CN204346386U - Based on the micro-cantilever sensing device of the adjustable flat mirror reflects of reaction tank leaning angle - Google Patents
Based on the micro-cantilever sensing device of the adjustable flat mirror reflects of reaction tank leaning angle Download PDFInfo
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- CN204346386U CN204346386U CN201520045712.5U CN201520045712U CN204346386U CN 204346386 U CN204346386 U CN 204346386U CN 201520045712 U CN201520045712 U CN 201520045712U CN 204346386 U CN204346386 U CN 204346386U
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- reaction tank
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- cantilever
- level crossing
- flat mirror
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Abstract
The utility model provides a kind of micro-cantilever sensing device of the flat mirror reflects adjustable based on reaction tank leaning angle, and it comprises laser instrument, microimaging head, reaction tank, the first level crossing, the second level crossing, Optoelectronic Position Sensitive Detector and data acquisition process equipment.Observe microimaging head, be irradiated on micro-cantilever tip above the laser beam transparent reaction tank that laser instrument is launched, the laser beam of laser beam injection after micro-cantilever reflection respectively through the first level crossing and the second flat mirror reflects receive by photodetector, the data that photodetector exports by data acquisition process equipment carry out acquisition and processing.The utility model utilizes and the laser beam after micro-cantilever reflection is again reflected at the level crossing of the tilt adjustable in reaction tank, realize, to the amplification of micro-cantilever deflection micrometric displacement, can be applicable to the monitoring in the fields such as food security, life science, the manufacturing and scientific research and detection.
Description
Technical field
The utility model belongs to the micrometric displacement detection field in micro system equipment, particularly a kind of micro-cantilever sensing device of the flat mirror reflects adjustable based on reaction tank leaning angle.
Background technology
Micro-cantilever sensing detection technology is a kind of emerging sensing detection technology based on mechanics effect grown up on atomic force microscope and MEMS (micro electro mechanical system) basis, owing to possessing, detection method is simple, highly sensitive, non-marked, energy real-time in-situ reproduce the advantages such as detection, become the focus of micro-nano Research on Sensing gradually, obtain at the subject such as chemical, biological at present and extensively studied, as gas molecule, protein, virus and genetic test.
Its main operational principle is: side surface probe molecule being fixed to micro-cantilever, this micro-cantilever is put into the good reaction tank of leakproofness, when the target molecules of sample detected in reaction tank and the probe molecule on micro-cantilever surface react, therefore micro-cantilever surface stress can change, thus cause micro-cantilever tip to occur bending and deformation, by optics or the real-time this distortion of detection of electrical method, the real time reaction information of this course of reaction can be obtained.
The general Optoelectronic Position Sensitive Detector that adopts of degree of crook detection at present for micro-cantilever receives, and the bending displacement of micro-cantilever is generally at micron order, along with the expansion of sensing range and the complexity of testing environment, the measuring accuracy of device volume and Optoelectronic Position Sensitive Detector is had higher requirement, due to the reason of manufacturing technology level, part Optoelectronic Position Sensitive Detector measuring accuracy is difficult to meet requirement of experiment, and this is just in the urgent need to realizing reduction means volume and amplifying the displacement of micro-cantilever degree of crook greatly.
Utility model content
The weak point that the utility model exists in order to avoid prior art, a kind of micro-cantilever sensing device of the flat mirror reflects adjustable based on reaction tank leaning angle is provided, realize the amplification to micro-cantilever yaw displacement by reaction tank inner plane mirror multiple reflections, improve the system performance of micro-cantilever beam sensor.
The utility model technical solution problem adopts following technical scheme:
Based on the micro-cantilever sensing device of the adjustable flat mirror reflects of reaction tank leaning angle, comprising:
One laser instrument, described laser instrument is for launching the laser beam of inclination;
One microimaging head, described microimaging head is used for record and amplifies micro-cantilever surface topography;
One reaction tank is transparent glass above described reaction tank, and the left and right sides is respectively arranged with reaction tank import and reaction tank outlet;
One first level crossing, described first level crossing is arranged on reaction tank upper inside walls, and is provided with adjustment button in its end, and level crossing is gone to the reflection lasering beam that correct position makes laser beam reflection Cheng Zhaoxiang second level crossing after micro-beam reflection by adjustment button;
One second level crossing, described second level crossing is arranged on the downside of reaction tank on inwall, for receiving the reflection lasering beam through the first flat mirror reflects;
One Optoelectronic Position Sensitive Detector, described Optoelectronic Position Sensitive Detector is for receiving the reflection lasering beam through the second flat mirror reflects;
One data acquisition process equipment, described data acquisition process equipment is made up of analog to digital converter and computing machine, for the facula position information that acquisition and processing Optoelectronic Position Sensitive Detector exports.
Described micro-cantilever is placed on the grain-clamping table in reaction tank, and reaction tank is passed in and out from reaction tank import and reaction tank outlet by peristaltic pump Quality control.
Described analog to digital converter uses ADC0809 chip.
Sensitivity and the micro-cantilever yaw displacement of micro-cantilever deflection detection system have comparatively Important Relations, the utility model utilizes the amplification of level crossing multiple reflections laser beam principle realization to micro-cantilever yaw displacement, compared with the prior art, the utility model beneficial effect is embodied in:
1) level crossing multiple reflections changes laser beam path, amplifies the yaw displacement of micro-cantilever, reduces external factors to the impact of micro-cantilever system performance simultaneously, realizes the detection that degree of accuracy is higher;
2) the first level crossing adjustable angle, expands the range of receiving of the laser beam after micro-cantilever reflection;
3) device is simple to operate, system stability.
Accompanying drawing explanation
Fig. 1 systematic schematic diagram of the present utility model
Fig. 2 level crossing multiple reflections laser beam schematic diagram
1 microimaging head, 2 microimaging head brackets, 3 laser instruments, 4 laser stents, 5 reaction tanks, 6 reaction tank imports, 7 reaction tank outlets, 8 peristaltic pumps, 9 fluid cylinders, 10 micro-cantilevers, 11 grain-clamping tables, 12 first level crossings, 13 adjusting knobs, 14 second level crossings, 15 Optoelectronic Position Sensitive Detectors, 16 Optoelectronic Position Sensitive Detector supports, 17 analog to digital converters and 18 computing machines.
Embodiment
Be described in detail below in conjunction with accompanying drawing 1 and accompanying drawing 2 pairs of the utility model patents, so that technician understands.
Embodiment 1
As shown in Figure 1, detection system comprises:
One laser instrument (3), described laser instrument (3) is for launching the laser beam of inclination;
One microimaging head (1), described microimaging head (1) is for record and amplify micro-cantilever (10) surface topography;
One reaction tank (5), described reaction tank (5) top is transparent glass, and the left and right sides is respectively arranged with reaction tank import (6) and reaction tank outlet (7);
One first level crossing (12), described first level crossing (12) is arranged on reaction tank (5) upper inside walls, and adjustment button (13) is installed in its end, the first level crossing (12) is gone to the reflection lasering beam that correct position makes laser beam reflection Cheng Zhaoxiang second level crossing (14) after micro-cantilever (10) reflection by adjustment button (13);
One second level crossing (14), described second level crossing (14) is arranged on the inwall of reaction tank (5) downside, for receiving the reflection lasering beam reflected through the first level crossing (12);
One Optoelectronic Position Sensitive Detector (15), described Optoelectronic Position Sensitive Detector (15) is for receiving the reflection lasering beam reflected through the second level crossing (14);
One data acquisition process equipment, described data acquisition process equipment is made up of, for the facula position information that acquisition and processing Optoelectronic Position Sensitive Detector (15) exports analog to digital converter (17) and computing machine (18).
Described micro-cantilever (10) is placed on the grain-clamping table (11) in reaction tank, and reaction tank is passed in and out from reaction tank import (6) and reaction tank outlet (7) by peristaltic pump (8) Quality control.
Detection system is carried out as follows:
1) micro-cantilever (10) of modified is fixed on grain-clamping table (11);
2) control peristaltic pump (8) and in reaction tank (5), add detection sample through reaction tank import (6);
3) adjust laser stent (4) laser instrument (3) is sent laser beam irradiation on micro-cantilever (10) tip;
4) adjusting adjusting knob (13) allows the first level crossing (12) deflect, make the laser beam irradiation after the reflection of micro-cantilever (10) tip on the first level crossing (12), the laser beam irradiation after the first level crossing (12) reflection is on the second level crossing (14);
5) laser beam irradiation is in the photosensitive target surface of Optoelectronic Position Sensitive Detector (15);
6) by computing machine (18) record and process laser beam information, the deflection situation of micro-cantilever (10) is detected.
The utility model is described by specific implementation process, when not departing from the utility model scope, can also carry out various conversion and equivalent replacement to utility model.Therefore, the utility model is not limited to disclosed specific implementation process, and should fall into the whole embodiments in the utility model right.
Claims (3)
1., based on the micro-cantilever sensing device of the adjustable flat mirror reflects of reaction tank leaning angle, comprising:
One laser instrument, described laser instrument is for launching the laser beam of inclination;
One microimaging head, described microimaging head is used for record and amplifies micro-cantilever surface topography;
One reaction tank is transparent glass above described reaction tank, and the left and right sides is respectively arranged with reaction tank import and reaction tank outlet;
One first level crossing, described first level crossing is arranged on reaction tank upper inside walls, and is provided with adjustment button in its end, and level crossing is gone to the reflection lasering beam that correct position makes laser beam reflection Cheng Zhaoxiang second level crossing after micro-beam reflection by adjustment button;
One second level crossing, described second level crossing is arranged on the downside of reaction tank on inwall, for receiving the reflection lasering beam through the first flat mirror reflects;
One Optoelectronic Position Sensitive Detector, described Optoelectronic Position Sensitive Detector is for receiving the reflection lasering beam through the second flat mirror reflects;
One data acquisition process equipment, described data acquisition process equipment is made up of analog to digital converter and computing machine, for the facula position information that acquisition and processing Optoelectronic Position Sensitive Detector exports.
2. the micro-cantilever sensing device of the flat mirror reflects adjustable based on reaction tank leaning angle according to claim 1, it is characterized in that: described micro-cantilever is placed on the grain-clamping table in reaction tank, reaction tank is passed in and out from reaction tank import and reaction tank outlet by peristaltic pump Quality control.
3. the micro-cantilever sensing device of the flat mirror reflects adjustable based on reaction tank leaning angle according to claim 1, is characterized in that: described analog to digital converter uses ADC0809 chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520045712.5U CN204346386U (en) | 2015-01-22 | 2015-01-22 | Based on the micro-cantilever sensing device of the adjustable flat mirror reflects of reaction tank leaning angle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520045712.5U CN204346386U (en) | 2015-01-22 | 2015-01-22 | Based on the micro-cantilever sensing device of the adjustable flat mirror reflects of reaction tank leaning angle |
Publications (1)
| Publication Number | Publication Date |
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| CN204346386U true CN204346386U (en) | 2015-05-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520045712.5U Expired - Fee Related CN204346386U (en) | 2015-01-22 | 2015-01-22 | Based on the micro-cantilever sensing device of the adjustable flat mirror reflects of reaction tank leaning angle |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105091771A (en) * | 2015-05-25 | 2015-11-25 | 合肥工业大学 | Apparatus for measuring micro-deformation of connecting rod based on displacement amplification principle |
| CN114414847A (en) * | 2021-12-30 | 2022-04-29 | 大连理工大学人工智能大连研究院 | Acceleration sensor |
| WO2022142065A1 (en) * | 2020-12-30 | 2022-07-07 | 张东昱 | Synchronous monitoring system for multi-point displacement and rotation response of large-scale structure and data analysis method therefor |
-
2015
- 2015-01-22 CN CN201520045712.5U patent/CN204346386U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105091771A (en) * | 2015-05-25 | 2015-11-25 | 合肥工业大学 | Apparatus for measuring micro-deformation of connecting rod based on displacement amplification principle |
| WO2022142065A1 (en) * | 2020-12-30 | 2022-07-07 | 张东昱 | Synchronous monitoring system for multi-point displacement and rotation response of large-scale structure and data analysis method therefor |
| CN114414847A (en) * | 2021-12-30 | 2022-04-29 | 大连理工大学人工智能大连研究院 | Acceleration sensor |
| CN114414847B (en) * | 2021-12-30 | 2023-12-29 | 大连理工大学人工智能大连研究院 | Acceleration sensor |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150520 Termination date: 20160122 |
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| EXPY | Termination of patent right or utility model |