CN204359280U - There is the interferometer fine-tuning mechanism of pneuma-lock function - Google Patents
There is the interferometer fine-tuning mechanism of pneuma-lock function Download PDFInfo
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- CN204359280U CN204359280U CN201420781510.2U CN201420781510U CN204359280U CN 204359280 U CN204359280 U CN 204359280U CN 201420781510 U CN201420781510 U CN 201420781510U CN 204359280 U CN204359280 U CN 204359280U
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Abstract
The utility model relates to a kind of interferometer fine-tuning mechanism with pneuma-lock function, and the dome arc spigot surface of middle seat and the concave arc spigot surface of base are connected, and form around X-axis revolute; Connection Block and middle seat are connected, and form around Z axis revolute; Rack pinion pair is housed between middle seat and base, for seat in realizing around the rotation of X-direction, rack pinion pair is housed between Connection Block and middle seat, rotates around Z-direction for realizing Connection Block; Base circular arc spigot surface arranges pneuma-lock parts, and in locking, seat is around X-direction turned position, uniform pneuma-lock parts on middle seat, for locking Connection Block around Z-direction turned position.The utility model can make interferometer do the adjustment of two degrees of freedom pose around X-axis, Z axis, and setting range is ± 5 °, and adjustment resolution is 0.1 °, meets the adjustment requirement of interferometer optical axis to large-sized optical elements surface verticality.It has pneuma-lock function, can complete auto lock in the optional position in setting range.
Description
Technical field
The utility model relates to a kind of interferometer of pneuma-lock function, especially a kind of fine-tuning mechanism of interferometer.
Background technology
Along with the development of science and technology, large scale optical system obtains in high-tech sectors such as astronomical optics, space optics, ground based detections and applies more and more widely.The detecting instrument that the manufacture of large-sized optical elements needs precision with it to adapt and mechanical adjusting mechanism.
The important means that interferometer detects as optical component surface shape, becomes the requisite equipment of enterprise.Before utilizing interferometer to detect, usually need adjustment interferometer optical axis to the verticality of optical element surface, to guarantee the accuracy detected.Because interferometer adjustment optical axis pose itself is limited in scope, this just needs mechanical adjusting mechanism to carry out auxiliary adjustment.
The classic method utilizing mechanical adjusting mechanism to adjust is off-line adjustment, take off from machining tool by optical element, be placed on mechanical adjusting mechanism, by adjusting the pose of optical element, meet the verticality requirement of interferometer optical axis to optical element surface, in whole adjustment process, interferometer pose remains unchanged.This method poor universality and efficiency is low, needs to manufacture different mechanical adjusting mechanisms and optical element carrying clamping mechanism according to optical element dimension, is obviously unsuitable for the detection of large-sized optical elements.For this reason, need to develop a kind of interferometer fine-tuning mechanism, by directly adjusting interferometer pose, meeting the verticality requirement of interferometer optical axis to optical element surface, realizing the high-level efficiency of large-sized optical elements face shape, pin-point accuracy detection in place.
Summary of the invention
Technical problem to be solved in the utility model overcomes the deficiencies in the prior art, provides a kind of interferometer fine-tuning mechanism with pneuma-lock function.
For solving above-mentioned technical barrier, the utility model adopts following technical proposals:
A kind of interferometer fine-tuning mechanism with pneuma-lock function, have one can in X-axis is rotated seat, a Connection Block that can rotate around Z axis, a base for seat in supporting, the dome arc spigot surface of described middle seat and the concave arc spigot surface of base are connected, and form around X-axis revolute; Described Connection Block and middle seat are connected, and form around Z axis revolute; Between described middle seat and base, rack pinion pair being housed, for seat in realizing around the rotation of X-direction, rack pinion pair being housed, for realizing the rotation of Connection Block around Z-direction between described Connection Block and middle seat; Respectively on the circular arc spigot surface at described base two ends arranging two cover pneuma-lock parts, for seat in locking around the turned position of X-direction, described middle seat being evenly equipped with four cover pneuma-lock parts, for locking the turned position of Connection Block around Z-direction.
Described rack pinion pair is made up of screw mandrel, tooth bar, sector gear and cushion block, and screw mandrel one end is made square, twists for spanner, and tooth bar one end has threaded hole, forms feed screw nut pair with screw mandrel.
Described pneuma-lock parts are made up of cylinder, cylinder pressure plate, air cylinder fixed plate, butterfly spring, clamping plate, fishbolt, the clamping region in cylinder front is connected with cylinder pressure plate, the cylinder back side is then connected with air cylinder fixed plate, clamping plate is stepped cylindrical shape, center has tapped through hole, and clamping plate cylindrical step surface is equipped with butterfly spring; The screw portion of fishbolt is screwed in clamping plate through hole, and its bolt head is square.
Needle bearing is equipped with at described Connection Block and the middle seat place of being rotationally connected, and needle bearing inner ring and middle seat round boss are connected, and outer ring and Connection Block center pit are connected, and described middle seat round boss is provided with the bearing gland for compressing needle bearing.
Described screw mandrel, cushion block are arranged on base, and cushion block is used for fixing screw mandrel position; Sector gear is arranged on middle seat, and is meshed with tooth bar, forms X-axis drive disk assembly.
Described screw mandrel, cushion block are arranged on middle seat, and cushion block is used for fixing screw mandrel position; Sector gear is arranged on Connection Block, and is meshed with tooth bar, forms Z-axis transmission parts.
Described air cylinder fixed plate is arranged on base, for fixed air cylinder position; Clamping plate is arranged in base, and the square bolt of fishbolt matches with the T-slot on middle seat circular arc spigot surface.
Described air cylinder fixed plate is arranged on middle seat, for fixed air cylinder position; Clamping plate is arranged in middle seat, and the square bolt of fishbolt matches with the T-slot on Connection Block spigot surface.
Described middle seat, base are installed respectively X-axis angle indicator board, X-axis angle index plate; Described Connection Block, middle seat are installed respectively Z axis angle indicator board, Z axis angle index plate.
The beneficial effects of the utility model are:
The utility model can make interferometer do the adjustment of two degrees of freedom pose around X-axis, Z axis, and setting range is ± 5 °, and adjustment resolution is 0.1 °, meets the adjustment requirement of interferometer optical axis to large-sized optical elements surface verticality.The utility model has pneuma-lock function, can complete auto lock in the optional position in setting range, with fixing interferometer pose, thus realizes high-level efficiency, the pin-point accuracy detection in place of large-sized optical elements face shape.
Accompanying drawing explanation
Fig. 1 is structural upright schematic diagram of the present utility model;
Fig. 2 is X-axis drive disk assembly Standard cut-open view of the present utility model;
Fig. 3 is Z-axis transmission modular construction sectional arrangement drawing of the present utility model;
Fig. 4 is X-axis pneuma-lock modular construction sectional arrangement drawing of the present utility model;
Fig. 5 is the partial enlarged drawing at I place in Fig. 4;
Fig. 6 is Z axis pneuma-lock modular construction sectional arrangement drawing of the present utility model;
Fig. 7 is the partial enlarged drawing at II place in Fig. 6;
Fig. 8 is the schematic perspective view of installation indicator board of the present utility model and scaleplate;
Fig. 9 is the partial enlarged drawing at III place in Fig. 8.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the utility model is described in further detail.
As shown in Figures 1 to 9, the interferometer fine-tuning mechanism with pneuma-lock function of the present utility model, comprise base 1, middle seat 2, Connection Block 3, X-axis screw mandrel 5, X-axis tooth bar 6, X-axis sector gear 7, X-axis cushion block 8, Z axis bearing 9, bearing gland 10, Z axis screw mandrel 11, Z axis tooth bar 12, Z axis sector gear 13, Z axis cushion block 14, X-axis cylinder 15, X-axis cylinder pressure plate 16, X-axis air cylinder fixed plate 17, butterfly spring 18, X-axis clamping plate 19, X-axis fishbolt 20, Z axis cylinder 21, Z axis cylinder pressure plate 22, Z axis air cylinder fixed plate 23, Z axis clamping plate 24, Z axis fishbolt 25, X-axis angle indicator board 26, X-axis angle index plate 27, Z axis angle indicator board 28, Z axis angle index plate 29.
As shown in Figure 1, base 1, middle seat 2, Connection Block 3 form interferometer fine-tuning mechanism body.Connection Block 3 front surface is for connecting interferometer 4, and its rear surface coordinates with middle seat 2, forms around Z axis revolute; The dome arc spigot surface of middle seat 2 matches with the concave arc spigot surface of base 1, forms around X-axis revolute; Base 1 position is fixed, for seat 2, Connection Block 3 and interferometer 4 in support.
As shown in Figure 2, X-axis screw mandrel 5, X-axis tooth bar 6, X-axis sector gear 7, X-axis cushion block 8 form X-axis drive disk assembly.X-axis screw mandrel 5 is arranged on base 1, and one end is made square, twists for spanner; X-axis cushion block 8 is arranged on base 1, for fixing X-axis screw mandrel 5 position; X-axis tooth bar 6 one end has threaded hole, forms feed screw nut pair with X-axis screw mandrel 5; X-axis sector gear 7 is arranged on middle seat 2, and is meshed with X-axis tooth bar 6, forms rack pinion secondary.Like this, manually twist X-axis screw mandrel 5, in just can realizing, seat 2 is around the rotation of X-direction.Z axis bearing 9 is needle bearing, for the rotation of Connection Block 3 around Z-direction, and plays radial support effect, and its inner ring coordinates with middle seat 2 round boss, and outer ring coordinates with Connection Block 3 center pit.Bearing gland 10 is arranged on middle seat 2 round boss, compresses Z axis bearing 9.
As shown in Figure 3, Z axis screw mandrel 11, Z axis tooth bar 12, Z axis sector gear 13, Z axis cushion block 14 form Z-axis transmission parts.Z axis screw mandrel 11 is arranged on middle seat 2, and one end is made square, twists for spanner; Z axis cushion block 14 is arranged on middle seat 2, for fixing Z axis screw mandrel 11 position; Z axis tooth bar 12 one end has threaded hole, forms feed screw nut pair with Z axis screw mandrel 11; Z axis sector gear 13 is arranged on Connection Block 3, and is meshed with Z axis tooth bar 12, forms rack pinion secondary.Like this, manually twist Z axis screw mandrel 11, just can realize the rotation of Connection Block 3 around Z-direction.
As Fig. 4, shown in 5, X-axis cylinder 15, X-axis cylinder pressure plate 16, X-axis air cylinder fixed plate 17, butterfly spring 18, X-axis clamping plate 19, X-axis fishbolt 20 form X-axis pneuma-lock parts, have 4 covers, each layout 2 cover on the circular arc spigot surface at base 1 two ends.The clamping region in X-axis cylinder 15 front is connected with X-axis cylinder pressure plate 16, and its back side is then connected with X-axis air cylinder fixed plate 17; X-axis air cylinder fixed plate 17 is arranged on base 1, for fixing X-axis cylinder 15 position; X-axis clamping plate 19 is in stepped cylindrical shape, and center has tapped through hole, is arranged in base 1, and its cylindrical step surface is equipped with butterfly spring 18; The screw portion of X-axis fishbolt 20 is screwed in X-axis clamping plate 19 through hole, and its bolt head is square, and matches with the T-slot on middle seat 2 circular arc spigot surface.Like this, by suitably adjusting the be threaded into amount of X-axis fishbolt 20 in X-axis clamping plate 19 through hole, butterfly spring 18 being compressed, just can obtain required clamping force.Under connection source of the gas state, the diaphragm of X-axis cylinder 15 ejects, and X-axis cylinder pressure plate 16 overcomes spring force and promotes X-axis clamping plate 19, make the bolt head of X-axis fishbolt 20 and T-slot bottom part from, at this moment middle seat 2 freely can rotate around X-direction; When turning to required position, cut off source of the gas, the diaphragm of X-axis cylinder 15 is retracted, X-axis cylinder pressure plate 16 moment is separated with X-axis clamping plate 19, X-axis clamping plate 19 under spring force, the bolt head of X-axis fishbolt 20 and T-slot bottom connection are touched, and clamps, thus locking is around the turned position of X-direction.
As Fig. 6, shown in 7, Z axis cylinder 21, Z axis cylinder pressure plate 22, Z axis air cylinder fixed plate 23, butterfly spring 18, Z axis clamping plate 24, Z axis fishbolt 25 form Z axis pneuma-lock parts, have 4 covers, are distributed on middle seat 2.The clamping region in Z axis cylinder 21 front is connected with Z axis cylinder pressure plate 22, and its back side is then connected with Z axis air cylinder fixed plate 23; Z axis air cylinder fixed plate 23 is arranged on middle seat 2, for fixing Z axis cylinder 21 position; Z axis clamping plate 24 is in stepped cylindrical shape, and center has tapped through hole, is arranged in middle seat 2, its cylindrical step surface is equipped with butterfly spring 18; The screw portion of Z axis fishbolt 25 is screwed in the through hole of Z axis clamping plate 24, and its bolt head is square, and matches with the T-slot on Connection Block 3 spigot surface.Like this, by suitably adjusting the be threaded into amount of Z axis fishbolt 25 in Z axis clamping plate 24 through hole, butterfly spring 18 being compressed, just can obtain required clamping force.Under connection source of the gas state, the diaphragm of Z axis cylinder 21 ejects, and Z axis cylinder pressure plate 22 overcomes spring force and promotes Z axis clamping plate 24, make the bolt head of Z axis fishbolt 25 and T-slot bottom part from, at this moment Connection Block 3 freely can rotate around Z-direction; When turning to required position, cut off source of the gas, the diaphragm of Z axis cylinder 21 is retracted, Z axis cylinder pressure plate 22 moment is separated with Z axis clamping plate 24, Z axis clamping plate 24 under spring force, the bolt head of Z axis fishbolt 25 and T-slot bottom connection are touched, and clamps, thus locking is around the turned position of Z-direction.
As Fig. 8, shown in 9, X-axis angle indicator board 26, X-axis angle index plate 27 are arranged on middle seat 2, base 1 respectively; Z axis angle indicator board 28, Z axis angle index plate 29 are arranged on Connection Block 3, middle seat 2 respectively, make the angular setting of X-axis, Z-direction more directly perceived, accurate.
The utility model can make interferometer do the adjustment of two degrees of freedom pose around X-axis, Z axis, and setting range is ± 5 °, and adjustment resolution is 0.1 °, meets the adjustment requirement of interferometer optical axis to large-sized optical elements surface verticality.The utility model has pneuma-lock function, can complete auto lock in the optional position in setting range, with fixing interferometer pose, thus realizes high-level efficiency, the pin-point accuracy detection in place of large-sized optical elements face shape.
Claims (9)
1. one kind has the interferometer fine-tuning mechanism of pneuma-lock function, have one can around X-axis rotate in seat (2), a Connection Block (3) that can rotate around Z axis, a base (1) for seat in supporting, it is characterized in that: the dome arc spigot surface of described middle seat (2) and the concave arc spigot surface of base (1) are connected, and form around X-axis revolute; Described Connection Block (3) and middle seat (2) are connected, and form around Z axis revolute; Between described middle seat (2) and base (1), rack pinion pair is housed, for seat (2) in realization around the rotation of X-direction, between described Connection Block (3) and middle seat (2), rack pinion pair is housed, for realizing the rotation of Connection Block (3) around Z-direction; Each layout two cover pneuma-lock parts on the circular arc spigot surface at described base (1) two ends, for seat (2) in locking around the turned position of X-direction, described middle seat (2) is evenly equipped with four cover pneuma-lock parts, for locking Connection Block (3) around the turned position of Z-direction.
2. a kind of interferometer fine-tuning mechanism with pneuma-lock function according to claim 1, it is characterized in that: described rack pinion pair is made up of screw mandrel, tooth bar, sector gear and cushion block, screw mandrel one end is made square, twist for spanner, tooth bar one end has threaded hole, forms feed screw nut pair with screw mandrel.
3. the interferometer fine-tuning mechanism with pneuma-lock function according to claim 1, it is characterized in that: described pneuma-lock parts are made up of cylinder, cylinder pressure plate, air cylinder fixed plate, butterfly spring, clamping plate, fishbolt, the clamping region in cylinder front is connected with cylinder pressure plate, the cylinder back side is then connected with air cylinder fixed plate, clamping plate is stepped cylindrical shape, center has tapped through hole, and clamping plate cylindrical step surface is equipped with butterfly spring; The screw portion of fishbolt is screwed in clamping plate through hole, and its bolt head is square.
4. the interferometer fine-tuning mechanism with pneuma-lock function according to claim 1, it is characterized in that: needle bearing is equipped with at described Connection Block (3) and middle seat (2) place of being rotationally connected, needle bearing inner ring and middle seat round boss are connected, outer ring and Connection Block center pit are connected, and described middle seat round boss are provided with the bearing gland for compressing needle bearing.
5. a kind of interferometer fine-tuning mechanism with pneuma-lock function according to claim 1, is characterized in that: described middle seat (2), base (1) are installed respectively X-axis angle indicator board (26), X-axis angle index plate (27); Described Connection Block (3), middle seat (2) are installed respectively Z axis angle indicator board (28), Z axis angle index plate (29).
6. the interferometer fine-tuning mechanism with pneuma-lock function according to claim 2, is characterized in that: described screw mandrel, cushion block are arranged on base (1), and cushion block is used for fixing screw mandrel position; Sector gear is arranged on middle seat (2), and is meshed with tooth bar, forms X-axis drive disk assembly.
7. the interferometer fine-tuning mechanism with pneuma-lock function according to claim 2, is characterized in that: described screw mandrel, cushion block are arranged on middle seat (2), and cushion block is used for fixing screw mandrel position; Sector gear is arranged on Connection Block (3), and is meshed with tooth bar, forms Z-axis transmission parts.
8. the interferometer fine-tuning mechanism with pneuma-lock function according to claim 3, is characterized in that: described air cylinder fixed plate is arranged on base (1), for fixed air cylinder position; Clamping plate is arranged in base (1), and the square bolt of fishbolt matches with the T-slot on middle seat (2) circular arc spigot surface.
9. a kind of interferometer fine-tuning mechanism with pneuma-lock function according to claim 3, is characterized in that: described air cylinder fixed plate is arranged on middle seat (2), for fixed air cylinder position; Clamping plate is arranged in middle seat (2), and the square bolt of fishbolt matches with the T-slot on Connection Block (3) spigot surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420781510.2U CN204359280U (en) | 2014-12-12 | 2014-12-12 | There is the interferometer fine-tuning mechanism of pneuma-lock function |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420781510.2U CN204359280U (en) | 2014-12-12 | 2014-12-12 | There is the interferometer fine-tuning mechanism of pneuma-lock function |
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| Publication Number | Publication Date |
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| CN204359280U true CN204359280U (en) | 2015-05-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420781510.2U Withdrawn - After Issue CN204359280U (en) | 2014-12-12 | 2014-12-12 | There is the interferometer fine-tuning mechanism of pneuma-lock function |
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| CN (1) | CN204359280U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104482879A (en) * | 2014-12-12 | 2015-04-01 | 上海机床厂有限公司 | Interferometer fine adjusting mechanism with pneumatic locking function |
| CN106000756A (en) * | 2016-06-17 | 2016-10-12 | 合肥格汇精密科技有限公司 | Automatic silicone oil applying equipment |
-
2014
- 2014-12-12 CN CN201420781510.2U patent/CN204359280U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104482879A (en) * | 2014-12-12 | 2015-04-01 | 上海机床厂有限公司 | Interferometer fine adjusting mechanism with pneumatic locking function |
| CN104482879B (en) * | 2014-12-12 | 2017-05-24 | 上海机床厂有限公司 | Interferometer fine adjusting mechanism with pneumatic locking function |
| CN106000756A (en) * | 2016-06-17 | 2016-10-12 | 合肥格汇精密科技有限公司 | Automatic silicone oil applying equipment |
| CN106000756B (en) * | 2016-06-17 | 2018-09-14 | 合肥格汇精密科技有限公司 | A kind of automatic painting silicone oil equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150527 Effective date of abandoning: 20170524 |