CN204298180U - The treatment system of fluoride waste - Google Patents

The treatment system of fluoride waste Download PDF

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Publication number
CN204298180U
CN204298180U CN201420801793.2U CN201420801793U CN204298180U CN 204298180 U CN204298180 U CN 204298180U CN 201420801793 U CN201420801793 U CN 201420801793U CN 204298180 U CN204298180 U CN 204298180U
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China
Prior art keywords
resin tower
tower
waste
regenerating unit
water
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Expired - Fee Related
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CN201420801793.2U
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Chinese (zh)
Inventor
李小兵
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Lite Semiconductor (wuxi) Co Ltd
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Lite Semiconductor (wuxi) Co Ltd
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  • Water Treatment By Sorption (AREA)

Abstract

The utility model discloses a kind for the treatment of system of fluoride waste, comprise the fluoride waste be linked in sequence and collect tank, waste water pump, ACF adsorption tower, bag filter, SAC resin tower, WBC resin tower, SBC resin tower, ultimate filter, finished product water tank and underground tank; Also comprise regeneration water pump, one end of regeneration water pump is connected on the pipeline between finished product water tank and underground tank, and the other end connects ACF adsorption tower, SAC resin tower, WBC resin tower and SBC resin tower respectively; Also comprise HCl regenerating unit and NaOH regenerating unit, HCl regenerating unit is connected with SAC resin tower, and NaOH regenerating unit is connected with SBC resin tower.The utility model can, in removal fluoride waste while fluorine ion, reduce electrical conductivity in waste water, and well control pH value.Water after the utility model process can directly reclaim, and produces water source as pure water.

Description

The treatment system of fluoride waste
Technical field
The utility model belongs to field of waste water treatment, relates to the system that water source was recycled, produced as pure water to a kind of fluoride waste.
Background technology
Fluorine is one of the widest element that the earth distributes.The chemical property of fluorine very vivaciously almost can interact with all elements, and the fluorine great majority thus in the earth's crust exist with compound state.Fluorine is one of trace element of needed by human, but Excess free enthalpy will cause fluorine poisoning.And the calcirm-fluoride of too high levels can show as different pathological changes: osteosclerosis, osteoporosis, osteomalacia and Secondary hyperparathyroidism osseous lesion.Long-term Excess free enthalpy fluorine can make bon e formation increase, and the bone arrangement formed is irregular, causes the segregation phenomenon of the quality and quantity of bone, shows obvious physiological-toxicity.Therefore GB8978 " integrated wastewater discharge standard " specifies that the limit value of fluoride (in F-) is 10mg/L (secondary discharge).
Fluoride waste is the main pollutant effluents that semiconductor manufacturing industry produces.Hydrofluoric acid becomes the primary solvent that uses in oxidation and etching technics due to its oxidisability and corrosivity, fluoride waste is mainly derived from the draining etc. of the board cleaning drainings such as FAB workshop BOE, SYSMAX, Quartz stove tube cleaning machine, Deglaze, Boron Deglaze and Wire Saw workshop cleaning wafer, and water for cleaning adopts ultra-pure water (UPW).
Existing fluoride wastewater treatment technology generally uses chemical precipitation method, namely calcium chloride PAC/PAM is added, and add alkali and carry out PH adjustment, fluoride waste electrical conductivity after this kind of PROCESS FOR TREATMENT is high, and the fluoride ion removing rate in fluoride waste can only control within 85%, can produce a large amount of mud after process, and the fluoride waste after process can not reuse, can only be discharged into municipal wastewater pipe network.
Hyperfiltration utilizes enough pressure to be that hydrone in high fluorinated volume is separated by reverse osmosis membrane, is widely used in desalinization at present, ultra-pure water produces and multiple feedwater, desalination in drainage sunk well and concentration technology.But its rate of recovery is the highest can only reach 80 ~ 85%, and go out inundation manage and generally can only accomplish below 10mg/L, fluorine (F-) clearance is generally also only between 93 ~ 96%, even if adopt two steps ro to reach water outlet conductivity≤15 μ s/cm (25 DEG C), but actually cannot reach the requirement that fluorinated volume is less than 1mg/L.
Utility model content
Based on the demand, the utility model proposes a kind for the treatment of system of fluoride waste, effectively reach required object, in removal fluoride waste while fluorine ion, reduce electrical conductivity in waste water, and well control pH value.
The technical solution of the utility model is as follows:
A treatment system for fluoride waste, comprises the fluoride waste be linked in sequence and collects tank, waste water pump, ACF adsorption tower, bag filter, SAC resin tower, WBC resin tower, SBC resin tower, ultimate filter, finished product water tank and underground tank; Also comprise regeneration water pump, one end of regeneration water pump is connected on the pipeline between finished product water tank and underground tank, and the other end connects ACF adsorption tower, SAC resin tower, WBC resin tower and SBC resin tower respectively; Also comprise HCl regenerating unit and NaOH regenerating unit, HCl regenerating unit is connected with SAC resin tower, and NaOH regenerating unit is connected with SBC resin tower.
Advantageous Effects of the present utility model is:
After former fluoride wastewater treatment, fluoride ion removing rate can only reach 85%, and electrical conductivity >1000 μ S/cm (25 DEG C), pH value is uncontrollable, can not directly recycle.And adopt the effluent quality of the utility model process to reach, electrical conductivity < 15 μ S/cm (25 DEG C), fluorinated volume (in F-) < 1mg/L, PH6 ~ 8, directly can reclaim, produce water source as pure water.
Accompanying drawing explanation
Fig. 1 is the utility model treatment system block diagram.
Detailed description of the invention
Below in conjunction with accompanying drawing, detailed description of the invention of the present utility model is described further.
As shown in Figure 1, the utility model comprises the fluoride waste collection tank, waste water pump, ACF adsorption tower, bag filter, SAC resin tower, WBC resin tower, SBC resin tower, ultimate filter, finished product water tank and the underground tank that are linked in sequence; Also comprise regeneration water pump, one end of regeneration water pump is connected on the pipeline between finished product water tank and underground tank, and the other end connects ACF adsorption tower, SAC resin tower, WBC resin tower and SBC resin tower respectively; Also comprise HCl regenerating unit and NaOH regenerating unit, HCl regenerating unit is connected with SAC resin tower, and NaOH regenerating unit is connected with SBC resin tower.
Composition graphs 1, handling process of the present utility model is:
1) fluoride waste is sent into fluoride waste feeder, carry out chemical coagulation and precipitation.
In fluorine process, one of maximum method is applied when chemical coagulation-sedimentation method is current fluoride wastewater treatment, but because it involves in large quantities of lime breast and aluminium salt (PAC) and organic flocculant (as PAM etc.), waste water after its process cannot reach the requirement of recycling, using the Main Means of original chemical coagulation-sedimentation method fluoride wastewater treatment groove as process the utility model fluoride waste reclaiming waste water in the utility model, continue to retain.
2) waste water after above-mentioned process is pumped into ACF adsorption tower by waste water pump, then send into bag filter.
According to fluoride waste source water analysis, process system discharges and contains the COD composition of part in the fluoride waste collected.These organic pollutions have an impact to the ion exchange resin etc. in fluoride waste recovery system, cause shorten its service life, and exchange capacity declines, regenerating agent consumption is excessive, effluent quality worsens, and time serious, may block resin bed space and cause resin to lump.Therefore, in the utility model, be provided with ACF adsorption tower (active carbon adsorber) and bag filter as technique preprocessing means, reduce the impact on follow-up equipment such as suspension, organic pollution, colloid as far as possible.
Charcoal absorption utilizes porous solid, its physical characteristic is finger-hole gap structure and distribution thereof mainly, the hole generated between lattice in activation process forms the minute aperture of various shape and size, thus huge adsorption surface area is formed, so, it has good adsorption capacity, the adsorption capacity of active carbon is based on physical absorption, but also carry out some selective absorptions, the organic matter being easy to be tightly held by activated carbon has with benzene, toluene etc. are the aromatic solvent class of representative, chlorinated aromatic hydrocarbons, phenol and chlorophenol, many lattice arene (as BaP), agricultural chemicals, chlorinated aromatic hydro carbons, and dyestuff, gasoline, amine, the contour molecular hydrocarbon of humus.Meanwhile, higher adsorption capacity is had to part heavy metal and bromine iodine, fluoride.
Bag filter retains tiny particle (such as broken powdered activated carbon etc.), volume is little, filter area is large, resistance is little, rejection advantages of higher to avoid the powdered carbon produced in active carbon adsorber (ACF tower) etc. to be with people's next procedure, polypropylene filter bag to have.
3) waste water after above-mentioned process is sent into SAC resin tower, WBA resin tower and SBA resin tower successively.
Due to the radius of fluorine ion (F-) and hydroxide ion (OH-) and electric charge all comparatively close, in most cases ion-exchange carries out between the OH-in solid phase and the F-in liquid phase, reduce the OH-concentration of liquid phase, be conducive to the carrying out of exchange process, when reducing with the pH of system, OH-concentration reduces, and being therefore conducive to most the present situation that F-and OH-carry out exchanging is the slightly acidic system of pH.Therefore the utility model have employed SAC/WBA/SBA resin tower and HCl and NaOH regenerating unit as treatment facility, effectively reach required object, in removal fluoride waste while fluorine ion, also reduce electrical conductivity in waste water, and well control pH value.
In addition, total hardness is there is in fluoride waste because of collection, i.e. calcium ions and magnesium ions, if be adsorbed on after on anion exchange resin by regenerative agent NaOH, operationally by heavy metal ion such as Ca2+, the Mg2+ in replacing water, corresponding precipitation of hydroxide can be produced, be attached to resin surface, block and pollute resin, stoping it to proceed ion-exchange, and being difficult to remove.Therefore, adopt stain resistance good in the utility model, and be conducive to system effectively except the highly acidic resin of fluorine, to ensure out that electrical conductivity of water meets designing requirement.
In order to ensure fluorine (F-) ion and the conductivity indices of producing water, save acid and alkali consumption, in the utility model, strong acid and strong base type resin adopts counter-current regeneration, and weakly base resin is very easily regenerated by alkali due to it, can utilize the regeneration liquid waste of basic resin.The utility model adopts highly acid gel system's resin and alkalescent macropore/strong basicity gelling anionic resin composition SAC (u)-WBA (D)-SBA (u) three tower ion exchange system to reclaim and purifying technique as main.
4) water of above-mentioned process is obtained pure water after ultimate filter, send into finished product water tank.Wherein a part of pure water is supplied to ACF adsorption tower as backwash water by regeneration water pump (backwashing pump of holding concurrently), and is supplied to SAC resin tower, WBA resin tower and SBA resin tower as recycled water.All the other pure water directly deliver to 2000m 3underground tank.
5) by the backwash draining in the regenerative wastewater of enrichment fluorine ion in SAC resin tower, WBA resin tower, SBA resin tower after above-mentioned process and ACF adsorption tower, be still discharged into the fluoride waste feeder of former chemical precipitation method, focus on rear discharge by former technique.
Above-described is only preferred embodiment of the present utility model, and the utility model is not limited to above embodiment.Be appreciated that the oher improvements and changes that those skilled in the art directly derive or associate under the prerequisite not departing from spirit of the present utility model and design, all should think and be included within protection domain of the present utility model.

Claims (1)

1. a treatment system for fluoride waste, is characterized in that: comprise the fluoride waste be linked in sequence and collect tank, waste water pump, ACF adsorption tower, bag filter, SAC resin tower, WBC resin tower, SBC resin tower, ultimate filter, finished product water tank and underground tank; Also comprise regeneration water pump, one end of regeneration water pump is connected on the pipeline between finished product water tank and underground tank, and the other end connects ACF adsorption tower, SAC resin tower, WBC resin tower and SBC resin tower respectively; Also comprise HCl regenerating unit and NaOH regenerating unit, HCl regenerating unit is connected with SAC resin tower, and NaOH regenerating unit is connected with SBC resin tower.
CN201420801793.2U 2014-12-16 2014-12-16 The treatment system of fluoride waste Expired - Fee Related CN204298180U (en)

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CN201420801793.2U CN204298180U (en) 2014-12-16 2014-12-16 The treatment system of fluoride waste

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CN201420801793.2U CN204298180U (en) 2014-12-16 2014-12-16 The treatment system of fluoride waste

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110683709A (en) * 2019-07-15 2020-01-14 衢州市鼎盛化工科技有限公司 Zero-discharge treatment method for fluorine-containing wastewater

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110683709A (en) * 2019-07-15 2020-01-14 衢州市鼎盛化工科技有限公司 Zero-discharge treatment method for fluorine-containing wastewater

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Granted publication date: 20150429