CN204478837U - For the air intake/outtake system of body of heater of lowering the temperature - Google Patents
For the air intake/outtake system of body of heater of lowering the temperature Download PDFInfo
- Publication number
- CN204478837U CN204478837U CN201520084047.0U CN201520084047U CN204478837U CN 204478837 U CN204478837 U CN 204478837U CN 201520084047 U CN201520084047 U CN 201520084047U CN 204478837 U CN204478837 U CN 204478837U
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- valve
- air intake
- air
- cylinder
- outtake
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Abstract
The utility model relates to semiconductor manufacturing equipment technical field, particularly relate to a kind of air intake/outtake system for body of heater of lowering the temperature, this air intake/outtake system comprises air intake wind path and air draft wind path, described air intake wind path is provided with air intake valve, is adjusted the aperture of described air intake valve by air intake valve opening assembly; Described air draft wind path is provided with valve for air exhaust, is driven the switch of described valve for air exhaust by valve for air exhaust drive unit.The aperture of described air intake valve is adjusted by described air intake valve opening assembly, accurately can control the cooling medium of the low temperature entered in described cooling body of heater, the switch of described valve for air exhaust is driven by valve for air exhaust drive unit, accurately can control the High-temperature cooling medium of discharging described cooling body of heater, thus ensure the temperature reduction performance of cooling body of heater, and then ensure the quality of heat treatment.
Description
Technical field
The utility model relates to semiconductor manufacturing equipment technical field, particularly relates to a kind of air intake/outtake system for body of heater of lowering the temperature.
Background technology
In the Technology for Heating Processing of the fast cooling of semiconductor, need to carry out fast cooling to cooling body of heater.In prior art, usually adopt RCU and air intake/outtake system to carry out fast cooling to body of heater, cooling body of heater is connected by the air intake/outtake system in the middle of the two with RCU.
Mainly comprise blower fan, heat exchanger etc. in RCU, play as cooling medium provides power, the High-temperature cooling medium refluxed is lowered the temperature simultaneously from body of heater.Air intake/outtake system connects body of heater and RCU, and major function the cooling medium of low temperature (normally air) is introduced body of heater cooling air channel, and led back in RCU by the High-temperature cooling medium from body of heater.
In order to ensure the temperature reduction performance of cooling body of heater, and then ensureing the quality of heat treatment, needing accurately to control the High-temperature cooling medium of the low-temperature cooling media and discharge body of heater that enter body of heater,
Therefore, how accurately to control enter the low-temperature cooling media of body of heater and discharge the High-temperature cooling medium of body of heater, become the technical barrier that those skilled in the art are urgently to be resolved hurrily.
Utility model content
The utility model object is to provide a kind of air intake/outtake system for body of heater of lowering the temperature, and can accurately control enter the low-temperature cooling media of body of heater and discharge the High-temperature cooling medium of body of heater.
To achieve these goals, the utility model provides a kind of air intake/outtake system for body of heater of lowering the temperature, and comprises air intake wind path and air draft wind path, and described air intake wind path is provided with air intake valve, is adjusted the aperture of described air intake valve by air intake valve opening assembly; Described air draft wind path is provided with valve for air exhaust, is driven the switch of described valve for air exhaust by valve for air exhaust drive unit.
Preferably, described air intake valve comprises two air inlets and an air outlet, the wind path of two described air inlets is equipped with air intake valve opening assembly.
Preferably, described air intake valve opening assembly comprises valve block, valve hinges, dial, scale pin, housing screw, described valve block is fixed in described valve hinges, described dial is fixed on the outside of described air intake valve, described scale pin is fixed on the end of described valve hinges, and described housing screw is successively through the end that can screw in described valve hinges after spring, described scale pin, described dial; The inner side of described scale pin is provided with and forms with the scale hole on described dial the pin coordinated.
Preferably, the wind path at described air inlet place is provided with air channel exploration hole.
Preferably, described valve for air exhaust comprises valve plate, valve hinges, and described valve plate is fixed in described valve hinges, and the end of described valve hinges is provided with the valve for air exhaust drive unit for driving described valve hinges to rotate.
Preferably, described valve for air exhaust drive unit comprises cylinder, connecting rod, guide post, knuckle joint, described cylinder is fixed on described guide plate, the end of described cylinder connects described knuckle joint, described knuckle joint is hinged in the slip elongated hole of described connecting rod one end, and the other end of described connecting rod connects described valve hinges.
Preferably, the L-shaped bending-like of described guide plate, described cylinder is fixed on the horizontal part of described guide plate, and the vertical portion of described guide plate is between described valve for air exhaust and described cylinder.
Preferably, the vertical portion of described guide plate is provided with the gathering sill parallel with described cylinder, and described knuckle joint is provided with guide post, and the end of described guide post inserts in described gathering sill.
Preferably, the outside of described cylinder is fixed with the guide post parallel with described Telescopic-cylinder direction, and the outside of described knuckle joint is provided with guide plate, and described guide post is placed in the pilot hole of this guide plate.
Preferably, described valve for air exhaust drive unit comprises cylinder, connecting rod, single arm type knuckle joint, the end of described cylinder connects described single arm type knuckle joint, and described single arm type knuckle joint connects one end of described connecting rod, and the other end of described connecting rod connects described valve hinges.
Preferably, the outboard end of described valve hinges is provided with the switch pointer being used to indicate described valve for air exhaust on off state.
Preferably, the cylinder body of described cylinder is provided with magnetic switch, and this magnetic switch is used for sending cylinder state signal to controller.
Preferably, the outside of described valve for air exhaust is provided with collet.
Preferably, the air outlet of described valve for air exhaust connects water cold sleeve, and described water cold sleeve is communicated with water route by water route tube connector.
Preferably, described water cold sleeve comprises crosspiece water cold sleeve and perpendicular section water cold sleeve, and described crosspiece water cold sleeve is communicated with water route with perpendicular section water cold sleeve respectively by water route tube connector.
The utility model is provided for the air intake/outtake system of cooling body of heater, air intake wind path is provided with air intake valve, is adjusted the aperture of described air intake valve by air intake valve opening assembly; Air draft wind path is provided with valve for air exhaust, is driven the switch of described valve for air exhaust by valve for air exhaust drive unit.The aperture of described air intake valve is adjusted by described air intake valve opening assembly, accurately can control the cooling medium of the low temperature entered in described cooling body of heater, the switch of described valve for air exhaust is driven by valve for air exhaust drive unit, accurately can control the High-temperature cooling medium of discharging described cooling body of heater, thus ensure the temperature reduction performance of cooling body of heater, and then ensure the quality of heat treatment.
Accompanying drawing explanation
Fig. 1 is the structural representation that the air intake/outtake system for body of heater of lowering the temperature provided by the utility model is assembled with cooling body of heater;
Fig. 2 is the structural representation of air intake valve in Fig. 1;
Fig. 3 is the front view of air intake valve in Fig. 2;
Fig. 4 is the close-up schematic view of air intake valve opening assembly in Fig. 2;
Fig. 5 is the package assembly schematic diagram of valve for air exhaust in Fig. 1;
Fig. 6 is the structural representation of the first embodiment of valve for air exhaust drive unit in Fig. 5;
Fig. 7 is the top view of valve for air exhaust drive unit in Fig. 6;
Fig. 8 is the close-up schematic view of valve for air exhaust drive unit in Fig. 6;
Fig. 9 is the concrete schematic diagram of valve for air exhaust in Fig. 5;
Figure 10 is vented utility model on-off principle schematic diagram in Fig. 5;
Figure 11 is the structural representation of the second embodiment of valve for air exhaust in Fig. 5;
Figure 12 is the structural representation being vented the third embodiment of utility model drive unit in Fig. 5.
Wherein, in Fig. 1 ~ Figure 12:
Body of heater f, valve for air exhaust 1, valve for air exhaust front end 11, valve shaft housing 112, collet 12, valve plate 13, valve hinges 131, valve for air exhaust drive unit 2, cylinder 21, connecting rod 22, guide post 23, guide post 23-1, guide plate 24, guide plate 24-1, knuckle joint 25, single arm type knuckle joint 25-1, switch pointer 26, water cold sleeve 3, crosspiece water cold sleeve 31, perpendicular section water cold sleeve 32, water route tube connector 33, discharge hose 4, air intake valve 5, air intake valve butt tube 51, air intake valve body of heater end butt tube 52, air channel exploration hole 53, air intake valve opening assembly 54, dial 541, housing screw 542, scale pin 543, spring 544, valve block 545, valve hinges 546, air intake flexible pipe 6.
Detailed description of the invention
For making content of the present utility model clearly understandable, below in conjunction with Figure of description, content of the present utility model is described further.Certain the utility model is not limited to this specific embodiment, and the general replacement known by those skilled in the art is also encompassed in protection domain of the present utility model.Secondly, the utility model detailed statement that utilized schematic diagram to carry out, when describing the utility model example in detail, for convenience of explanation, schematic diagram, should in this, as to restriction of the present utility model not according to general ratio partial enlargement.
It should be noted that, in following embodiment, utilize the structural representation of Fig. 1 ~ 12 to carry out detailed statement to the air intake/outtake system for body of heater of lowering the temperature provided by the utility model.When describing embodiment of the present utility model in detail, for convenience of explanation, each schematic diagram is not according to general scale and carried out partial enlargement and omitted process, therefore, should avoid in this, as to restriction of the present utility model.
Please refer to Fig. 1, Fig. 1 is the structural representation that the air intake/outtake system for body of heater of lowering the temperature provided by the utility model is assembled with cooling body of heater.
As shown in Figure 1, the air intake/outtake system for the body of heater f that lowers the temperature that the utility model provides comprises air intake wind path and air draft wind path, and described air intake wind path is provided with air intake valve 5, is adjusted the aperture of described air intake valve 5 by air intake valve opening assembly 54; Described air draft wind path is provided with valve for air exhaust 1, is driven the switch of described valve for air exhaust 1 by valve for air exhaust drive unit 2.
In concrete scheme, the air intake air port of cooling body of heater f is arranged under air draft air port, air intake wind path is arranged under air draft wind path, in the downstream of air intake/outtake system, the air intake flexible pipe 6 that end is provided with to RCU docks of air intake wind path and corresponding flange, the discharge hose 4 that the end on air draft wind path is provided with to RCU docks and corresponding flange.
The utility model is provided for the air intake/outtake system of cooling body of heater, air intake wind path is provided with air intake valve 5, is adjusted the aperture of described air intake valve 5 by air intake valve opening assembly 54; Air draft wind path is provided with valve for air exhaust 1, is driven the switch of described valve for air exhaust 1 by valve for air exhaust drive unit 2.The aperture of described air intake valve 1 is adjusted by described air intake valve opening assembly 54, accurately can control the cooling medium of the low temperature entered in described cooling body of heater f, the switch of described valve for air exhaust 1 is driven by valve for air exhaust drive unit 2, accurately can control the High-temperature cooling medium of discharging described cooling body of heater f, thus ensure the temperature reduction performance of cooling body of heater, and then ensure the quality of heat treatment.
In concrete scheme, as shown in Figure 2, described air intake valve 5 comprises two air inlets and an air outlet, air inlet valve goalkeeper main road is divided into two branch roads, air inlet is communicated with air intake flexible pipe 6, two two, air inlet place branch roads are respectively air intake valve butt tube 51, air intake valve body of heater end butt tube 52, and air intake valve butt tube 51, air intake valve body of heater end butt tube 52 are equipped with air intake valve opening assembly.
The pipeline of described main road adopts hard tube, and the pipeline of described main road is provided with air channel exploration hole 53, and for stretching into airspeedometer or thermometer, the wind pressure and wind speed in measurement air channel or temperature etc., opened by detection mouth 53 in use, the used time can not close.
In preferred scheme, as Fig. 3, shown in Fig. 4, described air intake valve opening assembly comprises valve block 545, valve hinges 546, dial 541, scale pin 543, housing screw 542, , described valve hinges 546 runs through air intake valve butt tube 51 or air intake valve body of heater end butt tube 52, described valve block 545 is fixed in described valve hinges 546, described dial 541 is fixed on the outside of described air intake valve 5, described scale pin 543 is fixed on the end of described valve hinges 546, described housing screw 542 is successively through spring 544, described scale pin 543, the end of described valve hinges 546 can be screwed in after described dial 541, the inner side of described scale pin 543 is provided with and forms with the scale hole on described dial 541 pin coordinated.
When needing the aperture regulating air channel, first housing screw 542 being unscrewed, allowing the thrust of spring 544 diminish, then pull-up scale pin 543, the termination of scale pin 543 is provided with pin, and pin inserts in scale hole corresponding on dial 541, realizes valve block 545 aperture location and outside identification.After adjustment scale pin 543, then screw housing screw 542, complete the adjustment of air channel aperture.
Please refer to Fig. 5-Figure 10, Fig. 5 is the package assembly schematic diagram of valve for air exhaust in Fig. 1; Fig. 6 is the structural representation of the first embodiment of valve for air exhaust drive unit in Fig. 5; Fig. 7 is the top view of valve for air exhaust drive unit in Fig. 6; Fig. 8 is the close-up schematic view of valve for air exhaust drive unit in Fig. 6; Fig. 9 is the concrete schematic diagram of valve for air exhaust in Fig. 5; Figure 10 is vented utility model on-off principle schematic diagram in Fig. 5.
As shown in fig. 5-10, valve for air exhaust has air inlet and air outlet, the air inlet of valve for air exhaust front end 11 is communicated with the exhaust outlet of cooling body of heater f, air outlet connects water cold sleeve 3 by air outlet, described water cold sleeve is communicated with water route by water route tube connector 33, in concrete scheme, described water cold sleeve 3 comprises crosspiece water cold sleeve 31 and perpendicular section water cold sleeve 32, and described crosspiece water cold sleeve 31 is communicated with water route with perpendicular section water cold sleeve 32 respectively by water route tube connector 33.
Described valve for air exhaust 1 comprises valve plate 13, valve hinges 131, described valve hinges 131 runs through described valve for air exhaust housing, valve shaft housing 112 is provided with between valve hinges 131 and valve housing, described valve plate 13 is fixed in described valve hinges 131, and the end of described valve hinges 131 is provided with the valve for air exhaust drive unit 2 for driving described valve hinges 131 to rotate.
In concrete scheme, described valve for air exhaust drive unit 2 comprises cylinder 21, connecting rod 22, guide post, knuckle joint 25, described cylinder 21 is fixed on described guide plate 24, the end of described cylinder 21 connects described knuckle joint 25, described knuckle joint 25 is hinged in the slip elongated hole of described connecting rod 22 one end, and the other end of described connecting rod 22 connects described valve hinges 131.
The action of cylinder 21 can drive knuckle joint 25 to do identical action, knuckle joint 25 is flexibly connected with connecting rod 22, form the form of slide block fork, the transform linear motion realizing knuckle joint 25 is that connecting rod 22 swings, the swing of connecting rod 22 can drive again valve hinges 131 to realize rotating, valve hinges 131 drives valve plate 13 to realize the swing of about 90 degree again, finally completes the switch motion of valve.
In preferred scheme, the L-shaped bending-like of described guide plate 24, described cylinder 21 is fixed on the horizontal part of described guide plate 24, the vertical portion of described guide plate 24 is between described valve for air exhaust and described cylinder 21, guide plate 24 is except playing the effect of support cylinder 21, the vertical portion of guide plate 24 also can stop that the heat from valve for air exhaust 1 transmits to cylinder 21, carries out thermal protection to cylinder 21.
In preferred scheme, the vertical portion of described guide plate 24 is provided with the gathering sill parallel with described cylinder 21, and described knuckle joint 25 is provided with guide post 23, and the end of described guide post 23 inserts in described gathering sill, play the effect of auxiliary guiding, and can effectively prevent the piston of cylinder 21 from rotating.
In preferred scheme, the outboard end of described valve hinges 131 is provided with the switch pointer 26 being used to indicate described valve for air exhaust 1 on off state, for the position of the switch from outer logo valve plate 13.
In further scheme, cylinder 21 body of described cylinder 21 is provided with magnetic switch, and this magnetic switch is used for sending cylinder 21 status signal to controller, is convenient to realize program Long-distance Control.
In preferred scheme, the outside of described valve for air exhaust is provided with collet 12.
In above-described embodiment, in order to prevent cylinder 21 piston from rotating, arrange gathering sill in the vertical portion of L-type guide plate 24, scheme provided by the utility model is not limited thereto, and please refer to Figure 11 and Figure 12.
As shown in figure 11, the outside of described cylinder 21 is fixed with the guide post 23-1 parallel with described cylinder 21 telescopic direction, and the outside of described knuckle joint 25 is provided with guide plate 24-1, and described guide post 23-1 is placed in the pilot hole of this guide plate 24-1.
As shown in figure 12, described valve for air exhaust drive unit 2 comprises cylinder 21, connecting rod 22, single arm type knuckle joint 25-1, the end of described cylinder 21 connects described single arm type knuckle joint 25-1, described single arm type knuckle joint 25-1 connects one end of described connecting rod, the other end of described connecting rod connects described valve hinges 131, such structural design, cylinder 21 can be made farther apart from valve, and this is simple and reliable for structure.
The above is only the description of the preferred embodiment of utility model; should be understood that; due to the finiteness of literal expression; and objectively there is unlimited concrete structure; for those skilled in the art; under the prerequisite not departing from the utility model principle, can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.Any simple modification, equivalent variations and modification, all still belong in the scope of technical solutions of the utility model protection.
Claims (15)
1. for an air intake/outtake system for body of heater of lowering the temperature, it is characterized in that, comprise air intake wind path and air draft wind path, described air intake wind path is provided with air intake valve, is adjusted the aperture of described air intake valve by air intake valve opening assembly; Described air draft wind path is provided with valve for air exhaust, is driven the switch of described valve for air exhaust by valve for air exhaust drive unit.
2. air intake/outtake system according to claim 1, is characterized in that, described air intake valve comprises an air outlet and two air inlets, the wind path of two described air inlets is equipped with air intake valve opening assembly.
3. air intake/outtake system according to claim 1 and 2, it is characterized in that, described air intake valve opening assembly comprises valve block, valve hinges, dial, scale pin, housing screw, described valve block is fixed in described valve hinges, described dial is fixed on the outside of described air intake valve, described scale pin is fixed on the end of described valve hinges, and described housing screw is successively through the end that can screw in described valve hinges after spring, described scale pin, described dial; The inner side of described scale pin is provided with and forms with the scale hole on described dial the pin coordinated.
4. air intake/outtake system according to claim 2, is characterized in that, the wind path at described air inlet place is provided with air channel exploration hole.
5. air intake/outtake system according to claim 1, it is characterized in that, described valve for air exhaust comprises valve plate, valve hinges, and described valve plate is fixed in described valve hinges, and the end of described valve hinges is provided with the valve for air exhaust drive unit for driving described valve hinges to rotate.
6. air intake/outtake system according to claim 5, it is characterized in that, described valve for air exhaust drive unit comprises cylinder, connecting rod, guide post, knuckle joint, described cylinder is fixed on guide plate, the end of described cylinder connects described knuckle joint, described knuckle joint is hinged in the slip elongated hole of described connecting rod one end, and the other end of described connecting rod connects described valve hinges.
7. air intake/outtake system according to claim 6, is characterized in that, the L-shaped bending-like of described guide plate, and described cylinder is fixed on the horizontal part of described guide plate, and the vertical portion of described guide plate is between described valve for air exhaust and described cylinder.
8. air intake/outtake system according to claim 7, is characterized in that, the vertical portion of described guide plate is provided with the gathering sill parallel with described cylinder, and described knuckle joint is provided with guide post, and the end of described guide post inserts in described gathering sill.
9. air intake/outtake system according to claim 6, is characterized in that, the outside of described cylinder is fixed with the guide post parallel with described Telescopic-cylinder direction, and the outside of described knuckle joint is provided with guide plate, and described guide post is placed in the pilot hole of this guide plate.
10. air intake/outtake system according to claim 5, it is characterized in that, described valve for air exhaust drive unit comprises cylinder, connecting rod, single arm type knuckle joint, the end of described cylinder connects described single arm type knuckle joint, described single arm type knuckle joint connects one end of described connecting rod, and the other end of described connecting rod connects described valve hinges.
11. air intake/outtake systems according to claim 5, is characterized in that, the outboard end of described valve hinges is provided with the switch pointer being used to indicate described valve for air exhaust on off state.
12. air intake/outtake systems according to any one of claim 6-9, it is characterized in that, the cylinder body of described cylinder is provided with magnetic switch, and this magnetic switch is used for sending cylinder state signal to controller.
13. air intake/outtake systems according to any one of claim 5-11, it is characterized in that, the outside of described valve for air exhaust is provided with collet.
14. air intake/outtake systems according to any one of claim 5-11, is characterized in that, the air outlet of described valve for air exhaust connects water cold sleeve, and described water cold sleeve is communicated with water route by water route tube connector.
15. air intake/outtake systems according to claim 14, is characterized in that, described water cold sleeve comprises crosspiece water cold sleeve and perpendicular section water cold sleeve, and described crosspiece water cold sleeve is communicated with water route with perpendicular section water cold sleeve respectively by water route tube connector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520084047.0U CN204478837U (en) | 2015-02-05 | 2015-02-05 | For the air intake/outtake system of body of heater of lowering the temperature |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520084047.0U CN204478837U (en) | 2015-02-05 | 2015-02-05 | For the air intake/outtake system of body of heater of lowering the temperature |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204478837U true CN204478837U (en) | 2015-07-15 |
Family
ID=53634623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520084047.0U Withdrawn - After Issue CN204478837U (en) | 2015-02-05 | 2015-02-05 | For the air intake/outtake system of body of heater of lowering the temperature |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204478837U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104634115A (en) * | 2015-02-05 | 2015-05-20 | 北京七星华创电子股份有限公司 | Air-intake-exhaust system for cooling furnace body |
-
2015
- 2015-02-05 CN CN201520084047.0U patent/CN204478837U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104634115A (en) * | 2015-02-05 | 2015-05-20 | 北京七星华创电子股份有限公司 | Air-intake-exhaust system for cooling furnace body |
| CN104634115B (en) * | 2015-02-05 | 2017-04-05 | 北京七星华创电子股份有限公司 | A kind of air intake/outtake system for body of heater of lowering the temperature |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150715 Effective date of abandoning: 20170405 |