CN204223506U - A kind of packaging of large-size target - Google Patents
A kind of packaging of large-size target Download PDFInfo
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- CN204223506U CN204223506U CN201420655815.9U CN201420655815U CN204223506U CN 204223506 U CN204223506 U CN 204223506U CN 201420655815 U CN201420655815 U CN 201420655815U CN 204223506 U CN204223506 U CN 204223506U
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Abstract
The utility model discloses a kind of packaging of large-size target, comprise the protective film be pasted onto on target driving surface, and be arranged on the internal layer packaging bag of target outside, be arranged on the secondary outer packaging bag of this internal layer packaging bag outside, and be arranged on the outer packaging bag of this outer packaging bag outside; Be pasted with and adjacently in the target of protective film, internal layer packaging bag, secondary outer packaging bag and outer packaging bag be vacuum state between the two.The utility model structure is simple, effectively can ensure that large-size target driving surface in production and transportation is injury-free.
Description
Technical field
The utility model relates to a kind of packaging of large-size target, for FPD and large scale used for solar batteries or oversize planar targets.
Background technology
Sputtering target material is one of the raw material of industry and consumptive material of semicon industry.Because large-scale integration circuit is to the rigors of manufacturing environment, therefore there is high requirement to the clean of sputtering target material and packaging.Patent documentation CN201660228U, CN201545361U, CN202529378U, CN203173156U and CN203173157U individually disclose the packing device for target.Because the size of quartz conductor sputtering target material is relatively little, even the target that 12 of current main-stream inches of manufacturing lines use, its greatest diametrical dimension is no more than φ 600mm.Therefore, quartz conductor target have employed two-layer above vacuum packaging always, and target itself does not carry out special processing.
But there is limitation in the sputtering target material packaging of the packing method of existing quartz conductor target in FPD and solar cell.For FPD, its production facilities used and scantling also increasing.Table 1 is TFT-LCD FPD glass substrate and supporting target size change list.
Table 1TFT-LCD FPD glass substrate and supporting target size change list
| TFT-LCD is line from generation to generation | Glass substrate size (mm) | Type | Monolithic target size (mm) |
| G3 | 550×650 | Overall | 831×901 |
| G5.5 | 1300×1500 | Overall | 1680×2265 |
| G6 | 1500×1800 | 10 pieces of splicings | 205×2650 |
| G8.5 | 2200×2500 | 12 pieces of splicings | 230×3000 |
Large-sized target like this, must ensure user install use before, prevent the target surface of sputtering target material to be oxidized, scratch, make moist and pollution etc. affect client production problem.Therefore, complete its difficulty of such packaging very large, the packing method of existing quartz conductor target is not suitable for the packaging of FPD and large-size target used for solar batteries.
Utility model content
The purpose of this utility model is the packaging providing a kind of large-size target, and this packaging structure is simple, effectively can ensure that large-size target driving surface in production and transportation is injury-free.
For achieving the above object, the utility model is by the following technical solutions:
A kind of packaging of large-size target, comprise the protective film be pasted onto on target driving surface, and be arranged on the internal layer packaging bag of target outside, be arranged on the secondary outer packaging bag of this internal layer packaging bag outside, and be arranged on the outer packaging bag of this outer packaging bag outside; Be pasted with and adjacently in the target of protective film, internal layer packaging bag, secondary outer packaging bag and outer packaging bag be vacuum state between the two.
Preferably, described protective film, with color, is different from the color that target is original.
Preferably; the surface of described protective film scribbles lining cement; this lining cement is not removing residual glue, mainly all kinds of pressure-sensitive adhesive, as natural rubber pressure sensitive adhesive, neoprene or reclaimed rubber pressure-sensitive adhesive, thermoplastic elastomer pressure-sensitive adhesive, Acrylic Pressure Sensitive Adhesive.
Preferably, the material of described protective film is polymer plastic material products, including, but not limited to polyethylene foil (PE), mylar (PET) and polypropylene (BOPP).
Preferably, the thickness of described protective film is 0.03mm ~ 0.1mm.
The beneficial effects of the utility model are:
The utility model, in order to protect large-size target driving surface, carries out pad pasting protection to it, then adopts the structure of similar sandwich to encapsulate, and structure is convenient operation simply again, effectively can ensure that large-size target driving surface in production and transportation is injury-free.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model large-size target packaging.
Detailed description of the invention
Be illustrated in figure 1 the structural representation of the utility model large-size target packaging.Wherein, the driving surface of target A is pasted with protective film, the internal layer packaging bag formed through edge sealing by inner layer film 1,4 is provided with in the outside of this target A, be provided with in this internal layer packaging bag outside the secondary outer packaging bag formed through edge sealing by secondary outer membrane 2,5, be provided with this outer packaging bag outside the outer packaging bag formed through edge sealing by outer membrane 3,6; Be pasted with and adjacently in the target of protective film, internal layer packaging bag, secondary outer packaging bag and outer packaging bag be vacuum state between the two.
Below in conjunction with specific embodiment, the utility model is described further.
Embodiment 1
TFT-LCD liquid crystal panel 5.5 generation line finished product target size is 30mm × 1680mm × 2265mm.To clean and target after drying carries out packing (noting: following all operations is all carry out in clean room) in accordance with the following steps:
The first step, target surface overlay film.Clean and dry target, utilizing blue polyethylene foil (PE) protective film that equipment for coating film is 0.1mm at target driving surface coated with thickness.This blue protection film scribbles natural rubber pressure sensitive adhesive, and this glue can not cause residual at target surface.
Second step, packing chest prepares.At clean room, the packing chest holding target is put into the position of regulation.
3rd step, lay multilayer packaging film.By multilayer packaging film (comprising inner layer film 1, secondary outer membrane 2 and outer membrane 3) overlapping alignment, lay, in packing chest, notices that packaging film size will exceed more than packing chest inside dimension 500mm.
4th step, target hangs.Hole for hoist on the suspender of cleaning and target is connected to a fixed; Lifting target, by also slow landing directly over the handling to packing chest of target pulsation-free, waits until target aligned position when packing chest, more slowly lands until target placement is safe, then pull down suspender.
5th step, inner layer film is packed.Lay inner layer film 4 on target, carries out edge sealing with capper to inner layer film 4 and 1 and forms a closed packaging bag; A small size mouth is sheared at this packaging bag one jiao, vacuum packing machine is utilized to vacuumize from this mouth internal layer packaging bag, start to be filled with a small amount of argon gas when degree of vacuum in bag reaches after specified value, and then vacuumize, seal when degree of vacuum in bag reaches after specified value, thus complete the packaging of innermost layer packaging bag.
6th step, secondary outer packaging.Desiccant is placed on packing inside bag surface, then lay time outer membrane 5 forms time outer packaging bag.By abovementioned steps, secondary outer membrane 5 and 2 carried out edge sealing, vacuumize, anti-applying argon gas, to vacuumize and sealing operation, complete time outer packaging.
7th step, outermost layer is packed.Desiccant is placed on time outer packaging bag surface, repaves and put outer membrane 6 and form outermost layer packaging bag.By abovementioned steps, edge sealing carried out to outer membrane 6 and 3, vacuumize, anti-applying argon gas, to vacuumize and sealing operation, complete outermost layer packaging.
Embodiment 2
TFT-LCD liquid crystal panel 6 generation line finished product target is 10 is a set of fabricate block, and monolithic is of a size of 32mm × 205mm × 2650mm.To clean and target after drying carries out packing (noting: following all operations is all carry out in clean room) in accordance with the following steps:
The first step, target surface overlay film.Clean and dry target, utilizing blue mylar (PET) protective film that equipment for coating film is 0.03mm at target driving surface coated with thickness.This blue protection film scribbles natural rubber pressure sensitive adhesive, and this glue can not cause residual at target surface.
Second step, target combination is fixing.The target of monolithic is connected and fixed with special anchor fitting respectively, forms the entirety of one.
3rd step, packing chest prepares.At clean room, the packing chest holding target is put into the position of regulation.
4th step, lay multilayer packaging film.By multilayer packaging film (comprising inner layer film 1, secondary outer membrane 2 and outer membrane 3) overlapping alignment, lay, in packing chest, notices that packaging film size will exceed more than packing chest inside dimension 500mm; Packaging film is divided into inner layer film, secondary outer membrane and outer membrane according to the position with target.
5th step, target hangs.Hole for hoist on the suspender of cleaning and target is connected to a fixed; Lifting target, by also slow landing directly over the handling to packing chest of target pulsation-free, waits until target aligned position when packing chest, more slowly lands until target placement is safe, then pull down suspender.
6th step, inner layer film is packed.Lay a slice and the measure-alike inner layer film 4 of below inner layer film 1 on target, inner layer film 4 and 1 forms innermost layer and packs; With capper, edge sealing is carried out to inner layer film 4 and 1 and form a closed packaging bag; A small size mouth is sheared at this packaging bag one jiao, vacuum packing machine is utilized to vacuumize from this mouth internal layer packaging bag, start to be filled with a small amount of argon gas when degree of vacuum in bag reaches after specified value, and then vacuumize, seal when degree of vacuum in bag reaches after specified value, thus complete the packaging of innermost layer packaging bag.
7th step, secondary outer packaging.Desiccant is placed on packing inside bag surface, then lay time outer membrane 5 forms time outer packaging bag.By abovementioned steps, edge sealing carried out to secondary outer membrane 5 and 2, vacuumize, anti-applying argon gas, to vacuumize and sealing operation, complete time outer packaging.
8th step, outermost layer is packed.Desiccant is placed on time outer packaging bag surface, repaves and put outer membrane 6 and form outermost layer packaging bag.By abovementioned steps, edge sealing carried out to outer membrane 6 and 3, vacuumize, anti-applying argon gas, to vacuumize and sealing operation, complete outermost layer packaging.
Embodiment 3
TFT-LCD liquid crystal panel 8.5 generation line finished product target is 12 is a set of fabricate block, and monolithic is of a size of 34mm × 230mm × 3000mm.To clean and target after drying carries out packing (noting: following all operations is all carry out in clean room) in accordance with the following steps:
The first step, target surface overlay film.Clean and dry target, utilizing equipment for coating film to be the blue polypropylene (BOPP) of 0.04mm at target driving surface coated with thickness.This blue protection film scribbles natural rubber pressure sensitive adhesive, and this glue can not cause residual at target surface.
Second step, target combination is fixing.The target of monolithic is connected and fixed with special anchor fitting respectively, forms the entirety of one.
3rd step, packing chest prepares.At clean room, the packing chest holding target is put into the position of regulation.
4th step, lay multilayer packaging film.By multilayer packaging film (comprising inner layer film 1, secondary outer membrane 2 and outer membrane 3) overlapping alignment, lay, in packing chest, notices that packaging film size will exceed more than packing chest inside dimension 500mm; Packaging film is divided into inner layer film, secondary outer membrane and outer membrane according to the position with target.
5th step, target hangs.Hole for hoist on the suspender of cleaning and target is connected to a fixed; Lifting target, by also slow landing directly over the handling to packing chest of target pulsation-free, waits until target aligned position when packing chest, more slowly lands until target placement is safe, then pull down suspender.
6th step, inner layer film is packed.Lay a slice and the measure-alike inner layer film 4 of below inner layer film on target, inner layer film 4 and 1 forms innermost layer and packs; With capper, edge sealing is carried out to inner layer film 4 and 1 and form a closed packaging bag; A small size mouth is sheared at this packaging bag one jiao, vacuum packing machine is utilized to vacuumize from this mouth internal layer packaging bag, start to be filled with a small amount of argon gas when degree of vacuum in bag reaches after specified value, and then vacuumize, seal when degree of vacuum in bag reaches after specified value, thus complete the packaging of innermost layer packaging bag.
7th step, secondary outer packaging.Desiccant is placed on packing inside bag surface, then lay time outer membrane 5 forms time outer packaging bag.By abovementioned steps, edge sealing carried out to secondary outer membrane 5 and 2, vacuumize, anti-applying argon gas, to vacuumize and sealing operation, complete time outer packaging.
8th step, outermost layer is packed.Desiccant is placed on time outer packaging bag surface, repaves and put outer membrane 6 and form outermost layer packaging bag.By abovementioned steps, edge sealing carried out to outer membrane 6 and 3, vacuumize, anti-applying argon gas, to vacuumize and sealing operation, complete outermost layer packaging.
Claims (7)
1. the packaging of a large-size target, it is characterized in that, comprise the protective film be pasted onto on target driving surface, and be arranged on the internal layer packaging bag of target outside, be arranged on the secondary outer packaging bag of this internal layer packaging bag outside, and be arranged on the outer packaging bag of this outer packaging bag outside; Be pasted with and adjacently in the target of protective film, internal layer packaging bag, secondary outer packaging bag and outer packaging bag be vacuum state between the two.
2. the packaging of large-size target according to claim 1, is characterized in that, described protective film, with color, is different from the color that target is original.
3. the packaging of large-size target according to claim 1, is characterized in that, the surface of described protective film scribbles lining cement, and this lining cement is not removing residual glue.
4. the packaging of large-size target according to claim 3, is characterized in that, described not removing residual glue is natural rubber pressure sensitive adhesive, neoprene or reclaimed rubber pressure-sensitive adhesive, thermoplastic elastomer pressure-sensitive adhesive or Acrylic Pressure Sensitive Adhesive.
5. the packaging of the large-size target according to any one of claim 1-3, is characterized in that, the material of described protective film is polymer plastic material products.
6. the packaging of large-size target according to claim 5, is characterized in that, the material of described protective film is polyethylene foil, mylar and polypropylene film.
7. the packaging of large-size target according to claim 1, is characterized in that, the thickness of described protective film is 0.03mm ~ 0.1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420655815.9U CN204223506U (en) | 2014-11-05 | 2014-11-05 | A kind of packaging of large-size target |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420655815.9U CN204223506U (en) | 2014-11-05 | 2014-11-05 | A kind of packaging of large-size target |
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| CN204223506U true CN204223506U (en) | 2015-03-25 |
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| CN201420655815.9U Active CN204223506U (en) | 2014-11-05 | 2014-11-05 | A kind of packaging of large-size target |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107761064A (en) * | 2016-08-15 | 2018-03-06 | 合肥江丰电子材料有限公司 | The processing method of copper target material |
| CN109018702A (en) * | 2017-06-08 | 2018-12-18 | 宁波江丰电子材料股份有限公司 | The packing method and wrapping tool of target |
| CN110589067A (en) * | 2019-08-02 | 2019-12-20 | 中山火炬职业技术学院 | Moisture-proof packaging technology for solid |
| CN113306865A (en) * | 2021-07-05 | 2021-08-27 | 合肥江丰电子材料有限公司 | Sealing packaging method for copper target material |
| WO2022168718A1 (en) * | 2021-02-02 | 2022-08-11 | 三菱マテリアル株式会社 | Package of mirror-like finished article and method for packing package of mirror-like finished article |
-
2014
- 2014-11-05 CN CN201420655815.9U patent/CN204223506U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107761064A (en) * | 2016-08-15 | 2018-03-06 | 合肥江丰电子材料有限公司 | The processing method of copper target material |
| CN109018702A (en) * | 2017-06-08 | 2018-12-18 | 宁波江丰电子材料股份有限公司 | The packing method and wrapping tool of target |
| CN109018702B (en) * | 2017-06-08 | 2021-02-19 | 宁波江丰电子材料股份有限公司 | Packaging method and packaging tool for target material |
| CN110589067A (en) * | 2019-08-02 | 2019-12-20 | 中山火炬职业技术学院 | Moisture-proof packaging technology for solid |
| WO2022168718A1 (en) * | 2021-02-02 | 2022-08-11 | 三菱マテリアル株式会社 | Package of mirror-like finished article and method for packing package of mirror-like finished article |
| CN113306865A (en) * | 2021-07-05 | 2021-08-27 | 合肥江丰电子材料有限公司 | Sealing packaging method for copper target material |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |