CN204514794U - Reflective laser on-line gas analysis instrument light path device - Google Patents
Reflective laser on-line gas analysis instrument light path device Download PDFInfo
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- CN204514794U CN204514794U CN201520236633.2U CN201520236633U CN204514794U CN 204514794 U CN204514794 U CN 204514794U CN 201520236633 U CN201520236633 U CN 201520236633U CN 204514794 U CN204514794 U CN 204514794U
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Abstract
The utility model proposes a kind of reflective laser on-line gas analysis instrument light path device, comprising: the Laser emission receiving element connected successively, remove background cell, on-line monitoring unit and laser reflection unit; Laser emission receiving element comprises, tunable laser, wedge-shaped mirrors one, reference cell, detector one, detector two and detector three, the direction that the primary optical axis direction of reference cell and detector one and tunable laser send laser is symmetrical about the normal of the first surface of wedge-shaped mirrors one; Background cell is gone to comprise wedge-shaped mirrors two; Laser reflection unit comprises wedge-shaped mirrors three and corner reflector.The utility model is double by the light path of tested gas, substantially increases sensitivity and the detection limit of analyser; Installation and Debugging are simple and convenient; Can real-time online measuring; Optical component is few, and structure is simple, and layman can also complete light path debugging and install.
Description
Technical field
The utility model relates to optics and enviromental protection instrument technical field, particularly relates to a kind of reflective laser on-line gas analysis instrument light path device.
Background technology
Laser on-line gas analysis instrument adopts tunable diode laser absorption spectroscopy technology (TunableDiode Laser Absorption Spectroscopy, be called for short TDLAS), obtained the concentration of gas by the selective absorbing of gas by analysis laser.
Modulated spectrum detection technique is a kind of by the Diode Laser Absorption Spectroscopy that can obtain compared with high detection sensitivity of most widespread use, it makes the frequency range of its inswept tested gas absorption spectrum line by fast modulation laser frequency, then adopts the techniques of phase-sensitive detecting technique measurement harmonic component be actually taken up by gas in rear transmission spectral line to carry out the absorbing state of analytical gas.The frequency of optical conductor laser generally has two kinds of methods next tuning: one is the working temperature by changing semiconductor laser; Another kind is the working current by changing laser instrument.Because the second can obtain light frequency tuned speed faster, therefore Diode Laser Absorption Spectroscopy generally adopts and makes laser frequency scanned whole piece absorption line to obtain complete absorption spectra data to the sine-wave current of semiconductor laser injection certain frequency.
TDLAS technology is a kind of high-resolution spectral absorption technology, and semiconductor laser can be expressed with Lambert-Beer (Lambert-Beer) law through the light intensity attenuation of tested gas:
I
v＝I
v,0T(v)＝I
v,0exp[-S(T)g(v-v
0)PXL]
In formula, I
v, 0and I
vwhen representing that frequency is the laser incidence of v respectively and through pressure P, the light intensity after concentration X and light path L; S (T) represents the intensity of gas absorption spectrum line; Linear function g (v-v
0) characterize the shape of this absorption line.
Use the sine wave of upper frequency to carry out the light frequency of the working current modulated laser of modulated laser, make Harmonic Decomposition to the gas permeation rate after modulation, each harmonic component all reflects the transmitance information of gas absorption spectrum line.The instrument of based semiconductor laser absorption spectroscopy generally detects gas concentration by measuring second harmonic signal: as shown in the formula
Therefore, only second harmonic signal S need be obtained
2fwith laser intensity DC component I
0just can analyze the concentration X obtaining tested gas, wherein Proportional coefficient K is by demarcating acquisition.
Laser on-line gas analysis instrument is used for carrying out continuous industry process and gas discharge measuring, for severe industrial environment, burner as various in iron and steel, Aluminum and non-ferrous metal, chemical industry, petrochemical industry, cement, generating, cigarette draw grass processing, wastewater treatment and waste incineration, existing laser on-line gas analysis instrument poor sensitivity, detect limit for height; The reception of detector signal can be affected when scene vibration is larger, cannot Received signal strength when vibrating excessive, need technician again to debug, waste time and energy; Serious by background interference under high dust, high particle operating mode, cannot normally work; Optical component is many, and Installation and Debugging are complicated, need professional to carry out light path debugging.
Utility model content
The utility model is intended to solve one of technical matters in correlation technique at least to a certain extent.
For this reason, an object of the present utility model is to propose a kind of concentration that can be used to the gases such as on-line measurement NH3, O2, H2O, CO, CO2, NO, HCl, HF, CH4; Do not disturb by background gas, effectively can eliminate the reflective laser on-line gas analysis instrument light path device of on-the-spot vibration on the impact of light path.
According to the reflective laser on-line gas analysis instrument light path device of the utility model embodiment, comprise connect successively Laser emission receiving element, remove background cell, on-line monitoring unit and laser reflection unit;
Described Laser emission receiving element comprises, tunable laser, wedge-shaped mirrors one, reference cell, detector one, detector two and detector three, the direction that the primary optical axis direction of described reference cell and described detector one and described tunable laser send laser is symmetrical about the normal of the first surface of described wedge-shaped mirrors one, described laser reflects to form first via reflected light through the first surface of described wedge-shaped mirrors one, described first via reflected light enters described detector one through described reference cell, the laser of described laser after the first surface refraction of described wedge-shaped mirrors reflects to form the second road reflected light through the second surface of described wedge-shaped mirrors, described second road reflected light enters described detector two by the first surface refraction of described wedge-shaped mirrors, adopting the object of wedge-shaped mirrors one to mainly contain two: one in Laser emission receiving element is to make the laser separation of laser after the first surface and second surface reflection of wedge-shaped mirrors one in the both sides of incident laser beam, be convenient to first via reflected light and enter through reference cell the installation that this path optics element of detector one and the second road reflected light enter this light path element of detector two, two is to avoid the beam path of laser multiple reflections between two planes of wedge-shaped mirrors one to overlap, and etalon (multiple-beam interference) phenomenon occurs,
Described background cell of going comprises wedge-shaped mirrors two, background cell is gone to pass described wedge-shaped mirrors two described in laser after the second surface refraction of described wedge-shaped mirrors one passes through, wedge-shaped mirrors two is except preventing the etalon phenomenon of self, itself and wedge-shaped mirrors one have certain angle, and this is in order to avoid the etalon phenomenon between two wedge-shaped mirrors occurs;
Through the laser of described wedge-shaped mirrors two through described on-line monitoring unit, tested gas is by on-line monitoring unit, on-line monitoring unit ensure tested gas normal through after, also and background cell to be gone firmly to be fixed together, to ensure that laser can enter detector three smoothly by laser reflection unit;
Described laser reflection unit comprises wedge-shaped mirrors three and corner reflector, laser through described on-line monitoring unit incides described corner reflector through after described wedge-shaped mirrors three, entered described detector three through described wedge-shaped mirrors three, described wedge-shaped mirrors two and described wedge-shaped mirrors one successively by the laser that described corner reflector reflects, wedge-shaped mirrors three mainly plays three effects: one is the etalon phenomenon preventing self; Two is the etalon phenomenons prevented between itself and wedge-shaped mirrors two; Three is be sealed in laser reflection unit by corner reflector, prevents dust, particle pollutes corner reflector, affect reverse laser optical path.
Compared with prior art, existing laser on-line gas analysis instrument, sensitivity is low, detect limit for height; Be subject to background gas interference; Can not monitor by accurate analysis under vibration; Reflective laser on-line gas analysis instrument light path device of the present utility model, not by the cross jamming of background gas; Double by the light path of tested gas, substantially increase sensitivity and the detection limit of analyser; Installation and Debugging are simple and convenient; Can real-time online measuring, without the need to pre-service of sampling; Optical component is few, and structure is simple, and layman can also complete light path debugging and install; Unique light path design, effectively can eliminate monitoring field and vibrate the impact caused light path.
In addition, following additional technical characteristic can also be had according to the reflective laser on-line gas analysis instrument light path device of the utility model above-described embodiment:
According to an example of the present utility model, described wedge-shaped mirrors one is mounted obliquely within described Laser emission receiving element, and the inclination angle of wedge-shaped mirrors one and vertical plane is generally below 3 °.
According to an example of the present utility model, described first via reflected light enters described detector one, for determining gas concentration absorption coefficient K through described reference cell.
According to an example of the present utility model, described second road reflected light enters the intensity of detector two for Real-Time Monitoring semiconductor laser.
According to an example of the present utility model, described corner reflector adopts glass material to make.
According to an example of the present utility model, described corner reflector is be bonded by the level crossing of metal-coated membrane.
According to an example of the present utility model, described tunable laser is provided with collimation lens.
According to an example of the present utility model, described background cell two ends of going seal with described wedge-shaped mirrors two by described wedge-shaped mirrors one, go to background cell inside to form seal chamber described in making.Go background cell to be filled with background gas (as: N2) during apparatus measures, prevent a small amount of tested gas contained in background gas from forming interference to measurement result.
According to an example of the present utility model, described wedge-shaped mirrors three to be positioned on the left of described laser reflection unit and to seal described laser reflection unit.
According to an example of the present utility model, described corner reflector is positioned at the seal chamber of described laser reflection unit.
Additional aspect of the present utility model and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present utility model.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the reflective laser on-line gas analysis instrument light path device according to the utility model embodiment.
Wherein, 10 is Laser emission receiving element, and 20 for going background cell, 30 is on-line monitoring unit, and 40 is laser reflection unit, and 101 is semiconductor laser, 102 is wedge-shaped mirrors one, 103 is reference cell, and 104 is detector one, and 105 is detector two, 106 is detector three, 201 is wedge-shaped mirrors two, and 401 is wedge-shaped mirrors three, and 402 is corner reflector.
Embodiment
Be described below in detail embodiment of the present utility model, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Be exemplary below by the embodiment be described with reference to the drawings, be intended to for explaining the utility model, and can not be interpreted as restriction of the present utility model.
Below with reference to the accompanying drawings the reflective laser on-line gas analysis instrument light path device according to the utility model embodiment is described in detail.
As shown in Figure 1, according to the reflective laser on-line gas analysis instrument light path device 10 of the utility model embodiment, comprising: comprise connect successively Laser emission receiving element 10, remove background cell 20, on-line monitoring unit 30 and laser reflection unit 40, Laser emission receiving element 10 comprises, tunable laser 101, wedge-shaped mirrors 1, reference cell 103, detector 1, detector 2 105 and detector 3 106, the direction that the primary optical axis direction of reference cell 103 and detector 1 and tunable laser 101 send laser is symmetrical about the normal of the first surface of wedge-shaped mirrors 1, laser reflects to form first via reflected light through the first surface of wedge-shaped mirrors 1, first via reflected light enters detector 1 through reference cell 103, the laser of laser after the first surface refraction of wedge-shaped mirrors one forms the second road reflected light through second surface reflection of wedge-shaped mirrors one, second road reflected light enters detector 2 105 by the first surface refraction of wedge-shaped mirrors one, go background cell 20 to comprise wedge-shaped mirrors 2 201, the laser after the second surface refraction of wedge-shaped mirrors 1 passes wedge-shaped mirrors 2 201 through past background cell 20, through the laser of wedge-shaped mirrors 2 201 through on-line monitoring unit 30, laser reflection unit 40 comprises wedge-shaped mirrors 3 401 and corner reflector 402, laser through on-line monitoring unit 30 incides corner reflector 402 through after wedge-shaped mirrors 3 401, entered detector 3 106 through wedge-shaped mirrors 3 401, wedge-shaped mirrors 2 201 and wedge-shaped mirrors 1 successively by the laser that corner reflector 402 reflects, obtain the absorption line of tested gas.
Wherein, wedge-shaped mirrors 1 is obliquely installed in Laser emission receiving element 10, the inclination angle of itself and vertical plane is below 3 °, wedge-shaped mirrors one, wedge-shaped mirrors two and wedge-shaped mirrors three non-parallel are arranged, their positions are spatially arranged all has certain angle, each other to avoid etalon phenomenon on the impact of monitoring result; Laser emission receiving element 10 is for the monitoring of the second harmonic signal of Laser emission, the determination of gas concentration assimilation ratio COEFFICIENT K, the real-time monitoring of laser intensity and tested gas; Being passed into background gas (as: N2) after going background cell 20 to be sealed by wedge-shaped mirrors 1 and wedge-shaped mirrors 2 201 to prevent in background gas tested gas to the interference of monitoring result; On-line monitoring unit 30 ensures that tested gas is normal through outward, also and background cell 20 will be gone to link together by laser reflection unit 40; Laser after laser reflection unit 40 guarantees incidence can return along former road smoothly, not by the impact of ambient vibration.
The utility model is generally placed in flue, its Laser emission receiving element 10, go background cell 20 and laser reflection unit be sealing, be not connected with overall situation, tested gas arrives flue top from stack base by on-line monitoring unit 30.
According to embodiments more of the present utility model, first via reflected light enters detector 1, for determining gas concentration absorption coefficient K through reference cell 103; Second road reflected light enters the intensity of detector 2 105 for Real-Time Monitoring semiconductor laser.
According to embodiments more of the present utility model, corner reflector 402 adopts glass material to make or is bonded by the level crossing of three pieces of metal-coated membranes.
According to embodiments more of the present utility model, tunable laser 101 is provided with collimation lens (not shown), tunable laser 101 is generally all fiber optic conduction laser, the laser alignment that tunable laser can send by collimation lens is installed, the first surface inciding wedge-shaped mirrors 1 of the laser level after collimation.
According to embodiments more of the present utility model, wedge-shaped mirrors 1 and wedge-shaped mirrors 2 201 will go to background cell 20 two ends to seal, and make background cell inside form seal chamber.Go background cell 20 to be filled with background gas (as: N2) during apparatus measures, prevent a small amount of tested gas contained in background gas from forming interference to measurement result.
According to embodiments more of the present utility model, wedge-shaped mirrors 3 401 to be positioned on the left of laser reflection unit 40 and sealed laser reflector element 40.
According to embodiments more of the present utility model, corner reflector 402 is positioned at the seal chamber of laser reflection unit 40, prevents dust, particle pollutes corner reflector, affect reverse laser optical path; The simultaneously application of corner reflector makes vibration greatly weaken the impact of light path, solve in prior art due to vibrate excessive cannot Received signal strength, need the technical matters of again debugging.
Laser reflected light when wedge-shaped mirrors first surface of tunable laser outgoing of the present utility model is used for determining gas concentration assimilation ratio COEFFICIENT K; The reflected light of refract light when the second performance is used for the intensity of Real-Time Monitoring tunable laser; Refract light through second surface is imitated by removing background cell, on-line monitoring unit and laser reflection unit, and Zai Yanyuan road returns and finally enters the absorption line that detector obtains tested gas.This reflective laser on-line gas analysis instrument is double by the light path of tested gas by laser, at double enhance the absorption of tested gas to laser, and then add the intensity of second harmonic signal, substantially increase sensitivity and the detection limit of analyser; Laser emission and receiving element unite two into one, and Installation and Debugging are simple and convenient; This analyser is directly installed on monitoring field, can real-time online measuring, without the need to pre-service of sampling; Optical component is few, structure is simple, and layman also can complete light path debugging and install; Unique light path design, effectively can eliminate monitoring field and vibrate the impact caused light path; Not by the cross jamming of background gas, not by the impact that dust and form pollute, still can monitor by accurate analysis under the operating mode of high dust, high particle, also automatically can carry out temperature, pressure correction, ensure the accuracy measured.
In description of the present utility model, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", " counterclockwise ", " axis ", " radial direction ", orientation or the position relationship of the instruction such as " circumference " are based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction of the present utility model.
In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance or imply the quantity indicating indicated technical characteristic.Thus, be limited with " first ", the feature of " second " can express or impliedly comprise one or more these features.In description of the present utility model, the implication of " multiple " is two or more, unless otherwise expressly limited specifically.
In the utility model, unless otherwise clearly defined and limited, the term such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or integral; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals or the interaction relationship of two elements.For the ordinary skill in the art, the concrete meaning of above-mentioned term in the utility model can be understood as the case may be.
In the utility model, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score can be that the first and second features directly contact, or the first and second features are by intermediary indirect contact.And, fisrt feature second feature " on ", " top " and " above " but fisrt feature directly over second feature or oblique upper, or only represent that fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " below " and " below " can be fisrt feature immediately below second feature or tiltedly below, or only represent that fisrt feature level height is less than second feature.
In the description of this instructions, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " example ", " concrete example " or " some examples " etc. means to describe in conjunction with this embodiment or example are contained at least one embodiment of the present utility model or example.In this manual, to the schematic representation of above-mentioned term not must for be identical embodiment or example.And the specific features of description, structure, material or feature can combine in one or more embodiment in office or example in an appropriate manner.In addition, when not conflicting, the feature of the different embodiment described in this instructions or example and different embodiment or example can carry out combining and combining by those skilled in the art.
Although illustrate and described embodiment of the present utility model above, be understandable that, above-described embodiment is exemplary, can not be interpreted as restriction of the present utility model, those of ordinary skill in the art can change above-described embodiment, revises, replace and modification in scope of the present utility model.
Claims (10)
1. a reflective laser on-line gas analysis instrument light path device, is characterized in that, comprise connect successively Laser emission receiving element, remove background cell, on-line monitoring unit and laser reflection unit;
Described Laser emission receiving element comprises, tunable laser, wedge-shaped mirrors one, reference cell, detector one, detector two and detector three, the direction that the primary optical axis direction of described reference cell and described detector one and described tunable laser send laser is symmetrical about the normal of the first surface of described wedge-shaped mirrors one, described laser reflects to form first via reflected light through the first surface of described wedge-shaped mirrors one, described first via reflected light enters described detector one through described reference cell, the laser of described laser after the first surface refraction of described wedge-shaped mirrors reflects to form the second road reflected light through the second surface of described wedge-shaped mirrors, described second road reflected light enters described detector two by the first surface refraction of described wedge-shaped mirrors,
Described background cell of going comprises wedge-shaped mirrors two, goes background cell to pass described wedge-shaped mirrors two described in the laser after the second surface refraction of described wedge-shaped mirrors one passes through;
Through the laser of described wedge-shaped mirrors two through described on-line monitoring unit;
Described laser reflection unit comprises wedge-shaped mirrors three and corner reflector, laser through described on-line monitoring unit incides described corner reflector through after described wedge-shaped mirrors three, is entered described detector three successively by the laser that described corner reflector reflects through described wedge-shaped mirrors three, described wedge-shaped mirrors two and described wedge-shaped mirrors one.
2. reflective laser on-line gas analysis instrument light path device according to claim 1, it is characterized in that, described wedge-shaped mirrors one is mounted obliquely within described Laser emission receiving element.
3. reflective laser on-line gas analysis instrument light path device according to claim 1, is characterized in that, described first via reflected light enters described detector one, for determining gas concentration absorption coefficient K through described reference cell.
4. reflective laser on-line gas analysis instrument light path device according to claim 1, it is characterized in that, described second road reflected light enters the intensity of detector two for Real-Time Monitoring semiconductor laser.
5. reflective laser on-line gas analysis instrument light path device according to claim 1, is characterized in that, described corner reflector adopts glass material to make.
6. reflective laser on-line gas analysis instrument light path device according to claim 1, it is characterized in that, described corner reflector is be bonded by the level crossing of metal-coated membrane.
7. reflective laser on-line gas analysis instrument light path device according to claim 1, is characterized in that, described tunable laser is provided with collimation lens.
8. reflective laser on-line gas analysis instrument light path device according to claim 1, is characterized in that, described background cell two ends of going seal with described wedge-shaped mirrors two by described wedge-shaped mirrors one, goes to background cell inside to form seal chamber described in making.
9. reflective laser on-line gas analysis instrument light path device according to claim 1, is characterized in that, described wedge-shaped mirrors three to be positioned on the left of described laser reflection unit and to seal described laser reflection unit.
10. reflective laser on-line gas analysis instrument light path device according to claim 1, it is characterized in that, described corner reflector is positioned at the seal chamber of described laser reflection unit.
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|---|---|---|---|
| CN201520236633.2U CN204514794U (en) | 2015-04-17 | 2015-04-17 | Reflective laser on-line gas analysis instrument light path device |
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| CN201520236633.2U CN204514794U (en) | 2015-04-17 | 2015-04-17 | Reflective laser on-line gas analysis instrument light path device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104729996A (en) * | 2015-04-17 | 2015-06-24 | 江苏天瑞仪器股份有限公司 | Reflective optical path device of online laser gas analyzer |
| CN105319173A (en) * | 2015-11-25 | 2016-02-10 | 上海禾赛光电科技有限公司 | Gas remote sensing detection device and method |
| CN105425808A (en) * | 2015-11-10 | 2016-03-23 | 上海禾赛光电科技有限公司 | Airborne-type indoor gas remote measurement system and method |
-
2015
- 2015-04-17 CN CN201520236633.2U patent/CN204514794U/en not_active Withdrawn - After Issue
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104729996A (en) * | 2015-04-17 | 2015-06-24 | 江苏天瑞仪器股份有限公司 | Reflective optical path device of online laser gas analyzer |
| CN104729996B (en) * | 2015-04-17 | 2017-10-31 | 江苏天瑞仪器股份有限公司 | Reflective laser on-line gas analysis instrument light path device |
| CN105425808A (en) * | 2015-11-10 | 2016-03-23 | 上海禾赛光电科技有限公司 | Airborne-type indoor gas remote measurement system and method |
| CN105425808B (en) * | 2015-11-10 | 2018-07-03 | 上海禾赛光电科技有限公司 | Machine-carried type indoor gas telemetry system and method |
| CN105319173A (en) * | 2015-11-25 | 2016-02-10 | 上海禾赛光电科技有限公司 | Gas remote sensing detection device and method |
| CN105319173B (en) * | 2015-11-25 | 2018-07-20 | 上海禾赛光电科技有限公司 | Gas remote measurement device and method |
| CN108918441A (en) * | 2015-11-25 | 2018-11-30 | 上海禾赛光电科技有限公司 | A kind of gas remote measurement method and device |
| CN108918441B (en) * | 2015-11-25 | 2020-11-03 | 上海禾赛科技股份有限公司 | Gas remote measuring method and device |
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