CN204455327U - A kind of device of electrophoretic deposition ceramic green - Google Patents
A kind of device of electrophoretic deposition ceramic green Download PDFInfo
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- CN204455327U CN204455327U CN201520002964.XU CN201520002964U CN204455327U CN 204455327 U CN204455327 U CN 204455327U CN 201520002964 U CN201520002964 U CN 201520002964U CN 204455327 U CN204455327 U CN 204455327U
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- 239000000919 ceramic Substances 0.000 title claims abstract description 68
- 238000001652 electrophoretic deposition Methods 0.000 title abstract description 37
- 239000002002 slurry Substances 0.000 claims abstract description 143
- 238000001962 electrophoresis Methods 0.000 claims abstract description 64
- 239000007788 liquid Substances 0.000 claims description 37
- 238000005303 weighing Methods 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 14
- 230000002457 bidirectional effect Effects 0.000 claims description 13
- 238000002156 mixing Methods 0.000 claims description 11
- 230000008021 deposition Effects 0.000 claims description 9
- 238000000034 method Methods 0.000 abstract description 22
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000004260 weight control Methods 0.000 abstract description 3
- -1 two-way pump Substances 0.000 abstract description 2
- 235000008733 Citrus aurantifolia Nutrition 0.000 abstract 1
- 235000011941 Tilia x europaea Nutrition 0.000 abstract 1
- 239000004571 lime Substances 0.000 abstract 1
- 238000007667 floating Methods 0.000 description 7
- 239000011449 brick Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 230000037396 body weight Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000462 isostatic pressing Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- XEBWQGVWTUSTLN-UHFFFAOYSA-M phenylmercury acetate Chemical compound CC(=O)O[Hg]C1=CC=CC=C1 XEBWQGVWTUSTLN-UHFFFAOYSA-M 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
The utility model discloses a kind of device of electrophoretic deposition ceramic green, its device comprises tray die, pallet weighed quantity sensor, electrophoresis chamber, transfer lime, two-way pump, slurry tank, slurry tank weight sensor, slurry vortex mixer, return line, digital instrument and Controlling System and working power.The utility model obtains the instant change information of the slurry in electrophoretic deposition process by weighting manner, thus accurately judge the weight of ceramic green, the utility model efficiently solves the problem of electrophoretic deposition ceramic green weight control difficulty, problem prepared by the continuous batch also solving ceramic green, and the different and problem of the ceramic green uneven thickness caused of slurry difference of densities.The device that the utility model adopts is simple, it is little to drop into, operation controls programmable, is highly suitable for electrophoretic deposition ceramic batch automatic production.
Description
Technical Field
The utility model relates to a pottery electrophoresis deposition shaping technical field specifically relates to a device of electrophoresis deposition pottery unburned bricks.
Background
Electrophoretic deposition is an important field of ceramic forming technology, and has the advantages of simple equipment, high forming speed, large-scale production and the like. The principle of electrophoretic deposition of ceramics is: charged ceramic particles or colloids suspended in a liquid solvent move under the action of an electric field to the surface of an oppositely charged electrode and form a deposited layer. Compared with the traditional mould pressing and isostatic pressing forming technologies, the electrophoretic deposition can avoid the problem of oriented arrangement of ceramic grains under the action of pressure, thereby avoiding anisotropy of physical and chemical properties of the ceramic product, which is particularly important for advanced functional ceramics requiring consistent physical and chemical properties. Because of the unique advantages of electrophoretic deposition ceramics in terms of their formation, electrophoretic deposition has attracted considerable attention in terms of the preparation of advanced functional ceramics.
In the electrophoretic deposition process, ceramic particles suspended in the slurry are deposited on the surface of an electrode, the density of the slurry is continuously reduced, and the total amount of the slurry is also reduced. This makes it very difficult to determine the actual weight of the ceramic green body by measuring only the floating weight of the green body. Particularly, in the occasions requiring high dimensional accuracy of ceramic products, the problem directly results in the generation of a plurality of waste products. Meanwhile, the slurry also causes density difference between the upper and lower parts under the action of gravity, thereby causing thickness unevenness of the ceramic green body. In addition, the volume of the electrophoresis tank is limited, and a single electrophoretic deposition can cause large change of the density of the slurry, so that the slurry needs to be replaced, and the continuous batch production is not suitable.
Chinese patent CN200510063084.4 discloses a functional ceramic material and a preparation method of a piezoelectric ceramic film in the technical field of manufacturing thereof. The method utilizes an electrophoretic deposition method to obtain the ceramic membrane, but the method does not consider the influence caused by the density change of slurry in the electrophoretic deposition process, can not control the weight and thickness uniformity of the ceramic green body, and can not meet the requirement of continuous batch preparation. In addition, chinese patent CN102345125A discloses a method for preparing a titanium-silicon-aluminum-carbon ceramic coating by electrophoretic deposition, which only makes a principle demonstration of an electrophoretic deposition device, and does not consider how to solve the problem caused by the density change of slurry, and how to solve the problem of continuous batch preparation of ceramic green compacts.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects of the prior art, the utility model aims to provide a device of electrophoretic deposition ceramic green body, this device acquires the change of thick liquids initial and deposition process weight through weighing transducer, adopts less and simple instrument equipment and programmed operation method, solves the problem that leads to ceramic green body weight to be difficult to control because of thick liquids change in the electrophoretic deposition process to guarantee to obtain the unanimous ceramic green body goods of target weight in continuous electrophoretic deposition technology.
In order to solve the technical problem, the utility model discloses a technical scheme is:
an apparatus for electrophoretically depositing a green ceramic body, comprising: the tray mould is placed in the electrophoresis tank and used for electrophoretically depositing ceramic green bodies, and positive and negative electrodes of the control system and the working power supply are connected with the tray mould and the electrophoresis tank; the tray weight sensor is used for weighing the tray mould, the slurry tank weight sensor is used for weighing the slurry tank, the tray weight sensor and the slurry tank weight sensor are both connected with a digital instrument, and the digital instrument is connected with a control system and a working power supply; the bidirectional pump is connected with the bottom of the electrophoresis tank and the bottom of the slurry tank through a conveying pipe, and the return pipe is connected with a liquid discharge port at the top of the electrophoresis tank and a liquid inlet at the top of the slurry tank.
The tray mould is a combination of a tray and a mould, the tray and the mould are mutually fixed, the ceramic green body is deposited on the surface of the mould, and the tray mould is made of a conductive material and is connected with a control system and a positive electrode or a negative electrode (opposite to the electrification of ceramic particles in the slurry) of a working power supply.
The cavity of the electrophoresis tank is made of conductive materials, and is connected with the control system and the negative electrode or the positive electrode (the same as the electrification of the ceramic particles in the slurry) of the working power supply to be used as a cathode or an anode. The bottom of the electrophoresis tank is provided with a liquid inlet, and the top of the electrophoresis tank is provided with a liquid outlet. In the electrophoretic deposition process, the slurry flows upwards from the bottom, so that the density difference between the upper part and the lower part of the slurry can be eliminated, and the ceramic green body with uniform thickness is obtained.
The volume of the slurry tank is larger than that of the electrophoresis tank, so that the slurry tank can contain more slurry than the electrophoresis tank; the amount of the contained slurry can meet the requirement of multiple electrophoretic deposition, and liquid inlets are formed in the bottom and the top of the slurry tank; the height of the liquid inlet at the top of the slurry tank is lower than that of the liquid outlet at the top of the electrophoresis tank, so that the slurry can flow back conveniently.
The slurry mixing device is installed on the slurry tank and used for mixing the slurry in the slurry tank uniformly so as to ensure the uniformity of the density of the slurry in the slurry tank.
The slurry mixer is a stirrer or an ultrasonic vibrator, or the combination of the stirrer and the ultrasonic vibrator.
The digital instrument is a weight display or a data acquisition unit, is connected with the tray weight sensor and the slurry tank weight sensor, is connected with the control system and the working power supply, and can be communicated with the control system.
The control system and the working power supply comprise a control system, a working power supply and a related human-computer interface, are connected with the digital instrument, and provide working voltage required in electrophoretic deposition for the tray mould and the electrophoretic bath. The control system can obtain the initial weight of the slurry, the initial weight of the tray mould and the floating weight (the floating weight is the weight obtained by subtracting the discharged slurry from the actual weight) of the tray mould through a digital instrument, and the real-time floating weights of the tray mould and the ceramic green body in the electrophoretic deposition process, and then calculate the real-time change of the density of the slurry according to the information, thereby accurately controlling the weight of the ceramic green body.
The utility model has the advantages of it is following:
1. the utility model discloses an electrophoretic deposition pottery unburned bricks device includes tray mould, tray weighing transducer, the electrophoresis tank, the conveyer pipe, the bilateral pump, the thick liquids jar, thick liquids jar weighing transducer, the agitator, the back flow, digital instrument and control system and working power supply, be connected with tray mould and thick liquids jar respectively through weighing transducer, control system acquires the instant change information of the thick liquids of electrophoretic deposition in-process through the mode of weighing, can accurately judge the weight of ceramic unburned bricks, simple structure is reliable, the equipment input cost is low.
2. The utility model discloses a can store a large amount of thick liquids in the thick liquids jar, can compensate the restriction that the electrophoresis tank volume is little to once fill thick liquids alright prepare ceramic unburned bricks in batches. In addition, the height of the liquid inlet at the top of the slurry tank is lower than that of the liquid outlet at the top of the electrophoresis tank, when the slurry is conveyed into the electrophoresis tank from the slurry tank by the bidirectional pump to reach the required amount, the excessive slurry in electrophoresis automatically flows back into the slurry tank, and the slurry can be recycled.
3. The utility model discloses a slurry mixing machine, slurry mixing machine can be agitator, ultrasonic vibrator or agitator and ultrasonic vibrator's combination, and it is installed on the thick liquids jar, and thick liquids are in the process of a mixing all the time in the thick liquids jar to make the density distribution of thick liquids in the thick liquids jar even. Meanwhile, in the process of electrophoretic deposition, slurry flows upwards from the bottom of the electrophoresis tank, so that the density difference between the upper part and the lower part of the slurry is eliminated, and the ceramic green body with uniform thickness can be obtained through electrophoretic deposition.
Drawings
Fig. 1 is a schematic structural diagram of the electrophoretic deposition ceramic green body device of the present invention.
The labels in the figure are: the device comprises a tray die 1, a tray weight sensor 2, an electrophoresis tank 3, a slurry 4, a ceramic green body 5, a delivery pipe 6, a bidirectional pump 7, a slurry tank 8, a slurry tank weight sensor 9, a slurry mixer 10 (a stirrer or an ultrasonic vibrator or a combination of the stirrer and the ultrasonic vibrator), a return pipe 11, a digital instrument 12 (a weight display or a data acquisition unit) and a control system and a working power supply 13.
Detailed Description
The present invention will be further described with reference to the following examples, but the present invention is not limited to the following examples, which are conventional unless otherwise specified, and the materials are commercially available from the public unless otherwise specified.
Example 1
As shown in fig. 1, the apparatus for electrophoretically depositing a ceramic green body in this embodiment includes a tray mold 1, a tray weight sensor 2, an electrophoresis tank 3, a delivery pipe 6, a bidirectional pump 7, a slurry tank 8, a slurry tank weight sensor 9, a slurry mixer 10 (stirrer), a return pipe 11, a weight display 12, a control system and a working power supply 13. The tray mould 1 comprises a tray and a mould, the ceramic green body 5 is deposited on the mould, the tray is used for fixing the mould for weighing (note: the tray and the mould can be fixed by a conventional method, such as threaded connection, welding and the like); the tray weight sensor 2 is used for weighing the tray die 1, and the slurry tank weight sensor 9 is used for weighing the slurry tank 8; the bottom of the electrophoresis tank 3 is communicated with the bottom of the slurry tank 8 through a conveying pipe 6 and a bidirectional pump 7, one end of a return pipe 11 is connected with a liquid outlet at the top of the electrophoresis tank 3, and the other end of the return pipe is connected with a liquid inlet at the top of the slurry tank 8.
The volume of the slurry tank 8 is larger than that of the electrophoresis tank 3, so that the slurry tank can contain more slurry than the electrophoresis tank; the height of a liquid inlet at the top of the slurry tank 8 is lower than that of a liquid outlet at the top of the electrophoresis tank 3, so that the slurry 4 can flow back conveniently; the slurry mixer 10 (stirrer) is installed on the slurry tank 8 and is used for mixing and homogenizing the slurry 4 in the slurry tank 8 so as to eliminate density difference inside the slurry.
The control system and working power supply 13 comprises a control system, a working power supply and a related human-computer interface, wherein the control system (note: the control system can adopt a conventional control system, such as a PLC control system, a DCS control system or an upper computer, etc.) is communicated with the weight display 12; the positive and negative poles of the working power supply are respectively connected with the anode (tray mould) and the cathode (electrophoresis tank) of the electrophoresis deposition device.
The tray mould 1 is placed in the electrophoresis tank 3, the ceramic suspended particles in the slurry 4 are negatively charged, migrate to the anode under the action of an electric field and deposit on the surface of the mould to form a ceramic green body 5. The slurry in the electrophoresis tank is provided by a slurry tank, when the bidirectional pump rotates forwards, the slurry is conveyed to the electrophoresis tank, and the slurry at the top of the electrophoresis tank flows back to the slurry tank through a pipeline; when the bi-directional pump is reversed, the slurry from the electrophoresis tank can be pumped back into the slurry tank. The tray weight sensor and the slurry tank weight sensor are both connected to a weight display 12, and the digital instrument 12 is connected to a control system and a working power supply 13.
Example 2
As shown in fig. 1, the apparatus for electrophoretically depositing a ceramic green body in this embodiment includes a tray mold 1, a tray weight sensor 2, an electrophoresis tank 3, a delivery pipe 6, a bidirectional pump 7, a slurry tank 8, a slurry tank weight sensor 9, a slurry mixer 10 (ultrasonic vibrator), a return pipe 11, a digital instrument 12 (data collector), a control system and a working power supply 13. The tray mould 1 comprises a tray and a mould, wherein the ceramic green body 5 is deposited on the mould, and the tray is used for supporting the mould to facilitate weighing (note: the tray and the mould can be fixed in a threaded connection way, a welding way and the like); the tray weight sensor 2 is used for weighing the tray die 1, and the slurry tank weight sensor 9 is used for weighing the slurry tank 8; the bottom of the electrophoresis tank 3 is communicated with the bottom of the slurry tank 8 through a conveying pipe 6 and a bidirectional pump 7, one end of a return pipe 11 is connected with a liquid outlet at the top of the electrophoresis tank 3, and the other end of the return pipe is connected with a liquid inlet at the top of the slurry tank 8.
The volume of the slurry tank 8 is larger than that of the electrophoresis tank 3, so that the slurry tank can contain more slurry than the electrophoresis tank; the height of a liquid inlet at the top of the slurry tank 8 is lower than that of a liquid outlet at the top of the electrophoresis tank 3, so that the slurry 4 can flow back conveniently; the ultrasonic vibrator 10 is installed on the slurry tank 8 (injection: the ultrasonic vibrator is installed at the bottom of the slurry tank with the optimal effect) and is used for uniformly mixing the slurry 4 in the slurry tank 8 so as to eliminate the density difference inside the slurry.
Control system and working power supply 13 comprises a control system, a working power supply and a relevant human-computer interface, wherein the control system (such as a PLC control system, a DCS control system or an upper computer) is communicated with data acquisition unit 12; the positive and negative poles of the working power supply are respectively connected with the cathode (tray mould) and the anode (electrophoresis tank) of the electrophoresis deposition device.
The ceramic suspended particles in the slurry 4 are positively charged, migrate to the cathode under the action of an electric field and deposit on the surface of the mold to form a ceramic green body 5. The slurry in the electrophoresis tank is provided by a slurry tank, when the bidirectional pump rotates forwards, the slurry is conveyed to the electrophoresis tank, and the slurry at the top of the electrophoresis tank flows back to the slurry tank through a pipeline; when the bi-directional pump is reversed, the slurry from the electrophoresis tank can be pumped back into the slurry tank.
Weight control method for ceramic green body
The following further describes the weight control method of the green electrophoretically deposited ceramic body provided by the utility model on the basis of examples 1 and 2, and the specific steps and principle are described as follows:
firstly, the bidirectional pump 7 is started to reversely rotate, and the slurry in the electrophoresis tank 3 is pumped back to the slurry tank until the slurry in the electrophoresis tank 3Completely pumping out, weighing the weight of the slurry in the slurry tank(not including the mass of the slurry tank, total weight minus tare weight of the slurry tank).
(II) putting the tray mould 1 into the electrophoresis tank 3, and weighing the weight of the tray mould 1(tray mould, is formed by tray and mould connection, and the ceramic unburned bricks deposit on the mould, and the tray is used for the fixed mould convenient to weigh).
And (III) starting the bidirectional pump 7 to rotate positively to convey the slurry to the electrophoresis tank until the slurry flows back to the slurry tank from the top of the electrophoresis tank, and weighing the floating weight of the tray mold 1(float weight, which means the weight of the slurry itself minus the weight of the discharged slurry) from which the pre-deposition density of the slurry can be derived:
(1)
Wherein,the mould is completely immersed in the slurry for the volume of the tray mould that is submerged by the slurry, and for the same type of tray mould this value is a fixed value, which can also be measured by conventional methods (for example by draining or by calculation from dimensional measurements) and entered as a parameter into the control system programIn (1). By combining the formula (1), the deposition precursor volume of the slurry can be easily determined:
(2)
(IV) operating a digital instrument (weight display or data acquisition unit) to peel off the tray mould so as to measure the floating weight of the ceramic green body in the electrophoretic deposition processThe increase in basis weight, which actually includes the self-tare weight of the ceramic green body and the increase in tray mold tare weight due to the decrease in slurry density, is referred to herein simply as the tare weight of the ceramic green body). Setting a ceramic green body weight target value in a control system(in the production process, the weight of the ceramic green body to be deposited on the mold), and the float weight of the ceramic green body is calculated by the control program. The following formula is readily available according to Archimedes' law:
(3)
wherein,the density of the slurry at which the electrophoretic deposition is performed,is the volume of the ceramic green body,can be obtained by the following formula:
(4)
experiments prove that for a determined slurry system, under the same electrophoretic deposition process condition, the density of the obtained ceramic green bodyFor a fixed value (which can also be measured by conventional methods, such as the drainage method, and entered as a parameter into the control system program), the following can be determined:
(5)
by combining the formulae (2) to (5), the compoundsAndthe relationship of (1) is:
(6)
in the formula,as setting parameters of a control system program;、andrespectively obtaining the weight through a weight display according to the steps (a) to (b);andactually measuring in advance according to a conventional method and using the measured values as input parameters of a control system program; and calculate out。
(V) controlling the power supply to start electrophoretic deposition by the operation control system, and when the floating weight increment of the ceramic green body and the tray mold reaches the target valueAnd when the electrophoresis tank is used, the control system controls the working power supply to be powered off, the electrophoresis deposition is automatically stopped, or the alarm prompt adopts a manual operation mode to stop the electrophoresis deposition.
And (VI) after the ceramic green bodies are deposited, replacing the tray mould, and repeating the processes (I) to (V) to continuously prepare the ceramic green bodies, so that the ceramic green bodies subjected to electrophoretic deposition can meet the target weight each time. In addition, from the second electrophoretic deposition,or can be used for the last time through the control systemWith the last timeAnd subtracting to obtain the final product.
The utility model discloses effectively solved because of the electrophoretic deposition in-process thick liquids total amount and density change and lead to ceramic unburned bricks weight to be difficult to control's problem, the device of adoption is simple moreover, drop into for a short time, operation control method programmable, is applicable to electrophoretic deposition ceramic batch automated production very much.
Claims (5)
1. An apparatus for electrophoretically depositing a green ceramic body, comprising: the electrophoresis device comprises a tray mould (1), a tray weight sensor (2), an electrophoresis tank (3), a conveying pipe (6), a bidirectional pump (7), a slurry tank (8), a slurry tank weight sensor (9), a backflow pipe (11), a digital instrument (12), a control system and a working power supply (13), wherein the tray mould (1) is placed in the electrophoresis tank (3) and used for carrying out electrophoresis deposition on ceramic green bodies, and the positive pole and the negative pole of the control system and the working power supply (13) are connected with the tray mould (1) and the electrophoresis tank (3); the tray weight sensor (2) is used for weighing the tray die (1), the slurry tank weight sensor (9) is used for weighing the slurry tank (8), the tray weight sensor (2) and the slurry tank weight sensor (9) are both connected with a digital instrument (12), and the digital instrument (12) is connected with a control system and a working power supply (13); the bidirectional pump (7) is connected with the bottom of the electrophoresis tank (3) and the bottom of the slurry tank (8) through a conveying pipe (6), and the return pipe (11) is connected with a liquid discharge port at the top of the electrophoresis tank (3) and a liquid inlet at the top of the slurry tank (8).
2. The apparatus of claim 1, wherein: the tray mould (1) is a combination of a tray and a mould, the tray and the mould are mutually fixed, and the ceramic green body is deposited on the surface of the mould.
3. The apparatus of claim 1, wherein: the volume of the slurry tank (8) is larger than that of the electrophoresis tank (3), so that the slurry tank can contain more slurry than the electrophoresis tank; the height of the liquid inlet at the top of the slurry tank (8) is lower than that of the liquid outlet at the top of the electrophoresis tank (3), so that the slurry can flow back conveniently.
4. The apparatus of claim 1, wherein: the slurry mixing device is characterized by further comprising a slurry mixing device (10), wherein the slurry mixing device (10) is installed on the slurry tank (8) and used for mixing the slurry (4) in the slurry tank (8) uniformly.
5. The apparatus of claim 4, wherein: the slurry mixer (10) is a stirrer or an ultrasonic vibrator, or the combination of the stirrer and the ultrasonic vibrator.
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CN201520002964.XU CN204455327U (en) | 2015-01-05 | 2015-01-05 | A kind of device of electrophoretic deposition ceramic green |
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CN201520002964.XU CN204455327U (en) | 2015-01-05 | 2015-01-05 | A kind of device of electrophoretic deposition ceramic green |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107346721A (en) * | 2017-08-22 | 2017-11-14 | 锦州华光电子管有限公司 | Electron tube can cut down part sealing-in bead technique and special equipment |
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2015
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107346721A (en) * | 2017-08-22 | 2017-11-14 | 锦州华光电子管有限公司 | Electron tube can cut down part sealing-in bead technique and special equipment |
CN107346721B (en) * | 2017-08-22 | 2023-05-09 | 锦州华光电子管有限公司 | Process and special equipment for sealing glass beads of valve kovar parts |
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