent too much untreated gas of nitrogen trifluoride from exporting.
Preferred further, the described first-hand movable valve that the outlet of described second air inlet pipe is arranged is communicated with successively and arranges inflow-rate of water turbine detector, the first one-way cock, and purge gas flows through described flow rate detector, described first one-way cock successively; And pipeline between described first-hand movable valve and described inflow-rate of water turbine detector arranges the first pressure sensor, described first pressure sensor is for monitoring the pressure of purge gas.
Preferred further, described emission-control equipment comprises PLC control device further, and the signal of described heater, described adsorbent equipment, described first pressure sensor, described inflow-rate of water turbine detector is transmitted to described PLC control device by grid line.
Preferred further, the pipeline between described second air inlet pipe and described first air inlet pipe sets gradually the 4th operated pneumatic valve, the second one-way cock, purge gas flows through described 4th operated pneumatic valve, described second one-way cock successively; And pipeline between described second one-way cock and described heater arranges the second pressure sensor, described second pressure sensor is for detecting the pressure of pending gas of nitrogen trifluoride.
Preferred further, described emission-control equipment comprises PLC control device further, and the signal of described heater, described adsorbent equipment, described second pressure sensor is transmitted to described PLC control device by grid line.
The technical program, the flow rate detector arranged can do further monitoring to the purge gas flow entered in the second air inlet pipe, prevent the excessive pressure causing purge gas pressure to be greater than pending gas of nitrogen trifluoride of flow, and cannot normally process pending gas of nitrogen trifluoride.In particular by the first pressure sensor, the purge gas pressure entered in the second air inlet pipe is monitored, monitored by the pressure of the second pressure sensor to the pending gas of nitrogen trifluoride entered in the first air inlet pipe simultaneously, final realization is to the control of purge gas flow, prevent purge gas from entering too much build-up of pressure excessive, and affect the inflow of pending gas of nitrogen trifluoride, ensure the continuity of process.
The technical program, by the operation conditions of PLC control realization to whole device, also assigned operation personnel can do concrete operation simultaneously, safely, reliably, and simple to operation.
The utility model owing to have employed technique scheme, thus has the following advantages: the utility model is communicated with by heater and adsorbent equipment, realizes heating and adsorption treatment pending gas of nitrogen trifluoride, better processing effect simultaneously; Simultaneously being communicated with of the first air inlet pipe and the second air inlet pipe, making this device can not only realize, to while pending gas of nitrogen trifluoride process, can purging the pipeline of whole treating apparatus again, improve the security of working environment.And then pending gas of nitrogen trifluoride is when passing into heater, purge gas also passes into can in heater, pending Nitrogen trifluoride can be diluted like this, and can the valve in the first air inlet pipe be cooled, prevent from causing valve that pipeline is arranged overheated due to preheating and causing damage; The utility model further, by the control of second-hand's movable valve, makes the second air inlet pipe directly be communicated with adsorbent equipment, realizes purging the degree of depth of adsorbent equipment, effectively for operating personnel provide a safe and reliable production environment.In addition, the utility model structure is simple, and is controlled by PLC control device, easy to operate.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail:
Fig. 1 is the structural representation of a kind of embodiment of the utility model emission-control equipment;
Drawing reference numeral illustrates:
First air inlet pipe H; Second air inlet pipe B; Escape pipe A;
Heater 100; Adsorbent equipment 200; Connecting pipe 300;
First ball valve 11; Second ball valve 12; 3rd ball valve 13;
First-hand movable valve 21; Second-hand's movable valve 22;
First operated pneumatic valve 31; Second operated pneumatic valve 32; 3rd operated pneumatic valve 33; 4th operated pneumatic valve 34;
First one-way cock 41; Second one-way cock 42; 3rd one-way cock 43;
First pressure sensor 51; Second pressure sensor 52;
Flow rate detector 61.
Detailed description of the invention
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
For making simplified form, only schematically show the part relevant to this practicality information in each figure, they do not represent its practical structures as product.In addition, for convenience of understanding, " air inlet ", " giving vent to anger " pointed out in this article, represent with arrow all in FIG.
In an embodiment of the present utility model, referring to Fig. 1, a kind of emission-control equipment, this device comprises heater 100, adsorbent equipment 200, air inlet pipe, escape pipe A; Wherein, air inlet pipe comprises for carrying the first air inlet pipe H of pending gas of nitrogen trifluoride and for carrying the second air inlet pipe B of purge gas; And heater 100 one end is communicated with adsorbent equipment 200, the other end is communicated with the first air inlet pipe H, and the import of the first air inlet pipe H is provided with the first ball valve 11; Simultaneously, adsorbent equipment 200 one end is communicated with the second air inlet pipe B with heater 100 simultaneously, and first-hand movable valve 21 is provided with on the pipeline be communicated with the second air inlet pipe B, and the other end of adsorbent equipment 200 is communicated with escape pipe A, and be provided with the second ball valve 12 in the outlet of escape pipe A.It should be noted that, first air inlet pipe H is that gas of nitrogen trifluoride also can for being mixed with the gas of Nitrogen trifluoride for passing into pending gas of nitrogen trifluoride, and the second air inlet pipe B is nitrogen for the purge gas passed into, and then by-pass valve control unlatching and relation can be come by the pressure of gas, and then realize passing into and discharging of gas, improve the service efficiency of whole treating apparatus.
When the first ball valve 11 is opened, and first-hand movable valve is closed, gas of nitrogen trifluoride pending like this enters heater 100 from the first air inlet pipe H, gas of nitrogen trifluoride flows in adsorbent equipment 200 after heater 100 heats, and the gas simultaneously after heating and adsorption treatment is discharged from escape pipe A.
When the first ball valve 11 is closed, and the first-hand movable valve 21 that the pipeline that adsorbent equipment 200 is communicated with the second air inlet pipe B is provided with is opened, and the nitrogen entered from the second air inlet pipe B like this can carry out degree of depth purging to adsorbent equipment 200.Can effectively for operating personnel provide a safe and reliable working environment, prevent operating personnel when changing adsorbent equipment 200, gas of nitrogen trifluoride residual in pipeline causes casualties.It should be noted that the heater 100 in this patent need carry out in the event of high temperatures, thus heater 100 preferably high temperature resistant, heatable heating tank; And adsorbent equipment 200, the adsorption tanks 200 of adsorbent are equipped with in preferred inside, heating tank and adsorption tanks all adopt 3mm cold-rolled steel sheet coated with the anticorrosive casing made of polyester powder to deposit special gas steel cylinder, so not only conveniently to purge and cleaned and changed, and improve the service life of whole device.
In an embodiment of the present utility model, while the second air inlet pipe B is communicated with adsorbent equipment 200, be also communicated with the first air inlet pipe H, and control the first air inlet pipe H and the second air inlet pipe B connected state by the first-hand movable valve 21 arranged.When gas of nitrogen trifluoride can be made like this to pass into heater 200, nitrogen also can pass in heater 200 simultaneously, realizes diluting gas of nitrogen trifluoride.And second-hand's movable valve 22 is provided with further on the pipeline of the second air inlet pipe B and adsorbent equipment 200, realize being communicated with of the second air inlet pipe B and adsorbent equipment 200 by second-hand's movable valve 22.But when first-hand movable valve 21 is opened, when second-hand's movable valve 22 is closed, second air inlet pipe B is communicated with heater 100, nitrogen flows through heater 100 and adsorbent equipment 200 successively, and the second air inlet pipe B and adsorbent equipment 200 are disconnected, therefore, nitrogen cannot be directly inputted to adsorbent equipment after the second air inlet pipe B passes into.When such nitrogen is only passed in heater 200, the cooling to the first air inlet pipe H can be realized further, effectively prevent valve that pipeline is arranged overheated and cause damage, improve the service life of valve.
Owing to being provided with the 3rd one-way cock 43 on the pipeline of second-hand's movable valve 22, nitrogen flows through second-hand's movable valve 22, the 3rd one-way cock 43 successively.And second-hand's movable valve 22 is mainly when changing adsorbent equipment 200, and when stopping gas of nitrogen trifluoride entering, can by the unlatching of second-hand's movable valve 22, realize nitrogen that the second air inlet pipe B enters and degree of depth purging is carried out to adsorbent equipment 200, even if the 3rd one-way cock 43 is also connected with heater 100 simultaneously, but owing to only having passing into of nitrogen, after nitrogen also passes into heater 100 simultaneously, flow in adsorbent equipment 200 again, can purge whole treating apparatus like this, and further degree of depth purging has been done to adsorbent equipment 200, and then for worker provide one safer, reliable working environment.
In an embodiment of the present utility model, because the first air inlet pipe H is mainly used in entering of gas of nitrogen trifluoride, and the gas entered need carry out adding thermal response through heater 100, thus the first air inlet pipe H air inlet pipeline on be provided with the first operated pneumatic valve 31 further, the pipeline simultaneously between adsorbent equipment 200 and escape pipe B is provided with the second pneumatic operated valve 32.Effectively control entering of gas by the first operated pneumatic valve 31 like this, make when gas flow deficiency, whole device can be out of service, and only have when gas flow reach enough can open the first pneumatic operated valve 31 pressure time, whole device just can continue to run.And then the gas of nitrogen trifluoride passed into reaches enough amounts after heating and absorption, just can open the second operated pneumatic valve 32 can discharge safety, harmless gas after process from gas outlet B; Otherwise gas can not be discharged from gas outlet B, uses whole device so effective and reasonablely, improve service efficiency, and increase the service life.It should be noted that in this patent by pressure setting at 0.4 ~ 0.63Mpa, just realizing opening when reaching predetermined force value first operated pneumatic valve 32.
In an embodiment of the present utility model, carry out adsorption treatment because the gas after heater 100 heats need pass in adsorbent equipment 200 further.So pipeline preferably between heater 100 and adsorbent equipment 200 is provided with the 3rd ball valve 13, and the 3rd ball valve 13 is arranged on the air inlet of adsorbent equipment 200, effectively the gas flow adsorbent equipment 200 can not only be flowed into from heater 100 by regulation and control like this by the 3rd ball valve 13, also the adjustable nitrogen flow with controlling to pass into from the second air inlet pipe B, more optimizedly improve the service efficiency of adsorbent equipment 200, extend the service life of adsorbent.
In an embodiment of the present utility model, particularly, connecting pipe 300 is set between the first air inlet pipe H and escape pipe A, and the 3rd operated pneumatic valve 33 is set on this connecting pipe 300,3rd operated pneumatic valve 33 is mainly used in the gas of nitrogen trifluoride controlling to enter from the first air inlet pipe H, can directly export from escape pipe B.It should be noted that, the setting of the 3rd operated pneumatic valve 33, when mainly avoiding heater 100 and adsorbent equipment 200 to break down, can when whole device out of service, the gas of nitrogen trifluoride passed into directly is discharged from escape pipe B simultaneously, effectively prevent too much gas of nitrogen trifluoride after the heater 100 that breaks down and adsorbent equipment 200, when not obtaining process in time, directly export from escape pipe B, and then cause the severe contamination of environment.
In an embodiment of the present utility model, again referring to Fig. 1, be communicated with successively at the first-hand movable valve 21 of the gas outlet of the second air inlet pipe B setting and inflow-rate of water turbine detector 61, first one-way cock 41 is set, and between first-hand movable valve 21 and flow rate detector 61, arrange one for monitoring the first pressure sensor 51 of nitrogen pressure.And pipeline between the second air inlet pipe B and the first air inlet pipe H sets gradually the 4th operated pneumatic valve 34, second one-way cock 42, and for monitoring the second pressure sensor 52 of gas of nitrogen trifluoride pressure.It should be noted that, the flow rate detector 61 arranged can do further monitoring to the nitrogen flow entered in the second air inlet pipe B, the excessive nitrogen pressure entered that causes of flow is prevented to be greater than gas of nitrogen trifluoride pressure, thus gas of nitrogen trifluoride but cannot normally flow into, and then ensure the continuity to gas of nitrogen trifluoride process.
In an embodiment of the present utility model, due to the signal of heater 100, adsorbent equipment 200, first pressure sensor 51, second pressure sensor 52 and inflow-rate of water turbine detector 61 by grid line to PLC transmission of digital amount signal, and control whole device by PLC.So arrange separately a PLC control device, by the operation conditions of PLC control realization to whole treating apparatus, and to the monitoring of heater 100 temperature, monitor the gas pressure of air inlet pipe H, B simultaneously, improve the service efficiency of whole treating apparatus, treatment effect is better.More optimizedly, also assigned operation personnel concrete operation can be done, safely, reliably, and simple to operation, avoid causing unnecessary casualties.
Referring to Fig. 1, adopt emission-control equipment in an embodiment of the present utility model to carry out the method for nitrogen trifluoride waste gas process, comprise as follows:
When pending gas of nitrogen trifluoride passes into, when heating means preheats is to 400 ~ 500 degree, monitored by PLC device, after reaching predetermined temperature, the first operated pneumatic valve 31 is opened, the gas of Nitrogen trifluoride is passed in heater 100, carry out pyrolytic process, the gas after process is input to adsorbent equipment 200 from heater 100, carries out adsorption treatment further, gas through adsorption treatment exports from escape pipe A, completes the decomposition to gas of nitrogen trifluoride and adsorption treatment;
When emission-control equipment purges, stop passing into pending gas of nitrogen trifluoride in heater 100, simultaneously, first-hand movable valve 21 is opened, nitrogen is passed in adsorbent equipment 200, carry out purging adsorbent equipment 200, the gas purged out exports from escape pipe, realizes the purging to adsorbent equipment 200.
And when pending gas of nitrogen trifluoride passes into, first-hand movable valve 21 is opened, first air inlet pipe is communicated with the second air inlet pipe, and after pending gas of nitrogen trifluoride is diluted, nitrogen passes into heater simultaneously, mixes with pending gas of nitrogen trifluoride, then flows into adsorbent equipment from heater, carry out adsorption reaction, the most reacted gas exports from escape pipe A.And then can while adsorbent equipment 200 is purged, nitrogen is passed in heater 100, after heater 100 exports, again enter adsorbent equipment 200, purge successively heater 100 and adsorbent equipment 200 like this, the gas purged out exports from escape pipe A.
As a concrete processing method, in the utility model, further detection can be done to the operation conditions of device by PLC control device, particularly when the gas of pending Nitrogen trifluoride passes into, pending gas of nitrogen trifluoride is passed in heater 100, when PLC control device detects heater 100 and/or adsorbent equipment 200 fault, the first air inlet pipe H is communicated with escape pipe A, and pending gas of nitrogen trifluoride directly exports from escape pipe A; Meanwhile, nitrogen is passed in heater 100, and carry out degree of depth purging to heater 100 and adsorbent equipment 200, the gas purged out exports from escape pipe A, then checks the heater 100 after purging and adsorbent equipment 200.Also can directly be passed in adsorbent equipment 200; degree of depth purging is carried out to adsorbent equipment 200; the gas purged out exports from escape pipe A; and then can the heater 100 after purging and adsorbent equipment 200 be checked and be changed; only need realize the purging to gas of nitrogen trifluoride remaining in device pipeline, all belong to the scope of this patent protection.
It should be noted that above-mentioned treatment step can need to do rational adjustment according to practical operation.
The above is only preferred embodiment of the present utility model; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the utility model principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (10)
1. an emission-control equipment, is characterized in that:
Comprise heater, adsorbent equipment, air inlet pipe, escape pipe;
Described air inlet pipe comprises for carrying the first air inlet pipe of pending gas of nitrogen trifluoride and for carrying the second air inlet pipe of purge gas;
Described heater one end is communicated with described adsorbent equipment, and the other end is communicated with described first air inlet pipe, and the import of described first air inlet pipe is provided with the first ball valve;
Described adsorbent equipment one end is communicated with described second air inlet pipe with described heater simultaneously, and is provided with first-hand movable valve on the pipeline be communicated with described second air inlet pipe; The other end of described adsorbent equipment is communicated with described escape pipe, and the outlet of described escape pipe is provided with the second ball valve;
When the import of described first air inlet pipe is provided with described first ball valve unlatching, described first-hand movable valve is closed, pending gas of nitrogen trifluoride enters described heater, and after heating, flow into described adsorbent equipment, the gas through adsorption treatment exports from described escape pipe;
When the import of described first air inlet pipe be provided with described first ball valve close time, during described first manual valve-opening of described second air inlet pipe, enter described adsorbent equipment for purge gas and carry out degree of depth purging, the gas purged out exports from described escape pipe.
2. emission-control equipment according to claim 1, is characterized in that:
Described second air inlet pipe is communicated with described first air inlet pipe simultaneously, and described first-hand movable valve controls the connected state of described second air inlet pipe and described first air inlet pipe simultaneously.
3. emission-control equipment according to claim 2, is characterized in that:
The pipeline of described second air inlet pipe and described adsorbent equipment is provided with second-hand's movable valve simultaneously; When described first manual valve-opening, when described second-hand's movable valve is closed, described second air inlet pipe is communicated with described heater, and purge gas flows through described heater and described adsorbent equipment successively.
4. emission-control equipment according to claim 3, is characterized in that:
The pipeline being provided with described second-hand's movable valve is provided with the 3rd one-way cock; When described first-hand movable valve and second-hand's movable valve are opened simultaneously, described second air inlet pipe is communicated with described adsorbent equipment, and purge gas flows through described second-hand's movable valve, described 3rd one-way cock and described adsorbent equipment successively.
5. emission-control equipment according to claim 1, is characterized in that:
The admission line of described first air inlet pipe is provided with the first operated pneumatic valve further, and pending gas of nitrogen trifluoride flows through described first ball valve, described first operated pneumatic valve successively;
And/or;
Pipeline between described adsorbent equipment and described escape pipe is provided with the second operated pneumatic valve;
And/or;
The air inlet of described adsorbent equipment is provided with the 3rd ball valve.
6. emission-control equipment according to claim 1, is characterized in that:
Between described first air inlet pipe and described escape pipe, connecting pipe is set, and connecting pipe described in this is arranged the 3rd operated pneumatic valve, the pending gas of nitrogen trifluoride that described 3rd operated pneumatic valve enters for controlling described first air inlet pipe, directly exports from described escape pipe.
7. emission-control equipment according to claim 1, is characterized in that:
The described first-hand movable valve that the outlet of described second air inlet pipe is arranged is communicated with successively and arranges inflow-rate of water turbine detector, the first one-way cock, and purge gas flows through described first-hand movable valve, described flow rate detector, described first one-way cock successively; And pipeline between described first-hand movable valve and described inflow-rate of water turbine detector arranges the first pressure sensor, described first pressure sensor is for monitoring the pressure of purge gas.
8. emission-control equipment according to claim 7, is characterized in that:
Comprise PLC control device further, the signal of described heater, described adsorbent equipment, described first pressure sensor, described inflow-rate of water turbine detector is transmitted to described PLC control device by grid line.
9. emission-control equipment according to claim 1, is characterized in that:
Pipeline between described second air inlet pipe and described first air inlet pipe sets gradually the 4th operated pneumatic valve, the second one-way cock, purge gas flows through described 4th operated pneumatic valve, described second one-way cock successively; And pipeline between described second one-way cock and described heater arranges the second pressure sensor, described second pressure sensor is for detecting the pressure of pending gas of nitrogen trifluoride.
10. emission-control equipment according to claim 9, is characterized in that:
Comprise PLC control device further, the signal of described heater, described adsorbent equipment, described second pressure sensor is transmitted to described PLC control device by grid line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520086666.3U CN204522663U (en) | 2015-02-06 | 2015-02-06 | Emission-control equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520086666.3U CN204522663U (en) | 2015-02-06 | 2015-02-06 | Emission-control equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204522663U true CN204522663U (en) | 2015-08-05 |
Family
ID=53736718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520086666.3U Withdrawn - After Issue CN204522663U (en) | 2015-02-06 | 2015-02-06 | Emission-control equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204522663U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104667713A (en) * | 2015-02-06 | 2015-06-03 | 上海创洁科技有限公司 | Nitrogen trifluoride waste gas treatment system and method |
| CN109458556A (en) * | 2018-12-26 | 2019-03-12 | 南京信创电子设备有限公司 | A kind of intelligent portable special gas safe transport cabinet |
-
2015
- 2015-02-06 CN CN201520086666.3U patent/CN204522663U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104667713A (en) * | 2015-02-06 | 2015-06-03 | 上海创洁科技有限公司 | Nitrogen trifluoride waste gas treatment system and method |
| CN109458556A (en) * | 2018-12-26 | 2019-03-12 | 南京信创电子设备有限公司 | A kind of intelligent portable special gas safe transport cabinet |
| CN109458556B (en) * | 2018-12-26 | 2024-03-26 | 南京信创电子设备有限公司 | Intelligent portable special gas safety conveying cabinet |
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