CN204461864U - A kind of timing corrosion device - Google Patents
A kind of timing corrosion device Download PDFInfo
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- CN204461864U CN204461864U CN201520095097.9U CN201520095097U CN204461864U CN 204461864 U CN204461864 U CN 204461864U CN 201520095097 U CN201520095097 U CN 201520095097U CN 204461864 U CN204461864 U CN 204461864U
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- timing
- alcohol
- corrosion device
- shower nozzle
- corrosion
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Abstract
The utility model relates to a kind of timing corrosion device, comprising: base; From the pillar that described base upwards extends; Be connected to the crossbeam on described pillar top; Be arranged on the sliding support on described crossbeam; For holding the sample frame of substrate sample; For driving the described sample frame vertical drive cylinder of mentioning movement between position and down position in vertical direction, described vertical drive cylinder is arranged on described sliding support, and described sample frame is connected on described vertical drive cylinder; For holding the corrosion case of etchant solution, open top and be arranged on below described crossbeam; Control box, comprises timer, and described control box is electrically connected with described vertical drive cylinder.Preset etching time by timer, make corrosion for several times remain on similar level, thus provide equipment support for successively corroding and studying ganoine thin film along layer depth distribution.
Description
Technical field
The utility model relates to a kind of timing corrosion device.
Background technology
Being widely used of ganoine thin film, the performance impact of its mechanical property to the part being coated with ganoine thin film is very large.There is certain unrelieved stress, particularly ganoine thin film in nearly all film, unrelieved stress other performance on film of film has obvious impact, and large unrelieved stress even can cause the global failure of film.In order to further investigate essence and the impact thereof of film residual stress, need to set up accurate measuring method.
There are some experimental techniques at present by successively peeling off the ganoine thin film of stainless steel-based surface, analyze the distribution of stress along layer depth of ganoine thin film.In the process, need successively to corrode stripping to film.The thicknesses of layers peeled off to make each corrosion is as far as possible consistent, needs the control corrosion rate time.But, also there is no special timing corrosion device at present.
Utility model content
The technical problems to be solved in the utility model is, for the defect not having special timing corrosion device to be used for successively peeling off the ganoine thin film of stainless steel-based surface in prior art, a kind of timing corrosion device is provided, can be used for successively peeling off the ganoine thin film of stainless steel-based surface.
The utility model solves the technical scheme that its technical matters adopts: a kind of timing of structure corrosion device, comprising:
Base;
From the pillar that described base upwards extends;
Be connected to the crossbeam on described pillar top;
Be arranged on the sliding support on described crossbeam;
For holding the sample frame of substrate sample;
For driving the described sample frame vertical drive cylinder of mentioning movement between position and down position in vertical direction, described vertical drive cylinder is arranged on described sliding support, and described sample frame is connected on described vertical drive cylinder;
For holding the corrosion case of etchant solution, open top and be arranged on below described crossbeam;
Control box, comprises timer, and described control box is electrically connected with described vertical drive cylinder.
According to timing corrosion device described in the utility model, described timing corrosion device also comprises the cleaning case be arranged side by side with described corrosion case, be provided with the multiple shower nozzles for cleaning substrate sample in described cleaning case, described sliding support is slidably disposed on described crossbeam.
According to timing corrosion device described in the utility model, described timing corrosion device also comprises for driving the horizontal drive cylinder that crossbeam described in described sliding support slides, and described horizontal drive cylinder is electrically connected with described control box.
According to timing corrosion device described in the utility model, in described corrosion case, be provided with the first beaker.
According to timing corrosion device described in the utility model, described shower nozzle comprises the first sprinkler head and the second sprinkler head, and aspect ratio second sprinkler head of described first sprinkler head is low, and the first sprinkler head tilts upward, and the second sprinkler head tilts down.
According to timing corrosion device described in the utility model, described shower nozzle also comprises the first alcohol shower nozzle and the second alcohol shower nozzle, and the aspect ratio second alcohol shower nozzle of the first alcohol shower nozzle is low, and the first alcohol shower nozzle tilts upward, and the second alcohol shower nozzle is tilted to down.
According to timing corrosion device described in the utility model, described timing corrosion device also comprises multiple valves of the keying for controlling described first sprinkler head, the second sprinkler head, the first alcohol shower nozzle and the second alcohol shower nozzle respectively, and described multiple valve is electrically connected with described control box.
According to timing corrosion device described in the utility model, described timing corrosion device also comprises cleaning fluid tank, and described cleaning fluid tank comprises the water tank for holding water and the alcohol tank for holding alcohol; Described timing corrosion device also comprises the first electric pump for fetching water from described water tank pump and the second electric pump for getting alcohol from described alcohol tank pump, described first electric pump is connected with described first sprinkler head and the second sprinkler head by pipeline, and described second electric pump is connected with described first alcohol shower nozzle and the second alcohol shower nozzle by pipeline.
According to timing corrosion device described in the utility model, on described water tank and alcohol tank, be provided with liquid level observation window.
According to timing corrosion device described in the utility model, described crossbeam is provided with guide frame, described sliding support comprises the sliding part be arranged in described guide frame and the extension extended out from described sliding part, and described vertical drive cylinder is arranged on described extension.
Implement timing corrosion device of the present utility model, there is following beneficial effect: preset etching time by timer, the time of each corrosion can be set, make corrosion for several times remain on similar level, thus provide equipment support for successively corroding and studying ganoine thin film along layer depth distribution.By timing etching apparatus of the present utility model, ganoine thin film can be realized and more successively removed, thus realize the effective measurement to ganoine thin film unrelieved stress.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is described in further detail, in accompanying drawing:
Fig. 1 is the schematic diagram of timing corrosion device in the utility model;
Fig. 2 is the front view of timing corrosion device in the utility model;
Fig. 3 is the side view of timing corrosion device in the utility model.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.
Fig. 1 is the schematic diagram of timing corrosion device 100 in the utility model; Fig. 2 is the front view of timing corrosion device 100 in the utility model; Fig. 3 is the side view of timing corrosion device 100 in the utility model.As Figure 1-3, timing corrosion device 100 of the present utility model comprise base 101, crossbeam 103 between two pillars 102 upwards extending from base 101 and the top being connected to two pillars 102.Crossbeam 103 is provided with guide frame 104, and this guide frame 104 can be gathering sill as shown in the figure, also can be guided way.
Sliding support 105 has been mounted slidably in guide frame 104.This sliding support 105 comprises the sliding part 105a be arranged in the guide frame 104 and extension 105b extended out from sliding part 105a.On sliding support 105, be provided with for driving sliding support 105 along horizontal direction reciprocating horizontal drive cylinder (not shown).On the extension 105b of sliding support 105, be provided with vertical drive cylinder 106.Timing corrosion device 100 also comprises and is connected on vertical drive cylinder 106 and is driven by vertical drive cylinder 106 thus reciprocating sample frame 107 in the vertical direction.The cylinder body of vertical drive cylinder 106 can be fixed on extension 105b, and sample frame 107 is connected to below the piston rod of vertical drive cylinder 106.Surface can be placed in sample frame 107 with the matrix sample (such as, stainless steel sample) of ganoine thin film.
Base 101 is also provided with control box 108.The top of control box 108 is provided with corrosion case 109.But the position of corrosion case 109 is not limited thereto.
The open top of corrosion case 109.The first beaker 111 is placed with in corrosion case 109.First beaker 111 is built with etchant solution.The aqueous hydrogen peroxide solution that this etchant solution can be the potassium hydroxide solution of 5.6mol/l by concentration, potassium oxalate saturated solution and mass ratio are 30% mixes, these three kinds of compositions can have different ratios, and the difference of ratio can cause corrosion speed different.But the solution mixed only understands the ganoine thin film of etched the matrix sample surfaces, and can not etched the matrix sample.
Timing corrosion device 100 also comprises the cleaning case 110 be arranged side by side with corrosion case 109, and corrosion case 109 and cleaning case 110 are all arranged on below crossbeam 103.The open top of this cleaning case 110, bottom is provided with outlet.In cleaning case 110, be provided with the first sprinkler head and the second sprinkler head, wherein aspect ratio second sprinkler head of the first sprinkler head is low, and the first sprinkler head tilts upward, and the second sprinkler head tilts down.The object of such setting is, first, second sprinkler head rinses from above-below direction matrix sample respectively, clean more thorough.Because water can stay on matrix sample surface water stain, in cleaning case 110, being also provided with the first alcohol shower nozzle and the second alcohol shower nozzle, cleaning for spraying alcohol.Can not stay water stain after alcohol volatilization in matrix sample.Similarly, the aspect ratio second alcohol shower nozzle of the first alcohol shower nozzle is low, and the first alcohol shower nozzle tilts upward, and the second alcohol shower nozzle is tilted to down.Also be provided with the second beaker 117 in the below of cleaning case 110, this second beaker 117 is positioned at outlet below, for catching water and the alcohol of outflow.But the utility model is not limited thereto, also the second beaker 117 can be replaced with rising pipe.Timing corrosion device 100 also comprises multiple valves of the keying for controlling the first sprinkler head, the second sprinkler head, the first alcohol shower nozzle and the second alcohol shower nozzle respectively.This multiple valve is electrically connected with control box 108.
Above-described water is pure water, and alcohol is other absolute ethyl alcohol of AG.
Control box 108 is electrically connected with horizontal drive cylinder, vertical drive cylinder 106, drives the action of cylinder and vertical drive cylinder 106 with level of control.Horizontal drive cylinder drives between sample frame 107 corrosion sites in the horizontal direction and cleaning positions and moves, and vertical drive cylinder 106 drives sample frame 107 mentioning between position and down position in vertical direction to move.Control box 108 also comprises timer.
When sample frame 107 is at corrosion sites, vertical drive cylinder 106 drives sample frame 107 to move to down position, thus corrodes in the etchant solution of immersion the first beaker 111.When etching time reaches the predetermined etching time of timer, control box controls vertical drive cylinder 106 and drives sample frame 107 to move upward to mention position, and horizontal drive cylinder drives sliding support 105 to move to cleaning positions from corrosion sites afterwards.Following vertical drive cylinder 106 drives sample frame 107 to move to down position from mentioning position.The valve opening of the first sprinkler head, the second sprinkler head, rinses the matrix sample in sample frame 107.After flush time reaches the predetermined scavenging period of timer, the valve closing of the first sprinkler head, the second sprinkler head, the valve opening of the first alcohol shower nozzle, the second alcohol shower nozzle, rinses the matrix sample in sample frame 107.After flush time reaches the predetermined scavenging period of timer, the valve closing of the first alcohol shower nozzle, the second alcohol shower nozzle.
In order to supply feedwater and alcohol, timing corrosion device 100 also comprises cleaning fluid tank 121.This cleaning fluid tank 121 comprises water tank and alcohol tank, is respectively used to hold water and alcohol.Timing corrosion device 100 also comprises the first electric pump 118 for fetching water from water tank pump and gets the second electric pump 119 of alcohol from alcohol tank pump.First electric pump 118 is connected with the first sprinkler head and the second sprinkler head by pipeline, and the second electric pump 119 is connected with the first alcohol shower nozzle and the second alcohol shower nozzle by pipeline.For the ease of observing the amount of remaining water and alcohol.On water tank and alcohol tank, be provided with liquid level observation window 120.
Preset etching time by timer, the time of each corrosion can be set, make corrosion for several times remain on similar level, thus provide equipment support for successively corroding and studying ganoine thin film along layer depth distribution.By timing etching apparatus of the present utility model, ganoine thin film can be realized and more successively removed, thus realize the effective measurement to ganoine thin film unrelieved stress.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (10)
1. a timing corrosion device, is characterized in that, comprising:
Base;
From the pillar that described base upwards extends;
Be connected to the crossbeam on described pillar top;
Be arranged on the sliding support on described crossbeam;
For holding the sample frame of substrate sample;
For driving the described sample frame vertical drive cylinder of mentioning movement between position and down position in vertical direction, described vertical drive cylinder is arranged on described sliding support, and described sample frame is connected on described vertical drive cylinder;
For holding the corrosion case of etchant solution, open top and be arranged on below described crossbeam;
Control box, comprises timer, and described control box is electrically connected with described vertical drive cylinder.
2. timing corrosion device according to claim 1, it is characterized in that, described timing corrosion device also comprises the cleaning case be arranged side by side with described corrosion case, and be provided with the multiple shower nozzles for cleaning substrate sample in described cleaning case, described sliding support is slidably disposed on described crossbeam.
3. timing corrosion device according to claim 2, is characterized in that, described timing corrosion device also comprises for driving the horizontal drive cylinder that crossbeam described in described sliding support slides, and described horizontal drive cylinder is electrically connected with described control box.
4. timing corrosion device according to claim 1, is characterized in that, is provided with the first beaker in described corrosion case.
5. timing corrosion device according to claim 2, is characterized in that, described shower nozzle comprises the first sprinkler head and the second sprinkler head, and aspect ratio second sprinkler head of described first sprinkler head is low, and the first sprinkler head tilts upward, and the second sprinkler head tilts down.
6. timing corrosion device according to claim 5, it is characterized in that, described shower nozzle also comprises the first alcohol shower nozzle and the second alcohol shower nozzle, and the aspect ratio second alcohol shower nozzle of the first alcohol shower nozzle is low, and the first alcohol shower nozzle tilts upward, the second alcohol shower nozzle is tilted to down.
7. timing corrosion device according to claim 6, it is characterized in that, described timing corrosion device also comprises multiple valves of the keying for controlling described first sprinkler head, the second sprinkler head, the first alcohol shower nozzle and the second alcohol shower nozzle respectively, and described multiple valve is electrically connected with described control box.
8. timing corrosion device according to claim 6, is characterized in that, described timing corrosion device also comprises cleaning fluid tank, and described cleaning fluid tank comprises the water tank for holding water and the alcohol tank for holding alcohol; Described timing corrosion device also comprises the first electric pump for fetching water from described water tank pump and the second electric pump for getting alcohol from described alcohol tank pump, described first electric pump is connected with described first sprinkler head and the second sprinkler head by pipeline, and described second electric pump is connected with described first alcohol shower nozzle and the second alcohol shower nozzle by pipeline.
9. timing corrosion device according to claim 8, is characterized in that, on described water tank and alcohol tank, is provided with liquid level observation window.
10. timing corrosion device according to claim 3, it is characterized in that, described crossbeam is provided with guide frame, described sliding support comprises the sliding part be arranged in described guide frame and the extension extended out from described sliding part, and described vertical drive cylinder is arranged on described extension.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520095097.9U CN204461864U (en) | 2015-02-10 | 2015-02-10 | A kind of timing corrosion device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520095097.9U CN204461864U (en) | 2015-02-10 | 2015-02-10 | A kind of timing corrosion device |
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| Publication Number | Publication Date |
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| CN204461864U true CN204461864U (en) | 2015-07-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520095097.9U Expired - Fee Related CN204461864U (en) | 2015-02-10 | 2015-02-10 | A kind of timing corrosion device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110255635A (en) * | 2019-06-28 | 2019-09-20 | 孝感市爱普丽生电子科技有限公司 | A kind of medical use liquid reagent is automatically for heat-extraction system and purification device |
-
2015
- 2015-02-10 CN CN201520095097.9U patent/CN204461864U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110255635A (en) * | 2019-06-28 | 2019-09-20 | 孝感市爱普丽生电子科技有限公司 | A kind of medical use liquid reagent is automatically for heat-extraction system and purification device |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150708 Termination date: 20160210 |
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| CF01 | Termination of patent right due to non-payment of annual fee |