CN204183493U - Valve plate dip angle regulating device - Google Patents
Valve plate dip angle regulating device Download PDFInfo
- Publication number
- CN204183493U CN204183493U CN201420530235.7U CN201420530235U CN204183493U CN 204183493 U CN204183493 U CN 204183493U CN 201420530235 U CN201420530235 U CN 201420530235U CN 204183493 U CN204183493 U CN 204183493U
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- CN
- China
- Prior art keywords
- valve plate
- sliding pin
- rubber press
- regulating device
- dip angle
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 230000001105 regulatory effect Effects 0.000 title claims abstract description 22
- 238000007789 sealing Methods 0.000 claims abstract description 29
- 230000008878 coupling Effects 0.000 abstract description 3
- 238000010168 coupling process Methods 0.000 abstract description 3
- 238000005859 coupling reaction Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
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Abstract
Provide a kind of valve plate dip angle regulating device, comprise connecting rod, nut, screw, connecting axle, sliding pin, rubber press, valve plate, and sealing ring.Described screw, sliding pin, and rubber press is arranged in the pin-and-hole of described connecting rod.Described screw promotes described valve plate by described sliding pin and described rubber press and rotates around described connecting axle, thus adjusts the depth of parallelism of described valve plate and sealing surface.According to shaft coupling valve plate dip angle regulating device of the present utility model, during adjustment screw, sliding pin, rubber press can promote valve plate and rotate around connecting axle, thus the depth of parallelism of adjustment valve plate and sealing surface, after having adjusted, pass through nut check, after flap valve mounting and adjusting puts in place substantially, utilize this structure that valve plate is adjusted to the state parallel with sealing surface, make the consistent of sealing ring decrement everywhere, ensure sealing effectiveness.
Description
Technical field
The utility model relates to large area magnetron sputtering membrane production equipment, particularly relates to valve plate dip angle regulating device.
Background technology
For continuous vacuum magnetron sputtering plating glass production line, glass substrate will switch fast between atmospheric condition-high vacuum state-atmospheric condition, to realize the High-efficient Production rate of magnetron sputtering production technology.The method of usual employing is: before and after coating chamber, arrange 2 ~ 3 vacuum chambers, with flap valve segmentation and sealing between each chamber, when flap valve is opened, and chamber before and after it, glass substrate can be transported to another chamber fast; Pressure adjustment can be carried out to single chamber during closedown.
Sealing effectiveness due to flap valve is directly connected to the formation of vacuum gradient between the vacuum of each chamber and each chamber, thus have influence on the stability can carrying glass substrate and coating chamber vacuum between each chamber fast, have influence on production efficiency and the coating quality of whole line the most at last.Valve plate and by the gap between sealing surface and the depth of parallelism, is two important parameters ensureing flap valve sealing effectiveness, is normally ensured by the initial settling angle degree of adjusting cylinders overhang and valve plate.But this method is difficult to take into account valve plate and by the gap between sealing surface and the depth of parallelism, usually need repeatedly to adjust, bring difficulty to debugging simultaneously.
Utility model content
The utility model is intended to solve when regulating gap and the depth of parallelism of valve plate and sealing surface, the two problem that cannot simultaneously take into account.Behind the gap of substantially adjusting valve plate and sealing surface, by this dip angle regulating device, the angle adjustment of valve plate is extremely parallel with sealing surface.
In order to overcome the deficiencies in the prior art, the utility model provides a kind of valve plate dip angle regulating device, comprise connecting rod (1,2), nut (3), screw (4), connecting axle (5), sliding pin (6), rubber press (7), valve plate (8), and sealing ring (9), described screw (4), sliding pin (6), and rubber press (7) is arranged in the pin-and-hole of described connecting rod (2).Described screw (4) promotes described valve plate (8) by described sliding pin (6) and described rubber press (7) and rotates around described connecting axle (5), thus adjusts the depth of parallelism of described valve plate (8) and sealing surface.
On in some embodiments, the two ends of described connecting axle (5) are arranged on described connecting rod (1,2) and go up and be fastened by bolts and link together on described valve plate (8).
On in some embodiments, described rubber press (7) is arranged in the endoporus of described sliding pin (6).
On in some embodiments, described sliding pin (6) is arranged in the pin-and-hole of described connecting rod (2), thus described sliding pin (6) can be slid axially.
On in some embodiments, when regulating described screw (4), promote described valve plate (8) by described sliding pin (6) and described rubber press (7) to rotate, and utilize described nut (3) adjusting device to be locked, thus the angle of fixing described valve plate.
According to shaft coupling valve plate dip angle regulating device of the present utility model, during adjustment screw, sliding pin, rubber press can promote valve plate and rotate around connecting axle, thus the depth of parallelism of adjustment valve plate and sealing surface, after having adjusted, pass through nut check, after flap valve mounting and adjusting puts in place substantially, utilize this structure that valve plate is adjusted to the state parallel with sealing surface, make the consistent of sealing ring decrement everywhere, ensure sealing effectiveness.
Below in conjunction with accompanying drawing, the description of the utility model purport is described by example, with clear other aspects of the present utility model and advantage.
Accompanying drawing explanation
By reference to the accompanying drawings, by detailed description hereafter, above-mentioned and other feature and advantage of the present utility model more clearly can be understood, wherein:
Fig. 1 is the top view according to the utility model embodiment valve plate dip angle regulating device
Fig. 2 is the sectional view along A-A line in Fig. 1;
Fig. 3 is the sectional view along B-B line in Fig. 1; And
Fig. 4 is the schematic diagram of the valve plate dip angle regulating device after adjustment.
Detailed description of the invention
See the accompanying drawing of the utility model specific embodiment, hereafter in more detail the utility model will be described.But the utility model can realize in many different forms, and should not be construed as by the restriction in the embodiment of this proposition.On the contrary, it is abundant and complete open in order to reach for proposing these embodiments, and makes those skilled in the art understand scope of the present utility model completely.
Description describes the valve plate dip angle regulating device according to the utility model embodiment in detail.
Valve plate dip angle regulating device comprises connecting rod 1,2, nut 3, screw 4, connecting axle 5, sliding pin 6, rubber press 7, valve plate 8, and sealing ring 9, described screw 4, sliding pin 6, and rubber press 7 is arranged in the pin-and-hole of described connecting rod 2.Described screw 4 promotes described valve plate 8 by described sliding pin 6 and described rubber press 7 and rotates around described connecting axle 5, thus adjusts the depth of parallelism of described valve plate 8 and sealing surface.
The two ends of described connecting axle 5 to be arranged on described connecting rod 1,2 and to be fastened by bolts and link together on described valve plate 8.Described rubber press 7 is arranged in the endoporus of described sliding pin 6.Described sliding pin 6 is arranged in the pin-and-hole of described connecting rod 2, thus described sliding pin 6 can be slid axially.When regulating described screw 4, promoting described valve plate 8 by described sliding pin 6 and described rubber press 7 and rotating, and utilize described nut 3 adjusting device to be locked, thus the angle of fixing described valve plate.
As Figure 1-4, final drive shaft is fixed on cavity by bearing block, and connecting rod 1,2 are mounted on final drive shaft by bolt.Connecting axle 5 is arranged on connecting rod 1, on 2, and is fastened by bolts on valve plate 8; Screw 4, sliding pin 6 and rubber press 7 are contained in the pin-and-hole of connecting rod 2.Rubber press 7 is arranged in the endoporus of sliding pin 6, and sliding pin 6 is arranged in the pin-and-hole of connecting rod 2, and sliding pin 6 can axially slide.
Sliding pin 6 can be promoted when adjusting screw 4, rubber press 7 slides axially and promote valve plate 8 and rotate around connecting axle 5, thus the depth of parallelism of adjustment valve plate and sealing surface.By nut 3, mechanism is locked after adjustment completes, fixing valve plate angle.State before Fig. 3 and Fig. 4 is respectively adjustment and after adjustment.
According to shaft coupling valve plate dip angle regulating device of the present utility model, during adjustment screw, sliding pin, rubber press can promote valve plate and rotate around connecting axle, thus the depth of parallelism of adjustment valve plate and sealing surface, after having adjusted, pass through nut check, after flap valve mounting and adjusting puts in place substantially, utilize this structure that valve plate is adjusted to the state parallel with sealing surface, make the consistent of sealing ring decrement everywhere, ensure sealing effectiveness.
More than describe preferred embodiment of the present utility model in detail.Should be appreciated that those of ordinary skill in the art just can make many modifications and variations according to design of the present utility model without the need to creative work.All technical staff in the art according to design of the present utility model on the basis of existing technology by the available technical scheme of logical analysis, reasoning, or a limited experiment, all should by the determined protection domain of claims.
Claims (5)
1. a valve plate dip angle regulating device, comprise connecting rod (1, 2), nut (3), screw (4), connecting axle (5), sliding pin (6), rubber press (7), valve plate (8), and sealing ring (9), described screw (4), sliding pin (6), and rubber press (7) is arranged in the pin-and-hole of described connecting rod (2), it is characterized in that, described screw (4) promotes described valve plate (8) by described sliding pin (6) and described rubber press (7) and rotates around described connecting axle (5), thus adjust the depth of parallelism of described valve plate (8) and sealing surface.
2. valve plate dip angle regulating device according to claim 1, is characterized in that, the two ends of described connecting axle (5) are arranged on described connecting rod (1,2) and go up and be fastened by bolts and link together on described valve plate (8).
3. valve plate dip angle regulating device according to claim 2, is characterized in that, described rubber press (7) is arranged in the endoporus of described sliding pin (6).
4. valve plate dip angle regulating device according to claim 3, is characterized in that, described sliding pin (6) is arranged in the pin-and-hole of described connecting rod (2), thus described sliding pin (6) can be slid axially.
5. valve plate dip angle regulating device according to claim 4, it is characterized in that, when regulating described screw (4), promote described valve plate (8) by described sliding pin (6) and described rubber press (7) to rotate, and utilize described nut (3) adjusting device to be locked, thus the angle of fixing described valve plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420530235.7U CN204183493U (en) | 2014-09-16 | 2014-09-16 | Valve plate dip angle regulating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420530235.7U CN204183493U (en) | 2014-09-16 | 2014-09-16 | Valve plate dip angle regulating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204183493U true CN204183493U (en) | 2015-03-04 |
Family
ID=52615524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420530235.7U Expired - Lifetime CN204183493U (en) | 2014-09-16 | 2014-09-16 | Valve plate dip angle regulating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204183493U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106466887A (en) * | 2015-08-20 | 2017-03-01 | 三星钻石工业株式会社 | Shearing device |
| CN108362242A (en) * | 2018-04-27 | 2018-08-03 | 广东鸿图科技股份有限公司 | A kind of three coordinate detecting devices and continuously it is repeatedly detected method |
| CN109357073A (en) * | 2018-12-16 | 2019-02-19 | 湖南玉丰真空科学技术有限公司 | A kind of vacuum chamber turning plate valve device |
-
2014
- 2014-09-16 CN CN201420530235.7U patent/CN204183493U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106466887A (en) * | 2015-08-20 | 2017-03-01 | 三星钻石工业株式会社 | Shearing device |
| CN106466887B (en) * | 2015-08-20 | 2020-05-26 | 三星钻石工业株式会社 | Cutting device |
| TWI695767B (en) * | 2015-08-20 | 2020-06-11 | 日商三星鑽石工業股份有限公司 | Breaking device |
| CN108362242A (en) * | 2018-04-27 | 2018-08-03 | 广东鸿图科技股份有限公司 | A kind of three coordinate detecting devices and continuously it is repeatedly detected method |
| CN108362242B (en) * | 2018-04-27 | 2024-04-05 | 广东鸿图科技股份有限公司 | Three-coordinate detection device and continuous repeated detection method |
| CN109357073A (en) * | 2018-12-16 | 2019-02-19 | 湖南玉丰真空科学技术有限公司 | A kind of vacuum chamber turning plate valve device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201228 Address after: No.1047 Tushan Road, Bengbu City, Anhui Province 233000 Patentee after: CHINA BUILDING MATERIALS BENGBU GLASS INDUSTRY DESIGN & RESEARCH INSTITUTE Co.,Ltd. Address before: 200061 27th floor, Zhongzhong building, 2000 Zhongshan North Road, Putuo District, Shanghai Patentee before: China Triumph International Engineering Co.,Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20150304 |