CN204228990U - A kind of filter sheet structure - Google Patents

Abstract

The utility model discloses a kind of filter sheet structure, comprise a glass substrate, described glass substrate is provided with light-transmissive film layer, described light-transmissive film layer comprises and is alternately deposited on Ge rete on described glass substrate and ZnS rete, described Ge rete and ZnS rete are three layers, the superiors of described light-transmissive film layer are ZnS rete, and described light-transmissive film layer is also provided with antireflective coating, and described antireflective coating comprises two-layer SiO ₂rete and a MgF ₂rete, described MgF ₂rete is positioned at two-layer SiO ₂between rete.This filter sheet structure has set up antireflective coating on light-transmissive film layer, the energy of reflected light and transmitted light can be made to redistribute by increasing antireflective coating, the energy of reflected light is reduced, the energy of transmitted light increases, so just effectively can increase the transmittance of optical filter, can more than 98% be reached according to this optical filter of detection to the light penetrability of wavelength between 2500-3000nm; This filter sheet structure coating only has 9 layers simultaneously, and coating layers is less, and technique is simple, and effectively can reduce production cost.

Description

A kind of filter sheet structure

Technical field

The utility model relates to a kind of optical filter, particularly a kind of MID INFRARED communication filter sheet structure.

Background technology

Optical communication refers to the communication mode realized as information carrier using light, can be divided into lasercom and optical fiber communication two kinds by the difference of transmission medium.Optical communication has the advantages such as message capacity is large, transmission range length, electromagnetism interference, transmission quality is good, signal cross-talk is little, good confidentiality, is the final goal of future transmission network Development, has boundless market outlook.In the bi-directional transceiver module of optical communication product, by the laser signal of selected wavelength, and reflect unwanted wave band and usually adopt optical filter (edge filters) to realize, can say optical filter play a part to cause in optical communication product close important.Along with developing rapidly of space technology and optical device, the application of infrared optical system more and more comes into one's own, light signal signal has to pass through the filtering that optical filter, protection window etc. carry out Time and place, this just requires that light is transmitting with maximal value as much as possible by its radiant quantity during optical filter, so just needs on optical element, be coated with according to different requirements the film met the demands.

Chinese utility model patent (the patent No.: 201420182095.9) disclose a kind of medium-wave infrared long wave pass filter, comprise: substrate and rete, rete comprises and is alternately deposited on Ge rete on described substrate and ZnS rete successively, and the rete number of described Ge rete and ZnS rete is respectively 13 layers and 12 layers, this medium-wave infrared long wave pass filter has the high and advantage that environmental stability is high of transmitance.This medium-wave infrared long wave pass filter transmittance probably has about 93% after testing, and have 7% still can be reflected, therefore transmittance is not still very high.Have on this optical filter again and will plate tens tunics, technique is comparatively complicated, and production efficiency is lower.

Utility model content

For solving the problems of the technologies described above, embodiment of the present utility model provides the filter sheet structure that a kind of coating process is simple, transmittance is high.

For achieving the above object, embodiment of the present utility model adopts following technical scheme: a kind of filter sheet structure, comprise a glass substrate, described glass substrate is provided with light-transmissive film layer, described light-transmissive film layer comprises and is alternately deposited on Ge rete on described glass substrate and ZnS rete, and described Ge rete and ZnS rete are three layers, and the superiors of described light-transmissive film layer are ZnS rete, described light-transmissive film layer is also provided with antireflective coating, and described antireflective coating comprises two-layer SiO ₂rete and a MgF ₂rete, described MgF ₂rete is positioned at two-layer SiO ₂between rete.

Further, described light-transmissive film layer from inside to outside, ground floor Ge thicknesses of layers is 352-353nm, ground floor ZnS thicknesses of layers is 176-176.5nm, second layer Ge thicknesses of layers is 687-689nm, second layer ZnS thicknesses of layers is 223-224nm, third layer Ge thicknesses of layers be 946-948nm, third layer ZnS thicknesses of layers is 311-312nm.

Further, described antireflective coating from inside to outside, ground floor SiO ₂thicknesses of layers is 125-126nm, MgF ₂thicknesses of layers is 49-51nm, second layer SiO ₂thicknesses of layers is 78-79nm.

Further, the thickness of described glass substrate is 0.145mm or 0.21mm.

The filter sheet structure that the utility model embodiment provides has following beneficial effect: this filter sheet structure has set up antireflective coating on light-transmissive film layer, the energy of reflected light and transmitted light can be made to redistribute by increasing antireflective coating, the energy of reflected light is reduced, the energy of transmitted light increases, so just effectively can increase the transmittance of optical filter, can more than 98% be reached according to this optical filter of detection to the light penetrability of wavelength between 2500-3000nm; This filter sheet structure coating only has 9 layers simultaneously, and coating layers is less, and technique is simple, and effectively can reduce production cost.

Accompanying drawing explanation

In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.

Fig. 1 is the structural representation of the utility model embodiment.

Fig. 2 is the utility model embodiment transmittance characteristics figure.

Embodiment

Below in conjunction with accompanying drawing, the utility model embodiment is described in detail.In description of the present utility model, it will be appreciated that, term " " center ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end ", " interior ", orientation or the position relationship of the instruction such as " outward " are based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction of the present utility model.

Term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance or imply the quantity indicating indicated technical characteristic.Thus, be limited with " first ", the feature of " second " can express or impliedly comprise one or more these features.In description of the present utility model, except as otherwise noted, the implication of " multiple " is two or more.In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, concrete condition the concrete meaning of above-mentioned term in the utility model can be understood.

As shown in Figure 1, the art of this patent scheme discloses a kind of filter sheet structure, comprises a glass substrate 1, and glass substrate 1 can select thickness to be the glass substrate of 0.145mm or 0.21mm.Glass substrate 1 is provided with light-transmissive film layer 2, light-transmissive film layer 2 comprises and is alternately deposited on Ge rete 21 on glass substrate 1 and ZnS rete 22, Ge rete 21 is high refractive index material layer, ZnS rete 22 is low birefringent material layer, and the rotatory that can be realized the light of different wave length by high-refraction material and low refractive material is passed through.As a kind of embodiment, Ge rete 21 on light-transmissive film layer 2 and ZnS rete 22 are three layers, the superiors of light-transmissive film layer 2 are ZnS rete, from inside to outside, ground floor Ge thicknesses of layers is 352-353nm to light-transmissive film layer 2, and ground floor ZnS thicknesses of layers is 176-176.5nm, second layer Ge thicknesses of layers is 687-689nm, second layer ZnS thicknesses of layers is 223-224nm, third layer Ge thicknesses of layers be 946-948nm, third layer ZnS thicknesses of layers is 311-312nm.

Above light-transmissive film layer 2, be also provided with antireflective coating 3, antireflective coating 3 comprises two-layer SiO ₂rete 31 and a MgF ₂rete 32, MgF ₂rete 32 is positioned at two-layer SiO ₂between rete 31.As a kind of optimal way, antireflective coating 3 from inside to outside, ground floor SiO ₂thicknesses of layers is 125-126nm, MgF ₂thicknesses of layers is 49-51nm, second layer SiO ₂thicknesses of layers is 78-79nm.According to detection, this antireflective coating 3 only has 1% at the optical band reflectivity of 2600-3000nm, and only have 0.5% at the optical band reflectivity of 2800-3000nm, the transmittance of this antireflective coating 3 is very high as can be seen here.

As can be seen here, antireflective coating 3 is combined with light-transmissive film layer 2 by this filter sheet structure, the energy of reflected light and transmitted light can be made to redistribute, the energy of reflected light is reduced by increasing antireflective coating, the energy of transmitted light increases, and so just effectively can increase the transmittance of optical filter.Should close to 1.23 according to the refractive index detecting this anti-reflection film, this optical filter can reach for more than 98% (as shown in Figure 2) to the light penetrability of wavelength between 2500-3000nm; This filter sheet structure coating only has 9 layers simultaneously, and coating layers is less, and technique is simple, and effectively can reduce production cost.

The above, be only embodiment of the present utility model, and in the description of this instructions, specific features, structure, material or feature can combine in an appropriate manner in any one or more embodiment or example.Therefore protection domain of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; change can be expected easily or replace; all should be encompassed within protection domain of the present utility model, protection domain of the present utility model should be as the criterion with the protection domain of described claim.

Claims (4)

1. a filter sheet structure, comprise a glass substrate, described glass substrate is provided with light-transmissive film layer, it is characterized in that: described light-transmissive film layer comprises and is alternately deposited on Ge rete on described glass substrate and ZnS rete, described Ge rete and ZnS rete are three layers, the superiors of described light-transmissive film layer are ZnS rete, and described light-transmissive film layer is also provided with antireflective coating, and described antireflective coating comprises two-layer SiO ₂rete and one deck MgF ₂rete, described MgF ₂rete is positioned at two-layer SiO ₂between rete.

2. filter sheet structure according to claim 1, it is characterized in that: described light-transmissive film layer from inside to outside, ground floor Ge thicknesses of layers is 352-353nm, ground floor ZnS thicknesses of layers is 176-176.5nm, second layer Ge thicknesses of layers is 687-689nm, second layer ZnS thicknesses of layers is 223-224nm, third layer Ge thicknesses of layers be 946-948nm, third layer ZnS thicknesses of layers is 311-312nm.

3. filter sheet structure according to claim 2, is characterized in that: described antireflective coating from inside to outside, ground floor SiO ₂thicknesses of layers is 125-126nm, MgF ₂thicknesses of layers is 49-51nm, second layer SiO ₂thicknesses of layers is 78-79nm.

4. filter sheet structure according to claim 1, is characterized in that: the thickness of described glass substrate is 0.145mm or 0.21mm.