CN109702683A - Assembling fixture - Google Patents
Assembling fixture Download PDFInfo
- Publication number
- CN109702683A CN109702683A CN201910124101.2A CN201910124101A CN109702683A CN 109702683 A CN109702683 A CN 109702683A CN 201910124101 A CN201910124101 A CN 201910124101A CN 109702683 A CN109702683 A CN 109702683A
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- Prior art keywords
- component
- support
- assembling fixture
- support member
- adjustable
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Abstract
A kind of assembling fixture is applied to boiler tube board, including support base, the support base are directly or indirectly mounted to the boiler tube board；Adjustable support member is provided on the support base, the adjustable support member is used to support at least one component in the boiler tube board.The adjustable support member can form good support to the component, dispersed the pressure of the original junction of the component, reduced contact stress, avoid stress it is excessive and caused by fracture.Simultaneously, because of support of the adjustable support member to the component, the component is set to be mounted and held on correct position, it is not in place or because of inclination caused by the reasons such as shaking to avoid component installation, and because being broken caused by inclination by other structures.
Description
Technical field
The present invention relates to field of semiconductor devices, more particularly to a kind of assembling fixture.
Background technique
Boiler tube board is the important equipment of field of semiconductor manufacture.In fabrication of semiconductor device, many technique streams
Journey all carries out at high temperature, for example, be used to Doped ions thermal diffusion process, grow oxide layer thermal oxidation technology and
For eliminating the annealing process of defect.These techniques are typically all to complete in boiler tube board.
Multiple quartz components different in size are installed in boiler tube board.Some of quartz members are not easy to install, machine
Platform inner space limitation, and setting angle is visually not easy to judge, causing these quartz members, to be easy installation not in place,
Contact area number is uneven in installation process, and along with the material and size problem of itself, the length of some components is reachable
The length of 1300mm results in these quartz members and easily damages, leads to scrap of the product.
Therefore, how to guarantee that the integrality of quartz member is urgent problem.
Summary of the invention
Problems solved by the invention is to provide a kind of assembling fixture, avoids the fracture of quartz member.
To solve the above problems, the present invention provides a kind of assembling fixture, it is applied to boiler tube board, including support base, it is described
Support base is directly or indirectly mounted to the boiler tube board；Adjustable support member is provided on the support base, it is described adjustable
Section supporting element is used to support at least one component in the boiler tube board.
Optionally, the adjustable support member is adjustable screw, bolt, button, support plate or support rod.
Optionally, the external shape of the wherein one end shape of the adjustable support member and supporting part on the component
Shape matching, for clamping the component.
Optionally, the adjustable support member quantity is at least one.
Optionally, matcoveredn is set in the adjustable support member.
Optionally, the protective layer is rubber mount or silica gel cushion.
Optionally, the adjustable support member is vertically installed on the support base.
Optionally, the support base is the support ring of circular support ring or cylindrical shape.
Optionally, the shape of the component be straight, arc, L-shaped, rectangular or irregular shape.
Optionally, the material of the component is quartz or glass.
Optionally, the component is thermocouple, tracheae or gas nozzle.
Optionally, assembling fixture further includes flange, inner tube sealing ring, and the flange is mounted on the boiler tube board, institute
It states inner tube sealing ring to be fixed on the flange, the support base is fixed on said inner tube sealing ring.
Compared with prior art, technical solution of the present invention has the advantage that
The support base and the adjustable support member are additionally arranged in the technical program, the adjustable support member can be right
The component forms good support, has dispersed the pressure of the original junction of the component, has reduced contact stress, avoid because
Stress it is excessive and caused by be broken.Meanwhile because support of the adjustable support member to the component, enables the component
It is mounted and held on correct position, it is not in place or because of inclination caused by the reasons such as shaking to avoid component installation,
And the situation because being broken caused by inclination by other structures.
Further, the wherein one end shape of the adjustable support member is matched with the component outer rim, can basis
The shape and structure of the component selects different adjustable support members, thus can satisfy the installation requirements of different components.
Further, protective layer can be set in the adjustable support member, by the ontology of the adjustable support member and
The component is kept apart, so as to avoid the additional injuries to the component.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of boiler tube board；
Fig. 2 is the schematic diagram of outer tube；
Fig. 3 is the scheme of installation of L-shaped quartz member in boiler tube board；
Fig. 4 is the disassemblying structure schematic diagram of assembling fixture embodiment of the present invention；
Fig. 5 is the first example schematic of adjustable support member in the assembling fixture of the embodiment of the present invention；
Fig. 6 is the second example schematic of adjustable support member in assembling fixture of the invention；
Fig. 7 is the third example schematic of adjustable support member in assembling fixture of the invention；
Fig. 8 is the first schematic diagram of the 4th example of adjustable support member in assembling fixture of the invention；
Fig. 9 is the second schematic diagram of the 4th example of adjustable support member in assembling fixture of the invention；
Figure 10 is the first schematic diagram of the 5th example of adjustable support member in assembling fixture of the invention；
Figure 11 is the second schematic diagram of the 5th example of adjustable support member in assembling fixture of the invention.
Specific embodiment
Fig. 1 is the structural schematic diagram of boiler tube board.Boiler tube board includes heater (heater) 1, in heater 1 from outside to
Inside it is successively arranged outer tube (outer tube) 2, inner tube (inner tube) 3, cassette (boat) 4.The cassette 4 can integrally at
Type, the device that need to be heat-treated for carrying wafer etc. are additionally provided with thermal insulation board 8 in the cassette 4.
Fig. 2 is the schematic diagram of outer tube.As can be seen from Figure 2, the outer tube 2 has tube body and bottom.
In conjunction with Fig. 1, Fig. 2 it is found that the bottom of the outer tube 2 is provided with air inlet and exhaust outlet (straight arrows direction in Fig. 1
Indicate gas flow direction).Referring to the left bottom of attached drawing 1, the air inlet leads equipped with gas for the position of the air inlet position
Enter pipe and 5, component 6 nut (ultra torr nut), the component 6 is gas nozzle (gas nozzle), and gas nozzle extends to described
Between inner tube 3 and the cassette 4.The position of the exhaust outlet is referring to the bottom right side of attached drawing 1, and exhaust outlet is equipped with fixture and O shape
Ring (clamp and O ring) 7.2 bottom of outer tube is also equipped with that cascade thermoelectric is even (cascade TC), as shown in figure 1 right side
Shown in component 6, cascade thermoelectric is occasionally extended between said inner tube 3 and the cassette 4.
Above-mentioned gas nozzle (gas nozzle), cascade thermoelectric even (cascade TC) are L-shaped quartz member.Due to machine
The problems such as platform inner space is limited to, it is not in place to cause the easy installation of these components.Along with itself geomery and material
Geological Problems result in these components and easily damage.
Fig. 3 is the scheme of installation of L shape quartz member in boiler tube board.From figure 3, it can be seen that L shape quartz member is only
Only there is support at bottom junctions (i.e. in Fig. 3 at A point), contact support zone is few, and support is unstable, adds boiler tube machine
It the problems such as platform inner space is limited to, results in L shape quartz member and is not easy to be installed in place, or even sent out in installation or use process
, there is phenomena such as bottom protrusion, top is not affixed on tube wall in raw inclination, this has resulted in bottom junctions and has been easy because of contact stress mistake
It is broken greatly, or the collision and friction that occur due to angular displacements with the other structures in boiler tube board, for example, by revolving
The cassette 4 turned is broken.
In order to overcome drawbacks described above, inventor is studied, and support base, the branch is arranged in concurrent boiler tube board now
It is provided with adjustable support member on support seat, the components not easy to install such as gas nozzle, thermocouple in boiler tube board can be carried out
Effective support.
To make the above purposes, features and advantages of the invention more obvious and understandable, with reference to the accompanying drawing to the present invention
Specific embodiment be described in detail.
Fig. 4 is the disassemblying structure schematic diagram of one embodiment of assembling fixture of the present invention.With reference to Fig. 4, assembling fixture includes: method
Blue 9, inner tube sealing ring 10, sealing ring fixing piece 11, support base 12, adjustable support member 13, support base fixing piece 14.The peace
Dress jig is installed on boiler tube board, at least one component 6 being used to support on the boiler tube board.
Wherein, said inner tube sealing ring 10 is fixed on the flange 9 by the sealing ring fixing piece 11；The support
Seat 12 is fixed on said inner tube sealing ring 10 by the support base fixing piece 14；The adjustable support member 13 is adjustably
It is arranged on the support base 12.
In conjunction with Fig. 4,5, the bottom of the component 6 is arranged in the support base 12.The adjustable support member 13 and institute
Support base 12 is stated to be vertically arranged.There is auxiliary section, one end of the adjustable support member 13 is located at described on the support base 12
In auxiliary section, to adjust height.By adjusting height, the adjustable support member 13 can form the component 6 good
Support.
In the present embodiment, the bottom position (with reference to Fig. 1) of board outer tube 2 is arranged in the flange 9, so that the installation is controlled
The position of tool is easily installed gas nozzle and thermocouple.In other embodiments, the flange 9 also be can be set in other positions, heavier
It wants, the position of the assembling fixture changes as the installation site of the component 6 changes.
In the present embodiment, the sealing ring fixing piece 11 can be screw, bolt or buckle.
In the present embodiment, the support base fixing piece 14 can be screw, bolt or buckle.
In the present embodiment, the component 6 includes gas nozzle and thermocouple.In other embodiments, the component 6 can also include
Air inlet pipe or other elements.
In the present embodiment, the component 6 is L-shaped.In other embodiments, the component 6 can also be other shapes, example
Such as, arc, rectangular, even irregular shape.
In the present embodiment, the component 6 is quartz member.In other embodiments, the component 6 can be other materials,
Such as glass etc..
In the present embodiment, the support base 12 can be circular support ring.In other embodiments, the support base 12
Can be other shapes structure, for example, cylindric support ring or other structure of adjustable support member can be installed,
Even, it can be the transformation of board original structure.
In the present embodiment, the support base 12 is installed on board by structures such as the flange 9, said inner tube sealing rings 10
On.In other embodiments, the support base 12 can be installed on board by other mounting structures, it might even be possible to be omitted
The support base 12 is directly installed on boiler tube board by the mounting structures such as flange.
As first example of the present embodiment, as shown in figure 5, the adjustable support member 13 can be screw.The spiral shell
Silk includes screw head and screw rod, wherein the screw head is used to support the component 6, the screw rod end is located at the support base 12
In auxiliary section, auxiliary section is threaded hole at this time.Support of the screw head of screw to the component 6, increases contact area, Neng Goufen
Dissipate the support force of 6 bottom junctions of component (i.e. in Fig. 3 at A point), so as to avoid the component 6 bottom junctions because
Stress is excessive and is broken；And the screw head of screw can enable the component 6 to be mounted and held on correct position, not send out
Raw positional shift or inclination, so as to avoid the collision and friction that may occur between other structures in boiler tube board.
In other embodiments, the adjustable support member 13 can also adjust height by other means, for example, logical
Position adjustment hole, card slot, spring, clamp system etc. are crossed to adjust the position of supporting element.These modes adjusted belong to ability
Field technique personnel are easy to accomplish, are not described in detail herein.
In the present embodiment, the adjustable support member 13 is adjustable height.In other embodiments, described adjustable
Section supporting element 13 can also adjust its position on the support base 12, for example, can be along the radial direction of the support base 12
Direction shift position.
The adjustable support member 13 can also be other structures other than being screw, for example, button, support plate or branch
Strut.It is specific as follows:
As second example of the present embodiment, as shown in fig. 6, the adjustable support member 13 can be support plate 131.Institute
Support plate 131 is stated to be vertically arranged with the support base 12.One end of the support plate 131 is located at the cooperation on the support base 12
In portion.In this example, the auxiliary section is sliding-rail sliding component, and one end of the support plate 131 is connected with the slide block, so as to
To adjust the position on the support base 12 along the sliding rail.By adjusting the support plate 131 in the support base 12
On position, the side of the component 6 can be made to be resisted against in the support plate 131, formed supporting point B.The supporting point B with
The original bottom junctions of the component 6 (i.e. at Fig. 3, the A point in 6) respectively form the component 6 on two positions
Support, and the support force direction of the two positions is mutually perpendicular to, and from both direction, firmly supports the component 6, it will
The component 6 can be mounted and held on correct position, prevent positional shift or inclination, so as to avoid with boiler tube
The collision and friction that may occur between other structures in board, and dispersed the contact force of 6 bottom junctions of component,
Bottom junctions stress so as to avoid the component 6 is excessive and is broken.
As the third example of the present embodiment, as shown in fig. 7, the adjustable support member 13 can be support plate 132.Institute
Stating support plate 132 includes support portion 132b, and the support portion 132b is the L shape to match with 6 shape of component.The support
Plate 132 further includes that the auxiliary section on rod-shaped base portion 132a, the base portion 132a and the support base 12 is cooperatively connected.This example
In, the auxiliary section can be sliding-rail sliding component, have mounting hole and fixture on the sliding block.The bar of the support plate 132
Shape base portion 132a is placed in the mounting hole, and is clamped by the fixture.It is adjustable by the release and clamping of the fixture
The height of the support plate 132, by the movement of sliding block on the slide rail, the adjustable support plate 132 is adjustable in institute
State the position on support base 12.Position and height by adjusting the support plate 132, can make the two sides of the component 6
It is resisted against on the support portion 132b of the support plate 132.
This supporting way in this example, compared with previous examples, the forced position of the component 6 is more, and stress is more
Bonus point dissipates, and further reduced contact stress, meanwhile, the stability of support is also increased, can preferably be pacified the component 6
It fills and is held in the correct position, avoid the fracture of the bottom junctions of the component 6 and the collision friction on top.
In this example, the support portion 132b of the support plate 132 is the L shape to match with 6 shape of component, at it
In his embodiment, according to the difference of the shape and structure of the component 6, the support plate 132 can also include other shapes structure
Support portion, the shape and structure of the support portion of the support plate 132 matches with the shape and structure of the component 6, and the purpose is to give
It gives the component 6 and consolidates good support, for example, arc, rectangular, even irregular shape.
As the 4th example of the present embodiment, as Figure 8-9, the adjustable support member 13 can be support rod 133.
The support rod 133 includes base portion 133a, and the top of the base portion 133a is equipped with curved support slot 133b.The base portion 133a with
Auxiliary section on the support base 12 is cooperatively connected.In this example, the auxiliary section can be mounting hole and fixture.The base portion
133a is placed in the mounting hole, and is clamped by the fixture.By the release and clamping of the fixture, the adjustable branch
The height of strut 133.By adjusting the height of the support rod 133, portion described in the curved support slot 133b support can be made
Part 6.The curved support slot 133b can disperse 6 bottom junctions of component (i.e. in Fig. 3 to the support of the component 6
At A point) support force, the bottom junctions stress so as to avoid the component 6 is excessive and is broken；And the arc is recessed
Slot can enable the component 6 to be mounted and held on correct position, and positional shift or inclination do not occur, so as to avoid
With the collision and friction that may occur between other structures in boiler tube board.
Obvious, according to the difference of the width of the support rod 133 of use, the support rod 133 can also be referred to as
Support plate.
As the 5th example of the present embodiment, as shown in figs. 10-11, the adjustable support member 13 can be supporting element
134.The supporting element 134 includes base portion 134a and clamping section 134b.Cooperation on the base portion 134a and the support base 12
Portion is cooperatively connected.In this example, the auxiliary section can be sliding-rail sliding component, have mounting hole and fixture on the sliding block.Institute
It states base portion 134a to be placed in the mounting hole, and is clamped by the fixture.It is adjustable by the release and clamping of the fixture
The height of the supporting element 134, by the movement of sliding block on the slide rail, the supporting element 134 is adjustable in the support base
Position on 12.By connector connection there are two the clamping section 134b on the base portion 134a, the clamping section 134b is
Arc.There is elastic mechanism on the connector.By the release and clamping of the elastic mechanism, adjustable two clampings
Position of the portion 134b on the base portion 134a, for example, two clamping section 134b can be moved up and down along the base portion 134a,
It can also be rotated around the base portion 134a.Two clamping section 134b can also adjust between distance, for example, using adjust
Screw is saved to adjust distance between the two, alternatively, passing through using the structure for being similar to clip used in daily life
Shaft and wind spring adjust distance between the two.
Height by adjusting the supporting element 134 or the position on the support base 12, adjust the clamping section
Position of the 134b on the base portion 134a, the clamping section 134b is adjusted on a more appropriate position, then, is adjusted
The distance between two clamping section 134b are saved, so that two clamping section 134b is clamped the component 6, and the component 6 is pacified
It fills and is held in the correct position.Clamping of the clamping section 134b to the component 6, can be firmly by the component 6
Stablize in correct position, avoids its collision and friction that may occur with other structures, meanwhile, the contact of retaining part
Area is larger, and is evenly distributed, and has dispersed the support force of 6 bottom junctions of component (i.e. A point in Fig. 3), to avoid
The bottom junctions stress of the component 6 is excessive and is broken.
In this example, there are two the clamping section 134b, and in other embodiments, the clamping section 134b can be three
Or more.
In this example, the clamping section 134b is arc, and in other embodiments, the clamping section 134b can be other
Shape, such as plane, the intersecting plane with angle etc..
Further, in order to guarantee the stability clamped, anti-Slipped Clove Hitch can be set on the clamping face of the clamping section 134b
Structure, for example, non-slip texture or protrusion.
In the present invention, according to actual needs, the adjustable support member 13 can be set to one or more.
Further, according to actual needs, different types of adjustable support member can be selected, for example, it may be above-mentioned
The combination of different types of adjustable support member in embodiment.
Further, the part that the adjustable support member 13 can be integrally formed, can also be by multiple component assemblies
It forms.
Further, the adjustable support member 13 can be metal, be also possible to it is nonmetallic, or by different materials
The assembling parts of matter form.
Further, in order to protect the component 6, protective layer can also be set in the adjustable support member 13, for example,
Rubber mount or silica gel cushion can prevent from drawing for keeping apart the ontology of the adjustable support member 13 and the component 6
Hurt the component 6, also can reduce contact stress.
Although present disclosure is as above, present invention is not limited to this.Anyone skilled in the art are not departing from this
It in the spirit and scope of invention, can make various changes or modifications, therefore protection scope of the present invention should be with claim institute
Subject to the range of restriction.
Claims (12)
1. a kind of assembling fixture is applied to boiler tube board, which is characterized in that including support base, the support base is direct or indirect
Ground is installed on the boiler tube board；Adjustable support member is provided on the support base, the adjustable support member is used to support
At least one component in the boiler tube board.
2. assembling fixture as described in claim 1, which is characterized in that the adjustable support member is adjustable screw or spiral shell
Bolt or button or support plate or support rod.
3. assembling fixture as described in claim 1, which is characterized in that the wherein one end shape of the adjustable support member with
The outer shape matching of supporting part on the component, for component described in clamp standoff.
4. assembling fixture as described in claim 1, which is characterized in that the adjustable support member quantity is at least one.
5. assembling fixture as described in claim 1, which is characterized in that matcoveredn is arranged in the adjustable support member.
6. assembling fixture as claimed in claim 5, which is characterized in that the protective layer is rubber mount or silica gel cushion.
7. assembling fixture as described in claim 1, which is characterized in that the adjustable support member is vertically installed in the support
On seat.
8. assembling fixture as described in claim 1, which is characterized in that the support base is circular support ring or cylindrical shape
Support ring.
9. assembling fixture as described in claim 1, which is characterized in that the shape of the component is straight, arc, L shape, side
Shape or irregular shape.
10. assembling fixture as described in claim 1, which is characterized in that the material of the component is quartz or glass.
11. assembling fixture as described in claim 1, which is characterized in that the component is thermocouple, tracheae or gas nozzle.
12. assembling fixture as described in claim 1, which is characterized in that further include flange, inner tube sealing ring, wherein the method
Orchid is fixed on the boiler tube board, and said inner tube sealing ring is fixed on the flange, and the support base is fixed in described
On seal of tube circle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910124101.2A CN109702683A (en) | 2019-02-19 | 2019-02-19 | Assembling fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910124101.2A CN109702683A (en) | 2019-02-19 | 2019-02-19 | Assembling fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109702683A true CN109702683A (en) | 2019-05-03 |
Family
ID=66264712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910124101.2A Pending CN109702683A (en) | 2019-02-19 | 2019-02-19 | Assembling fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109702683A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2026026278A1 (en) * | 2024-07-29 | 2026-02-05 | 盛美半导体设备(上海)股份有限公司 | Pipe mount/dismount fixture |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200988135Y (en) * | 2006-12-27 | 2007-12-12 | 中芯国际集成电路制造(上海)有限公司 | Quartz tube dismantling auxiliary tool |
| KR100965453B1 (en) * | 2009-12-14 | 2010-06-24 | (주) 대진유압기계 | Pipe jointing tool |
| CN202155683U (en) * | 2011-05-27 | 2012-03-07 | 华西能源工业股份有限公司 | Double screw head bent column pipe clamp |
| CN202360521U (en) * | 2011-12-08 | 2012-08-01 | 中芯国际集成电路制造(上海)有限公司 | Joint fixing device and furnace tube |
| CN203426955U (en) * | 2013-08-20 | 2014-02-12 | 中芯国际集成电路制造(北京)有限公司 | Sealing ring mounting tool of furnace tube reaction cavity automatic blocking door |
| CN204470961U (en) * | 2015-03-04 | 2015-07-15 | 中芯国际集成电路制造(北京)有限公司 | Positioner |
| CN207233709U (en) * | 2017-10-10 | 2018-04-13 | 德淮半导体有限公司 | Quartzy sleeve assembling fixture |
-
2019
- 2019-02-19 CN CN201910124101.2A patent/CN109702683A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200988135Y (en) * | 2006-12-27 | 2007-12-12 | 中芯国际集成电路制造(上海)有限公司 | Quartz tube dismantling auxiliary tool |
| KR100965453B1 (en) * | 2009-12-14 | 2010-06-24 | (주) 대진유압기계 | Pipe jointing tool |
| CN202155683U (en) * | 2011-05-27 | 2012-03-07 | 华西能源工业股份有限公司 | Double screw head bent column pipe clamp |
| CN202360521U (en) * | 2011-12-08 | 2012-08-01 | 中芯国际集成电路制造(上海)有限公司 | Joint fixing device and furnace tube |
| CN203426955U (en) * | 2013-08-20 | 2014-02-12 | 中芯国际集成电路制造(北京)有限公司 | Sealing ring mounting tool of furnace tube reaction cavity automatic blocking door |
| CN204470961U (en) * | 2015-03-04 | 2015-07-15 | 中芯国际集成电路制造(北京)有限公司 | Positioner |
| CN207233709U (en) * | 2017-10-10 | 2018-04-13 | 德淮半导体有限公司 | Quartzy sleeve assembling fixture |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2026026278A1 (en) * | 2024-07-29 | 2026-02-05 | 盛美半导体设备(上海)股份有限公司 | Pipe mount/dismount fixture |
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| PB01 | Publication | ||
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Application publication date: 20190503 |