CN204401693U - A kind of water supply balance system for process water - Google Patents
A kind of water supply balance system for process water Download PDFInfo
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- CN204401693U CN204401693U CN201420865666.9U CN201420865666U CN204401693U CN 204401693 U CN204401693 U CN 204401693U CN 201420865666 U CN201420865666 U CN 201420865666U CN 204401693 U CN204401693 U CN 204401693U
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- delivery pump
- frequency converter
- pressure transmitter
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Abstract
The utility model discloses a kind of water supply balance system for process water, comprise: water tank, delivery pump, frequency converter, heat interchanger, sterilizer, ultimate filter, pressure transmitter, terminal water spot and counterbalance valve, the delivery port of described water tank is provided with outlet conduit, to be connected successively delivery pump by outlet conduit, heat interchanger, sterilizer and ultimate filter, ultimate filter is connected to terminal water spot by water supply line, the input of water return pipeline is connected on water supply line, the output of water return pipeline is connected on water tank, counterbalance valve is arranged on water return pipeline, pressure transmitter is arranged on water supply line, and pressure transmitter signal connects frequency converter, Frequency Converter Control connects delivery pump.The utility model can realize the comparatively stable change of water system operating mode, avoids occurring the situation about fluctuating widely that supplies water, and greatly provides the stability of system, energy conservation, rational utilization of water resources, improves system availability, and reduces backwater amount.
Description
Technical field
The utility model relates to the technical field of Design of Waterworks, particularly relates to a kind of water supply balance system of the process water for semiconductor and luminous energy fabrication plant.
Background technology
Existing large-scale semiconductor and luminous energy element manufacturing type factory, in the process of producing chip and element, need to carry out strict control according to corresponding requirement of producing board to the temperature flow of water inlet and pressure, chip and the component products of better quality can be produced, due in process of production, in the same time, the start and stop quantity of board is different, total water supply volume is also different, maximum water supply volume needed for when therefore can run together according to all boards in traditional handicraft carries out sustainable supply, process water pump is kept to be opened to the state of maximum functional transportation load, if but when most of board is stopped using, then large discharge pure water is back to pure water water tank.
The applicant finds that existing water system has following shortcoming: 1, in art production process, pure water delivery pump needs to be in fixing large discharge working condition always, consumes electric energy larger.2, the board in manufacturing process is opened, once run into water use peak and low ebb phase, change procedure is too short, and the flow of cataclysm can remote-effects portioned product quality.3, long-term large discharge runs, also can the load of each parts, long running when being unfavorable for system effective.
Therefore, the applicant is devoted to exploitation one can effective energy conservation, and rational utilization of water resources, improves system availability, and the water supply balance system for process water of minimizing backwater amount.
Utility model content
The purpose of this utility model, be exactly one is proposed can effective energy conservation, rational utilization of water resources, improves system availability, and the water supply balance system for process water of minimizing backwater amount.
The utility model is for solving the problems of the technologies described above, provide a kind of water supply balance system for process water, comprise: for the water tank of accommodating pure water, for the delivery pump of pumping pure water, for regulating the frequency converter of described delivery pump output flow, for carrying out thermoregulator heat interchanger to pure water, for carrying out the sterilizer of sterilization to pure water, for the ultimate filter filtered pure water, for the pressure transmitter to monitoring water supply line discharge pressure, for exporting the terminal water spot of process water, and for controlling the counterbalance valve of water return pipeline uninterrupted.
The delivery port of described water tank is provided with outlet conduit, to be connected successively described delivery pump by described outlet conduit, described heat interchanger, described sterilizer and described ultimate filter, described ultimate filter is connected to described terminal water spot by described water supply line, the input of described water return pipeline is connected on described water supply line, the output of described water return pipeline is connected on described water tank, described counterbalance valve is arranged on described water return pipeline, described pressure transmitter is arranged on described water supply line, and described pressure transmitter signal connects described frequency converter, described Frequency Converter Control connects described delivery pump.
Preferably, described sterilizer is ultraviolet germicidal lamp.
Preferably, the utility model also comprises described water supply balance system and also comprises electrical control cabinet, delivery pump, frequency converter, heat interchanger, sterilizer, ultimate filter, pressure transmitter and/or counterbalance valve described in described electrical control cabinet control connection, see the automaticity of further raising system by adding electrical control cabinet.
Preferably, described electrical control cabinet is PLC control cabinet.
In sum, the utility model has following beneficial effect for the water supply balance system of process water:
The present inventor is creationary provides a kind of process water water supply balance system, corresponding frequency converter is equipped with by adopting delivery pump, and the signal collected by pressure transmitter carries out the technology that controls, effective according to actual production demand, water-supply quantity is regulated, and effectively reduces equipment actual motion power.Not only avoid the continued high load operation conditions of subsequent parts, also reduce the effective work energy consumption in the unit interval, and then save corresponding operation cost.Meanwhile, the utility model is also provided with corresponding counterbalance valve on water return pipeline, can carry out the runoff investigation of backwater intelligently according to overpressure, makes terminal water spot in the moment using peak and low ebb, unlatching at any time that can be intelligent.
Visible, the utility model utilizes the matching design of counterbalance valve and frequency converter, the change that water system operating mode is comparatively stable can be realized, avoid occurring the situation about fluctuating widely that supplies water, greatly provide the stability of system, energy conservation, rational utilization of water resources, improves system availability, and reduces reclamation rate, especially be applicable to being applied in large-scale semiconductor and luminous energy element manufacturing type factory, realize the further raising of producing Yield and quality.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail:
Fig. 1 is the structural representation of specific embodiment for the water supply balance system of process water.
Drawing reference numeral illustrates:
Water tank 1, delivery pump 2, frequency converter 3, heat interchanger 4, ultraviolet germicidal lamp 5, ultimate filter 6, pressure transmitter 7, terminal water spot 8, counterbalance valve 9.
Detailed description of the invention
As shown in Figure 1, present embodiment discloses a kind of water supply balance system for process water, comprise: for the water tank 1 of accommodating pure water, for the delivery pump 2 of pumping pure water, for regulating the frequency converter 3 of delivery pump 2 output flow, for carrying out thermoregulator heat interchanger 4 to pure water, for carrying out the ultraviolet germicidal lamp 5 of sterilization to pure water, for the ultimate filter 6 filtered pure water, for the pressure transmitter 7 to monitoring water supply line discharge pressure, for exporting the terminal water spot 8 of process water, and for controlling the counterbalance valve 9 of water return pipeline uninterrupted.
As shown in Figure 1, the delivery port of the water tank 1 of the present embodiment is provided with outlet conduit (not marking in figure), to be connected successively delivery pump 2 by described outlet conduit, heat interchanger 4, ultraviolet germicidal lamp 5 and ultimate filter 6, ultimate filter 6 is connected to terminal water spot 8 by water supply line (not marking in figure), the input of described water return pipeline (not marking in figure) is connected on water supply line, the output of described water return pipeline is connected on water tank 1, counterbalance valve 9 is arranged on described water return pipeline, pressure transmitter 7 is arranged on described water supply line, and pressure transmitter 7 signal connects frequency converter 3, frequency converter 3 control connection delivery pump 2.
In this embodiment, the parts such as the pipeline that the present embodiment relates to, water tank, delivery pump, frequency converter, heat interchanger, ultraviolet germicidal lamp, ultimate filter, pressure transmitter and/or counterbalance valve directly can carry out outsourcing use, repeat no more herein.
Exemplary, the water supply balance system being used for process water of the present embodiment be applied in semiconductor and luminous energy fabrication plant, embody rule situation is as follows:
Use water needs according to factory's board, each terminal water spot correspondence of the present embodiment is connected on each board.In process of production, in the same time, the start and stop quantity of board is different, total water supply volume is also different, the water pump of water tank is delivered on terminal water spot for each board by delivery pump by the water supply balance system of the present embodiment, water temperature is adjusted by heat interchanger successively in pumping procedure, sterilizer sterilization and ultimate filter filter, and by pressure transformer, water supply line output pressure is monitored, and Real-time Feedback signal is on frequency converter, the output flow of delivery pump is regulated, the working flow of delivery pump is have adjusted according to actual board water condition, effectively reduce power consumption, decrease unnecessary energy loss, also avoid the long-time high load capacity work continued simultaneously.Simultaneously, by water return pipeline, water tank Inner eycle is back to for unnecessary unspent pure water use, and mechanical counterbalance valve is set on reflux line, realize when not needing electrically supply, the runoff investigation of backwater can be carried out intelligently according to overpressure, make board in the moment using peak and low ebb, unlatching at any time that can be intelligent.
In semiconductor and luminous energy fabrication plant, carry out the improvement of as above water supply balance system, substantially reduce the water supply fluctuation buffer time of peak and low ebb phase in manufacturing process, production efficiency is improved greatly, and production product quality too increases stability.
As the further embodiment of the present embodiment, the present embodiment can also comprise described water supply balance system and also comprise electrical control cabinet (not shown), delivery pump, frequency converter, heat interchanger, sterilizer, ultimate filter, pressure transmitter and/or counterbalance valve described in described electrical control cabinet control connection, see the automaticity of further raising system by adding electrical control cabinet.Exemplary, described electrical control cabinet is PLC control cabinet.
With above-mentioned be only preferred embodiment of the present utility model; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the utility model principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (4)
1., for a water supply balance system for process water, it is characterized in that, comprising:
For the water tank of accommodating pure water,
For the delivery pump of pumping pure water,
For regulating the frequency converter of described delivery pump output flow,
For carrying out thermoregulator heat interchanger to pure water,
For carrying out the sterilizer of sterilization to pure water,
For the ultimate filter filtered pure water,
For the pressure transmitter to monitoring water supply line discharge pressure,
For exporting the terminal water spot of process water, and
For controlling the counterbalance valve of water return pipeline uninterrupted;
The delivery port of described water tank is provided with outlet conduit, to be connected successively described delivery pump by described outlet conduit, described heat interchanger, described sterilizer and described ultimate filter, described ultimate filter is connected to described terminal water spot by described water supply line, the input of described water return pipeline is connected on described water supply line, the output of described water return pipeline is connected on described water tank, described counterbalance valve is arranged on described water return pipeline, described pressure transmitter is arranged on described water supply line, and described pressure transmitter signal connects described frequency converter, described Frequency Converter Control connects described delivery pump.
2., as claimed in claim 1 for the water supply balance system of process water, it is characterized in that: described sterilizer is ultraviolet germicidal lamp.
3. as claimed in claim 1 for the water supply balance system of process water, it is characterized in that: described water supply balance system also comprises electrical control cabinet, delivery pump, frequency converter, heat interchanger, sterilizer, ultimate filter, pressure transmitter and/or counterbalance valve described in described electrical control cabinet control connection.
4., as claimed in claim 3 for the water supply balance system of process water, it is characterized in that: described electrical control cabinet is PLC control cabinet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420865666.9U CN204401693U (en) | 2014-12-29 | 2014-12-29 | A kind of water supply balance system for process water |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420865666.9U CN204401693U (en) | 2014-12-29 | 2014-12-29 | A kind of water supply balance system for process water |
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| Publication Number | Publication Date |
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| CN204401693U true CN204401693U (en) | 2015-06-17 |
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| CN201420865666.9U Active CN204401693U (en) | 2014-12-29 | 2014-12-29 | A kind of water supply balance system for process water |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111549857A (en) * | 2020-05-20 | 2020-08-18 | 河海大学 | Cooling water supply device for plate heat exchanger |
| CN115557621A (en) * | 2021-07-02 | 2023-01-03 | 奥加诺株式会社 | Pure water production apparatus and method for operating same |
-
2014
- 2014-12-29 CN CN201420865666.9U patent/CN204401693U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111549857A (en) * | 2020-05-20 | 2020-08-18 | 河海大学 | Cooling water supply device for plate heat exchanger |
| CN115557621A (en) * | 2021-07-02 | 2023-01-03 | 奥加诺株式会社 | Pure water production apparatus and method for operating same |
| CN115557621B (en) * | 2021-07-02 | 2024-08-23 | 奥加诺株式会社 | Pure water production apparatus and method for operating same |
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