CN204425633U - A kind of MEMS microphone, MEMS capacitance sensor and a kind of vibrating diaphragm - Google Patents
A kind of MEMS microphone, MEMS capacitance sensor and a kind of vibrating diaphragm Download PDFInfo
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- CN204425633U CN204425633U CN201420741105.8U CN201420741105U CN204425633U CN 204425633 U CN204425633 U CN 204425633U CN 201420741105 U CN201420741105 U CN 201420741105U CN 204425633 U CN204425633 U CN 204425633U
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- 238000010586 diagram Methods 0.000 description 2
- 230000003116 impacting effect Effects 0.000 description 2
- 241000533950 Leucojum Species 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
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Abstract
The utility model discloses a kind of MEMS microphone, MEMS capacitance sensor and a kind of vibrating diaphragm.The vibrating diaphragm that the utility model provides is provided with the bleed structure opened after air pressure outside exceedes preset value.The technical scheme that the utility model provides can solve existing MEMS vibrating diaphragm when to be subject to suddenly large air pressure and to impact as blown, and easily causes damaged problem.
Description
Technical field
The utility model relates to microphone techniques field, particularly relates to a kind of MEMS microphone, MEMS capacitance sensor and a kind of vibrating diaphragm.
Background technology
The vibrating diaphragm of current MEMS microphone is generally single thickness, and is the design of full film.For the vibrating diaphragm of MEMS microphone, demand fulfillment mechanical shock, fall, the performance requirement of the correlation intensity such as air blowing.But the vibrating diaphragm of the MEMS microphone of existing full film design, being subject to large air pressure impact suddenly, during as blown, easily cause the breakage of vibrating diaphragm.
From the above, existing MEMS vibrating diaphragm as blown, easily causes damaged problem when to be subject to suddenly large air pressure and to impact.
Utility model content
The utility model provides a kind of MEMS microphone, MEMS capacitance sensor and a kind of vibrating diaphragm.The technical scheme that the utility model provides can solve existing MEMS vibrating diaphragm when to be subject to suddenly large air pressure and to impact as blown, and easily causes damaged problem.
The utility model discloses a kind of vibrating diaphragm, described vibrating diaphragm is provided with the bleed structure opened after air pressure outside exceedes preset value.
Optionally, the number of described bleed structure is N number of; Wherein N be less than or equal to 50 natural number.
Optionally, described N number of bleed structure is evenly distributed on the edge of described vibrating diaphragm.
Optionally, the cross section of described bleed structure is smoothed curve.
Optionally, described bleed structure comprises V-type, C type, S Xing, Swastika type or X-type.
Optionally, described bleed structure is
type, or described bleed structure is
type.
Optionally, the width range of the cross section of institute's bleed structure is 0.1um ~ 10um.
Optionally, the length range of the cross section of institute's bleed structure is 1um ~ 200um.
The invention also discloses a kind of MEMS capacitance sensor, the vibrating diaphragm of described MEMS capacitance sensor adopts the vibrating diaphragm described in above-mentioned any one.
The invention also discloses a kind of MEMS microphone, described MEMS microphone comprises above-mentioned MEMS capacitance sensor.
In sum; in technical scheme provided by the utility model; by arranging bleed structure on the vibrating diaphragm of MEMS microphone; make vibrating diaphragm can when being subject to large air pressure and impacting; can realize losing heart; thus protection vibrating diaphragm does not damage because large air pressure impacts, thus solving existing MEMS vibrating diaphragm when to be subject to suddenly large air pressure and to impact as blown, easily causing damaged problem.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of vibrating diaphragm in the utility model;
Fig. 2 is the cutaway view under normal circumstances of vibrating diaphragm shown in Fig. 1;
Fig. 3 is the cutaway view that vibrating diaphragm shown in Fig. 1 is hit in situation;
Fig. 4 is the cross section enlarged diagram of bleed structure shown in Fig. 1;
Fig. 5 is the structural representation of a kind of MEMS capacitance sensor in the utility model.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearly, do also to describe in detail to the utility model execution mode below in conjunction with accompanying drawing.
In order to achieve the above object, the technical solution of the utility model is achieved in that
Fig. 1 is the structural representation of a kind of vibrating diaphragm in the utility model, and Fig. 2 is the cutaway view under normal circumstances of vibrating diaphragm shown in Fig. 1.Fig. 3 is the cutaway view that vibrating diaphragm shown in Fig. 1 is hit in situation.Shown in Figure 1, vibrating diaphragm 10 is provided with the bleed structure 101 opened after air pressure outside exceedes preset value.
In a kind of embodiment of the present utility model, described bleed structure is the gap running through vibrating diaphragm 10 be arranged on vibrating diaphragm 10.Shown in Fig. 2 and Fig. 3, in the condition of normal use, there is not deformation in vibrating diaphragm 10 relative smooth of bleed structure 101 both sides; Impacted, as outer air pressure exceed preset value time, there is deformation in the vibrating diaphragm 10 of bleed structure 101 both sides, make the gap of bleed structure 101 become large, make pressure release more rapidly, thus protection vibrating diaphragm 10 is not impacted by air pressure and damages.
In a kind of embodiment of the present utility model, after air pressure exceedes preset value outside, vibrating diaphragm 10 can be protected better, can N number of bleed structure 101 be set on vibrating diaphragm 10.Wherein N be less than or equal to 50 natural number.
In a kind of embodiment of the present utility model, in order to the service behaviour of vibrating diaphragm can be ensured better, N number of bleed structure 101 can be evenly distributed on the edge of vibrating diaphragm 10.Namely in the present embodiment, the integrality of vibrating diaphragm 10 mid portion can be ensured, when not affecting the normal use of vibrating diaphragm 10; can outer air pressure when increasing; bleed structure 101 can lead to and loses heart fast, reduces outer air pressure to the impact of vibrating diaphragm 10, thus can protect vibrating diaphragm 10 better.
In a kind of embodiment of the present utility model, the cross section of bleed structure 101 is smoothed curve.In above-described embodiment of the present utility model, cross section is that the advantage of smoothed curve is, under can ensureing the state opened at bleed structure 101, can not affect the normal use of vibrating diaphragm 10.
Fig. 4 is the cross section enlarged diagram of bleed structure shown in Fig. 1.
In a kind of embodiment of the present utility model, bleed structure 101 comprises V-type, C type, S Xing, Swastika type or X-type.
In a kind of embodiment of the present utility model, bleed structure 101 is
type, or described bleed structure is
type.
In above-described embodiment of the present utility model, when ensureing that vibrating diaphragm 10 can normally use, bleed structure 101 can also be arranged to other shapes, as snowflake type, ox horn type etc.
In a kind of specific embodiment of the present utility model, when ensureing that vibrating diaphragm 10 can normally use, the width range of the cross section of bleed structure 101 is 0.1um ~ 10um.In the present embodiment, the width of the cross section of bleed structure 101 refers to the width in the gap on corresponding vibrating diaphragm 10.Wherein, bleed structure 101 width is set to 0.1um ~ 10um, making bleed structure 101 being subject in time deformation to occur when air pressure impacts, opening bleed structure 101 and realizing exhaust.And when not being subject to air pressure and impacting, ensure the normal use of vibrating diaphragm 10.
In a kind of specific embodiment of the present utility model, when ensureing that vibrating diaphragm 10 can normally use, the length range of the cross section of bleed structure 101 is 1um ~ 200um.In the present embodiment, the length of the cross section of bleed structure 101 refers to the total length in the gap on corresponding vibrating diaphragm 10.Wherein, bleed structure 101 length is set to 1um ~ 200um, makes in unit are, and the area shared by bleed structure 101 is larger, thus can realize the function of losing heart better.
The utility model additionally provides a kind of MEMS capacitance sensor, and Fig. 5 is the structural representation of a kind of MEMS capacitance sensor in the utility model; Shown in Figure 5, this MEMS capacitance sensor comprises: back pole plate 301, supporting layer 302, vibrating diaphragm 301, insulating barrier 304 and basic unit 305.Wherein, described vibrating diaphragm 301 adopts as the vibrating diaphragm in any one embodiment in Fig. 1 ~ Fig. 4.
The utility model additionally provides a kind of MEMS microphone, and this microphone comprises the MESM transducer in above-described embodiment.Be specially: in above-described embodiment of the present utility model, in the MEMS microphone provided, vibrating diaphragm is provided with the bleed structure opened after air pressure outside exceedes preset value.
To sum up, in technical scheme provided by the utility model, by arranging bleed structure on the vibrating diaphragm of MEMS microphone.This bleed structure is evenly be arranged on the gap on vibrating diaphragm edge.In the event of an impact, as outer air pressure exceed preset value time, the vibrating diaphragm generation deformation of bleed structure both sides, make the gap of bleed structure become large, realize pressure release rapidly, thus protection vibrating diaphragm is not impacted by air pressure and damages.
The foregoing is only preferred embodiment of the present utility model, be not intended to limit protection range of the present utility model.All do within spirit of the present utility model and principle any amendment, equivalent replacement, improvement etc., be all included in protection range of the present utility model.
Claims (9)
1. a vibrating diaphragm, is characterized in that, described vibrating diaphragm is provided with the bleed structure opened after air pressure outside exceedes preset value.
2. vibrating diaphragm according to claim 1, is characterized in that, the number of described bleed structure is N number of; Wherein N be less than or equal to 50 natural number.
3. vibrating diaphragm according to claim 2, is characterized in that, described N number of bleed structure is evenly distributed on the edge of described vibrating diaphragm.
4. vibrating diaphragm according to claim 1, it is characterized in that, the cross section of described bleed structure is smoothed curve.
5. the vibrating diaphragm according to any one of claim 1-4, is characterized in that, described bleed structure comprises V-type, C type, S Xing, Swastika type or X-type.
6. vibrating diaphragm according to claim 1, is characterized in that, the width range of the cross section of institute's bleed structure is 0.1um ~ 10um.
7. vibrating diaphragm according to claim 1, is characterized in that, the length range of the cross section of institute's bleed structure is 1um ~ 200um.
8. a MEMS capacitance sensor, is characterized in that, the vibrating diaphragm of described MEMS capacitance sensor adopts the vibrating diaphragm described in any one of claim 1-8.
9. a MEMS microphone, is characterized in that, described MEMS microphone comprises MEMS capacitance sensor according to claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420741105.8U CN204425633U (en) | 2014-11-28 | 2014-11-28 | A kind of MEMS microphone, MEMS capacitance sensor and a kind of vibrating diaphragm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420741105.8U CN204425633U (en) | 2014-11-28 | 2014-11-28 | A kind of MEMS microphone, MEMS capacitance sensor and a kind of vibrating diaphragm |
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| Publication Number | Publication Date |
|---|---|
| CN204425633U true CN204425633U (en) | 2015-06-24 |
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| CN201420741105.8U Active CN204425633U (en) | 2014-11-28 | 2014-11-28 | A kind of MEMS microphone, MEMS capacitance sensor and a kind of vibrating diaphragm |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106375912A (en) * | 2016-08-31 | 2017-02-01 | 歌尔股份有限公司 | Vibration diaphragm in MEMS microphone, and MEMS microphone |
| CN106851509A (en) * | 2017-03-06 | 2017-06-13 | 瑞声声学科技(深圳)有限公司 | Mems microphone |
| CN106996827A (en) * | 2017-04-28 | 2017-08-01 | 歌尔股份有限公司 | One kind sensing diaphragm and MEMS microphone |
| US20170217761A1 (en) * | 2016-01-28 | 2017-08-03 | Cirrus Logic International Semiconductor Ltd. | Mems device and process |
| WO2018137275A1 (en) * | 2017-01-25 | 2018-08-02 | 歌尔股份有限公司 | Mems microphone |
| CN114125664A (en) * | 2021-11-15 | 2022-03-01 | 歌尔微电子股份有限公司 | Sensor and wearable equipment |
-
2014
- 2014-11-28 CN CN201420741105.8U patent/CN204425633U/en active Active
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10266393B2 (en) | 2016-01-28 | 2019-04-23 | Cirrus Logic, Inc. | MEMS device and process |
| US20170217761A1 (en) * | 2016-01-28 | 2017-08-03 | Cirrus Logic International Semiconductor Ltd. | Mems device and process |
| GB2547103A (en) * | 2016-01-28 | 2017-08-09 | Cirrus Logic Int Semiconductor Ltd | MEMS device and process |
| US11381917B2 (en) * | 2016-08-31 | 2022-07-05 | Goertek, Inc. | Vibration diaphragm in MEMS microphone and MEMS microphone |
| CN106375912B (en) * | 2016-08-31 | 2020-03-17 | 歌尔股份有限公司 | Vibrating diaphragm in MEMS microphone and MEMS microphone |
| WO2018040528A1 (en) * | 2016-08-31 | 2018-03-08 | 歌尔股份有限公司 | Vibration diaphragm in mems microphone, and mems microphone |
| CN106375912A (en) * | 2016-08-31 | 2017-02-01 | 歌尔股份有限公司 | Vibration diaphragm in MEMS microphone, and MEMS microphone |
| WO2018137275A1 (en) * | 2017-01-25 | 2018-08-02 | 歌尔股份有限公司 | Mems microphone |
| US11974094B2 (en) | 2017-01-25 | 2024-04-30 | Goertek, Inc. | MEMS microphone |
| CN106851509A (en) * | 2017-03-06 | 2017-06-13 | 瑞声声学科技(深圳)有限公司 | Mems microphone |
| CN106996827A (en) * | 2017-04-28 | 2017-08-01 | 歌尔股份有限公司 | One kind sensing diaphragm and MEMS microphone |
| CN106996827B (en) * | 2017-04-28 | 2020-11-20 | 潍坊歌尔微电子有限公司 | Sensing diaphragm and MEMS microphone |
| CN114125664A (en) * | 2021-11-15 | 2022-03-01 | 歌尔微电子股份有限公司 | Sensor and wearable equipment |
| WO2023083104A1 (en) * | 2021-11-15 | 2023-05-19 | 歌尔微电子股份有限公司 | Sensor and wearable device |
| CN114125664B (en) * | 2021-11-15 | 2024-03-19 | 歌尔微电子股份有限公司 | Sensor and wearable equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20200615 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
|
| TR01 | Transfer of patent right |