CN204490984U - A kind of vacuum cathode rotating permanent magnet dynamic magnetic field - Google Patents
A kind of vacuum cathode rotating permanent magnet dynamic magnetic field Download PDFInfo
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- CN204490984U CN204490984U CN201520071359.8U CN201520071359U CN204490984U CN 204490984 U CN204490984 U CN 204490984U CN 201520071359 U CN201520071359 U CN 201520071359U CN 204490984 U CN204490984 U CN 204490984U
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- fixed
- bearing
- target
- permanent magnet
- seat board
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Abstract
The utility model discloses a kind of vacuum cathode rotating permanent magnet dynamic magnetic field, comprise drive system, rotational system, field system and target system, described drive system is positioned on rotational system, described field system is between rotational system and target system, described rotational system comprises rotation seat board, bearing support and bearing solid of revolution, described bearing support is fixed on and rotates on seat board, described bearing solid of revolution is fixed on bearing support, described bearing solid of revolution comprises follower gear and Connection Block, described Connection Block is fixed on follower gear, described field system comprises interior magnetic support and internal polar plate, described internal polar plate is separately fixed on interior magnetic support and Connection Block, described target system comprises target stand and target, described target is fixed on below target stand.The vacuum cathode rotating permanent magnet dynamic magnetic field that the utility model provides not only structure is simple, and target can be made to etch scope increasing, reduces production cost.
Description
Technical field
The utility model relates to field, magnetic field, particularly relates to a kind of vacuum cathode rotating permanent magnet dynamic magnetic field.
Background technology
In existing market vacuum industry, vacuum cathode Magnetic control mode is of a great variety, target rate of utilization is lower, complex structure, general method is by fixed permanent magnet or solenoid controlled magnetic approach, target magnetic field constraint adopts the magnetically confined ability of solenoid mode weak, ionization level is low, so production cost is high.
Utility model content
In view of current vacuum cathode magnetic field above shortcomings, it is large that the utility model provides a kind of target to etch scope, the vacuum cathode rotating permanent magnet dynamic magnetic field that production cost is low.
For achieving the above object, embodiment of the present utility model adopts following technical scheme:
A kind of vacuum cathode rotating permanent magnet dynamic magnetic field, comprise drive system, rotational system, field system and target system, described drive system is on rotational system, described field system is between rotational system and target system, described rotational system comprises rotation seat board, bearing support and bearing solid of revolution, described bearing support is fixed on and rotates on seat board, described bearing solid of revolution is fixed on bearing support, described bearing solid of revolution comprises follower gear and Connection Block, described Connection Block is fixed on follower gear, described field system comprises interior magnetic support and internal polar plate, described internal polar plate is separately fixed on interior magnetic support and Connection Block, described target system comprises target stand and target, described target is fixed on below target stand.
According to another aspect described in the utility model, described drive system comprises motor and driving toothed gear, and described motor is fixed on and rotates on seat board, and described driving toothed gear is fixed on motor shaft end, and links closely identical with follower gear.
According to another aspect described in the utility model, described bearing solid of revolution also comprises bearing gland, the first rolling bearing, inner ring, the second rolling bearing and bearing location, bearing location outer shroud, inner ring, the second rolling bearing and bearing location, described first rolling bearing, bearing location outer shroud is all positioned on bearing gland, and described bearing gland is fixed on bearing support.
According to another aspect described in the utility model, described field system also comprises permanent magnet, outer magnetic support and external polar plate, and described external polar plate is fixed on outer magnetic support, and described permanent magnet is outside in magnetic support and external polar plate.
According to another aspect described in the utility model, described rotation seat board is provided with the first pillar stiffener and the second pillar stiffener, described first pillar stiffener one end is fixed on outer magnetic support, the other end of described first pillar stiffener is fixed to and rotates on seat board, described second pillar stiffener one end is fixed on target stand, and the other end of described second pillar stiffener is fixed to and rotates on seat board.
According to another aspect described in the utility model, described rotation seat board is also provided with handle, described handle is fixed on and rotates on seat board.
The advantage that the utility model is implemented: a kind of vacuum cathode rotating permanent magnet dynamic magnetic field, comprise drive system, rotational system, field system and target system, drive system is on rotational system, described field system is between rotational system and target system, rotational system comprises rotation seat board, bearing support and bearing solid of revolution, bearing support is fixed on and rotates on seat board, bearing solid of revolution is fixed on bearing support, bearing solid of revolution comprises follower gear and Connection Block, Connection Block is fixed on follower gear, field system comprises interior magnetic support and internal polar plate, internal polar plate is separately fixed on interior magnetic support and Connection Block, target system comprises target stand and target, target is fixed on below target stand, such drive system can drive interior magnetic support ceaselessly to rotate together with internal polar plate, thus make target etch scope increasing, reduce production cost, rotate seat board and be provided with the first pillar stiffener and the second pillar stiffener, first pillar stiffener one end is fixed on outer magnetic support, the other end of the first pillar stiffener is fixed to and rotates on seat board, second pillar stiffener one end is fixed on target stand, the other end of the second pillar stiffener is fixed to and rotates on seat board, rotates on seat board and is also provided with handle, and handle is fixed on and rotates on seat board, therefore the utility model vacuum cathode rotating permanent magnet dynamic magnetic field structure is also simple, and maintenance also facilitates.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme in the utility model embodiment, be briefly described to the accompanying drawing used required in embodiment below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the schematic perspective view of the utility model vacuum cathode rotating permanent magnet dynamic magnetic field;
Fig. 2 is the explosion type structural representation of the utility model vacuum cathode rotating permanent magnet dynamic magnetic field;
Fig. 3 is the structural representation of the utility model vacuum cathode rotating permanent magnet dynamic magnetic field.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail.
As Fig. 1, Fig. 2, shown in Fig. 3, a kind of vacuum cathode rotating permanent magnet dynamic magnetic field, comprise drive system 101, rotational system 102, field system 103 and target system 104, drive system 101 is positioned on rotational system 102, field system 103 is between rotational system 102 and target system 104, rotational system 102 comprises rotation seat board 201, bearing support 202 and bearing solid of revolution 203, bearing support 202 is fixed on and rotates on seat board 201, bearing solid of revolution 203 is fixed on bearing support 202, bearing solid of revolution 203 comprises follower gear 204 and Connection Block 205, Connection Block 205 is fixed on follower gear 204, field system 103 comprises interior magnetic support 206 and internal polar plate 207, internal polar plate 207 is separately fixed on interior magnetic support 206 and Connection Block 205, target system 104 comprises target stand 208 and target 209, target 209 is fixed on below target stand 208, such drive system 101 can drive interior magnetic support 206 ceaselessly to rotate together with internal polar plate 207, thus make target etch scope increasing, reduce production cost.
In actual applications, drive system 101 can comprise motor 210 and driving toothed gear 211, motor 210 is fixed on and rotates on seat board 201, driving toothed gear 211 is fixed on motor 210 axle head, and link closely identical with follower gear 204, bearing solid of revolution 203 also comprises bearing gland 212, first rolling bearing 213, second rolling bearing 222, bearing location inner ring 214 and bearing location outer shroud 215, first rolling bearing 213, second rolling bearing 222, bearing location inner ring 214 and bearing location outer shroud 215 are all positioned on bearing gland 212, bearing gland 212 is fixed on bearing support 202, field system 103 also can comprise permanent magnet 216, outer magnetic support 217 and external polar plate 218, permanent magnet 216 is respectively outside in magnetic support 217 and external polar plate 218, rotate seat board 201 and be provided with the first pillar stiffener 220 and the second pillar stiffener 221, first pillar stiffener 220 one end is fixed on outer magnetic support 217, the other end of the first pillar stiffener 220 is fixed to and rotates on seat board 201, second pillar stiffener 221 one end is fixed on target stand 208, the other end of the second pillar stiffener 221 is fixed to and rotates on seat board 201, rotate on seat board 201 and be also provided with handle 219, handle 219 is fixed on and rotates on seat board 201, first follower gear 204 is inserted in bearing support 202 during installation, first rolling bearing 213 is loaded in bearing support 202, load bearing location inner ring 214 more successively, bearing location outer shroud 215 and the second rolling bearing 222, after being seated, with screw bearing gland 212 is fixed on bearing support 202 and compresses bearing inner race, because internal polar plate 207 is screwed respectively on interior magnetic support 206 and Connection Block 205, Connection Block 205 is screwed compression axis bearing outer-ring on follower gear 204, be screwed above rotation seat board 102 more afterwards so be assembled into a single piece, external polar plate 218 is screwed outside on magnetic support 217, being tightened first pillar stiffener 220 one end is fixed on outer magnetic support 217, ensure highly consistent after installing, first pillar stiffener 220 the other end is screwed and rotates above seat board 201, being tightened second pillar stiffener 221 one end is fixed on target stand 208, and ensure highly consistent after installing, second pillar stiffener 221 the other end is screwed and rotates above seat board 201, is finally screwed by handle 219 on rotation seat board 201.As can be seen here, the utility model vacuum cathode rotating permanent magnet dynamic magnetic field structure is very simple, easy to maintenance, improves production efficiency.
When needing test, starter motor 210, driving toothed gear 211 drives follower gear 204 to rotate, make bearing solid of revolution 203, permanent magnet 216, outer magnetic support 217, interior magnetic support 206, external polar plate 218 and internal polar plate 207 also together with rotate, under vacuum conditions, arc electrode and cathode surface to ignite arc-over instantaneously in break-make, target 209 ionization level is high, magnetically confined power is strong, rete compactness is good, and it is large that target 209 etches area, utilizes solid target 209, do not have molten bath, target 209 can be installed even to ensure plated film in optional position.
The above; be only embodiment of the present utility model; but protection domain of the present utility model is not limited thereto; the technician of any skilled is in technical scope disclosed in the utility model; the change that can expect easily or replacement, all should be encompassed within protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of described claim.
Claims (6)
1. a vacuum cathode rotating permanent magnet dynamic magnetic field, comprise drive system, rotational system, field system and target system, it is characterized in that: described drive system is positioned on rotational system, described field system is between rotational system and target system, described rotational system comprises rotation seat board, bearing support and bearing solid of revolution, described bearing support is fixed on and rotates on seat board, described bearing solid of revolution is fixed on bearing support, described bearing solid of revolution comprises follower gear and Connection Block, described Connection Block is fixed on follower gear, described field system comprises interior magnetic support and internal polar plate, described internal polar plate is separately fixed on interior magnetic support and Connection Block, described target system comprises target stand and target, described target is fixed on below target stand.
2. according to a kind of vacuum cathode rotating permanent magnet dynamic magnetic field according to claim 1, it is characterized in that: described drive system comprises motor and driving toothed gear, described motor is fixed on and rotates on seat board, and described driving toothed gear is fixed on motor shaft end, and links closely identical with follower gear.
3. according to a kind of vacuum cathode rotating permanent magnet dynamic magnetic field according to claim 1, it is characterized in that: described bearing solid of revolution also comprises bearing gland, the first rolling bearing, inner ring, the second rolling bearing and bearing location, bearing location outer shroud, inner ring, the second rolling bearing and bearing location, described first rolling bearing, bearing location outer shroud is all positioned on bearing gland, and described bearing gland is fixed on bearing support.
4. according to a kind of vacuum cathode rotating permanent magnet dynamic magnetic field according to claim 1, it is characterized in that: described field system also comprises permanent magnet, outer magnetic support and external polar plate, described external polar plate is fixed on outer magnetic support, and described permanent magnet is outside in magnetic support and external polar plate.
5. according to a kind of vacuum cathode rotating permanent magnet dynamic magnetic field one of Claims 1-4 Suo Shu, it is characterized in that: described rotation seat board is provided with the first pillar stiffener and the second pillar stiffener, described first pillar stiffener one end is fixed on outer magnetic support, the other end of described first pillar stiffener is fixed to and rotates on seat board, described second pillar stiffener one end is fixed on target stand, and the other end of described second pillar stiffener is fixed to and rotates on seat board.
6. according to a kind of vacuum cathode rotating permanent magnet dynamic magnetic field according to claim 5, it is characterized in that: described rotation seat board is also provided with handle, described handle is fixed on and rotates on seat board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520071359.8U CN204490984U (en) | 2015-02-02 | 2015-02-02 | A kind of vacuum cathode rotating permanent magnet dynamic magnetic field |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520071359.8U CN204490984U (en) | 2015-02-02 | 2015-02-02 | A kind of vacuum cathode rotating permanent magnet dynamic magnetic field |
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| Publication Number | Publication Date |
|---|---|
| CN204490984U true CN204490984U (en) | 2015-07-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520071359.8U Expired - Fee Related CN204490984U (en) | 2015-02-02 | 2015-02-02 | A kind of vacuum cathode rotating permanent magnet dynamic magnetic field |
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| Country | Link |
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| CN (1) | CN204490984U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109468598A (en) * | 2018-11-15 | 2019-03-15 | 温州职业技术学院 | A kind of rotating excitation field cathode arc source |
-
2015
- 2015-02-02 CN CN201520071359.8U patent/CN204490984U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109468598A (en) * | 2018-11-15 | 2019-03-15 | 温州职业技术学院 | A kind of rotating excitation field cathode arc source |
| CN109468598B (en) * | 2018-11-15 | 2020-09-29 | 温州职业技术学院 | Rotating magnetic field cathode arc source |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150722 Termination date: 20170202 |