CN204269692U - A kind of probe - Google Patents
A kind of probe Download PDFInfo
- Publication number
- CN204269692U CN204269692U CN201420812301.XU CN201420812301U CN204269692U CN 204269692 U CN204269692 U CN 204269692U CN 201420812301 U CN201420812301 U CN 201420812301U CN 204269692 U CN204269692 U CN 204269692U
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- cantilever
- transverse
- trailing
- arms
- arm
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Abstract
The utility model provides a kind of probe, and this probe at least comprises: the substrate with upper and lower surface; Vertically be fixed on some square waveform cantilevers of described upper surface of base plate; Described square waveform cantilever is cross-linked by some transverse arms and trailing arm and forms; Wherein be fixed with support component between adjacent two described transverse arms; The free end of described cantilever is provided with tip.Described probe of the present utility model be often provided with between adjacent two transverse arms support component make to execute stressed at the upper surface of described substrate while, described square waveform cantilever is unlikely to cause distortion due to discontinuity, thus avoid making due to the distortion of cantilever weld pad on probe and wafer mutually extrude and cause each self-damage, and cause test invalidation.
Description
Technical field
The utility model relates to a kind of semi-conductor processing equipment, particularly relates to a kind of probe for chip monitoring electrical characteristics.
Background technology
Probe of the prior art generally comprises cantalever type probe card and vertical probe carb, as shown in Figure 1, Fig. 1 display be the structural representation of cantalever type probe card in prior art.Cantalever type probe card generally comprise tiling open at probe tip and carrying probe tip and length be L, width is b, thickness is the cantilever of h, and by pad bump that signal wire is electrically connected with cantilever; Described pad bump is undertaken being connected test by with the circuit in tester table; Some probe tips that described tiling is opened have tip clearance each other; And each probe tip is for contacting each weld pad corresponding on wafer; This cantalever type probe card is generally provided with the probe tip of lesser amt, for testing the test structure with a small amount of weld pad; Such as can be used for the test etc. of WAT.And for the test structure on most of wafer, these test structures contain more weld pad, this cantalever type probe card can not perform well in testing other other test structures except the test structure on test wafer.
A kind of vertical probe carb is also had to can be used for testing the test structure with the more weld pad of number, as shown in Figure 2, this vertical probe carb is generally made up of with the tip 12 being positioned at cantilever free end the some cantilevers 11 perpendicular to this substrate be distributed on a substrate 10.For convenience of description, a cantilever be positioned on substrate is only provided in Fig. 1.The tip of this vertical probe carb, compared with the weld pad of probe tip more on wafer of cantalever type probe card, makes test sensitiveer; Simultaneously because this vertical probe carb is arranged on same substrate 10 simultaneously, the intensive arrangement area making more to save weld pad of arranging, therefore, it is possible to test has the test structure of more weld pad.
And the cantilever in each vertical probe carb of the prior art is as shown in Figure 2 the square waveform cantilever be cross-linked by some transverse arms and trailing arm, one end of cantilever is fixed on a substrate 10, and the other end is provided with most advanced and sophisticated 12; When performing a test, usually pressure is applied at the back side of substrate; The transverse arm of described square waveform cantilever and the tie point 13 of trailing arm usually because the effect of pressure can be distorted deformation, this deformation cause described most advanced and sophisticated 12 with the weld pad loose contact on wafer, finally cause test invalidation.
Therefore, be necessary that proposing a kind of new probe solves the problem.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of probe, owing to executing for solving vertical probe carb of the prior art stressedly makes cantilever easily deformation occur simultaneously and causes most advanced and sophisticated contacting insensitive problem with weld pad.
For achieving the above object and other relevant objects, the utility model provides a kind of probe, and described probe at least comprises: the substrate with upper and lower surface; Vertically be fixed on some square waveform cantilevers of described upper surface of base plate; Described square waveform cantilever is cross-linked by some transverse arms and trailing arm and forms; Wherein be fixed with support component between adjacent two described transverse arms; The free end of described cantilever is provided with tip.
As a kind of preferred version of probe of the present utility model, described support component is by two trailing arms and is connected to the U-shaped metal parts that a transverse arm between these two trailing arms forms; Two trailing arms of described U-shaped metal parts are parallel to the transverse arm in described square waveform cantilever; The end of two trailing arms of described U-shaped metal parts is provided with the pillar of the trailing arm perpendicular to this U-shaped metal parts, and one of them pillar is fixed on transverse arm adjacent with described pillar in described support component and the tie point of trailing arm.
As a kind of preferred version of probe of the present utility model, the opening of the transverse arm of the described U-shaped metal parts in described cantilever between adjacent two transverse arms comparatively this U-shaped metal parts is closer to the trailing arm in described cantilever between these adjacent two transverse arms.
As a kind of preferred version of probe of the present utility model, some transverse arm length of described square waveform cantilever are equal respectively, and its some trailing arm length is equal respectively; The length of the transverse arm of described U-shaped metal parts is 1/3 ~ 1/2 of the trailing arm length in described cantilever; The length of the trailing arm of described U-shaped metal parts is less than the length of transverse arm in described cantilever.
As a kind of preferred version of probe of the present utility model, described support component is by two trailing arms and is connected to the nonmetal U-shaped portion part that a transverse arm between these two trailing arms formed; Two trailing arms of described nonmetal U-shaped portion part are parallel to the transverse arm in described square waveform cantilever; The end of two trailing arms of described nonmetal U-shaped portion part is provided with the pillar of the trailing arm perpendicular to this nonmetal U-shaped portion part, and these two pillars are individually fixed in the tie point of transverse arm with the immediate cantilever of described each pillar and trailing arm.
As a kind of preferred version of probe of the present utility model, the free end of described cantilever is the transverse arm forming this cantilever; Described tip is arranged on the transverse arm of this cantilever free end; Be fixed on the transverse arm of this free end with the pillar in the immediate U-shaped non-metallic component of the transverse arm of this free end.
As a kind of preferred version of probe of the present utility model, described support component is the support column be made up of nonmetallic materials; The two ends of described support column are individually fixed on two transverse arms adjacent in described square waveform cantilever.
As a kind of preferred version of probe of the present utility model, in described square waveform cantilever, be often fixed with at least two support columns between adjacent two transverse arms.
As a kind of preferred version of probe of the present utility model, some square waveform cantilevers arrangement on the substrate of being fixed on described base lower surface is formed corresponding with the arrangement of the weld pad in the wafer that this probe is tested on described wafer.
As mentioned above, probe of the present utility model, there is following beneficial effect: described probe of the present utility model be often provided with between adjacent two transverse arms support component make to execute stressed at the upper surface of described substrate while, described square waveform cantilever is unlikely to cause distortion due to discontinuity, thus avoid making due to the distortion of cantilever weld pad on probe and wafer mutually extrude and cause each self-damage, and cause test invalidation.
Accompanying drawing explanation
Fig. 1 is shown as the structural representation of cantalever type probe card in prior art.
Fig. 2 is shown as the structural representation of vertical probe carb in prior art.
Fig. 3 is shown as the structural representation of a kind of vertical probe carb of the present utility model.
Fig. 4 and Fig. 5 is shown as the structural representation of another two kinds of vertical probe carbs of the present utility model.
Element numbers explanation
10 substrates
11 square waveform cantilevers
111,142,152 transverse arms
112,141,151 trailing arms
12 is most advanced and sophisticated
13 tie points
14 U-shaped metal parts
143,153 pillars
15 nonmetal U-shaped portion parts
16 support columns
Embodiment
Below by way of specific instantiation, embodiments of the present invention are described, those skilled in the art the content disclosed by this instructions can understand other advantages of the present invention and effect easily.The present invention can also be implemented or be applied by embodiments different in addition, and the every details in this instructions also can based on different viewpoints and application, carries out various modification or change not deviating under spirit of the present invention.
Please refer to the drawing 3 to Fig. 5.It should be noted that, the diagram provided in the present embodiment only illustrates basic conception of the present invention in a schematic way, then only the assembly relevant with the present invention is shown in graphic but not component count, shape and size when implementing according to reality is drawn, it is actual when implementing, and the kenel of each assembly, quantity and ratio can be a kind of change arbitrarily, and its assembly layout kenel also may be more complicated.
Embodiment one
As shown in Figure 3, the utility model provides a kind of probe, and described probe is provided with substrate 10, and described substrate 10 is provided with upper and lower surface; The upper surface of described substrate is provided with the some square waveform cantilevers 11 being vertically fixed on this upper surface of base plate; As shown in Figure 3, described square waveform cantilever is cross-linked by some transverse arms 111 and trailing arm 112 and forms; Wherein be fixed with support component between adjacent two described transverse arms; The free end of described cantilever is provided with most advanced and sophisticated 12.As a kind of preferred version of probe of the present utility model, as shown in Figure 3, described support component is by two trailing arms 141 and is connected to the U-shaped metal parts 14 that a transverse arm 142 between these two trailing arms 141 forms; Described U-shaped metal parts 14 with the position relationship of described cantilever 11 is: two trailing arms are parallel to the transverse arm in described square waveform cantilever; The end of two trailing arms of described U-shaped metal parts 14 is also provided with the pillar 143 perpendicular to the trailing arm of this U-shaped metal parts, and one of them pillar is fixed on transverse arm adjacent with described pillar in described support component and the tie point of trailing arm.Because described support component is U-shaped metal parts, therefore, if scheme of the present utility model uses metal parts as support component, then this support component as far as possible not adjacent with two in described cantilever 11 transverse arm 111 be connected, avoid short circuit.In addition, why the pillar 143 of two these trailing arms vertical is set at the end of two trailing arms of described U-shaped metal parts 14, and one of them pillar is fixed on the transverse arm of described cantilever and the tie point of trailing arm, object is that the pillar at described tie point place can play the effect of trimming moment when the lower surface of described substrate applies pressure as shown in the figure.
As a kind of preferred version of the present utility model, as shown in Figure 3, the opening of the transverse arm 142 of the described U-shaped metal parts 14 in described cantilever 11 between adjacent two transverse arms 111 comparatively this U-shaped metal parts is closer to the trailing arm 112 in described cantilever between these adjacent two transverse arms.That is, the opening of the U-shaped metal parts 14 in Fig. 3 between adjacent two transverse arms 111 of described probe cantilever outwardly, the opening of described U-shaped metal parts 14 is compared with the transverse arm of this U-shaped metal parts, and its transverse arm is closer in the trailing arm 112 between upper and lower two transverse arms 111 of this U-shaped metal parts.In this preferred version, by the opening of described U-shaped metal parts object one be outwardly why make the pillar on two trailing arms of described U-shaped metal parts can drop on the transverse arm of described cantilever and the tie point of trailing arm while, in the space that whole U-shaped metal parts can be made to drop between cantilever two transverse arms, due to numerous described cantilever that described substrate can be arranged, therefore, the benefit of this preferred version to save the arrangement space of cantilever, and what each cantilever was arranged on the substrate is compacter.
Further preferably, some transverse arm length of described square waveform cantilever are equal respectively, and its some trailing arm length is equal respectively; The length of the transverse arm of described U-shaped metal parts is 1/3 ~ 1/2 of the trailing arm length in described cantilever; The length of the trailing arm of described U-shaped metal parts is less than the length of transverse arm in described cantilever.That is, for each square waveform cantilever, it comprises some transverse arms, and the length each other of the described some transverse arms being arranged in same cantilever in the present embodiment is equal respectively.Further preferably, the size of the U-shaped metal parts between every two transverse arms is identical respectively.The length of the transverse arm 142 of described each U-shaped metal parts is 1/2 ~ 1/3 of trailing arm 112 length of described cantilever.Because the pillar on described U-shaped metal parts two trailing arms needs certain length, therefore, the length of the transverse arm of described U-shaped metal parts can not be too large.In addition, on two trailing arms of described U-shaped metal parts, why respectively establish the object of a pillar to be, the lower pillar in one of them position contacts with described cantilever, and the effect of the higher pillar in another position makes cantilever when being distorted distortion, this pillar can with its above the bridge contacts of cantilever, play a supporting role, make described cantilever be unlikely to too large distortion occurs and cause damaging the weld pad of wafer and damage probe.Preferably, the material of the U-shaped metal parts in the present embodiment is cobalt or nickel.
Preferably, some square waveform cantilevers arrangement on the substrate of being fixed on described base lower surface in the present embodiment is formed corresponding with the arrangement of the weld pad in the wafer that this probe is tested on described wafer.The arrangement of the weld pad that is on described test structure determines the arrangement of the cantilever on described substrate, and the probe on a cantilever corresponds to a weld pad on described test structure.
Embodiment two
As shown in Figure 4, the present embodiment and the difference of embodiment one are that the support component in two embodiments is different to the structural representation of the probe of the present embodiment, and described support component is different from the annexation of described cantilever simultaneously.The described support component of the present embodiment is nonmetal U-shaped portion part 15, and as shown in Figure 4, described nonmetal U-shaped portion part 15 comprises two trailing arms 151 and is connected to a transverse arm 152 between these two trailing arms; Two trailing arms 151 of described nonmetal U-shaped portion part 15 are parallel to the transverse arm 111 in described square waveform cantilever; The end of two trailing arms 151 of described nonmetal U-shaped portion part 15 is provided with the pillar 153 of the trailing arm perpendicular to this nonmetal U-shaped portion part, and these two pillars are individually fixed in the tie point of transverse arm 111 with the immediate cantilever of described each pillar and trailing arm 112.
The present embodiment and embodiment one difference are: the described support component in the present embodiment is nonmetal U-shaped portion part; In addition, all immediate with it transverse arm 111 of cantilever of two pillars of these nonmetal U parts and the tie point of trailing arm 112 are connected.Make because the described support component in the present embodiment is nonmetallic materials, therefore, this nonmetal U-shaped portion part is connected between adjacent two transverse arms in described cantilever, described cantilever can not be made to produce short circuit.Simultaneously, compare embodiment one, the described nonmetal U-shaped portion part of the present embodiment is directly formed and supports between any two adjacent transverse arms of described cantilever, the lower surface of described substrate is executed stressed while, due to the supporting role of described nonmetal U-shaped portion part, described cantilever can not be made to be distorted deformation, therefore, to avoid the damage that probe and wafer are caused.
Further preferably, as shown in Figure 4, the free end of described cantilever is the transverse arm forming this cantilever; That is, the part being positioned at the top is the free end of described cantilever, and the free end of described cantilever is not the trailing arm forming cantilever, but forms the transverse arm of this cantilever; Described most advanced and sophisticated 12 are arranged on the transverse arm of this cantilever free end; Be fixed on the transverse arm of this free end with the pillar 153 in the immediate U-shaped non-metallic component of the transverse arm of this free end.The present embodiment is except above-mentioned technical characteristic is different from embodiment one, and other technologies feature is identical with the technical characteristic in embodiment one.
Preferably, some square waveform cantilevers arrangement on the substrate of being fixed on described base lower surface in the present embodiment is formed corresponding with the arrangement of the weld pad in the wafer that this probe is tested on described wafer.The arrangement of the weld pad that is on described test structure determines the arrangement of the cantilever on described substrate, and the probe on a cantilever corresponds to a weld pad on described test structure.
Embodiment three
As shown in Figure 5, the present embodiment and the difference of embodiment one are that the support component in two embodiments is different to the structural representation of the probe in the present embodiment, and described support component is different from the annexation of described cantilever simultaneously.As shown in Figure 5, the support component of the present embodiment is the support column 16 between adjacent two transverse arms of described cantilever; The two ends of described support column 16 are individually fixed on two transverse arms adjacent in described square waveform cantilever.The material of the described support component (support column 16) in the present embodiment is nonmetallic materials.
What be fixed to make described cantilever is comparatively firm, executes stressedly be unlikely to make described cantilever to be distorted deformation simultaneously at described base lower surface.The present embodiment further preferably, as shown in Figure 5, is often fixed with at least two support columns between adjacent two transverse arms in described waveform cantilever.Can adjust according to the demand of the transverse arm length of described cantilever and actual process at the concrete number of the support column often between adjacent two transverse arms.
Preferably, some square waveform cantilevers arrangement on the substrate of being fixed on described base lower surface in the present embodiment is formed corresponding with the arrangement of the weld pad in the wafer that this probe is tested on described wafer.The arrangement of the weld pad that is on described test structure determines the arrangement of the cantilever on described substrate, and the probe on a cantilever corresponds to a weld pad on described test structure.The present embodiment except above-mentioned support component and this support component different with embodiment one from the annexation of described cantilever except, other technologies feature is identical with the technical characteristic in embodiment one.
In sum, described probe of the present utility model be often provided with between adjacent two transverse arms support component make to execute stressed at the upper surface of described substrate while, described square waveform cantilever is unlikely to cause distortion due to discontinuity, thus avoid making due to the distortion of cantilever weld pad on probe and wafer mutually extrude and cause each self-damage, and cause test invalidation.So the utility model effectively overcomes various shortcoming of the prior art and tool high industrial utilization.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all without prejudice under spirit of the present utility model and category, can modify above-described embodiment or changes.Therefore, such as have in art and usually know that the knowledgeable modifies or changes not departing from all equivalences completed under the spirit and technological thought that the utility model discloses, must be contained by claim of the present utility model.
Claims (9)
1. a probe, is characterized in that, described probe at least comprises:
There is the substrate of upper and lower surface; Vertically be fixed on some square waveform cantilevers of described upper surface of base plate;
Described square waveform cantilever is cross-linked by some transverse arms and trailing arm and forms; Wherein be fixed with support component between adjacent two described transverse arms; The free end of described cantilever is provided with tip.
2. probe according to claim 1, is characterized in that: described support component is by two trailing arms and is connected to the U-shaped metal parts that a transverse arm between these two trailing arms forms; Two trailing arms of described U-shaped metal parts are parallel to the transverse arm in described square waveform cantilever; The end of two trailing arms of described U-shaped metal parts is provided with the pillar of the trailing arm perpendicular to this U-shaped metal parts, and one of them pillar is fixed on transverse arm adjacent with described pillar in described support component and the tie point of trailing arm.
3. probe according to claim 2, is characterized in that: the opening of the transverse arm of the described U-shaped metal parts in described cantilever between adjacent two transverse arms comparatively this U-shaped metal parts is closer to the trailing arm in described cantilever between these adjacent two transverse arms.
4. probe according to claim 3, is characterized in that: some transverse arm length of described square waveform cantilever are equal respectively, and its some trailing arm length is equal respectively; The length of the transverse arm of described U-shaped metal parts is 1/3 ~ 1/2 of the trailing arm length in described cantilever; The length of the trailing arm of described U-shaped metal parts is less than the length of transverse arm in described cantilever.
5. probe according to claim 1, is characterized in that: described support component is by two trailing arms and is connected to the nonmetal U-shaped portion part that a transverse arm between these two trailing arms formed; Two trailing arms of described nonmetal U-shaped portion part are parallel to the transverse arm in described square waveform cantilever; The end of two trailing arms of described nonmetal U-shaped portion part is provided with the pillar of the trailing arm perpendicular to this nonmetal U-shaped portion part, and these two pillars are individually fixed in the tie point of transverse arm with the immediate cantilever of described each pillar and trailing arm.
6. probe according to claim 5, is characterized in that: the free end of described cantilever is the transverse arm forming this cantilever; Described tip is arranged on the transverse arm of this cantilever free end; Be fixed on the transverse arm of this free end with the pillar in the immediate U-shaped non-metallic component of the transverse arm of this free end.
7. probe according to claim 1, is characterized in that: described support component is the support column be made up of nonmetallic materials; The two ends of described support column are individually fixed on two transverse arms adjacent in described square waveform cantilever.
8. probe according to claim 7, is characterized in that: be often fixed with at least two support columns between adjacent two transverse arms in described square waveform cantilever.
9. probe according to claim 1, is characterized in that: some square waveform cantilevers arrangement on the substrate of being fixed on described base lower surface is formed corresponding with the arrangement of the weld pad in the wafer that this probe is tested on described wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420812301.XU CN204269692U (en) | 2014-12-18 | 2014-12-18 | A kind of probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420812301.XU CN204269692U (en) | 2014-12-18 | 2014-12-18 | A kind of probe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204269692U true CN204269692U (en) | 2015-04-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201420812301.XU Active CN204269692U (en) | 2014-12-18 | 2014-12-18 | A kind of probe |
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| CN (1) | CN204269692U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113533929A (en) * | 2020-04-21 | 2021-10-22 | 中芯国际集成电路制造（天津）有限公司 | Probe card |
-
2014
- 2014-12-18 CN CN201420812301.XU patent/CN204269692U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113533929A (en) * | 2020-04-21 | 2021-10-22 | 中芯国际集成电路制造（天津）有限公司 | Probe card |
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