CN204331288U - Photoresist bucket servicing unit - Google Patents
Photoresist bucket servicing unit Download PDFInfo
- Publication number
- CN204331288U CN204331288U CN201420797611.9U CN201420797611U CN204331288U CN 204331288 U CN204331288 U CN 204331288U CN 201420797611 U CN201420797611 U CN 201420797611U CN 204331288 U CN204331288 U CN 204331288U
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- photoresist
- fixed support
- bucket
- drives structure
- photoresist bucket
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Abstract
The utility model discloses a kind of photoresist bucket servicing unit, comprise fixed support (3), fixed support (3) inner side is placed with photoresist bucket (1), drainage catheter (2) is inserted with in photoresist bucket, also comprise drives structure (4) and control structure (5), fixed support is arranged on above drives structure, and drives structure is arranged on support bracket fastened below, for adjusting support bracket fastened degree of tilt; Control structure is connected with drives structure, for controlling drives structure work.The utility model is by setting up for regulating the drives structure of fixed support degree of tilt and the control structure for controlling drives structure work, can by the photoresist bucket slant setting in fixed support, make full use of the photoresist in photoresist bucket, the angle tilted along with photoresist bucket is increasing, in photoresist bucket, the residual volume of photoresist is fewer and feweri, cannot be utilized until exhaust, and then reduce the residual volume of photoresist to greatest extent, improve the utilization factor of photoresist.
Description
Technical field
The utility model relates to a kind of device for photoresist bucket, specifically a kind of photoresist bucket servicing unit, belongs to photoresist bucket accessory technical field.
Background technology
As everyone knows, conductor gold-tinted technique comprises photoresistance, exposure and development three process.Wherein, upper photoresistance refers to smears photoresist in wafer, forms the process of photoresist film; Exposure utilizes exposing light beam the wafer being covered with photoresist film to be irradiated, and forms pattern; Development is then last operation, is specifically displayed through developing procedure by the pattern that exposure is formed again.
At present, the general upper photoresistance operation using rotary coating machine to remove first, while wafer rotates, a certain amount of jet-coating photoresit is in wafer centre, and by centrifugal action, be evenly diffused into wafer edge from inside to outside, complete whole upper photoresistance operation.During operation, in order to preventing pollution environment, the photoresist A supplying rotary coating machine is generally contained in photoresist bucket 1, as shown in Figure 1, photoresist bucket 1 is placed in fixed support 3, be inserted with drainage catheter 2 in photoresist bucket 1, the photoresist A in bucket is supplied in rotary coating machine through drainage catheter 2 by the mode that drainage is extracted; Treat that the photoresist A in photoresist bucket 1 uses totally, then the photoresist bucket 1 more renewed.But in actual mechanical process, the photoresist A bottom photoresist bucket 1 will have remnants, change glue bucket, cause the waste of photoresist under the state that photoresist A cannot utilize completely.And photoresist belongs to high cost material, unserviceable photoresist adds production cost to a certain extent, reduces the utilization factor of photoresist.
In addition, because photoresist A is more responsive to light application ratio, for preventing illumination from entering in photoresist bucket 1, photoresist bucket 1 generally selects dark color to be color, and operator directly cannot observe the content of photoresist A in photoresist bucket 1 from outside.And the sensor can measuring liquid level is not set outside photoresist bucket 1 yet, therefore cannot know the residual volume of photoresist A in photoresist bucket 1.
Summary of the invention
For above-mentioned prior art Problems existing, the utility model provides a kind of photoresist bucket servicing unit, can reduce the residual volume of photoresist in photoresist bucket to greatest extent, improves the utilization factor of photoresist.
To achieve these goals, a kind of photoresist bucket servicing unit that the utility model adopts, comprise fixed support, photoresist bucket is placed with inside fixed support, be inserted with drainage catheter in photoresist bucket, also comprise drives structure and control structure, described fixed support is arranged on above drives structure, described drives structure is arranged on support bracket fastened below, for adjusting support bracket fastened degree of tilt; Described control structure is connected with drives structure, for controlling drives structure work.
Described drives structure comprises left side driving shaft and right side driving shaft, and described left and right side driving shaft lays respectively at both sides under fixed support, by regulating the support bracket fastened degree of tilt of height control of the fixed support left and right sides.
Described control structure take time as the angle of inclination that benchmark arranges photoresist bucket in fixed support and fixed support, and the photoresist bucket in fixed support and fixed support tilts according to the amplitude arranged in advance under the effect of drives structure.
Described control structure comprises motor and controller, described controller according in the working condition of time controling motor of establishing, drive the degree of tilt of drives structure work adjustment fixed support and photoresist bucket.
Described drives structure is also provided with stopping inductor, and when support bracket fastened bottom touches stopping inductor, drives structure quits work, and stopping is tilted by fixed support and photoresist bucket.
Compared with prior art, the utility model passes through for regulating the drives structure of fixed support degree of tilt and the control structure for controlling drives structure work, can by the photoresist bucket slant setting in fixed support, make full use of the photoresist in photoresist bucket, the angle tilted along with photoresist bucket is increasing, and in photoresist bucket, the residual volume of photoresist is fewer and feweri, is utilized until exhaust repeating transmission, and then reduce the residual volume of photoresist to greatest extent, improve the utilization factor of photoresist.Meanwhile, making full use of of photoresist, decreases the liquid photoresist waste liquid of discharge, thus alleviates the pollution to environment.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing photoresist bucket use-pattern;
Fig. 2 is the structural representation of the utility model use-pattern;
Fig. 3 is the structural representation of the utility model later stage use-pattern.
In figure: 1, photoresist bucket, 2, drainage catheter, 3, fixed support, 4, drives structure, 4A, left side driving shaft, 4B, right side driving shaft, 5, control structure, A, photoresist.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail.
As shown in Figures 2 and 3, a kind of photoresist bucket servicing unit, comprise fixed support 3, photoresist bucket 1 is placed with inside fixed support 3, be inserted with drainage catheter 2 in photoresist bucket 1, also comprise drives structure 4 and control structure 5, described fixed support 3 is arranged on above drives structure 4, described drives structure 4 is arranged on the below of fixed support 3, for adjusting the degree of tilt of fixed support 3; Described control structure 5 is connected with drives structure 4, works for controlling drives structure 4.
As shown in Figure 2, start control structure 5, control structure 5 drives drives structure 4 to work, and carries out Slope angle adjustment to fixed support 3, and the photoresist bucket 1 in fixed support 3 together can tilt together with fixed support 3.Like this, can ensure that the amount of photoresist A in photoresist bucket 1 reduces gradually, by photoresist bucket 1 slant setting being increased the use amount of photoresist A, and then decrease the residual volume of photoresist A in photoresist bucket 1 to greatest extent, improve the utilization factor of photoresist.Wherein, the setting of control structure 5 can ensure the accuracy at angle of inclination.
Preferably, described drives structure 4 can comprise left side driving shaft 4A and right side driving shaft 4B, described left and right side driving shaft 4A, 4B lay respectively at fixed support 3 times both sides, by the degree of tilt regulating the height of fixed support 3 left and right sides to adjust fixed support 3 and photoresist bucket 1, because of under the control of control structure 5, height can be carried out to left and right side driving shaft 4A, 4B respectively to regulate, namely left and right side driving shaft 4A, 4B can complete the oscilaltion work of different amplitude, therefore can realize fixed support 3 and photoresist bucket 1 inclination in various degree.
Described control structure 5 can be the angle of inclination that benchmark arranges photoresist bucket 1 in fixed support 3 and fixed support 3 with time, and the photoresist bucket 1 in fixed support 3 and fixed support 3 tilts according to the amplitude arranged in advance under the effect of drives structure 4.Set by the time, control structure 5 sends signal to drives structure 4, controls drives structure 4 and carries out degree of tilt adjustment work, namely according to the setting of time, and photoresist bucket 1 run-off the straight gradually; As: signal can be sent to left and right side driving shaft 4A, 4B, control the oscilaltion action that left and right side driving shaft 4A, 4B carry out different amplitude; In control structure 5 time setting can with the height correlation of left and right side driving shaft 4A, 4B, left and right side driving shaft 4A, 4B are according to the society of time east, and it highly makes corresponding change, thus the controllability realizing photoresist bucket 1 tilts.Wherein, the time least unit of setting is 1 hour, and maximum unit is 48 hours, the change of photoresist A life cycle, can not affect the use of the utility model photoresist bucket servicing unit.
Described control structure 5 comprises motor and controller, described controller according in the working condition of time controling motor of establishing, drive drives structure 4 to work the degree of tilt of adjustment fixed support 3 and photoresist bucket 1.Motor, under the order of controller internal program is guided, drives left and right side driving shaft 4A, 4B to complete the oscilaltion action of corresponding amplitude, and then realizes the adjustment of fixed support 3 and photoresist bucket 1 degree of tilt.
Because of photoresist bucket 1 run-off the straight gradually in driving mechanism 4 course of work, topple over to prevent photoresist bucket 1 over-tilting, can install in described drives structure 4 and stop inductor, when the bottom of fixed support 3 touches stopping inductor, drives structure 4 quits work, fixed support 3 and photoresist bucket 1 will no longer tilt, and can reduce the residual volume of photoresist A in photoresist bucket 1 to greatest extent, improve the utilization factor of photoresist.
From said structure, the utility model is by setting up for regulating the drives structure of fixed support degree of tilt and the control structure for controlling drives structure work, can by the photoresist bucket slant setting in fixed support, make full use of the photoresist in photoresist bucket, the angle tilted along with photoresist bucket is increasing, and in photoresist bucket, the residual volume of photoresist is fewer and feweri, cannot be utilized until exhaust, and then reduce the residual volume of photoresist to greatest extent, improve the utilization factor of photoresist.And the minimizing of the liquid photoresist waste liquid of discharging, reduce the pollution to environment in a way.
Claims (5)
1. a photoresist bucket servicing unit, comprise fixed support (3), fixed support (3) inner side is placed with photoresist bucket (1), drainage catheter (2) is inserted with in photoresist bucket (1), it is characterized in that, also comprise drives structure (4) and control structure (5), described fixed support (3) is arranged on drives structure (4) top, described drives structure (4) is arranged on the below of fixed support (3), for adjusting the degree of tilt of fixed support (3); Described control structure (5) is connected with drives structure (4), for controlling drives structure (4) work.
2. a kind of photoresist bucket servicing unit according to claim 1, it is characterized in that, described drives structure (4) comprises left side driving shaft (4A) and right side driving shaft (4B), described left and right side driving shaft (4A, 4B) lays respectively at both sides under fixed support (3), by regulating the degree of tilt of the height control fixed support (3) of fixed support (3) left and right sides.
3. a kind of photoresist bucket servicing unit according to claim 1 and 2, it is characterized in that, described control structure (5) take time as the angle of inclination that benchmark arranges fixed support (3) and the interior photoresist bucket (1) of fixed support (3), and the photoresist bucket (1) in fixed support (3) and fixed support (3) tilts according to the amplitude arranged in advance under the effect of drives structure (4).
4. a kind of photoresist bucket servicing unit according to claim 3, it is characterized in that, described control structure (5) comprises motor and controller, described controller according in the working condition of time controling motor of establishing, drive the degree of tilt of drives structure (4) work adjustment fixed support (3) and photoresist bucket (1).
5. a kind of photoresist bucket servicing unit according to claim 1,2 or 4, it is characterized in that, (4) are also provided with stopping inductor to described drives structure, when the bottom of fixed support (3) touches stopping inductor, drives structure (4) quits work, and stopping is tilted by fixed support (3) and photoresist bucket (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420797611.9U CN204331288U (en) | 2014-12-16 | 2014-12-16 | Photoresist bucket servicing unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420797611.9U CN204331288U (en) | 2014-12-16 | 2014-12-16 | Photoresist bucket servicing unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204331288U true CN204331288U (en) | 2015-05-13 |
Family
ID=53167630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420797611.9U Expired - Fee Related CN204331288U (en) | 2014-12-16 | 2014-12-16 | Photoresist bucket servicing unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204331288U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105944410A (en) * | 2016-06-20 | 2016-09-21 | 湖州嘉暄生物科技有限公司 | Sediment filtration device for collecting bacteria solution |
| CN106515048A (en) * | 2016-08-29 | 2017-03-22 | 江苏恒神股份有限公司 | Composite material high-temperature glue injecting tool |
-
2014
- 2014-12-16 CN CN201420797611.9U patent/CN204331288U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105944410A (en) * | 2016-06-20 | 2016-09-21 | 湖州嘉暄生物科技有限公司 | Sediment filtration device for collecting bacteria solution |
| CN105944410B (en) * | 2016-06-20 | 2018-01-30 | 湖州嘉暄生物科技有限公司 | A kind of precipitation filter for being used to collect bacterium solution |
| CN106515048A (en) * | 2016-08-29 | 2017-03-22 | 江苏恒神股份有限公司 | Composite material high-temperature glue injecting tool |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 221000 Xuzhou economic and Technological Development Zone, Jiangsu, Yang Road, No. 88 Patentee after: XUZHOU GAPSS OE TECHNOLOGY Co.,Ltd. Address before: 221000 Xuzhou economic and Technological Development Zone, Jiangsu, Yang Road, No. 88 Patentee before: XUZHOU GAPSS OE TECHNOLOGY CO.,LTD. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150513 Termination date: 20211216 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |