CN204470961U - Positioner - Google Patents
Positioner Download PDFInfo
- Publication number
- CN204470961U CN204470961U CN201520126507.1U CN201520126507U CN204470961U CN 204470961 U CN204470961 U CN 204470961U CN 201520126507 U CN201520126507 U CN 201520126507U CN 204470961 U CN204470961 U CN 204470961U
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- CN
- China
- Prior art keywords
- expansion link
- positioner
- bushing pipe
- motor
- mechanical arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model provides a kind of positioner, comprising: axostylus axostyle, mechanical arm, fixed cell, expansion link and stop inductor.Positioner can by rotating the distance measuring diverse location place bushing pipe distance diffusion furnace tube base center at grade respectively, while expansion link stretches measurement, the step number that pedometer synchronous recording everywhere expansion link is flexible, after completing the measurement of a week, adjust according to each measurement point pedometer record step number, the location of bushing pipe can be completed easily; Whole positioning device structure is simple, be easy to operation, and positioning precision is higher, can accurately 0.1mm; Meanwhile, by arranging the slide block that can slide up and down, dynamic positioning system can be with to move up and down to corresponding height, the distance at bushing pipe distance base center in Different Plane is measured, the whether run-off the straight of diffusion furnace tube base and bushing pipe can be checked.
Description
Technical field
The utility model relates to field of semiconductor manufacture, particularly relates to a kind of positioner.
Background technology
In semiconductor furnace tube normal pressure diffusion technique, the diffusion furnace tube used as shown in Figure 1, comprises heater 11, process duct 12, bushing pipe (liner tube) 13 and base 14; Wherein said process duct 12 and described bushing pipe 13 are arranged in described heater 11, and described bushing pipe 13 is between described process duct 12 and described heater 11, for insulation.But needing to change described heater 11 at every turn, or when yearly maintenance needs bushing pipe 13 described in dismounting, all needing bushing pipe 13 described in dismounting.After the dismounting of described bushing pipe 13, when described bushing pipe 13 is re-installed in described heater 11, need to ensure that described bushing pipe 13 is positioned at the RC position of described heater 11, namely as shown in Figure 1, the spacing d of heater 11 described in relative two lateral extents of described bushing pipe 13
1with d
2equal.But due in the process of installing, position for described bushing pipe 13 does not have good way to measure, so after often occurring to have changed described bushing pipe 13, described bushing pipe 13 can depart from the center of described heater 11, namely as shown in Figure 2, the spacing d of heater 11 described in relative two lateral extents of described bushing pipe 13
1with d
2unequal, this will cause the uniformity being positioned at the chip of described process duct 12 in the process of diffusion poor, and then affects the quality of product.
In order to avoid the generation of the problems referred to above, in prior art generally when installing described bushing pipe 13, first by visually observing the center making described bushing pipe 13 be positioned at described heater 11 as far as possible; Then detected the uniformity of the chip being positioned at described process duct 12 by pretreatment, the uniformity as fruit chip is bad, needs the position of moving described bushing pipe 13 according to 49 dot patterns of uniformity; Then try again pretreatment and detection; Continuous repetition above-mentioned steps is until detect that the uniformity of described chip reaches requirement position.But said method needs repeatedly to adjust and repeated detection, and whole adjustment process is more loaded down with trivial details, consuming time longer, inherently wastes a large amount of manpowers and time, affects the productive rate of this process engineering, increase production cost; And due to whole adjustment process be all manually operate, the accuracy of location is lower.
Therefore, provide a kind of follow-on positioner very necessary.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of positioner, for solve in prior art install bushing pipe time, in the process adopting conventional method to position bushing pipe, whole position fixing process is more loaded down with trivial details, consuming time longer, inherently wastes a large amount of manpowers and time, affect the productive rate of this process engineering, increase production cost and the lower problem of positioning precision.
For achieving the above object and other relevant objects, the utility model provides a kind of positioner, and described positioner at least comprises: axostylus axostyle, mechanical arm, fixed cell, expansion link and stop inductor; Described mechanical arm is placed on described axostylus axostyle, can around described axostylus axostyle rotary motion under the effect of external force; The bottom of described fixed cell is fixed on described mechanical arm, is suitable for fixing described expansion link; One end of described expansion link is fixed on described fixed cell, can under the effect of external force stretching motion; Described stop inductor is positioned on described expansion link, is suitable for being triggered when the stretching motion of described expansion link is prevented from.
As a kind of preferred version of positioner of the present utility model, described positioner also comprises a slide block, and described slide block set is placed on described axostylus axostyle, and is positioned at the below of described mechanical arm; Described slide block can drive described mechanical arm to move up and down together under the effect of external force.
As a kind of preferred version of positioner of the present utility model, described positioner also comprises the first motor, and described first motor is connected with described slide block, is suitable for driving described slide block to move up and down.
As a kind of preferred version of positioner of the present utility model, described stop inductor is positioned at described expansion link one end away from described fixed cell.
As a kind of preferred version of positioner of the present utility model, described positioner also comprises the second motor, and described second motor is connected with described mechanical arm, is suitable for driving described mechanical arm rotary motion.
As a kind of preferred version of positioner of the present utility model, described positioner also comprises the 3rd motor, and described 3rd motor is connected with described expansion link, is suitable for driving described expansion link stretching motion.
As a kind of preferred version of positioner of the present utility model, described stop inductor and described 3rd motors connect, and are suitable for controlling described 3rd motor when described stop inductor is triggered and stop driving described expansion link to travel forward.
As a kind of preferred version of positioner of the present utility model, the step pitch of described expansion link stretching motion is 0.1mm.
As a kind of preferred version of positioner of the present utility model, described positioner also comprises pedometer, and described pedometer is connected with described expansion link, is suitable for recording the flexible step number of described expansion link.
As mentioned above, positioner of the present utility model, there is following beneficial effect: described positioner can measure bushing pipe a bit apart from the distance at diffusion furnace tube base center by expansion link, then by rotating, can measure respectively at grade bushing pipe described in diverse location place apart from the distance at described diffusion furnace tube base center, while expansion link stretches measurement, the step number that pedometer synchronous recording everywhere expansion link is flexible, after completing the measurement of a week, adjust according to each measurement point pedometer record step number, the location of described bushing pipe can be completed easily, whole positioning device structure is simple, be easy to operation, and positioning precision is higher, can accurately 0.1mm, simultaneously, by arranging the slide block that can slide up and down, dynamic positioning system can be with move up and down to corresponding height, the distance of bushing pipe described in Different Plane apart from described base center is measured, the whether run-off the straight of described diffusion furnace tube base and described bushing pipe can be checked.
Accompanying drawing explanation
Fig. 1 is shown as the cross-sectional view of diffusion furnace tube when bushing pipe in prior art is positioned at heater center.
Fig. 2 is shown as the cross-sectional view of diffusion furnace tube when bushing pipe in prior art departs from heater center.
Fig. 3 is shown as the cross-sectional view that positioner of the present utility model positions bushing pipe.
Fig. 4 is shown as the connection diagram of positioner internal structure of the present utility model.
Element numbers explanation
11 heaters
12 process duct
13 bushing pipes
14 bases
21 bushing pipes
22 bases
23 positioners
230 axostylus axostyles
231 mechanical arms
232 fixed cells
233 expansion links
234 stop inductor
235 slide blocks
236 first motors
237 second motors
238 the 3rd motors
239 pedometers
24 main shafts
D
1the distance of bushing pipe one lateral extent heater
D
2the distance of bushing pipe opposite side distance heater
Detailed description of the invention
By particular specific embodiment, embodiment of the present utility model is described below, person skilled in the art scholar the content disclosed by this description can understand other advantages of the present utility model and effect easily.
Refer to Fig. 3 to Fig. 4.Notice, this description is appended illustrates the structure, ratio, size etc. that illustrate, content all only in order to coordinate description to disclose, understand for person skilled in the art scholar and read, and be not used to limit the enforceable qualifications of the utility model, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting under effect that the utility model can produce and the object that can reach, still all should drop on technology contents that the utility model discloses and obtain in the scope that can contain.Simultaneously, quote in this description as " on ", D score, "left", "right", " middle part " and " one " etc. term, also only for ease of understanding of describing, and be not used to limit the enforceable scope of the utility model, the change of its relativeness or adjustment, under changing technology contents without essence, when being also considered as the enforceable category of the utility model.
Refer to Fig. 3 to Fig. 4, the utility model provides a kind of positioner 23, described positioner 23 is applicable to semiconductor diffusion technique boiler tube, be suitable for positioning when installing the bushing pipe in described semiconductor diffusion technique boiler tube, described positioner, 23 at least comprise: axostylus axostyle 230, mechanical arm 231, fixed cell 232, expansion link 233 and stop inductor 234; Described mechanical arm 231 is placed on described axostylus axostyle 230, can around the rotary motion of described axostylus axostyle 230 under the effect of external force; The bottom of described fixed cell 232 is fixed on described mechanical arm 231, is suitable for fixing described expansion link 233; One end of described expansion link 233 is fixed on described fixed cell 232, can under the effect of external force stretching motion; Described stop inductor 234 is positioned on described expansion link 233, is suitable for being triggered when the stretching motion of described expansion link 233 is prevented from.
Concrete, described positioner 23 also comprises a slide block 235, and described slide block 235 is placed on described axostylus axostyle 230, and is positioned at the below of described mechanical arm 231; Described slide block 235 can drive described mechanical arm 231 to move up and down together under the effect of external force.
Concrete, described positioner 23 also comprises the first motor 236, and described first motor 236 is connected with described slide block 235, is suitable for driving described slide block 235 to move up and down.Preferably, in the present embodiment, described first motor 236 is meter step motor.
Concrete, described stop inductor 234 according to the actual needs, can be arranged at any position of described expansion link 233 under the prerequisite not affecting its function.Preferably, in the present embodiment, described stop inductor 234 is positioned at described expansion link 233 one end away from described fixed cell 232.
Concrete, described positioner 23 also comprises the second motor 237, and described second motor 237 is connected with described mechanical arm 231, is suitable for driving the rotary motion of described mechanical arm 231.Preferably, in the present embodiment, described second motor 237 is meter step motor.
Concrete, described positioner also comprises the 3rd motor 238, and described 3rd motor 238 is connected with described expansion link 233, is suitable for driving described expansion link 233 stretching motion.Preferably, in the present embodiment, described 3rd motor 238 is meter step motor.
Concrete, described stop inductor 234 is connected with described 3rd motor 238, is suitable for controlling described 3rd motor 238 when described stop inductor 234 is triggered and stops driving described expansion link 233 to travel forward.
Concrete, according to actual needs, can set the step pitch of described expansion link 233 in stretching motion, preferably, in the present embodiment, the step pitch of described expansion link 233 stretching motion is 0.1mm.
Concrete, described positioner 23 also comprises pedometer 239, and described pedometer 239 is connected with described expansion link 233, is suitable for recording the flexible step number of described expansion link 233 when described expansion link 233 does stretching motion.
It should be noted that, in the present embodiment, the type of drive of described slide block 235, described mechanical arm 231 and described expansion link 233 is not limited in motor and drives, in other embodiments, all type of drive be applicable to such as air cylinder driven or fluid cylinder driving can also be adopted to do corresponding motion to drive described slide block 235, described mechanical arm 231 and described expansion link 233.
Please continue to refer to Fig. 3 to Fig. 4, described positioner 23 is used to comprise the following steps the process that described bushing pipe 21 positions: the main shaft 24 that 1) base 22 described in is set on base 22, described main shaft 24 is perpendicular to the upper surface of described base 22, and be positioned at the center of described base 22, namely the longitudinal centre line of described main shaft 24 and the longitudinal centre line of described base 22 coincide, and described axostylus axostyle 230 is fixed with described main shaft 24 is connected, the longitudinal centre line of described axostylus axostyle 230 and the longitudinal centre line of described main shaft 24 are coincided, preferably, in the present embodiment, described axostylus axostyle 230 is fixedly connected with by pin key with described main shaft 24, like this, namely described positioner 23 is installed on described pedestal 22, meanwhile, carried out by described bushing pipe 21 just installing, after installing, ensure that described expansion link 233 is come in and gone out complete retracted state, namely described expansion link 233 is not protruding.2) opening described 3rd motor 238 drives described expansion link 233 to travel forward step by step, until the described stop inductor 234 being positioned at described expansion link 233 front end contacts with the inwall of described bushing pipe 21, described stop inductor 234 is triggered and controls described 3rd motor 238 and stops driving described expansion link 233 to move forward, and controls described 3rd motor 238 and drive described expansion link 233 to regain completely; Meanwhile, described pedometer 239 records the total step number that described in this process, expansion link 233 stretches out.3) open the second motor 237, described second motor 237 drives described mechanical arm 231 to rotate a certain angle, and preferably, in the present embodiment, the angle that described mechanical arm 231 once rotates is 30 °; Described mechanical arm 231 is rotated in place rear repetition step 2).4) step 3 is repeated) until described mechanical arm 231 rotates a circle.After whole process completes, described pedometer 239 records the step count data that 12 groups correspond to diverse location, adjusts accordingly, namely complete the location to described bushing pipe 21 in a plane according to the installation site of these data to described bushing pipe 21.
After completing the location in an above-mentioned plane, described first motor 236 can be opened, described first motor 236 drives described slide block 235 to drive described mechanical arm 231, described fixed cell 232, described expansion link 233 and described stop inductor 234 rise/fall to certain altitude, and repeat above-mentioned in one plane to the step that described bushing pipe 21 is located, the location in another plane can be completed.Meanwhile, can according to the actual needs, described first motor 236 drives described slide block 235 to required differing heights, and Different Plane positions described bushing pipe 21.By described slide block 235 described bushing pipe 21 carried out to the location in Different Plane, the whether run-off the straight of described base 22 and described bushing pipe 21 can be judged according to the data of the record of pedometer 239 described in position fixing process in Different Plane in the process of location.
In sum, the utility model provides a kind of positioner, described positioner can measure bushing pipe a bit apart from the distance at diffusion furnace tube base center by expansion link, then by rotating, can measure respectively at grade bushing pipe described in diverse location place apart from the distance at described diffusion furnace tube base center, while expansion link stretches measurement, the step number that pedometer synchronous recording everywhere expansion link is flexible, after completing the measurement of a week, adjust according to each measurement point pedometer record step number, the location of described bushing pipe can be completed easily; Whole positioning device structure is simple, be easy to operation, and positioning precision is higher, can accurately 0.1mm; Simultaneously, by arranging the slide block that can slide up and down, dynamic positioning system can be with move up and down to corresponding height, the distance of bushing pipe described in Different Plane apart from described base center is measured, the whether run-off the straight of described diffusion furnace tube base and described bushing pipe can be checked.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all without prejudice under spirit of the present utility model and category, can modify above-described embodiment or changes.Therefore, such as have in art and usually know that the knowledgeable modifies or changes not departing from all equivalences completed under the spirit and technological thought that the utility model discloses, must be contained by claim of the present utility model.
Claims (9)
1. a positioner, is characterized in that, described positioner at least comprises: axostylus axostyle, mechanical arm, fixed cell, expansion link and stop inductor;
Described mechanical arm is placed on described axostylus axostyle, can around described axostylus axostyle rotary motion under the effect of external force;
The bottom of described fixed cell is fixed on described mechanical arm, is suitable for fixing described expansion link;
One end of described expansion link is fixed on described fixed cell, can under the effect of external force stretching motion;
Described stop inductor is positioned on described expansion link, is suitable for being triggered when the stretching motion of described expansion link is prevented from.
2. positioner according to claim 1, is characterized in that: described positioner also comprises a slide block, and described slide block set is placed on described axostylus axostyle, and is positioned at the below of described mechanical arm; Described slide block can drive described mechanical arm to move up and down together under the effect of external force.
3. positioner according to claim 2, is characterized in that: described positioner also comprises the first motor, and described first motor is connected with described slide block, is suitable for driving described slide block to move up and down.
4. positioner according to claim 1, is characterized in that: described stop inductor is positioned at described expansion link one end away from described fixed cell.
5. positioner according to claim 1, is characterized in that: described positioner also comprises the second motor, and described second motor is connected with described mechanical arm, is suitable for driving described mechanical arm rotary motion.
6. positioner according to claim 1, is characterized in that: described positioner also comprises the 3rd motor, and described 3rd motor is connected with described expansion link, is suitable for driving described expansion link stretching motion.
7. positioner according to claim 6, is characterized in that: described stop inductor and described 3rd motors connect, and is suitable for controlling described 3rd motor when described stop inductor is triggered and stops driving described expansion link to travel forward.
8. positioner according to claim 1, is characterized in that: the step pitch of described expansion link stretching motion is 0.1mm.
9. positioner according to claim 1, is characterized in that: described positioner also comprises pedometer, and described pedometer is connected with described expansion link, is suitable for recording the flexible step number of described expansion link.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520126507.1U CN204470961U (en) | 2015-03-04 | 2015-03-04 | Positioner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520126507.1U CN204470961U (en) | 2015-03-04 | 2015-03-04 | Positioner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204470961U true CN204470961U (en) | 2015-07-15 |
Family
ID=53626719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520126507.1U Expired - Fee Related CN204470961U (en) | 2015-03-04 | 2015-03-04 | Positioner |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204470961U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109702683A (en) * | 2019-02-19 | 2019-05-03 | 德淮半导体有限公司 | Assembling fixture |
-
2015
- 2015-03-04 CN CN201520126507.1U patent/CN204470961U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109702683A (en) * | 2019-02-19 | 2019-05-03 | 德淮半导体有限公司 | Assembling fixture |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150715 Termination date: 20190304 |