CN204333043U - Substrate switching device shifter between a kind of OLED critical process - Google Patents
Substrate switching device shifter between a kind of OLED critical process Download PDFInfo
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- CN204333043U CN204333043U CN201520028276.0U CN201520028276U CN204333043U CN 204333043 U CN204333043 U CN 204333043U CN 201520028276 U CN201520028276 U CN 201520028276U CN 204333043 U CN204333043 U CN 204333043U
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- substrate
- cylindrical coordinates
- card casket
- oled
- coordinates robot
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Abstract
The utility model discloses substrate switching device shifter between a kind of OLED critical process, comprise moveable seal chamber and be located at the cylindrical coordinates robot one of seal chamber inside, cylindrical coordinates robot two, for placing card casket and the switching mechanism of oled substrate, described card casket is arranged on the output of switching mechanism, and cylindrical coordinates robot one and cylindrical coordinates robot two lay respectively at the both sides of card casket; Substrate switching device shifter of the present utility model, oled substrate takes out from photoetching line body output device and is placed into card casket by cylindrical coordinates robot one, automatically this device is transported to technique initialization position by AGV dolly, card casket overturns under the effect of switching mechanism, oled substrate takes out and is placed in evaporated device substrate input cavity by cylindrical coordinates robot two from card casket, whole process all realizes in the seal chamber being filled with nitrogen, can effectively prevent oled substrate and asperity contact, and without the need to manual operation, efficiency is high.
Description
Technical field
The utility model belongs to OLED Display Technique field, is specifically related to substrate switching device shifter between a kind of OLED critical process.
Background technology
The Chinese " display of organic electroluminescence " by name of OLED, also known as " organic electro-luminescent display ", OLED technology is regarded as the maximum novel flat-plate Display Technique of development potentiality after LCD and PDP, because its outstanding performance advantage obtains the attention of many countries and enterprise in the world, be in technology fast development at present, stage that industry progressively starts.OLED has that active illuminating, fast response time, low-voltage driving, power consumption are low, structure of whole solid state, ultra-thin, visual angle are wide, can the plurality of advantages such as serviceability temperature scope is large, be called in the industry " dreamlike display ", represented the developing direction of current Display Technique.
The manufacturing process technology content of OLED is high, difficulty is large, if the particle matter in the fabrication process in space drops on oled substrate electrode, scrap making this device and then the OLED yield of whole production batch is reduced, greatly will increase manufacturing cost like this, affect the profit of company, therefore it is also very high to the purity requirements of the environment in manufacture process, outside trying not before simultaneously also requiring device not encapsulate to be exposed to.Because photo-mask process is on-line equipment, evaporation packaging process is whole set equipment, and therefore the working space seal of this in-process is fine, but when substrate switches between operation, the section of the having time makes the electrode of substrate be exposed among space.Traditional way is after photoetching line body completes the circuit production of OLED, by the mechanical arm of photo-mask process, substrate is put into card casket, operating personnel take out card casket and are placed on trolley, shift evaporation packaging machine front end onto, by operator, card casket is placed on assigned address again, from card casket, take out substrate by the multi-joint mechanical arm of evaporation operation again to overturn, inside the cavity putting into evaporation packaging machine, the method is inefficiency not only, and easily allows the particle matter in space drop on exposed electrode.
Utility model content
The purpose of this utility model solves the problem, provide a kind of simple to operate, efficiency is high, effectively can prevent substrate switching device shifter between the OLED critical process of oled substrate and asperity contact.
For solving the problems of the technologies described above, the technical solution of the utility model is: substrate switching device shifter between a kind of OLED critical process, comprise moveable seal chamber and be located at the cylindrical coordinates robot one of seal chamber inside, cylindrical coordinates robot two, for placing card casket and the switching mechanism of oled substrate, described card casket is arranged on the output of switching mechanism, and cylindrical coordinates robot one and cylindrical coordinates robot two lay respectively at the both sides of card casket.
Preferably, described switching mechanism comprises motor, and the output of motor is fixedly connected with card casket.
Preferably, be provided with can the gate of folding at the two ends of described seal chamber.
Preferably, described cylindrical coordinates robot one comprise liftable and rotation rotation axis one, be arranged on the substrate one of rotation axis one upper end and be slidably mounted on the yoke one of substrate one upper surface, the upper surface of yoke one is provided with vacuum cup.
Preferably, described cylindrical coordinates robot two comprise liftable and rotation rotation axis two, be arranged on the substrate two of rotation axis two upper end and be slidably mounted on the yoke two of substrate two lower surface, the lower surface of yoke two is provided with vacuum cup.
Preferably, described vacuum cup is connected with vacuum source.
Preferably, described seal chamber is provided with the control valve be connected with source nitrogen.
Preferably, also comprise moveable dolly, seal chamber is placed on dolly and also can moves with dolly.
Preferably, described dolly is AGV dolly.
The beneficial effects of the utility model are: substrate switching device shifter between OLED critical process provided by the utility model, oled substrate takes out from photoetching line body output device and is placed into card casket by cylindrical coordinates robot one, technique initialization position is transported to by automatic just this device of AGV dolly, card casket overturns under the effect of switching mechanism, oled substrate takes out and is placed in evaporated device substrate input cavity by cylindrical coordinates robot two from card casket, whole process all realizes in the seal chamber being filled with nitrogen, can effectively prevent oled substrate and asperity contact, and without the need to manual operation, efficiency is high.
Accompanying drawing explanation
Fig. 1 is the structural representation of substrate switching device shifter between the utility model OLED critical process;
Fig. 2 is the schematic diagram of the utility model cylindrical coordinates robot one;
Fig. 3 is the schematic diagram of the utility model cylindrical coordinates robot two;
Fig. 4 is the schematic diagram of the utility model substrate switching device shifter and photoetching line body output device;
Fig. 5 is the schematic diagram that the utility model substrate switching device shifter and evaporated device substrate input cavity.
Description of reference numerals: 1, seal chamber; 11, control valve; 12, gate one; 13, gate two; 2, cylindrical coordinates robot one; 21, rotation axis one; 22, substrate one; 23, yoke one; 3, cylindrical coordinates robot two; 31, rotation axis two; 32, substrate two; 33, yoke two; 4, card casket; 51, motor; 6, photoetching line body output device; 7, evaporated device substrate input cavity.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described further:
As shown in Figures 1 to 5, substrate switching device shifter between OLED critical process provided by the utility model, comprise moveable seal chamber 1 and be located at the cylindrical coordinates robot 1 of seal chamber 1 inside, cylindrical coordinates robot 23, for placing card casket 4 and the switching mechanism of oled substrate, card casket 4 is arranged on the output of switching mechanism, and cylindrical coordinates robot 1 and cylindrical coordinates robot 23 lay respectively at the both sides of card casket 4; Switching mechanism comprises motor 51, and the output of motor 51 is fixedly connected with card casket 4; Card casket 4 has the box-like body of opening for one end, its inside is provided with the interlayer of some placement oled substrates, card casket 4 can overturn under the effect of switching mechanism thus the opening of card casket 4 can switch towards cylindrical coordinates robot 1 or between cylindrical coordinates robot 23, in this embodiment, the output of motor 51 is fixedly connected with rectangular center, the side of card casket 4, switching mechanism can make card casket do θ C=180 ° of upset, but need ensure that the opening upwards of card casket 4 overturns, prevent oled substrate from dropping.
The two ends of seal chamber 1 are provided with can the gate of folding, and gate keeps closing at ordinary times, only needs by oled substrate stored in or extract and just open, thus can reduce the oled substrate exposed aerial time, reduction particulate is attached to the probability on electrode; Near cylindrical coordinates robot 1 is gate 1, and near cylindrical coordinates robot 23 is gate 2 13, and in this embodiment, gate 1 and gate 2 13 are the self-shooter of Electric Machine Control; Oled substrate to take out from photoetching line body output device 6 by the gate 1 opened and is placed into card casket 4 by cylindrical coordinates robot 1, and oled substrate takes out and is placed into evaporated device substrate by the gate 2 13 opened and inputs in cavity 7 by cylindrical coordinates robot 23 from card casket 4.
Cylindrical coordinates robot 1 comprise liftable and rotation rotation axis 1, be arranged on the substrate 1 of rotation axis 1 upper end and be slidably mounted on the yoke 1 of substrate 1 upper surface, the upper surface of yoke 1 is provided with vacuum cup, vacuum cup is connected with vacuum source, for fixing the absorption of oled substrate; Cylindrical coordinates robot 1 moving sets Y for complete oled substrate stored in extraction, moving sets Z is for completing the location of the corresponding number of plies position in card casket of oled substrate, and revolute pair θ is for completing the horizontal level conversion of oled substrate in seal chamber 1.
Structure and the cylindrical coordinates robot 1 of cylindrical coordinates robot 23 are similar, cylindrical coordinates robot 23 comprise liftable and rotation rotation axis 2 31, be arranged on the substrate 2 32 of rotation axis 2 31 upper end and be slidably mounted on the yoke 2 33 of substrate 2 32 lower surface, the lower surface of yoke 2 33 is provided with vacuum cup, and vacuum cup is connected with vacuum source.The vacuum cup of cylindrical coordinates robot 1 upwards and the vacuum cup of cylindrical coordinates robot 23 is downward, because the electrode of oled substrate is upper in photoetching line body output device 6, and oled substrate need in evaporation operation evaporation organic material on the good electrode of photoetching thus oled substrate to be placed in evaporated device substrate input cavity 7 should electrode downward.
Seal chamber 1 is provided with the control valve 11 be connected with source nitrogen, displaces original air in seal chamber 1, to improve cleanliness factor in seal chamber 1 for passing into high pure nitrogen.
This device also comprises moveable dolly 5, and seal chamber 1 is placed on dolly 5 and also can moves with dolly 5; In this embodiment, dolly 5 is AGV dolly, and AGV dolly is equipped with the homing guidance such as electromagnetism or optics device, can travel along the guide path of regulation, and without the need to artificial promotion.
Between above-mentioned OLED critical process, the course of work of substrate switching device shifter is:
Open control valve 11 and be filled with nitrogen to seal chamber 1, after being got rid of by air, keep seal chamber 1 to close and closed control valve 11; Control AGV dolly makes device move to photo-mask process end and to make seal chamber 1 be provided with one end of gate 1 relative with photoetching line body output device 6, gate 1 is opened, yoke 1 is stretched into photoetching line body output device 6 by cylindrical coordinates robot 1, by vacuum cup oled substrate taken out and put into seal chamber 1, oled substrate is successively discharged enter in card casket 4, after card casket 4 is filled, cylindrical coordinates robot 1 resets and complete retraction seal chamber 1, and gate 1 is closed.If because productive temp controls the reasons such as improper or burst accident, device cannot enter next procedure and need wait as long for, then open control valve 11 and make seal chamber 1 keep nitrogen to be filled with state to prevent oled substrate bare electrode oxidized.Control AGV dolly make device move to evaporation packaging process and the one end making seal chamber 1 be provided with gate 2 13 and evaporated device substrate to input cavity 7 relative, card casket 4 overturns 180 ° under the effect of switching mechanism, gate 2 13 is opened, yoke 2 33 stretches in card casket 4 by cylindrical coordinates robot 23, by vacuum cup oled substrate successively taken out and put into evaporated device substrate input cavity 7, after oled substrate takes, cylindrical coordinates robot 23 resets and complete retraction seal chamber 1, and gate 2 13 is closed.Repeat the transhipment that the above-mentioned course of work can complete oled substrate efficiently, and can effectively prevent oled substrate and asperity contact.
Those of ordinary skill in the art will appreciate that, embodiment described here is to help reader understanding's principle of the present utility model, should be understood to that protection range of the present utility model is not limited to so special statement and embodiment.Those of ordinary skill in the art can make various other various concrete distortion and combination of not departing from the utility model essence according to these technology enlightenment disclosed in the utility model, and these distortion and combination are still in protection range of the present utility model.
Claims (9)
1. substrate switching device shifter between an OLED critical process, it is characterized in that: comprise moveable seal chamber (1) and be located at the inner cylindrical coordinates robot one (2) of seal chamber (1), cylindrical coordinates robot two (3), for placing card casket (4) and the switching mechanism of oled substrate, described card casket (4) is arranged on the output of switching mechanism, and cylindrical coordinates robot one (2) and cylindrical coordinates robot two (3) lay respectively at the both sides of card casket (4).
2. according to the substrate switching device shifter described in claim 1, it is characterized in that: described switching mechanism comprises motor (51), the output of motor (51) is fixedly connected with card casket (4).
3. substrate switching device shifter according to claim 2, is characterized in that: the two ends of described seal chamber (1) are provided with can the gate of folding.
4. substrate switching device shifter according to any one of claim 1 to 3, it is characterized in that: described cylindrical coordinates robot one (2) comprise liftable and rotation rotation axis one (21), be arranged on the substrate one (22) of rotation axis one (21) upper end and be slidably mounted on the yoke one (23) of substrate one (22) upper surface, the upper surface of yoke one (23) is provided with vacuum cup.
5. substrate switching device shifter according to any one of claim 1 to 3, it is characterized in that: described cylindrical coordinates robot two (3) comprise liftable and rotation rotation axis two (31), be arranged on the substrate two (32) of rotation axis two (31) upper end and be slidably mounted on the yoke two (33) of substrate two (32) lower surface, the lower surface of yoke two (33) is provided with vacuum cup.
6. substrate switching device shifter according to claim 5, is characterized in that: described vacuum cup is connected with vacuum source.
7. substrate switching device shifter according to any one of claim 1 to 3, is characterized in that: described seal chamber (1) is provided with the control valve (11) be connected with source nitrogen.
8. substrate switching device shifter according to any one of claim 1 to 3, it is characterized in that: also comprise moveable dolly (5), seal chamber (1) is placed on dolly (5) and above also can moves with dolly (5).
9. substrate switching device shifter according to claim 8, is characterized in that: described dolly (5) is AGV dolly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520028276.0U CN204333043U (en) | 2015-01-15 | 2015-01-15 | Substrate switching device shifter between a kind of OLED critical process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520028276.0U CN204333043U (en) | 2015-01-15 | 2015-01-15 | Substrate switching device shifter between a kind of OLED critical process |
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| CN204333043U true CN204333043U (en) | 2015-05-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520028276.0U Expired - Fee Related CN204333043U (en) | 2015-01-15 | 2015-01-15 | Substrate switching device shifter between a kind of OLED critical process |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110311059A (en) * | 2019-07-20 | 2019-10-08 | 韦森特(东莞)科技技术有限公司 | A kind of OLED polaroid automatic turning abutted equipment and its application method |
| WO2021097933A1 (en) * | 2019-11-22 | 2021-05-27 | 深圳市华星光电半导体显示技术有限公司 | Oled automatic production device |
| CN116313947A (en) * | 2023-05-25 | 2023-06-23 | 深圳赛仕电子科技有限公司 | micro-LED display panel packaging method and device |
-
2015
- 2015-01-15 CN CN201520028276.0U patent/CN204333043U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110311059A (en) * | 2019-07-20 | 2019-10-08 | 韦森特(东莞)科技技术有限公司 | A kind of OLED polaroid automatic turning abutted equipment and its application method |
| WO2021097933A1 (en) * | 2019-11-22 | 2021-05-27 | 深圳市华星光电半导体显示技术有限公司 | Oled automatic production device |
| CN116313947A (en) * | 2023-05-25 | 2023-06-23 | 深圳赛仕电子科技有限公司 | micro-LED display panel packaging method and device |
| CN116313947B (en) * | 2023-05-25 | 2023-08-08 | 深圳赛仕电子科技有限公司 | micro-LED display panel packaging method and device |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150513 Termination date: 20210115 |
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| CF01 | Termination of patent right due to non-payment of annual fee |