CN204142297U - Circulating fluid flow measurement device - Google Patents

Circulating fluid flow measurement device Download PDF

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Publication number
CN204142297U
CN204142297U CN201420590616.4U CN201420590616U CN204142297U CN 204142297 U CN204142297 U CN 204142297U CN 201420590616 U CN201420590616 U CN 201420590616U CN 204142297 U CN204142297 U CN 204142297U
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CN
China
Prior art keywords
beam splitter
feed liquor
fluid
reflection
light
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CN201420590616.4U
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Chinese (zh)
Inventor
王涛
张玉莹
陆耀东
孙岩
李鹏
张丽雯
王帅
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BEIJING INST OF ELECTRO-OPTICS
Beijing Inst of Opto Electronic Tech
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BEIJING INST OF ELECTRO-OPTICS
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Abstract

The utility model discloses a kind of circulating fluid flow measurement device, comprising: laser measuring device for measuring, load cooling device; Load cooling device, comprising: feed tube, feed liquor impact damper, feed liquor reflection camel, load, fluid impact damper, fluid reflection camel and drain pipe; Feed tube is connected with feed liquor impact damper; Feed liquor impact damper is connected with load by load inlet; Load is connected with fluid impact damper by load liquid outlet; Fluid impact damper is connected with drain pipe; Feed liquor reflection camel is arranged in feed liquor impact damper; Fluid reflection camel is arranged in fluid impact damper; Laser measuring device for measuring, for by feed liquor reflection camel and fluid reflection camel, determines the flow flowing through loaded liquid.The utility model, can be accurately measured the difference in height of liquid in feed liquor impact damper and fluid impact damper, thus determine the fluid flow flowing through load, improve measuring accuracy by laser measuring device for measuring, feed liquor reflection camel and fluid reflection camel.

Description

Circulating fluid flow measurement device
Technical field
The utility model relates to measuring technique, particularly relates to a kind of circulating fluid flow measurement device.
Background technology
Radiating circulating fluid technology is a kind of important cooling way, is widely used in the fields such as instrument and equipment such as superpower laser, laser testing equipment, litho machine, engine needing to eliminate thermal effect.The basic functional principle of radiating circulating fluid is that cryogenic liquid flows through load and taken away by the heat in load, thus cools load.
The temperature of load is not only relevant with the fluid temperature in feed tube, and also relevant with the flow of liquid in load, in load, fluid flow is larger, and the heat taken away by liquid is more, and the temperature of load is lower, and vice versa.In order to the temperature of accurate control load, just need accurately to measure the fluid flow flowing through load.In the prior art, flowmeter survey is usually adopted to flow through the fluid flow of load.
But due to the impact of flowmeter apparatus oneself factor, its measuring accuracy is limited, the fluid flow of load cannot be flowed through by Measurement accuracy.
Utility model content
The utility model provides a kind of circulating fluid flow measurement device, to overcome the technical matters that in prior art, measuring accuracy is not high.
The utility model provides a kind of circulating fluid flow measurement device, comprising: laser measuring device for measuring, load cooling device;
Described load cooling device, comprising: feed tube, feed liquor impact damper, feed liquor reflection camel, load, fluid impact damper, fluid reflection camel and drain pipe; Wherein,
Described feed tube is connected with described feed liquor impact damper;
Described feed liquor impact damper is connected with described load by load inlet;
Described load is connected with described fluid impact damper by load liquid outlet;
Described fluid impact damper is connected with described drain pipe;
Described feed liquor reflection camel is arranged in described feed liquor impact damper;
Described fluid reflection camel is arranged in described fluid impact damper;
Described laser measuring device for measuring, for by described feed liquor reflection camel and described fluid reflection camel, determines the flow flowing through described loaded liquid.
Further, described laser measuring device for measuring, specifically comprises: laser instrument, the first beam splitter, the second beam splitter, beam reflection unit, the 4th beam splitter, photo-detector and controller; Wherein,
Described first beam splitter, described second beam splitter, described beam reflection unit and the orthogonal setting of described 4th beam splitter;
The incidence point of described first beam splitter equals the distance of incidence point to the 4th incidence point of described second beam splitter to the distance of the incidence point of described beam reflection unit, and wherein, described 4th incidence point is the incidence point of described 4th beam splitter;
The incidence point of described first beam splitter equals the distance of incidence point to described 4th incidence point of described beam reflection unit to the distance of the incidence point of described second beam splitter;
Described first beam splitter, the first light beam for reflecting the injection of described laser instrument is radiated at described feed liquor reflection camel to make the first beam orthogonal after via described first beam splitter reflection, first light beam described in transmission arrives described second beam splitter to make the first light beam after transmission, and transmission is via the feed liquor reference light of described feed liquor reflection camel reflection;
Described second beam splitter, be radiated at described fluid reflection camel for the first light beam reflected via described first beam splitter transmission to make the first beam orthogonal via described second beam splitter reflection, and transmission is via the fluid reference light of described fluid reflection camel reflection;
Described beam reflection unit, for reflecting the feed liquor reference light via described first beam splitter transmission, arrives described 4th beam splitter to make the feed liquor reference light via described beam reflection unit reflection;
Described 4th beam splitter, for via feed liquor reference light described in described 4th incidence point transmission, reflects described fluid reference light via described 4th incidence point;
Described photo-detector, for receiving the interference light formed at described 4th incidence point by described feed liquor reference light and described fluid reference light, and for receiving the interference fringe of described interference light;
Described controller is connected with described photo-detector, for determining according to described interference fringe and default pipeline parameter the fluid flow flowing through described load.
Further, described beam reflection unit, comprising:
Beam splitter, or be all-trans light microscopic.
Further, described load cooling device, also comprises: feed liquor variable valve and fluid variable valve;
Described feed liquor variable valve is arranged on described feed tube, for regulating the fluid flow flowing into feed tube;
Described fluid variable valve is arranged on described drain pipe, for regulating the fluid flow flowing out drain pipe;
Described feed liquor variable valve and described fluid variable valve are connected with described controller respectively, with make described controller according to preset fluid flow and described load current liquid flow control described in feed liquor variable valve and described fluid variable valve.
Further, described laser measuring device for measuring, also comprises: the first optoisolator;
Described first optoisolator, being arranged in the light path between described laser instrument and described first beam splitter, injecting in described laser instrument for stoping light.
Further, described laser measuring device for measuring, also comprises: the second optoisolator;
Described second optoisolator, is arranged in the light path between described first beam splitter and described second beam splitter, arrives described first beam splitter for stoping light.
Further, described laser measuring device for measuring, also comprises: the first optical trap;
Described first optical trap, is arranged on the light path extended line that formed by described first beam splitter and described second beam splitter, for absorbing the light via described second beam splitter transmission.
Further, described laser measuring device for measuring, also comprises: the second optical trap;
Described second optical trap, is arranged on the light path extended line that formed by described second beam splitter and described 4th beam splitter, for absorbing the light via described 4th beam splitter transmission.
Further, described laser measuring device for measuring, also comprises: the 3rd optical trap;
Described 3rd optical trap, is arranged on the light path extended line that formed by described first beam splitter and described beam reflection unit, for absorbing the light via the transmission of described beam reflection unit.
Further, described laser measuring device for measuring, also comprises: optical path compensator;
Described optical path compensator, is arranged in the light path between described beam reflection unit and described 4th beam splitter, for increasing the light path of described feed liquor reference light.
Technique effect of the present utility model is: the difference in height that can be accurately measured liquid in feed liquor impact damper and fluid impact damper by laser measuring device for measuring, feed liquor reflection camel and fluid reflection camel, thus determine the fluid flow flowing through load, improve measuring accuracy.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model circulating fluid flow measurement device embodiment one;
Fig. 2 is the structural representation of the utility model circulating fluid flow measurement device embodiment two;
Fig. 3 is the structural representation of the utility model circulating fluid flow measurement device embodiment three;
Fig. 4 is the structural representation of the utility model circulating fluid flow measurement device embodiment four.
Embodiment
Fig. 1 is the structural representation of the utility model circulating fluid flow measurement device embodiment one.As shown in Figure 1, the device of the present embodiment can comprise: laser measuring device for measuring 1, load cooling device 2;
Described load cooling device 1, comprising: feed tube 201, feed liquor impact damper 202, feed liquor reflection camel 203, load 204, fluid impact damper 205, fluid reflection camel 206 and drain pipe 207; Wherein,
Described feed tube 201 is connected with described feed liquor impact damper 202;
Described feed liquor impact damper 202 is connected with described load 204 by load inlet;
Described load 204 is connected with described fluid impact damper 205 by load liquid outlet;
Described fluid impact damper 205 is connected with described drain pipe 207;
Described feed liquor reflection camel 203 is arranged in described feed liquor impact damper 202;
Described fluid reflection camel 206 is arranged in described fluid impact damper 205;
Described laser measuring device for measuring 1, for by described feed liquor reflection camel 203 and described fluid reflection camel 206, determines the flow flowing through described loaded liquid.
Particularly, load 204 is need cooled device, such as, and the high-power component such as generator, laser instrument.Liquid flows into feed liquor impact damper 202 by feed tube 201, flows through load 204, then flow through fluid impact damper 205 successively, drain pipe 207 flows out.The temperature of liquid is lower than the temperature of in running order load 204.When liquid stream overload 204, heat interchange can be carried out with load 204, thus the heat taking away load 204 is load 204 lowers the temperature.
Feed liquor reflection camel 203, fluid reflection camel 206 are set respectively in feed liquor impact damper 202 and fluid impact damper 205.The surface reflecting camel 206 liquid dorsad in feed liquor reflection camel 203 and fluid is coated with the reflectance coating being suitable for laser wavelength.When there being light beam irradiation at reflectance coating, reflectance coating can folded light beam.
According to fluid mechanics principle, when cooling load 204, flow through the flow of the liquid of load 204, can form liquid level difference in feed liquor impact damper 202 with fluid impact damper 206, the flow larger liquid level difference of liquid is larger, and the flow less liquid level difference of liquid is less.The size of current liquid flow can be determined by measuring liquid level extent.
The present embodiment can be accurately measured in feed liquor impact damper 202 and fluid impact damper 205 by laser measuring device for measuring 1 and form liquid level difference.Such as, utilize laser instrument respectively to feed liquor reflection camel 203, fluid reflection camel 206 normal incident light beam, and utilize light reflecting device that feed liquor reflected light and fluid reflected light are interfered, analyzing the interference fringe of interference light, can to accurately measure the liquid level formed in feed liquor impact damper 202 and fluid impact damper 205 poor, thus calculate the flow of the liquid flowing through load 204.
The present embodiment, by utilizing laser measuring device for measuring 1, feed liquor to reflect camel 203 and fluid reflection camel 206, accurately measuring the liquid level difference height formed in feed liquor impact damper 202 and fluid impact damper 205, thus calculating the flow of the liquid flowing through load 204.The measuring accuracy of usual laser measuring device for measuring is nanometer scale.Therefore, solve the impact due to flowmeter apparatus oneself factor in prior art, its measuring accuracy is limited, cannot flow through the technical matters of the fluid flow of load by Measurement accuracy.
The technical scheme of several specific embodiment to embodiment one is adopted to be explained in detail below.
Fig. 2 is the structural representation of the utility model circulating fluid flow measurement device embodiment two.As shown in Figure 2, on the basis of above-described embodiment, further, described laser measuring device for measuring 1, specifically comprises: laser instrument 101, first beam splitter 102, second beam splitter 103, beam reflection unit 104, the 4th beam splitter 105, photo-detector 106 and controller 107; Wherein,
Described first beam splitter 102, described second beam splitter 103, described beam reflection unit 104 and the orthogonal setting of described 4th beam splitter 105;
The incidence point of described first beam splitter 102 equals the distance of incidence point to the 4th incidence point of described second beam splitter 103 to the distance of the incidence point of described beam reflection unit 104, and wherein, described 4th incidence point is the incidence point of described 4th beam splitter 105;
The incidence point of described first beam splitter 102 equals the distance of incidence point to described 4th incidence point of described beam reflection unit 104 to the distance of the incidence point of described second beam splitter 103;
Described first beam splitter 102, the first light beam for reflecting the injection of described laser instrument 101 is radiated at described feed liquor reflection camel 203 to make the first beam orthogonal after via described first beam splitter 102 reflection, first light beam described in transmission arrives described second beam splitter 103 to make the first light beam after transmission, and the feed liquor reference light that transmission is reflected via described feed liquor reflection camel 203;
Described second beam splitter 103, described fluid reflection camel 206 is radiated to make the first beam orthogonal reflected via described second beam splitter 103 for the first light beam reflected via described first beam splitter 102 transmission, and the fluid reference light that transmission is reflected via described fluid reflection camel 206;
Described beam reflection unit 104, for reflecting the feed liquor reference light via described first beam splitter 102 transmission, arrives described 4th beam splitter 105 to make the feed liquor reference light via described beam reflection unit reflection 104;
Described 4th beam splitter 105, for via feed liquor reference light described in described 4th incidence point transmission, reflects described fluid reference light via described 4th incidence point;
Described photo-detector 106, for receiving the interference light formed at described 4th incidence point by described feed liquor reference light and described fluid reference light, and for receiving the interference fringe of described interference light;
Described controller 106 is electrically connected with described photo-detector 106, for analyzing described interference fringe, and determines according to analysis result and default pipeline parameter the fluid flow flowing through described load 204.
Particularly, the first light beam that laser instrument 101 penetrates reflects at the first beam splitter 102 place, the incident feed liquor reflection of the beam orthogonal after reflection camel 203, and reflects to form feed liquor reference light through feed liquor reflection camel 203.First light beam also can arrive the second beam splitter 103 after transmission occurs at the first beam splitter 102 place, the incident fluid reflection of the reflective vertical via the second beam splitter 103 camel 206, and reflects to form fluid reference light through feed liquor reflection camel 206.
Feed liquor reference light arrives the 4th incidence point of the 4th beam splitter 105 by the reflection of beam reflection unit 104.Fluid reference light is transmitted through the 4th incidence point also arriving the 4th beam splitter 105 after the second beam splitter 103.Feed liquor reference light is in the 4th incidence point transmission, and fluid reference light reflects at the 4th incidence point, and the feed liquor reference light after transmission interferes with the rear fluid reference light of reflection, forms interference light.
Photo-detector 106 receives the interference fringe of interference light.
Controller 107 is electrically connected with photo-detector 106, and photo-detector 106 sends to controller 107 after interference fringe is converted to a signal.Staff can in advance by the pipeline parameter typing controller 107 of load cooling device 2, and controller 107, according to the pipeline parameter prestored and the analysis result to interference fringe, calculates the current flow flowing through the liquid of load 204.
More specifically, beam reflection unit 104 can be beam splitter, can be the back side be coated with light absorping film beam splitter, can also be the light microscopic that is all-trans.
Fig. 3 is the structural representation of the utility model circulating fluid flow measurement device embodiment three.As shown in Figure 3, on the basis of above-described embodiment, further, described load cooling device 2, also comprises: feed liquor variable valve 208 and fluid variable valve 209;
Described feed liquor variable valve 208 is arranged on described feed tube, for regulating the fluid flow flowing into feed tube;
Described fluid variable valve 209 is arranged on described drain pipe, for regulating the fluid flow flowing out drain pipe;
Described feed liquor variable valve 208 and described fluid variable valve 209 are connected with described controller 107 respectively, with make described controller 107 according to preset fluid flow and described load current liquid flow control described in feed liquor variable valve 208 and described fluid variable valve 209.
Particularly, feed liquor variable valve 208 and fluid variable valve 209 are can the valve of regulates liquid uninterrupted.Such as, turn down feed liquor variable valve 208 and fluid variable valve 209, flow can be turned down; Drive large feed liquor variable valve 208 and fluid variable valve 209, flow can be tuned up.
Staff can in advance to the uninterrupted that typing in controller 107 is desirable, the fluid flow namely preset.When the current fluid flow flowing through load 204 is less than default fluid flow, controller 107 controls feed liquor variable valve 208 and fluid variable valve 209, makes both open large.When the current fluid flow flowing through load 204 is greater than default fluid flow, controller 107 controls feed liquor variable valve 208 and fluid variable valve 209, makes both turn down.Thus current fluid flow is reached default fluid flow.
Control feed liquor variable valve 208 and fluid variable valve 209 by controller 107, make the automatic adjustment that the device of the present embodiment can also realize fluid flow.
Fig. 4 is the structural representation of the utility model circulating fluid flow measurement device embodiment four.As shown in Figure 4, on the basis of above-described embodiment, further, described laser measuring device for measuring 1, also comprises: the first optoisolator 108, second optoisolator 109, first optical trap 110, second optical trap 112, the 3rd optical trap 111, optical path compensator 113.
Described first optoisolator 108, being arranged in the light path between described laser instrument and described first beam splitter 102, injecting in described laser instrument for stoping echo laser.
Particularly, optoisolator is the unidirectional optical device passed through of a kind of only permission light beam.Such as, feed liquor reflected light also can reflect at the first beam splitter 102 place, and form echo laser, the feed liquor reflected light after reflection will be injected in laser instrument 101, and what cause laser instrument 101 goes out light characteristic instability, can make laser instrument 101 quencher time serious.Therefore, the light path between laser instrument 101 and the first beam splitter 102 arranges the first optoisolator 108, and the echo laser after can effectively stoping reflection is injected in laser instrument 101.
Described second optoisolator 109, is arranged in the light path between described first beam splitter 102 and described second beam splitter 103, arrives described first beam splitter 102 for stoping echo laser.
Similarly, fluid reflected light can reflect at other optical element surface places in the second beam splitter 103, fluid catoptron and light path, and form echo laser, retroeflection to the first beam splitter 102 disturbs feed liquor reflected light.Light path between the first beam splitter 102 and the second beam splitter 103 arranges the second optoisolator 109 and effectively can reduce the interference of echo laser to feed liquor reflected light, further increasing the precision of measurement.
Described first optical trap 110, is arranged on the light path extended line that formed by described first beam splitter 102 and described second beam splitter 103, for absorbing the light via described second beam splitting 103 mirror transmission.
Particularly, optical trap is a kind of optical device for absorbing light beam.Laser measuring device for measuring 1 is usually provided with shell in practical operation, and due to enclosure material characteristic, Absorbable rod laser, minimizing reflection, scattered beam have an impact to measuring accuracy.The light path extended line that first beam splitter 102 and the second beam splitter 103 are formed arranges the first optical trap 110, can be used for absorbing the light beam via the second beam splitter 103 transmission, further increasing the precision of measurement.
Described second optical trap 112, is arranged on the light path extended line that formed by described second beam splitter 103 and described 4th beam splitter 105, for absorbing the light via described 4th beam splitter transmission.
Similarly, the light path extended line that the second beam splitter 103 and the 4th beam splitter 105 are formed arranges the second optical trap 112, can be used for absorbing the light beam via the 4th beam splitter 105 transmission, further increasing the precision of measurement.
Described 3rd optical trap 111, is arranged on the light path extended line that formed by described first beam splitter 102 and described beam reflection unit 104, for absorbing the light via the transmission of described beam reflection unit.
Similarly, when beam reflection unit 104 is the optical device of transmissive light beam, preferably the 3rd optical trap 111 is set on the first beam splitter 102 with the light path extended line of beam reflection unit 104, can be used for absorbing the light beam via beam reflection unit 104 transmission, further increasing the precision of measurement.
Described optical path compensator 113, is arranged in the light path between described beam reflection unit 104 and described 4th beam splitter 105, for increasing the light path of described feed liquor reference light.
Particularly, optical path compensator 113 is arranged in the light path between beam reflection unit 104 and the 4th beam splitter 105, can be used for the light path increasing feed liquor reference light, thus adjustment feed liquor reference light and fluid reference light optical path difference.The fringe-width being formed interference light by feed liquor reference light and fluid reference light is increased, and then makes measuring accuracy higher.
Last it is noted that above embodiment is only in order to illustrate the technical solution of the utility model, be not intended to limit; Although be described in detail the utility model with reference to previous embodiment, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein portion of techniques feature; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the spirit and scope of each embodiment technical scheme of the utility model.

Claims (10)

1. a circulating fluid flow measurement device, is characterized in that, comprising:
Laser measuring device for measuring, load cooling device;
Described load cooling device, comprising: feed tube, feed liquor impact damper, feed liquor reflection camel, load, fluid impact damper, fluid reflection camel and drain pipe; Wherein,
Described feed tube is connected with described feed liquor impact damper;
Described feed liquor impact damper is connected with described load by load inlet;
Described load is connected with described fluid impact damper by load liquid outlet;
Described fluid impact damper is connected with described drain pipe;
Described feed liquor reflection camel is arranged in described feed liquor impact damper;
Described fluid reflection camel is arranged in described fluid impact damper;
Described laser measuring device for measuring, for by described feed liquor reflection camel and described fluid reflection camel, determines the flow flowing through described loaded liquid.
2. device according to claim 1, is characterized in that, described laser measuring device for measuring, specifically comprises: laser instrument, the first beam splitter, the second beam splitter, beam reflection unit, the 4th beam splitter, photo-detector and controller; Wherein,
Described first beam splitter, described second beam splitter, described beam reflection unit and the orthogonal setting of described 4th beam splitter;
The incidence point of described first beam splitter equals the distance of incidence point to the 4th incidence point of described second beam splitter to the distance of the incidence point of described beam reflection unit, and wherein, described 4th incidence point is the incidence point of described 4th beam splitter;
The incidence point of described first beam splitter equals the distance of incidence point to described 4th incidence point of described beam reflection unit to the distance of the incidence point of described second beam splitter;
Described first beam splitter, the first light beam for reflecting the injection of described laser instrument is radiated at described feed liquor reflection camel to make the first beam orthogonal after via described first beam splitter reflection, first light beam described in transmission arrives described second beam splitter to make the first light beam after transmission, and transmission is via the feed liquor reference light of described feed liquor reflection camel reflection;
Described second beam splitter, be radiated at described fluid reflection camel for the first light beam reflected via described first beam splitter transmission to make the first beam orthogonal via described second beam splitter reflection, and transmission is via the fluid reference light of described fluid reflection camel reflection;
Described beam reflection unit, for reflecting the feed liquor reference light via described first beam splitter transmission, arrives described 4th beam splitter to make the feed liquor reference light via described beam reflection unit reflection;
Described 4th beam splitter, for via feed liquor reference light described in described 4th incidence point transmission, reflects described fluid reference light via described 4th incidence point;
Described photo-detector, for receiving the interference light formed at described 4th incidence point by described feed liquor reference light and described fluid reference light, and for receiving the interference fringe of described interference light;
Described controller is connected with described photo-detector, for determining according to described interference fringe and default pipeline parameter the fluid flow flowing through described load.
3. device according to claim 2, is characterized in that, described beam reflection unit, comprising: beam splitter, or be all-trans light microscopic.
4. the device according to any one of claims 1 to 3, is characterized in that, described load cooling device, also comprises: feed liquor variable valve and fluid variable valve;
Described feed liquor variable valve is arranged on described feed tube, for regulating the fluid flow flowing into feed tube;
Described fluid variable valve is arranged on described drain pipe, for regulating the fluid flow flowing out drain pipe;
Described feed liquor variable valve and described fluid variable valve are connected with described controller respectively, with make described controller according to preset fluid flow and described load current liquid flow control described in feed liquor variable valve and described fluid variable valve.
5. the device according to any one of claims 1 to 3, is characterized in that, described laser measuring device for measuring, also comprises: the first optoisolator;
Described first optoisolator, being arranged in the light path between described laser instrument and described first beam splitter, injecting in described laser instrument for stoping echo laser.
6. the device according to any one of claims 1 to 3, is characterized in that, described laser measuring device for measuring, also comprises: the second optoisolator;
Described second optoisolator, is arranged in the light path between described first beam splitter and described second beam splitter, arrives described first beam splitter for stoping echo laser.
7. the device according to any one of claims 1 to 3, is characterized in that, described laser measuring device for measuring, also comprises: the first optical trap;
Described first optical trap, is arranged on the light path extended line that formed by described first beam splitter and described second beam splitter, for absorbing the light via described second beam splitter transmission.
8. the device according to any one of claims 1 to 3, is characterized in that, described laser measuring device for measuring, also comprises: the second optical trap;
Described second optical trap, is arranged on the light path extended line that formed by described second beam splitter and described 4th beam splitter, for absorbing the light via described 4th beam splitter transmission.
9. the device according to any one of claims 1 to 3, is characterized in that, described laser measuring device for measuring, also comprises: the 3rd optical trap;
Described 3rd optical trap, is arranged on the light path extended line that formed by described first beam splitter and described beam reflection unit, for absorbing the light via the transmission of described beam reflection unit.
10. the device according to any one of claims 1 to 3, is characterized in that, described laser measuring device for measuring, also comprises: optical path compensator;
Described optical path compensator, is arranged in the light path between described beam reflection unit and described 4th beam splitter, for increasing the light path of described feed liquor reference light.
CN201420590616.4U 2014-10-13 2014-10-13 Circulating fluid flow measurement device Withdrawn - After Issue CN204142297U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104266691A (en) * 2014-10-13 2015-01-07 北京光电技术研究所 Flow rate measuring device for circulating liquid
CN112269413A (en) * 2020-11-10 2021-01-26 上海宇航系统工程研究所 Control method of portable laser heat dissipation device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104266691A (en) * 2014-10-13 2015-01-07 北京光电技术研究所 Flow rate measuring device for circulating liquid
CN112269413A (en) * 2020-11-10 2021-01-26 上海宇航系统工程研究所 Control method of portable laser heat dissipation device

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