CN204491008U - Modular micro-electroforming apparatus - Google Patents
Modular micro-electroforming apparatus Download PDFInfo
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- CN204491008U CN204491008U CN201520098576.6U CN201520098576U CN204491008U CN 204491008 U CN204491008 U CN 204491008U CN 201520098576 U CN201520098576 U CN 201520098576U CN 204491008 U CN204491008 U CN 204491008U
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- electrotyping bath
- electroforming
- liquid inlet
- electroforming apparatus
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Abstract
The utility model discloses a kind of modular micro-electroforming apparatus, include electrotyping bath, circulated filter system, temperature control system, acdity and basicity measuring meter and electrode system, electrotyping bath two ends sidewall is respectively equipped with liquid inlet and outlet, and is connected to liquid inlet and outlet pipe; The two ends of circulated filter system are connected with liquid inlet and outlet respectively by liquid inlet and outlet pipe; The upper end of electrotyping bath is provided with cover plate, cover plate is respectively equipped with multiple perforate, temperature control system extend in electrotyping bath by the first perforate in multiple perforate, acdity and basicity measuring meter extend in electrotyping bath by the second perforate in multiple perforate, and electrode system is extend in electrotyping bath by the 3rd perforate in multiple perforate.The utility model takes modular configuration, plug and play, and the temperature being realized electroforming solution by separate module is controlled and circulating filtration, not only effectively improve efficiency and the quality of micro-electroforming, and structure is simple, easy to use, be easy to safeguard, decrease equipment cost and maintenance cost.
Description
Technical field
The utility model relates to micro-processing technology and metal micro structure manufactures field, specifically a kind of modular micro-electroforming apparatus.
Background technology
At present, the LIGA class micro-processing technology of the LIGA based on X-ray and the UV-LIGA based on UV-light is widely regarded as the effective means of processing MEMS (micro electro mechanical system) (MEMS) and metal micro structure, and micro-electroforming is the core content of such micro-processing technology.Microelectroforming technology is the new ideas set up on the basis of traditional electrical casting process, compared with traditional electroforming, the cast layer thickness of micro-electroforming is between several micron ~ millimeter, this thickness magnitude combines with the pattern characteristics of large depth-to-width ratio, proposes high requirement to cast layer quality such as homogeneity, the grain size etc. of micro-electroforming.Therefore corresponding requirement be it is also proposed to electroforming apparatus.
In traditional electroforming process; due to electroforming solution temperature, uneven concentration in electrotyping bath; and then cause electroforming efficiency lower; and the impurity produced in electroforming process; some particles can be inevitably increased on the surface of master mold; after repeatedly electroforming, these particles can be increasing, affects electroforming workpiece quality.
Current business-like electroforming apparatus is external product substantially, although level of automation is higher, price is high, in addition bulky, complex operation, safeguards inconvenience.In addition, such electroforming apparatus is universal, and when for micro-electroforming, not only the size and shape of foundry goods is also subject to some restrictions, and electroforming quality also cannot be ensured preferably.
Utility model content
For the processing requirement of above-mentioned micro-electroforming and Problems existing when using, the purpose of this utility model is to provide a kind of easy but effectively can control the modular micro-electroforming apparatus of electroforming efficiency and quality.
The technical solution of the utility model is as follows:
A kind of modular micro-electroforming apparatus, includes electrotyping bath, circulated filter system, temperature control system, acdity and basicity measuring meter and electrode system, it is characterized in that: described electrotyping bath two ends sidewall is respectively equipped with liquid inlet and outlet, and is connected to liquid inlet and outlet pipe; The two ends of described circulated filter system are connected with described liquid inlet and outlet respectively by described liquid inlet and outlet pipe; The upper end of described electrotyping bath is provided with cover plate, described cover plate is respectively equipped with multiple perforate, described temperature control system extend in described electrotyping bath by the first perforate in described multiple perforate, described acdity and basicity measuring meter extend in described electrotyping bath by the second perforate in described multiple perforate, and described electrode system is extend in described electrotyping bath by the 3rd perforate in described multiple perforate.
Described modular micro-electroforming apparatus, is characterized in that: the shape of described electrotyping bath is rectangular parallelepiped, and its material adopts synthetic glass or tetrafluoroethylene.
Described modular micro-electroforming apparatus, is characterized in that: described cover plate has three pieces, and every block cover plate is respectively equipped with perforate, passes through respectively and extend into described electrotyping bath inside in order to described temperature control system, acdity and basicity measuring meter and electrode system.
Described modular micro-electroforming apparatus, is characterized in that: described liquid inlet and outlet is separately installed with by-pass valve control, respectively in order to control circulation and the displacement of electroforming solution in described electrotyping bath.
Described modular micro-electroforming apparatus, is characterized in that: described circulated filter system includes chemical cycle pump, filtration unit and rly..
Described modular micro-electroforming apparatus, it is characterized in that: described filtration unit includes and filters pipe and coiling filter core, described coiling filter core is built in described filtration pipe, and coaxial with described filtration pipe, can filter the impurity of several micron level.
Described modular micro-electroforming apparatus, is characterized in that: described temperature control system includes intelligent temperature adjusting apparatus, thermopair, thermostat and electric leakage air switch.
Described modular micro-electroforming apparatus, is characterized in that: described electrode system includes direct supply, wire and electrode clamping device.
Described modular micro-electroforming apparatus, is characterized in that: the middle part of described electrode clamping device is provided with compression spring and electrode grip block, in order to the electrode of fixing different size.
The beneficial effects of the utility model:
1, separate between each system of the present utility model, be independent of each other, make whole apparatus structure simple, be easy to dismounting and maintenance;
2, the utility model independently circulated filter system not only can filter the impurity of electroforming solution, the homogeneity of the concentration of metal ions in electroforming solution can also be kept, thus effectively ensure that the homogeneity of electroforming cast layer.
3, the utility model independently intelligent temperature control system can ensure the activity of this electrochemical reaction of electroforming by keeping the temperature of electroforming solution, thus improve speed and the efficiency of micro-electroforming reaction.
Accompanying drawing explanation
Fig. 1 is the relative position relation figure in the utility model between each system.
Fig. 2 is the utility model structural representation.
Fig. 3 is the schematic diagram of filter glass pipe in the utility model.
Fig. 4 is the schematic diagram of electrode clamping device in the utility model.
Fig. 5 is the structural plan figure of the cover plate of electrotyping bath upper end in the utility model.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples for illustration of the utility model, but are not used for limiting scope of the present utility model.
As shown in Figure 1, the modular micro-electroforming apparatus of one of the present utility model, comprises electrotyping bath 15, circulated filter system, temperature control system, acdity and basicity measuring meter and electrode system.
Be described in detail below in conjunction with the modular micro-electroforming apparatus of the one of Fig. 2-Fig. 5 to the present embodiment:
Electrotyping bath 15 is connected with liquid inlet and outlet pipe 16,17 respectively by liquid inlet and outlet, and liquid inlet and outlet is separately installed with by-pass valve control 13,14, in order to control circulation and the displacement of electroforming solution in electrotyping bath 15.Filtration unit 10, chemical cycle pump 9 form the circulated filter system of the present embodiment together with rly. 11, electroforming solution in electrotyping bath 15 is circulated and filters impurity wherein, ensure electroforming quality, rly. 11 is connected with 220V AC power 12, and the two ends of this circulated filter system are connected with electrotyping bath 1 respectively by liquid inlet and outlet pipe 16,17.Filtration unit 10 is made up of coiling filter core and filtration pipe 18, filters the structure of pipe 18 as shown in Figure 3.220V AC power 1, electric leakage air switch 2, intelligent temperature adjusting apparatus 3, rly. 4 form the temperature control system of the present embodiment together with thermopair 8, the electroforming solution in electrotyping bath 15 can be made to keep constant temperature by intelligent temperature adjusting apparatus 3 and thermopair 8, ensure the speed that micro-electroforming is reacted and efficiency, thermopair 8 is inserted in electrotyping bath 15 by the first perforate of the cover plate 19 of electrotyping bath 15 upper end.Direct supply 6 and electrode clamping device 7 form electrode system, and in order to holding electrode to carry out micro-electroforming at electrode surface, electrode clamping device 7 is extend in electrotyping bath 15 by the 3rd perforate of the cover plate 19 of electrotyping bath 15 upper end.As shown in Figure 4, it is made up of a wire 20 stretched out by the second perforate of the cover plate 19 of electrotyping bath 15 upper end, four, middle part compression spring 21 and two electrode grip blocks 22 electrode clamping device.Acdity and basicity measuring meter 5 is extend in electrotyping bath 15 by the second perforate in the cover plate 19 of electrotyping bath 15 upper end.Cover plate as shown in Figure 5, be divided into three pieces, it is respectively equipped with four perforates, two perforates that both sides are independent, namely being respectively first and second perforate is that temperature control system and confession acdity and basicity measuring meter 5 extend in electrotyping bath 15 respectively, adjacent two perforates in middle part, being the 3rd perforate is that cathode electrode in power pole system and anode electrode extend in electrotyping bath 15.
The utility model have employed modular configuration, and structure can ensure simply again the temperature of electroforming solution, mobility and homogeneity, thus improves electroforming quality and efficiency, is a kind of simple, practical and micro-electroforming apparatus efficiently.
Last it is noted that the above embodiment is only in order to illustrate the technical solution of the utility model, be not intended to limit; Although be described in detail the utility model with reference to previous embodiment, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in previous embodiment, or carries out equivalent replacement to wherein portion of techniques feature; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the spirit and scope of embodiment technical scheme described in the utility model.
Claims (9)
1. a modular micro-electroforming apparatus, includes electrotyping bath, circulated filter system, temperature control system, acdity and basicity measuring meter and electrode system, it is characterized in that: described electrotyping bath two ends sidewall is respectively equipped with liquid inlet and outlet, and is connected to liquid inlet and outlet pipe; The two ends of described circulated filter system are connected with described liquid inlet and outlet respectively by described liquid inlet and outlet pipe; The upper end of described electrotyping bath is provided with cover plate, described cover plate is respectively equipped with multiple perforate, described temperature control system extend in described electrotyping bath by the first perforate in described multiple perforate, described acdity and basicity measuring meter extend in described electrotyping bath by the second perforate in described multiple perforate, and described electrode system is extend in described electrotyping bath by the 3rd perforate in described multiple perforate.
2. modular micro-electroforming apparatus according to claim 1, is characterized in that: the shape of described electrotyping bath is rectangular parallelepiped, and its material adopts synthetic glass or tetrafluoroethylene.
3. modular micro-electroforming apparatus according to claim 1, is characterized in that: described cover plate has three pieces, and every block cover plate is respectively equipped with perforate.
4. modular micro-electroforming apparatus according to claim 1, is characterized in that: described liquid inlet and outlet is separately installed with by-pass valve control.
5. modular micro-electroforming apparatus according to claim 1, is characterized in that: described circulated filter system includes chemical cycle pump, filtration unit and rly..
6. modular micro-electroforming apparatus according to claim 5, is characterized in that: described filtration unit includes and filters pipe and coiling filter core, and described coiling filter core is built in described filtration pipe, and coaxial with described filtration pipe.
7. modular micro-electroforming apparatus according to claim 1, is characterized in that: described temperature control system includes intelligent temperature adjusting apparatus, thermopair, thermostat and electric leakage air switch.
8. modular micro-electroforming apparatus according to claim 1, is characterized in that: described electrode system includes direct supply, wire and electrode clamping device.
9. modular micro-electroforming apparatus according to claim 8, is characterized in that: the middle part of described electrode clamping device is provided with compression spring and electrode grip block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520098576.6U CN204491008U (en) | 2015-02-10 | 2015-02-10 | Modular micro-electroforming apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520098576.6U CN204491008U (en) | 2015-02-10 | 2015-02-10 | Modular micro-electroforming apparatus |
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| Publication Number | Publication Date |
|---|---|
| CN204491008U true CN204491008U (en) | 2015-07-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520098576.6U Expired - Fee Related CN204491008U (en) | 2015-02-10 | 2015-02-10 | Modular micro-electroforming apparatus |
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| Country | Link |
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| CN (1) | CN204491008U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112011809A (en) * | 2020-08-20 | 2020-12-01 | 中南大学 | Precise electroforming integrated automatic control method and system based on modularization |
-
2015
- 2015-02-10 CN CN201520098576.6U patent/CN204491008U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112011809A (en) * | 2020-08-20 | 2020-12-01 | 中南大学 | Precise electroforming integrated automatic control method and system based on modularization |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150722 Termination date: 20170210 |
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| CF01 | Termination of patent right due to non-payment of annual fee |