CN204392112U - A kind of large stroke and high precision micro-nano drive unit - Google Patents
A kind of large stroke and high precision micro-nano drive unit Download PDFInfo
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- CN204392112U CN204392112U CN201420817462.8U CN201420817462U CN204392112U CN 204392112 U CN204392112 U CN 204392112U CN 201420817462 U CN201420817462 U CN 201420817462U CN 204392112 U CN204392112 U CN 204392112U
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Abstract
The utility model discloses a kind of large stroke and high precision micro-nano drive unit, to solve the technical problems such as traditional precise driving device positioning precision is low, bearing capacity is little.The utility model comprises fixing outrigger, first and drives module, second to drive module, mobile decoupling assembly, connecting screw rod, loading plate, fairlead and fastening bolt, first drives module to be made up of excitor, piezoelectric patches and transmission body, second drives module to be made up of piezoelectric stack and supporting bracket, and mobile decoupling assembly can be bulb decoupling zero or bearing decoupling zero implementation.Apply micron order and nanoscale combined positioning method in piezoelectric patches and piezoelectric stack, micron order within the scope of forward and reverse direction Centimeter Level or decimeter grade Long Distances can be realized respectively and nanoscale is located, thus realize the utility model nano-grade displacement movement output.The utility model has the advantages such as simple and compact for structure, positioning precision is high, bearing capacity is large, has broad application prospects at micro-move device and precision positioning technology field.
Description
Technical field
The utility model relates to a kind of large stroke and high precision micro-nano drive unit, belongs to micro-move device and precision positioning technology field.
Background technology
Along with the develop rapidly of science and technology, the precise driving device with nano grade positioning precision within the scope of exploitation Long Distances has become one of key technical problem urgently to be resolved hurrily in current micro-move device and precision positioning technology field.In recent years, with piezoelectricity thread motor for precision driver, extensive concern is subject to by the precision actuation of mechanical transmission mechanism implement device and location, compared with the type of drive such as tradition machinery, electromagnetism, fluid, because of its have motion stabilization performance good, without electromagnetic interference, control the technical advantages such as simple, be widely used in micro-move device and the precision positioning technology fields such as Aero-Space, bioengineering, medicine equipment.
Chinese patent " screw thread driven polyhedron ultrasonic motor ", Authorization Notice No. is CN 100438307 C, authorized announcement date is on November 26th, 2008, disclosed a kind of screw thread driven polyhedron ultrasonic motor, it is made up of stator, rotor and the multiple piezoelectric ceramic piece of all-in-one-piece bonding with stator or rotor, the surface that described stator contacts with rotor is threaded, and described rotor is also with the screw thread matched with stator, Chinese patent " ultrasonic lead screw motor ", Authorization Notice No. is CN 1879232 B, authorized announcement date is on April 7th, 2010, disclose a kind of for driving the device of the thread spindle assembly comprising the thread spindle with rotating shaft and the screw nut be mated, screw nut being carried out ultrasonic vibration causes thread spindle axially rotate simultaneously and move, and thread spindle is connected to load axial force being applied to thread spindle, Chinese patent " utilizing the screw drive type rotary linear ultrasonic motor of column stator high-order flexural vibration mode ", application notification number is CN 102843063 A, authorized announcement date is on December 26th, 2012, disclosed a kind of screw drive type rotary linear ultrasonic motor utilizing column stator high-order flexural vibration mode, it comprises threaded output shaft, metal tube resilient sleeve and m group piezoelectric ceramic piece, or comprise threaded output shaft, piezoelectric ceramic tube, two metal caps and p group external electrode, the utility model is by exciting two high-order flexural vibrations mutually orthogonal on free stator space, as second order or three rank flexural vibration modes, utilize the superposition of vibration and be coupled, produce at the inner surface of the stator drive end be made up of metal tube spring-backed quill and m group piezoelectric ceramic piece and drive row ripple, stator and threaded output shaft are by screw thread pair transmission, rotation-the rectilinear motion realizing output shaft under the effect of axial load power exports, Chinese patent " micropositioner based on piezoelectricity thread Driving technique ", application publication number is CN 103199732 A, Shen Qing Publication day is on July 10th, 2013, disclosed a kind of micropositioner based on piezoelectricity thread Driving technique, it comprises employing piezoelectricity thread driver Direct driver micropositioner one dimension micropositioner and prototype with displacement resolution, appropriate location on upper plate is symmetrical arranged two fixed muffles, two piezoelectricity thread drivers are connected with fixed muffle screw-internal thread fit, piezoelectricity thread driver center fixed drive screw rod, and contact with lower plate, two springs and steel ball are that isosceles triangle is supported on micro-vibration of the utility model piezoelectric ceramic between upper plate and lower plate drive screw positive and negative direction linearly can be made to move, and drive screw Direct driver micropositioner, without intermediate transmission mechanism, Chinese patent " piezoelectric plate-sandwiched rotary linear ultrasonic motor stator ", Authorization Notice No. is CN 102355157 B, authorized announcement date is on February 12nd, 2014, disclosed a kind of piezoelectric plate-sandwiched rotary linear ultrasonic motor stator, it adopts piezoelectric patches sandwich structure, and piezoelectric ceramic piece utilizes high mechanical-electric coupling efficiency
d 33pattern encourages stator, by exciting two low order flexural vibrations mutually orthogonal on stator space, utilize the superposition of vibration and be coupled, produce at the inner surface of drive end and drive row ripple, drive end and output shaft are by screw thread pair transmission, and the rotational motion to linear motion realizing output shaft under the effect of axial load power exports, Chinese patent " mode conversion type piezoelectric thread transmission linear ultrasonic motor ", publication No. is authorized to be CN 102185519 B, date of publication is authorized to be on November 6th, 2013, disclosed a kind of mode conversion type piezoelectric thread transmission linear ultrasonic motor, it comprises stator and mover, described stator comprises bracing frame, longitudinal vibration piezoelectric ceramic piece group and longitrorse modal transducer, the ring plate for fixed electrical machinery is provided with in the middle of bracing frame, longitudinal vibration piezoelectric ceramic piece group is fixed between bracing frame and longitrorse modal transducer by the mode that screw thread compresses, described mover external cylindrical surface is processed with externally threaded cylinder, by the screw-internal thread fit on external screw thread and longitrorse modal transducer.
Above-mentioned several piezoelectricity thread motor that utilizes drives the technical scheme with location as power source implement device, though it can realize the driving of Centimeter Level even in decimeter grade stroke range and location under the incentive action of a certain localization method, but it has the technical problems such as positioning precision is low, bearing capacity is little, generally only can obtain micron-sized positioning precision, be difficult to realize nano level positioning precision, limit the development of precision actuation and microposition technical field to a certain extent.
Summary of the invention
For solving the current piezoelectric actuator that utilizes as the driving of power source implement device and location, being difficult to of causing realizes the technical problems such as nano grade positioning precision, bearing capacity be little, the utility model discloses a kind of large stroke and high precision micro-nano drive unit.
The technical scheme that the utility model adopts is: described large stroke and high precision micro-nano drive unit comprises fixing outrigger, first and drives module, second to drive module, mobile decoupling assembly, connecting screw rod, loading plate, fairlead and fastening bolt.
Described first drives module to be made up of excitor, piezoelectric patches and transmission body; Described excitor is free beam or cantilever beam structure elastomer; Described piezoelectric patches is
d 31the rectangular piezoelectric ceramic sheet of exciting pattern or
d 33,
d 15the annular piezoelectric ceramic piece of exciting pattern; Described transmission body is for being provided with externally threaded cylindrical structure.Described second drives module to be made up of piezoelectric stack and supporting bracket; Described supporting bracket is disk-like structure, and its upper end face is along the circumferential direction evenly provided with k blind hole, for realizing fastening installation and the layout of k piezoelectric stack, wherein k be greater than 1 integer; Described supporting bracket is provided with a through-hole structure, and it is for realizing the extraction of piezoelectric stack electrified wire; Described support plate upper surface center is provided with internal thread hole, and it is for screwing the transmission of pressurization pretension and the loading plate straight-line displacement campaign being connected and realizing piezoelectric stack with connecting screw rod.Described fixing outrigger is the hollow circuit cylinder body structure that an end is provided with blind flange; Described blind flange side end face is along the circumferential direction evenly provided with p for hard-wired through hole, wherein p be greater than 1 integer; Described fixing outrigger free end is provided with interior shoulder hole, and it is for realizing the fastening installation of fairlead; Described fixing outrigger is provided with through-hole structure near cantilever end, and it is for realizing the extraction of electrified wire.The implementation of described mobile decoupling assembly can be bulb decoupling zero or bearing decoupling zero.Described loading plate is disk-like structure, and its upper end face is along the circumferential direction evenly provided with h screwed hole, for realizing the straight-line displacement movement output of external loading, wherein h be more than or equal to 1 integer; Described loading plate upper end face center is provided with inner hexagonal hole structure, and it is for realizing the pressurization pretension of piezoelectric stack; Centre of surface position, described loading plate bottom is provided with internal thread hole, and it is for screwing with connecting screw rod the output being connected and realizing loading plate straight-line displacement campaign.The guiding that described fairlead exports for the support and displacement movement realizing loading plate and supporting bracket.
The localization method of described the utility model large stroke and high precision micro-nano drive unit is specially and utilizes the first driving module realize Long Distances micron location and utilize the second driving module to realize the combined positioning method of nanometer positioning:
Describedly utilize the first driving module to realize Long Distances micron localization method to be specially, apply to drive phase difference be the ac-excited signal of telecommunication of 90 degree or 270 degree in the piezoelectric patches of the first driving module, the described ac-excited signal of telecommunication can adopt amplitude to be
vthe p1 cycle is
tthe periodic electric signal such as sine, square wave or sawtooth waveforms, through the energising actuation duration
t 1=
iTafter, the micron order location within the scope of the positive and negative both direction Centimeter Level of the first driving module or decimeter grade Long Distances can be realized respectively, wherein
ifor being more than or equal to the integer of 1.
Describedly utilize the second driving module to realize nanometer positioning method to be specially, applying slope is
k 1dC signal drive the piezoelectric stack of module in second, through the energising actuation duration
t 2=
jTthe amplitude of rear excitation electric signal is
vp2, can realize the nanoscale location of the second driving module, finally realize large range nanometer grade positioning control of the present utility model, complete the output of extraneous loaded with nano level displacement movement, wherein
jfor being more than or equal to the integer of 1.
The beneficial effects of the utility model are: the utility model adopts screw thread pair transmission to realize the transmission of power of the first driving module and movement output and employing piezoelectric stack and realizes the composite flooding mode that the transmission of power of the second driving module and movement output combine, therefore the utility model large stroke and high precision micro-nano drive unit has compact conformation, bearing capacity greatly and positioning precision high-technology advantage, the utility model adopts and drives module to realize Long Distances micron location based on first and encourage based on the second combined positioning method driving module to realize nanometer positioning, therefore the utility model large stroke and high precision micro-nano drive unit effectively can eliminate the impact of thread pitch and drive gap under the excitation of this localization method, within the scope of guarantee the Centimeter Level even effective travel of decimeter grade, nano level positioning precision can be realized, significantly improve the positioning precision of device, simultaneously by adopting screw thread pair transmission, make bearing capacity can reach more than hundred Ns of levels, have broad application prospects in micro-move device and precision positioning technology field.
Accompanying drawing explanation
Figure 1 shows that the cutaway view of the large stroke and high precision micro-nano drive unit of a kind of SMD free beam excite structures body bulb decoupled components implementation that the utility model proposes;
Figure 2 shows that the axial cutaway view of the fixing outrigger of the large stroke and high precision micro-nano drive unit of a kind of free beam excite structures body that the utility model proposes;
Figure 3 shows that the transverse sectional view of the fixing outrigger of the large stroke and high precision micro-nano drive unit of a kind of free beam excite structures body that the utility model proposes;
Figure 4 shows that the vertical view of the excitor of the large stroke and high precision micro-nano drive unit of a kind of SMD free beam excite structures body that the utility model proposes;
Figure 5 shows that the cutaway view of the excitor of the large stroke and high precision micro-nano drive unit of a kind of SMD free beam excite structures body that the utility model proposes;
Figure 6 shows that the front view of the transmission body of the large stroke and high precision micro-nano drive unit of a kind of bulb decoupled components implementation that the utility model proposes;
Figure 7 shows that the vertical view of the transmission body of the large stroke and high precision micro-nano drive unit of a kind of bulb decoupled components implementation that the utility model proposes;
Figure 8 shows that the cutaway view of the fairlead of a kind of large stroke and high precision micro-nano drive unit that the utility model proposes;
Figure 9 shows that the vertical view of the loading plate of a kind of large stroke and high precision micro-nano drive unit that the utility model proposes;
Figure 10 shows that the cutaway view of the loading plate of a kind of large stroke and high precision micro-nano drive unit that the utility model proposes;
Figure 11 shows that a kind of large stroke and high precision micro-nano drive unit that the utility model proposes piezoelectric stack mechanical encapsulation structural representation with adapter;
Figure 12 shows that the structural representation of the connecting screw rod of a kind of large stroke and high precision micro-nano drive unit that the utility model proposes;
Figure 13 shows that the vertical view of the supporting bracket of the large stroke and high precision micro-nano drive unit of a kind of bulb decoupled components implementation that the utility model proposes;
Figure 14 shows that the cutaway view of the supporting bracket of the large stroke and high precision micro-nano drive unit of a kind of bulb decoupled components implementation that the utility model proposes;
Figure 15 shows that the wiring schematic diagram of a kind of SMD large stroke and high precision micro-nano drive unit exciting group A that the utility model proposes;
Figure 16 shows that the wiring schematic diagram of a kind of SMD large stroke and high precision micro-nano drive unit exciting group B that the utility model proposes;
Figure 17 shows that the structural representation of a kind of large stroke and high precision micro-nano drive unit excitation electric signal that the utility model proposes;
Figure 18 shows that the cutaway view of the large stroke and high precision micro-nano drive unit of a kind of SMD cantilever beam structure excitor bulb decoupled components implementation that the utility model proposes;
Figure 19 shows that the axial cutaway view of the fixing outrigger of the large stroke and high precision micro-nano drive unit of a kind of cantilever beam structure excitor that the utility model proposes;
Figure 20 shows that the transverse sectional view of the fixing outrigger of the large stroke and high precision micro-nano drive unit of a kind of cantilever beam structure excitor that the utility model proposes;
Figure 21 is depicted as the vertical view of the excitor of the large stroke and high precision micro-nano drive unit of a kind of SMD cantilever beam structure excitor that the utility model proposes;
Figure 22 is depicted as the cutaway view of the excitor of the large stroke and high precision micro-nano drive unit of a kind of SMD cantilever beam structure excitor that the utility model proposes;
Figure 23 is depicted as the cutaway view of the large stroke and high precision micro-nano drive unit of a kind of sandwich type free beam excite structures body bulb decoupled components implementation that the utility model proposes;
Figure 24 is depicted as the cutaway view of the excitor of the large stroke and high precision micro-nano drive unit of a kind of sandwich type free beam excite structures body that the utility model proposes;
Figure 25 is depicted as the cutaway view of match block after in the large stroke and high precision micro-nano drive unit excitor of a kind of sandwich type free beam excite structures body that the utility model proposes;
Figure 26 is depicted as the cutaway view of match block before in the large stroke and high precision micro-nano drive unit excitor of a kind of sandwich type free beam excite structures body that the utility model proposes;
Figure 27 is depicted as the cutaway view of the insulating sleeve of a kind of sandwich large stroke and high precision micro-nano drive unit that the utility model proposes;
Figure 28 is depicted as the one that the utility model proposes and utilizes
d 33the piezoelectric patches step mode schematic diagram of the sandwich large stroke and high precision micro-nano drive unit of multi-region exciting pattern;
Figure 29 is depicted as in a kind of sandwich large stroke and high precision micro-nano drive unit that the utility model proposes
d 33multi-region exciting mode piezoelectric sheet excitation subregion schematic diagram;
Figure 30 is depicted as the cutaway view of the large stroke and high precision micro-nano drive unit of a kind of sandwich type cantilever beam excite structures body bulb decoupled components implementation that the utility model proposes;
Figure 31 is depicted as the cutaway view of the large stroke and high precision micro-nano drive unit excitor of a kind of sandwich type cantilever beam excite structures body that the utility model proposes;
Figure 32 is depicted as the cutaway view of match block after in the large stroke and high precision micro-nano drive unit excitor of a kind of sandwich type cantilever beam excite structures body that the utility model proposes;
Figure 33 is depicted as the cutaway view of match block before in the large stroke and high precision micro-nano drive unit excitor of a kind of sandwich type cantilever beam excite structures body that the utility model proposes;
Figure 34 is depicted as the one that the utility model proposes and utilizes
d 33with
d 15the piezoelectric patches step mode schematic diagram of the sandwich large stroke and high precision micro-nano drive unit of coupling exciting pattern;
Figure 35 is depicted as the cutaway view of the large stroke and high precision micro-nano drive unit of a kind of SMD free beam excite structures body bearing decoupled components implementation that the utility model proposes;
Figure 36 is depicted as the structural representation of the bearing decoupled components of a kind of large stroke and high precision micro-nano drive unit that the utility model proposes;
Figure 37 is depicted as the front view of the large stroke and high precision micro-nano drive unit transmission body of a kind of bearing decoupled components implementation that the utility model proposes;
Figure 38 is depicted as the vertical view of the large stroke and high precision micro-nano drive unit transmission body of a kind of bearing decoupled components implementation that the utility model proposes;
Figure 39 is depicted as the front view of the large stroke and high precision micro-nano drive unit supporting bracket of a kind of bearing decoupled components implementation that the utility model proposes;
Figure 40 is depicted as the cutaway view of the large stroke and high precision micro-nano drive unit supporting bracket of a kind of bearing decoupled components implementation that the utility model proposes;
Figure 41 is depicted as the cutaway view of the large stroke and high precision micro-nano drive unit of a kind of SMD cantilever beam structure excitor bearing decoupled components implementation that the utility model proposes;
Figure 42 is depicted as the cutaway view of the large stroke and high precision micro-nano drive unit of a kind of sandwich type free beam excite structures body bearing decoupled components implementation that the utility model proposes;
Figure 43 is depicted as the cutaway view of the large stroke and high precision micro-nano drive unit of a kind of sandwich type cantilever beam excite structures body bearing decoupled components implementation that the utility model proposes.
Embodiment
Embodiment one: composition graphs 1 ~ Figure 17 illustrates present embodiment.Present embodiments provide for a kind of specific embodiments of large stroke and high precision micro-nano drive unit of SMD free beam excite structures body bulb decoupling zero implementation.The large stroke and high precision micro-nano drive unit of described SMD free beam excite structures body bulb decoupling zero implementation drives module 100, second to drive module 200, mobile decoupling assembly 6, loading plate 7, connecting screw rod 10, fairlead 5 and fastening bolt 8 to form primarily of fixing outrigger 1, first.
Described first drives module 100 to be made up of excitor 2, piezoelectric patches 3 and transmission body 4; Described excitor 2 is provided with the free beam structural elasticity body of internal thread hole 2-3 for both side ends, its external peripheral surface is along the circumferential direction evenly provided with 4n outerplanar 2-2, for by liking that jail reaches epoxide-resin glue and realizes being fastenedly connected of piezoelectric patches 3, wherein n be more than or equal to 1 integer; Described excitor 2 outerplanar 2-2 is along the circumferential direction evenly provided with two groups of 2m blind hole 2-1 structures, and it realizes the fixed installation of the first driving module 100 for being connected with fastening bolt 8, wherein m be more than or equal to 1 integer; Between described two groups of blind hole 2-1, axial distribution distance should be greater than piezoelectric patches 3 maximum length direction size; The axial distribution position of the upper two groups of blind hole 2-1 of described excitor 2 outerplanar 2-2 is identical.Described piezoelectric patches 3 is
d 31the rectangular piezoelectric ceramic sheet of exciting pattern, 4n piezoelectric patches 3 is along the circumferential direction evenly arranged on the outerplanar 2-2 of excitor 2, and all through-thickness polarization; Deformation direction and excitor 2 central axis of the described piezoelectric patches 3 be arranged on excitor 2 outerplanar 2-2 all become to be arranged in parallel relation.Described transmission body 4 is for being provided with the cylindrical structure of external screw thread 4-1, and it realizes the utility model move and the transmission of power for screwing to be connected with excitor 2 both side ends internal thread hole 2-3; Described transmission body 4 side end surface is along the circumferential direction evenly provided with the identical bulb 4-2 structure of t, wherein t be more than or equal to 3 integer.
Described second drives module 200 to be made up of piezoelectric stack 9 and supporting bracket 11; Described supporting bracket 11 is disk-like structure, its surface, bottom is provided with circular cambered way 11-4, described circular cambered way 11-4 forms ball motion decoupled components 6 together with the bulb 4-2 structure of transmission body 4 one side end, and it rotates for realizing transmission body 4-mobile decoupling of straight-line displacement movement output and loading plate 7 straight-line displacement movement output; Described supporting bracket 11 upper end face is along the circumferential direction evenly provided with k blind hole 11-1 structure, and it is for realizing fastening installation and the layout of k piezoelectric stack 9, wherein k be greater than 1 integer; Described supporting bracket 11 is provided with a through hole 11-2 structure, and it is for realizing the extraction of piezoelectric stack 9 electrified wire; Described supporting bracket 11 upper surface center is provided with internal thread hole 11-3 structure, and it is for screwing the transmission of pressurization pretension and the loading plate 7 straight-line displacement campaign being connected and realizing piezoelectric stack 9 with connecting screw rod 10.Described piezoelectric stack 9 can select Harbin Science and Technology Ltd.'s core tomorrow model to be the mechanical type encapsulation piezoelectricity fold stack driver of VS12 series with adapter structure.
Described fixing outrigger 1 is the hollow circuit cylinder body structure that an end is provided with blind flange 1-1; Described blind flange 1-1 side end face is along the circumferential direction evenly provided with p for hard-wired through hole 1-1-1, wherein p be greater than 1 integer; Described fixing outrigger 1 free end is provided with interior shoulder hole 1-3, and it is for realizing the fastening installation of fairlead 5; Described fixing outrigger 1 hollow circular cylinder external peripheral surface is along the circumferential direction evenly provided with two groups 2m countersunk head through hole 1-4 structure, and it is for coordinating the fixed installation realizing the first driving module 100 with fastening bolt 8 by the blind hole 2-1 on excitor 2; The distributing position of described two groups of countersunk head through hole 1-4 is identical with the distributing position of two groups of blind hole 2-1 on excitor 2; Described fixing outrigger 1 is provided with through hole 1-2 near cantilever end, and it is for realizing the extraction of electrified wire.
Described loading plate 7 is disk-like structure, and its upper end face is along the circumferential direction evenly provided with h internal thread hole 7-1, for realizing the straight-line displacement movement output of external loading, wherein h be more than or equal to 1 integer; Described loading plate 7 upper end face center is provided with inner hexagonal hole 7-3 structure, and it is for realizing the pressurization pretension of piezoelectric stack 9 by inner hexagon spanner; Centre of surface position, described loading plate 7 bottom is provided with internal thread hole 7-2, and it is for screwing with connecting screw rod 10 output being connected and realizing loading plate 7 straight-line displacement campaign.
Described fairlead 5 is thin-wall circular tubular polytetrafluoroethylene fairlead, its guiding exported with support and the displacement movement of supporting bracket 11 for realizing loading plate 7.
The specific embodiments of the large stroke and high precision micro-nano drive unit localization method of described present embodiment SMD free beam excite structures body is utilize the first driving module 100 realize Long Distances micron location and utilize the second driving module 200 to realize the combined positioning method of nanometer positioning:
The described specific embodiments utilizing the first driving module 100 to realize Long Distances micron localization method is, the 2n sheet piezoelectric patches 3 of spaced layout in the 4n sheet piezoelectric patches 3 be distributed on excitor 2 outerplanar 2-2 is formed exciting group A, and the 2n sheet piezoelectric patches 3 of all the other spaced layouts forms exciting group B; In described exciting group A, the n sheet piezoelectric patches 3 of spaced layout forms exciting group A1, and in described exciting group A, the n sheet piezoelectric patches 3 of all the other spaced layouts forms exciting group A2, and the driving phase difference of described exciting group A1 and described exciting group A2 is 180 degree; In described exciting group B, the n sheet piezoelectric patches 3 of spaced layout forms exciting group B1, and in described exciting group B, the n sheet piezoelectric patches 3 of all the other spaced layouts forms exciting group B2, and the driving phase difference of described exciting group B1 and described exciting group B2 is 180 degree; Described exciting group A and exciting group B passes to and drives phase difference to be the ac-excited signal of telecommunication of 90 degree or 270 degree; The described ac-excited signal of telecommunication can adopt amplitude to be
vthe p1 cycle is
tthe periodic electric signal such as sine, square wave or sawtooth waveforms, through the energising actuation duration
t 1=
iTafter, the micron order location within the scope of the positive and negative both direction Centimeter Level of the first driving module 100 or decimeter grade Long Distances can be realized respectively, wherein
ifor being more than or equal to the integer of 1.
The described specific embodiments utilizing the second driving module 200 to realize nanometer positioning method is, applies slope to be
k 1dC signal drive piezoelectric stack 9 in module 200 in second, through the energising actuation duration
t 2=
jTthe amplitude of rear excitation electric signal is
vp2, can realize the nanoscale location of the second driving module 200, finally realize large-stroke nanometer positioning control of the present utility model, complete the output of extraneous loaded with nano level displacement movement, wherein
jfor being more than or equal to the integer of 1.
Embodiment two: present embodiment is described in conjunction with Figure 18 ~ Figure 22.Present embodiments provide for a kind of specific embodiments of large stroke and high precision micro-nano drive unit of SMD cantilever beam structure excitor bulb decoupling zero implementation.Its structure composition, connected mode are identical with embodiment one with localization method, and difference is that its fixing outrigger 1 and first drives the concrete structure of excitor 2 in module 100 composition different.
Described first drives excitor 2 in module 100 that free end is provided with the cantilever beam structure elastomer of internal thread hole 2-3, and it realizes the utility model move and the transmission of power for screwing to be connected with the external screw thread 4-1 of transmission body 4; Described excitor 2 cantilever end is provided with for hard-wired ring flange 2-1; Described ring flange 2-1 side end face is along the circumferential direction evenly provided with q for hard-wired through hole 2-1-1, and it realizes the fixed installation of the first driving module 100 for being connected with fastening bolt 8, wherein q be greater than 1 integer; Described excitor 2 external peripheral surface is along the circumferential direction evenly provided with 4n outerplanar 2-2, and it realizes being fastenedly connected of piezoelectric patches 3 for reaching epoxide-resin glue by love jail.
Described fixing outrigger 1 is the hollow circuit cylinder body structure that an end is provided with blind flange 1-1; Described blind flange 1-1 side end face is along the circumferential direction evenly provided with p for hard-wired through hole 1-1-1; Described fixing outrigger 1 free end is provided with interior shoulder hole 1-3, and it is for realizing the fastening installation of fairlead 5; Described fixing outrigger 1 is provided with through hole 1-2 near cantilever end, and it is for realizing the extraction of electrified wire; Described fixing outrigger 1 cantilever end is also provided with interior shoulder hole 1-4, described interior shoulder hole 1-4 upper end ring textures is along the circumferential direction also evenly provided with q internal thread hole 1-5, and it realizes the fixed installation of the first driving module 100 for being connected with fastening bolt 8.
Embodiment three: present embodiment is described in conjunction with Figure 23 ~ Figure 29.Present embodiments provide for a kind of specific embodiments of large stroke and high precision micro-nano drive unit of sandwich type free beam excite structures body bulb decoupling zero implementation.Its structure composition is identical with embodiment one with connected mode, and difference is that the concrete structure composition of excitor 2 in its first driving module 100 is different with localization method.
Described excitor 2 is made up of rear match block 2-1, piezoelectric patches 2-2, powered electrode sheet 2-3, front match block 2-4 and insulating sleeve 3; Described rear match block 2-1 is the stepped hollow cylindrical structure that left end is provided with internal thread hole 2-1-5; Described rear match block 2-1 left part external peripheral surface is along the circumferential direction evenly provided with w outerplanar 2-1-1 structure, its for realize rear match block 2-1 clamping install, wherein w be greater than 1 integer; External peripheral surface between described rear match block 2-1 outerplanar 2-1-1 and cascaded surface 2-1-6 is along the circumferential direction evenly provided with one group of m blind hole 2-1-2 structure, and it realizes the fixed installation of the first driving module 100 for being connected by the countersunk head through hole 1-4 on fixing outrigger 1 and fastening bolt 8; Described rear match block 2-1 right-hand end is provided with external screw thread 2-1-4, and it realizes piezoelectric patches 2-2 be connected with the clamping of powered electrode sheet 2-3 for screwing to be connected with front match block 2-4 left end internal thread 2-4-1; Described piezoelectric patches 2-3 is
d 33the annular piezoelectric ceramic piece of exciting pattern; Described powered electrode sheet 2-2 is the annular copper sheet being provided with ledge arrangement; 4n sheet piezoelectric patches 2-3 and 4n+1 sheet powered electrode sheet 2-2 is by the spaced external peripheral surface 2-1-3 be socketed between rear match block 2-1 and cascaded surface 2-1-6 of insulating sleeve 3.Described front match block 2-4 is the cylindrical structure that left and right end portions is provided with internal thread hole; Described front match block 2-4 left part internal thread hole 2-4-1 is used for screwing to be connected with rear match block 2-1 right part external screw thread 2-1-4 realizing piezoelectric patches 2-3 and being connected with the clamping of powered electrode sheet 2-2; Described front match block 2-4 right part internal thread hole 2-4-3 and rear match block 2-1 left part internal thread hole 2-1-5 screw with the external screw thread 4-1 of transmission body 4 to be together connected and realize the utility model and move and the transmission of power; Described front match block 2-4 right part external peripheral surface is along the circumferential direction evenly provided with w outerplanar 2-4-2 structure, and it is installed for the clamping realizing rear match block 2-1 and front match block 2-4 together with w outerplanar 2-1-1 on rear match block 2-1; Described front match block 2-4 left part external peripheral surface is along the circumferential direction evenly provided with one group of m blind hole 2-4-4 structure, and it realizes the fixed installation of the first driving module 100 for being connected by the countersunk head through hole 1-4 on fixing outrigger 1 and fastening bolt 8; The axial distribution position of two groups of blind hole 2-4-4 and 2-1-2 after described front match block 2-4 and rear match block 2-1 clamp and connect on it is identical.
The specific embodiments of the large stroke and high precision micro-nano drive unit localization method of described present embodiment sandwich type free beam excite structures body is utilize the first driving module 100 realize Long Distances micron location and utilize the second driving module 200 to realize the combined positioning method of nanometer positioning:
The described specific embodiments utilizing the first driving module 100 to realize Long Distances micron localization method is, the 2n sheet piezoelectric patches 2-3 that side in the 4n sheet piezoelectric patches 2-3 be socketed on rear match block 2-1 external peripheral surface 2-1-3 is arranged is formed exciting group A, and the 2n sheet piezoelectric patches 2-3 that all the other opposite sides are arranged forms exciting group B; Piezoelectric patches 2-3 in described exciting group A and exciting group B is all along the circumferential direction provided with 2s fan-shaped polarized area 2-3-1 and 2s fan-shaped insulation isolated area 2-3-2, and on described piezoelectric patches 2-3,2s fan-shaped polarized area 2-3-1 and 2s the spaced contiguous circumferential of fan-shaped insulation isolated area 2-3-2 is arranged; On described piezoelectric patches 2-3, the telescopic direction of 2s fan-shaped polarized area 2-3-1 is consistent with the thickness direction of piezoelectric patches 2-3, wherein
sfor being more than or equal to the integer of 1; The driving phase difference 180 degree of adjacent fan-shaped polarized area 2-3-1 on described piezoelectric patches 2-3; In described exciting group A or exciting group B, the fan-shaped polarized area 2-3-1 of piezoelectric patches 2-3 and fan-shaped polarized area 2-3-1 faces, and it drives phase place identical; Fan-shaped polarized area 2-3-1 between described exciting group A and exciting group B and fan-shaped insulation isolated area 2-3-2 faces; Described exciting group A and exciting group B passes to and drives phase difference to be the ac-excited signal of telecommunication of 90 degree or 270 degree; The described ac-excited signal of telecommunication can adopt amplitude to be
vthe p1 cycle is
tthe periodic electric signal such as sine, square wave or sawtooth waveforms, through the energising actuation duration
t 1=
iTafter, the micron order location within the scope of the positive and negative both direction Centimeter Level of the first driving module 100 or decimeter grade Long Distances can be realized respectively, wherein
ifor being more than or equal to the integer of 1.
The described specific embodiments utilizing the second driving module 200 to realize nanometer positioning method is, applies slope to be
k 1dC signal drive piezoelectric stack 9 in module 200 in second, through the energising actuation duration
t 2=
jTthe amplitude of rear excitation electric signal is
vp2, can realize the nanoscale location of the second driving module 200, finally realize large range nanometer grade positioning control of the present utility model, complete the output of extraneous loaded with nano level displacement movement, wherein
jfor being more than or equal to the integer of 1.
Embodiment four: present embodiment is described in conjunction with Figure 30 ~ Figure 33.Present embodiments provide for a kind of specific embodiments of large stroke and high precision micro-nano drive unit of sandwich type cantilever beam excite structures body bulb decoupling zero implementation.Its structure composition, connected mode are identical with embodiment three with localization method, and difference is that the concrete structure composition of excitor 2 in its first driving module 100 is different.
Described excitor 2 is made up of rear match block 2-1, piezoelectric patches 2-2, powered electrode sheet 2-3, front match block 2-4 and insulating sleeve 3; Described rear match block 2-1 is stepped hollow cantilever beam structure, and its left end is provided with ring flange 2-1-1; Described ring flange 2-1-1 side end face is along the circumferential direction evenly provided with q through hole 2-1-2, and it realizes the fixed installation of the first driving module 100 for being connected with fastening bolt 8; Described rear match block 2-1 right part is provided with external screw thread 2-1-4 structure, and it realizes piezoelectric patches 2-3 be connected with the clamping of powered electrode sheet 2-2 for screwing to be connected with internal thread hole 2-4-1 on the left of front match block 2-4; External peripheral surface 2-1-3 between described rear match block 2-1 external screw thread 2-1-4 and cascaded surface 2-1-5 is used for the mounting arrangements of insulating sleeve 3; Described front match block 2-4 is the cylindrical structure that left and right end portions is provided with internal thread hole; Described front match block 2-4 left part internal thread hole 2-4-1 is used for screwing to be connected with rear match block 2-1 right part external screw thread 2-1-4 realizing piezoelectric patches 2-3 and being connected with the clamping of powered electrode sheet 2-2; Described front match block 2-4 right part internal thread hole 2-4-3 and rear match block 2-1 left part internal thread hole 2-1-5 screw with the external screw thread 4-1 of transmission body 4 to be together connected and realize the utility model and move and the transmission of power; Described front match block 2-4 right part external peripheral surface is along the circumferential direction evenly provided with w outerplanar 2-4-2 structure, and it is installed for the clamping realizing rear match block 2-1 and front match block 2-4.
Embodiment five: present embodiment is described in conjunction with Figure 34.Present embodiments provide for the specific embodiments of the another kind of implementation of sandwich large stroke and high precision micro-nano drive unit localization method.In described present embodiment, the concrete arrangement of 4n sheet piezoelectric patches 2-3 is, the 2n sheet piezoelectric patches 2-3 that wherein side is arranged is
d 33the annular piezoelectric ceramic piece of exciting pattern, the 2n sheet piezoelectric patches 2-3 that all the other opposite sides are arranged is
d 15the annular piezoelectric ceramic piece of exciting pattern.
The specific embodiments of described present embodiment sandwich large stroke and high precision micro-nano drive unit localization method is utilize the first driving module 100 realize Long Distances micron location and utilize the second driving module 200 to realize the combined positioning method of nanometer positioning:
The described specific embodiments utilizing the first driving module 100 to realize Long Distances micron localization method is, by the 2n sheet that side in the 4n sheet piezoelectric patches 2-3 be socketed on rear match block 2-1 external peripheral surface 2-1-3 is arranged
d 33exciting mode piezoelectric sheet 2-3 forms exciting group A, the 2n sheet that all the other opposite sides are arranged
d 15exciting mode piezoelectric sheet 2-3 forms exciting group B; Piezoelectric patches 2-3 equal through-thickness polarization in described exciting group A, and its positive polarization face and positive polarization face positioned opposite, negative polarization face and negative polarization face positioned opposite; In described exciting group B, piezoelectric patches 2-3 all along the circumferential direction polarizes, and its positive polarization face and positive polarization face positioned opposite, negative polarization face and negative polarization face positioned opposite; Described exciting group A and exciting group B passes to and drives phase difference to be the ac-excited signal of telecommunication of 90 degree or 270 degree; The described ac-excited signal of telecommunication can adopt amplitude to be
vthe p1 cycle is
tthe periodic electric signal such as sine, square wave or sawtooth waveforms, through the energising actuation duration
t 1=
iTafter, the micron order location within the scope of the positive and negative both direction Centimeter Level of the first driving module 100 or decimeter grade Long Distances can be realized respectively, wherein
ifor being more than or equal to the integer of 1.
The described specific embodiments utilizing the second driving module 200 to realize nanometer positioning method is, applies slope to be
k 1dC signal drive piezoelectric stack 9 in module 200 in second, through the energising actuation duration
t 2=
jTthe amplitude of rear excitation electric signal is
vp2, can realize the nanoscale location of the second driving module 200, finally realize large-stroke nanometer positioning control of the present utility model, complete the output of extraneous loaded with nano level displacement movement, wherein
jfor being more than or equal to the integer of 1.
Embodiment six: present embodiment is described in conjunction with Figure 35 ~ Figure 43.Present embodiments provide for a kind of specific embodiments of mobile decoupling assembly 6 bearing decoupling zero implementation of large stroke and high precision micro-nano drive unit.
The mobile decoupling assembly 6 of described bearing decoupling zero implementation is made up of bearing outrigger 6-1 and double-direction thrust ball bearing 6-2; End surface center, transmission body 4 side in described present embodiment is provided with countersunk head blind hole 4-3 structure, and it is for realizing the installation and removal of double-direction thrust ball bearing 6-2; Described transmission body 4 homonymy end surface is along the circumferential direction evenly provided with r internal thread hole, and it realizes being fastenedly connected of bearing outrigger 6-1 and transmission body 4 for being connected with fastening bolt 8, wherein r be greater than 1 integer; Supporting bracket 11 rear surface center in described present embodiment is provided with internal thread hole 11-4, it screws connection for the fastening bolt 8 be connected with double-direction thrust ball bearing 6-2 interference fit, realizes transmission body 4 to rotate the-mobile decoupling of straight-line displacement movement output and loading plate 7 straight-line displacement movement output.
Claims (4)
1. a large stroke and high precision micro-nano drive unit, is characterized in that: described micro-nano drive unit drives module (100), second to drive module (200), mobile decoupling assembly (6), loading plate (7), connecting screw rod (10), fairlead (5) and fastening bolt (8) to form by fixing outrigger (1), first; Described first drives module (100) to comprise excitor (2), piezoelectric patches (3) and transmission body (4), described excitor (2) is free beam or cantilever beam structure elastomer, the rectangular piezoelectric ceramic sheet that described piezoelectric patches (3) is d31 exciting pattern or the annular piezoelectric ceramic piece of d33, d15 exciting pattern, described transmission body (4) is for being provided with externally threaded cylindrical structure; Described second drive module (200) comprise piezoelectric stack (9) and supporting bracket (11), described supporting bracket (11) is disk-like structure, and its upper end face is along the circumferential direction evenly provided with k blind hole (11-1), wherein k be greater than 1 integer; Described supporting bracket is provided with a through hole (11-2), and described supporting bracket (11) upper surface center is provided with internal thread hole (11-3); Described fixing outrigger (1) is the hollow circuit cylinder body structure that a side end is provided with blind flange (1-1); Described blind flange (1-1) side end face is along the circumferential direction evenly provided with p through hole (1-1-1), wherein p be greater than 1 integer, described fixing outrigger (1) free end is provided with interior shoulder hole (1-3), and described fixing outrigger (1) is provided with through hole (1-2) near cantilever end; Described mobile decoupling assembly (6) is ball motion decoupled components or bearing movable decoupled components; Described loading plate (7) is disk-like structure, upper end face is along the circumferential direction evenly provided with at least one screwed hole (7-1), described loading plate (7) upper end face center is provided with inner hexagonal hole (7-3) structure, and centre of surface position, described loading plate (7) bottom is provided with internal thread hole (7-2).
2. a large stroke and high precision micro-nano drive unit according to claim 1, it is characterized in that: be a kind of large stroke and high precision micro-nano drive unit of SMD free beam excite structures body, the excitor (2) of the large stroke and high precision micro-nano drive unit of described SMD free beam excite structures body is provided with the free beam structural elasticity body of internal thread hole (2-3) for both side ends, its external peripheral surface is along the circumferential direction evenly provided with 4n outerplanar (2-2), wherein n be more than or equal to 1 integer, described excitor (2) outerplanar (2-2) is along the circumferential direction evenly provided with two groups 2m blind hole (2-1), wherein m be more than or equal to 1 integer, between described two groups of blind holes (2-1), axial distribution distance should be greater than piezoelectric patches (3) maximum length direction size, the axial distribution position of the upper two groups of blind holes (2-1) of described excitor (2) outerplanar (2-2) is identical, described piezoelectric patches (3) is
d 31the rectangular piezoelectric ceramic sheet of exciting pattern, 4n sheet piezoelectric patches (3) is along the circumferential direction evenly arranged in the outerplanar (2-2) of excitor (2), and all through-thickness polarization, described in be arranged in piezoelectric patches (3) deformation direction on excitor (2) outerplanar (2-2) and excitor (2) central axis and all become to be arranged in parallel relation, described fixing outrigger (1) hollow circular cylinder external peripheral surface is along the circumferential direction evenly provided with two groups 2m countersunk head through hole (1-4) structure, and the distributing position of described two groups of countersunk head through holes (1-4) is identical with the distributing position of the upper two groups of blind holes (2-1) of excitor (2),
or for a kind of large stroke and high precision micro-nano drive unit of SMD cantilever beam structure excitor, the excitor (2) of the large stroke and high precision micro-nano drive unit of described SMD cantilever beam structure excitor is provided with the cantilever beam structure elastomer of internal thread hole (2-3) for free end, described excitor (2) cantilever end is provided with ring flange (2-1) structure, described ring flange (2-1) side end face is along the circumferential direction evenly provided with q through hole (2-1-1), wherein q be greater than 1 integer; Described excitor (2) external peripheral surface is along the circumferential direction evenly provided with 4n outerplanar (2-2); Described fixing outrigger (1) is the hollow circuit cylinder body structure that an end is provided with blind flange (1-1), described blind flange (1-1) side end face is along the circumferential direction evenly provided with p through hole (1-1-1), described fixing outrigger (1) free end is provided with interior shoulder hole (1-3), described fixing outrigger (1) is provided with through hole (1-2) near cantilever end, described fixing outrigger (1) cantilever end is also provided with interior shoulder hole (1-4), and described interior shoulder hole (1-4) upper end ring textures is along the circumferential direction also evenly provided with q internal thread hole (1-5).
3. a large stroke and high precision micro-nano drive unit according to claim 1, it is characterized in that: be a kind of large stroke and high precision micro-nano drive unit of sandwich type free beam excite structures body, the excitor (2) of the large stroke and high precision micro-nano drive unit of described sandwich type free beam excite structures body is made up of rear match block (2-1), piezoelectric patches (2-2), powered electrode sheet (2-3), front match block (2-4) and insulating sleeve (3), described rear match block (2-1) is provided with the stepped hollow cylindrical structure of internal thread hole (2-1-5) for left end, described rear match block (2-1) left part external peripheral surface is along the circumferential direction evenly provided with w outerplanar (2-1-1) structure, wherein w be greater than 1 integer, external peripheral surface between described rear match block (2-1) outerplanar (2-1-1) and cascaded surface (2-1-6) is along the circumferential direction evenly provided with one group m blind hole (2-1-2), described rear match block (2-1) right-hand end is provided with external screw thread (2-1-4), described piezoelectric patches (2-3) is
d 33the annular piezoelectric ceramic piece of exciting pattern, described powered electrode sheet (2-2) is for being provided with the annular copper sheet of ledge arrangement, 4n sheet piezoelectric patches (2-3) and 4n+1 sheet powered electrode sheet (2-2) are by the spaced external peripheral surface (2-1-3) be socketed between rear match block (2-1) and cascaded surface (2-1-6) of insulating sleeve (3), described front match block (2-4) is provided with the cylindrical structure of internal thread hole for left and right end portions, described front match block (2-4) right part external peripheral surface is along the circumferential direction evenly provided with w outerplanar (2-4-2) structure, described front match block (2-4) left part external peripheral surface is along the circumferential direction evenly provided with one group m blind hole (2-4-4), two groups of blind holes (2-4-4) after described front match block (2-4) and rear match block (2-1) clamp and connect on it are identical with the axial distribution position of (2-1-2),
Or be a kind of large stroke and high precision micro-nano drive unit of sandwich type cantilever beam excite structures body, the excitor (2) of the large stroke and high precision micro-nano drive unit of described sandwich type cantilever beam excite structures body is made up of rear match block (2-1), piezoelectric patches (2-2), powered electrode sheet (2-3), front match block (2-4) and insulating sleeve (3), described rear match block (2-1) is stepped hollow cantilever beam structure, its left end is provided with ring flange (2-1-1), described ring flange (2-1-1) side end face is along the circumferential direction evenly provided with q through hole (2-1-2), described rear match block (2-1) right part is provided with external screw thread (2-1-4), external peripheral surface (2-1-3) mounting arrangements insulating sleeve (3) between described rear match block (2-1) external screw thread (2-1-4) and cascaded surface (2-1-5), described front match block (2-4) is provided with the cylindrical structure of internal thread hole for left and right end portions, described front match block (2-4) right part external peripheral surface is along the circumferential direction evenly provided with w outerplanar (2-4-2) structure.
4. the mobile decoupling assembly of a large stroke and high precision micro-nano drive unit according to claim 1, it is characterized in that: be a kind of ball motion decoupled components (6), in described ball motion decoupled components (6), transmission body (4) side end surface is along the circumferential direction evenly provided with individual identical bulb (4-2) structure of t, wherein t be more than or equal to 3 integer, described supporting bracket (11) surface, bottom is provided with circular cambered way (11-4), bulb (4-2) Structure composing ball motion decoupled components (6) of described circular cambered way (11-4) and transmission body (4) side end,
or for a kind of bearing movable decoupled components (6), described bearing movable decoupled components (6) is made up of bearing outrigger (6-1) and double-direction thrust ball bearing (6-2), in described ball motion decoupled components (6), end surface center, transmission body (4) side is provided with countersunk head blind hole (4-3), described transmission body (4) homonymy end surface is along the circumferential direction evenly provided with r internal thread hole, wherein r be greater than 1 integer, supporting bracket (11) the rear surface center in described ball motion decoupled components (6) is provided with internal thread hole (11-4).
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105043702A (en) * | 2015-09-19 | 2015-11-11 | 吉林大学 | Exciting force applying method and device in spatial direction |
| CN105305874A (en) * | 2015-11-16 | 2016-02-03 | 南京航空航天大学 | Rib plate-excited displacement type longitudinal-torsional composite ultrasonic motor |
| CN105537980A (en) * | 2015-12-16 | 2016-05-04 | 哈尔滨工业大学 | High-precision flexible redundant platform |
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2014
- 2014-12-22 CN CN201420817462.8U patent/CN204392112U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105043702A (en) * | 2015-09-19 | 2015-11-11 | 吉林大学 | Exciting force applying method and device in spatial direction |
| CN105043702B (en) * | 2015-09-19 | 2017-08-11 | 吉林大学 | A kind of direction in space exciting force applying method and device |
| CN105305874A (en) * | 2015-11-16 | 2016-02-03 | 南京航空航天大学 | Rib plate-excited displacement type longitudinal-torsional composite ultrasonic motor |
| CN105305874B (en) * | 2015-11-16 | 2017-09-05 | 南京航空航天大学 | A kind of floor excitation formula displacement type longitudinal-torsional composite ultrasonic motor |
| CN105537980A (en) * | 2015-12-16 | 2016-05-04 | 哈尔滨工业大学 | High-precision flexible redundant platform |
| CN105537980B (en) * | 2015-12-16 | 2017-09-26 | 哈尔滨工业大学 | A kind of flexible redundancy platform of high accuracy |
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