CN204385322U - Sapphire furnace crystal growing and pulling mechanism - Google Patents
Sapphire furnace crystal growing and pulling mechanism Download PDFInfo
- Publication number
- CN204385322U CN204385322U CN201420787166.8U CN201420787166U CN204385322U CN 204385322 U CN204385322 U CN 204385322U CN 201420787166 U CN201420787166 U CN 201420787166U CN 204385322 U CN204385322 U CN 204385322U
- Authority
- CN
- China
- Prior art keywords
- lift
- lift axle
- axle bed
- pedestal
- straight line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 43
- 230000007246 mechanism Effects 0.000 title claims abstract description 33
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 18
- 239000010980 sapphire Substances 0.000 title claims abstract description 18
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 description 4
- 230000003534 oscillatory effect Effects 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model sapphire furnace crystal growing and pulling mechanism, comprising: frame, in frame, is equipped with back shaft; Straight line module, straight line module is arranged in frame, and straight line module is provided with lift servo-motor mechanisms; Lift pedestal, lift pedestal is arranged on straight line module, and lift pedestal is connected with lift servo-motor mechanisms; Bearing head, one end of bearing head is rotationally connected by rotating shaft and lift pedestal; Bearing bar, bearing bar is fixed by holding bolt and bearing head; Lift axle bed, lift axle bed is set in the outside of bearing bar, and lift axle bed is provided with convolution joint, and convolution joint is connected with convolution servomotor; Lift axle, lift axle is arranged in lift axle bed, and one end of lift axle is connected with convolution joint; Poidometer, poidometer is arranged on lift pedestal, and the weigh the other end of pressure head and bearing head of the adjustment of poidometer front end is fitted.The utility model seed crystal easily adjusts seed crystal position, meets the various processing requirement of crystal growth.
Description
Technical field
The utility model relates to field of semiconductor processing, particularly a kind of sapphire furnace crystal growing and pulling mechanism.
Background technology
Sapphire furnace growth shift mechanism on market, is all realized the moving forward and backward of seed crystal by orthogonal two cover slide rails, moved left and right, cannot realizes swing, swing.This structure cannot adjust, because the lift axle in the vertical direction seed crystal position that factors such as (cause) part manufacture, assembly precision or the stressed after strain of lift axle cause that tilts is departed from, and seed crystal departs from thermal field center and easily causes long brilliant difficulty or long brilliant failure; This structure as there is sticky pot, also lacks effective terms of settlement in long brilliant process, easily long brilliant failure; Two poidometers that this shift mechanism needs two cover slide rails and diagonal angle to install, complicated in mechanical structure, cost is higher.
Utility model content
The purpose of this utility model is to provide a kind of sapphire furnace crystal growing and pulling mechanism meeting the various processing requirement of crystal growth.
For solving the problems of the technologies described above, the utility model sapphire furnace crystal growing and pulling mechanism, comprising: frame, in described frame, is equipped with back shaft; Straight line module, described straight line module is arranged in described frame, and described straight line module is provided with lift servo-motor mechanisms; Lift pedestal, described lift pedestal is arranged on described straight line module, and described lift pedestal is connected with described lift servo-motor mechanisms; Bearing head, one end of described bearing head is rotationally connected by rotating shaft and described lift pedestal; Bearing bar, described bearing bar is fixed by holding bolt and described bearing head; Lift axle bed, described lift axle bed is set in the outside of described bearing bar, and described lift axle bed is provided with convolution joint, and described convolution joint is connected with convolution servomotor; Lift axle, described lift axle is arranged in described lift axle bed, and one end of described lift axle is connected with described convolution joint; Poidometer, described poidometer is arranged on described lift pedestal, and the weigh the other end of pressure head and described bearing head of the adjustment of described poidometer front end is fitted.
Also be provided with adjusting nut in the outside of described bearing bar, described adjusting nut is set on the outside of lift axle bed, is provided with the outside screw matched with the internal thread on described adjusting nut inwall in the outside of described lift axle bed.
Described frame is provided with locking mechanism.Holding screw is provided with in the outside of described bearing bar.
The utility model sapphire furnace crystal growing and pulling mechanism seed crystal can be elevated, rotate, move forward and backward, move left and right, swing, swings, and easily adjustment seed crystal position, meets the various processing requirement of crystal growth; In crystal growing process, there are abnormal conditions (sticky pot), axle can be lifted by slight oscillatory, coordinate and improve temperature of thermal field, effectively deal with problems; Lever type mechanical mechanism, structure is simple, and stiff stability, cost is lower.
Accompanying drawing explanation
Fig. 1 is the utility model sapphire furnace crystal growing and pulling mechanism structure schematic diagram;
Fig. 2 is the utility model sapphire furnace crystal growing and pulling mechanism's test pattern and partial enlarged drawing.
Description of reference numerals in the utility model sapphire furnace crystal growing and pulling mechanism accompanying drawing:
1-back shaft 2-frame 3-locking mechanism
4-straight line module 5-lifts servo-motor mechanisms 6-bearing head
7-adjusting nut 8-convolution joint 9-convolution servomotor
10-poidometer 11-lifts pedestal 12-rotating shaft
13-seed crystal 14-bearing bar 15-holding screw
16-holding bolt 17-lifts axle bed 18-and lifts axle
19-weighs pressure head
Embodiment
Below in conjunction with accompanying drawing, the utility model sapphire furnace crystal growing and pulling mechanism is described in further detail.
As shown in Figure 1 and Figure 2, the frame 2 of the utility model sapphire furnace crystal growing and pulling mechanism rotates around back shaft 1, realizes seed crystal 13 and moves forward and backward.After seed crystal 13 arrives correct position, lock by locking mechanism 3, prevent from swaying; Lift servo-motor mechanisms 5 drives the lift pedestal 11 be fastened on straight line module 4 slide block to move up and down, and realizes seed crystal 13 up-and-down movement.Bearing head 6 is arranged on lift pedestal 11 with hinging manner and sways, and pressure head 19 of weighing is point of suppon, and application lever balance theory, poidometer 10 can weigh crystal growth weight.Regulate the length of pressure head 19 relative to poidometer 10 of weighing, then bearing head 6 is rotated around lift pedestal 11 by rotating shaft 12, realizes seed crystal 13 and swings.Bearing bar 14 is fastened on bearing head 6 by holding bolt 16, adjusting nut 7 is fixed relative to bearing bar 14 axial location, and adjusting nut 7 is threaded with lift axle bed 17, rotates adjusting nut 7, lift axle bed 17 can be driven to move forward and backward, realize seed crystal 13 and move left and right.Lift axle bed 17 rotates around bearing bar 14, realizes seed crystal 13 swing.After seed crystal 13 arrives correct position, fastening holding screw 15, prevents from swaying; As there is sticky pot in crystal growing process, can unclamp holding screw 15, slight oscillatory lift axle, coordinates and improves temperature of thermal field, can effectively deal with problems.Convolution servomotor 9 drives convolution joint 8 to drive lift axle 18 to rotate, and realizes seed crystal 13 cyclotron motion.
The utility model sapphire furnace crystal growing and pulling mechanism seed crystal can be elevated, rotate, move forward and backward, move left and right, swing, swings, and easily adjustment seed crystal position, meets the various processing requirement of crystal growth; In crystal growing process, there are abnormal conditions (sticky pot), axle can be lifted by slight oscillatory, coordinate and improve temperature of thermal field, effectively deal with problems; Lever type mechanical mechanism, structure is simple, and stiff stability, cost is lower.
Below the preferred embodiment that the utility model is created is illustrated, but the utility model is created and is not limited to described embodiment, those of ordinary skill in the art also can make all equivalent modification or replacement under the prerequisite without prejudice to the invention spirit, and these equivalent modification or replacement are all included in the application's claim limited range.
Claims (4)
1. sapphire furnace crystal growing and pulling mechanism, is characterized in that, comprising:
Frame, is equipped with back shaft in described frame;
Straight line module, described straight line module is arranged in described frame, and described straight line module is provided with lift servo-motor mechanisms;
Lift pedestal, described lift pedestal is arranged on described straight line module, and described lift pedestal is connected with described lift servo-motor mechanisms;
Bearing head, one end of described bearing head is rotationally connected by rotating shaft and described lift pedestal;
Bearing bar, described bearing bar is fixed by holding bolt and described bearing head;
Lift axle bed, described lift axle bed is set in the outside of described bearing bar, and described lift axle bed is provided with convolution joint, and described convolution joint is connected with convolution servomotor;
Lift axle, described lift axle is arranged in described lift axle bed, and one end of described lift axle is connected with described convolution joint;
Poidometer, described poidometer is arranged on described lift pedestal, and the weigh the other end of pressure head and described bearing head of the adjustment of described poidometer front end is fitted.
2. sapphire furnace crystal growing and pulling mechanism according to claim 1, it is characterized in that, also adjusting nut is provided with in the outside of described bearing bar, described adjusting nut is set on the outside of lift axle bed, is provided with the outside screw matched with the internal thread on described adjusting nut inwall in the outside of described lift axle bed.
3. sapphire furnace crystal growing and pulling mechanism according to claim 1, is characterized in that, described frame is provided with locking mechanism.
4. sapphire furnace crystal growing and pulling mechanism according to claim 1, is characterized in that, be provided with holding screw in the outside of described bearing bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420787166.8U CN204385322U (en) | 2014-12-12 | 2014-12-12 | Sapphire furnace crystal growing and pulling mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420787166.8U CN204385322U (en) | 2014-12-12 | 2014-12-12 | Sapphire furnace crystal growing and pulling mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204385322U true CN204385322U (en) | 2015-06-10 |
Family
ID=53358055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420787166.8U Expired - Fee Related CN204385322U (en) | 2014-12-12 | 2014-12-12 | Sapphire furnace crystal growing and pulling mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204385322U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104499052A (en) * | 2014-12-12 | 2015-04-08 | 上海汉虹精密机械有限公司 | Crystal growth pulling-lifting mechanism of sapphire furnace |
| CN105239155A (en) * | 2015-11-17 | 2016-01-13 | 哈尔滨奥瑞德光电技术有限公司 | Improved large-sized sapphire single crystal furnace support structure |
-
2014
- 2014-12-12 CN CN201420787166.8U patent/CN204385322U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104499052A (en) * | 2014-12-12 | 2015-04-08 | 上海汉虹精密机械有限公司 | Crystal growth pulling-lifting mechanism of sapphire furnace |
| CN104499052B (en) * | 2014-12-12 | 2023-09-26 | 上海汉虹精密机械有限公司 | Crystal growth lifting mechanism of sapphire furnace |
| CN105239155A (en) * | 2015-11-17 | 2016-01-13 | 哈尔滨奥瑞德光电技术有限公司 | Improved large-sized sapphire single crystal furnace support structure |
| CN105239155B (en) * | 2015-11-17 | 2017-10-24 | 哈尔滨奥瑞德光电技术有限公司 | Improved large-size sapphire single-crystal furnace cradle structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150610 |