CN204291391U - 一种指向性mems麦克风 - Google Patents
一种指向性mems麦克风 Download PDFInfo
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- CN204291391U CN204291391U CN201520015550.0U CN201520015550U CN204291391U CN 204291391 U CN204291391 U CN 204291391U CN 201520015550 U CN201520015550 U CN 201520015550U CN 204291391 U CN204291391 U CN 204291391U
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- Prior art keywords
- acoustic aperture
- microphone
- substrate
- mems chip
- chip
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- 238000013016 damping Methods 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 238000005538 encapsulation Methods 0.000 claims abstract description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 238000005452 bending Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims description 3
- 230000010363 phase shift Effects 0.000 abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
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Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201520015550.0U CN204291391U (zh) | 2015-01-09 | 2015-01-09 | 一种指向性mems麦克风 |
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CN201520015550.0U CN204291391U (zh) | 2015-01-09 | 2015-01-09 | 一种指向性mems麦克风 |
Publications (1)
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CN204291391U true CN204291391U (zh) | 2015-04-22 |
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CN201520015550.0U Active CN204291391U (zh) | 2015-01-09 | 2015-01-09 | 一种指向性mems麦克风 |
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CN (1) | CN204291391U (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104507029A (zh) * | 2015-01-09 | 2015-04-08 | 歌尔声学股份有限公司 | 一种指向性mems麦克风 |
CN113259820A (zh) * | 2021-04-26 | 2021-08-13 | 歌尔微电子股份有限公司 | 麦克风 |
EP4090049A1 (en) * | 2021-05-11 | 2022-11-16 | Infineon Technologies AG | Mems device with passive acoustic attenuation filter |
-
2015
- 2015-01-09 CN CN201520015550.0U patent/CN204291391U/zh active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104507029A (zh) * | 2015-01-09 | 2015-04-08 | 歌尔声学股份有限公司 | 一种指向性mems麦克风 |
CN113259820A (zh) * | 2021-04-26 | 2021-08-13 | 歌尔微电子股份有限公司 | 麦克风 |
EP4090049A1 (en) * | 2021-05-11 | 2022-11-16 | Infineon Technologies AG | Mems device with passive acoustic attenuation filter |
US11910154B2 (en) | 2021-05-11 | 2024-02-20 | Infineon Technologies Ag | MEMS microphone and package with integrated passive acoustic filter, extended soundport |
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Legal Events
Date | Code | Title | Description |
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GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20200618 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
|
TR01 | Transfer of patent right |