CN204123399U

CN204123399U - A kind of semiconductor test mechanical arm

Info

Publication number: CN204123399U
Application number: CN201420570519.9U
Authority: CN
Inventors: 王浩; 程尧
Original assignee: JIANGSU ACETEC SEMICO-NDUCTOR Co Ltd
Current assignee: JIANGSU ACETEC SEMICO-NDUCTOR Co Ltd
Priority date: 2014-09-29
Filing date: 2014-09-29
Publication date: 2015-01-28
Anticipated expiration: 2024-09-29

Abstract

The utility model discloses a kind of semiconductor test mechanical arm, comprise robot body, balancing weight, synchronizing wheel, Timing Belt, described synchronizing wheel engages with described Timing Belt, and described robot body, described balancing weight are separately positioned on synchronizing wheel both sides and are connected by described Timing Belt.The utility model has the advantages that and replace steel wire rope by Timing Belt, make mechanical arm realize overload protection, be easy to maintenance, reduce unnecessary loss; Timing Belt engages with synchronizing wheel, and realize the Synchronous Transmission without slippage, obtain accurate gearratio, positioning precision is high, avoids the generation of sliding phenomenon, ensure that the accuracy of test result, and in whole test process, noise is lower.

Description

A kind of semiconductor test mechanical arm

Technical field

The utility model relates to semiconductor test field, specifically a kind of for the mechanical arm of integrated circuit with the automatic test of other electronics wafers.

Background technology

In the automatic test of integrated circuit with other electronics wafers, need to coordinate special test processor, with suitable temperature, suitable position is tested.Wafer test is huge and the Auto-Test System of costliness forms by one, and this system needs a measuring head and carries out being connected with the main body of device handler and realize accurate high speed test.In such test macro, in order to ensure accuracy, measuring head uses the electronic circuit of high-precision frequency control apparatus and data-signal, and quality is comparatively large, usually at 40 to 300 kilograms.In order to realize the movement of the measuring head so weighed, the general fixed pulley structure adopted as shown in Figure 1, the Z axis using steel wire rope connection balancing weight and mechanical arm to realize measuring head moves.

Steel wire rope tensile property is outstanding, and a usual root architecture is 1 × 19, and the steel wire rope of diameter 11mm can bear the weight of about 10.1 tons, much larger than general test head weight (weight of measuring head and mechanical arm is referred to as the weight of measuring head).In actual use, it is very large that measuring head adds the weight of mechanical arm own, if be subject to suddenly a very large shock loading, pulling force is increased suddenly, exceed the strength degree of other parts of mechanical arm, and do not reach the rupture pull force of steel wire rope, just likely cause the damage of the damage of mechanical arm inner body or whole mechanical arm, cause unnecessary economic loss.

The connected mode of steel wire rope and balancing weight and mechanical arm is comparatively single, generally add on its both sides the part that is threaded, steel wire rope is connected with other component, it production method is the mode adopting high-strength compression, the coupling part pulling force that can bear is much smaller than the intensity of this life of steel wire rope, equally when being subject to suddenly a very large shock loading, junction is caused to rupture.

Moreover balancing weight need be kept during test identical with test head weight, and such measuring head can at the move under influence of external force.But steel wire rope infinite place device, in measuring head motion process, can produce sliding phenomenon, cannot control the displacement of movement more accurately.Sliding phenomenon can cause the pressure that repeats of measuring head to be surveyed, and causes the tiny skew of a position, causes measuring producing error.

Utility model content

Utility model object: for the problems referred to above, the purpose of this utility model is to provide and a kind ofly realizes overload protection and the testing machine tool arm of registration.

Technical scheme: a kind of semiconductor test mechanical arm, comprise robot body, balancing weight, synchronizing wheel, Timing Belt, described synchronizing wheel engages with described Timing Belt, and described robot body, described balancing weight are separately positioned on synchronizing wheel both sides and are connected by described Timing Belt.

Further, the end of described Timing Belt is clamped by clamping plate, described clamping plate are separately fixed on described robot body, described balancing weight by bolt presses, and connected mode adopts the composite joint of pressing plate and screw thread, guarantee the standard of strength criterion higher than Timing Belt of link position.

Further, described clamping plate comprise light face clamping plate, flank of tooth clamping plate, and described flank of tooth clamping plate engage with described Timing Belt, increase the intensity of link position further.

Further, described Timing Belt is HTD8M Timing Belt.

Beneficial effect: compared with prior art, the utility model has the advantages that and replace steel wire rope by Timing Belt, makes mechanical arm realize overload protection, is easy to maintenance, reduces unnecessary loss; Timing Belt engages with synchronizing wheel, and realize the Synchronous Transmission without slippage, obtain accurate gearratio, positioning precision is high, avoids the generation of sliding phenomenon, ensure that the accuracy of test result, and in whole test process, noise is lower.

Accompanying drawing explanation

Fig. 1 is the structural representation of existing machinery arm;

Fig. 2 is structural representation of the present utility model;

Fig. 3 is the structural representation of synchronizing wheel;

Fig. 4 is Timing Belt and robot body, balancing weight connected mode schematic diagram.

Detailed description of the invention

Below in conjunction with the drawings and specific embodiments, illustrate the utility model further, these embodiments should be understood and be only not used in restriction scope of the present utility model for illustration of the utility model, after having read the utility model, the amendment of those skilled in the art to the various equivalent form of value of the present utility model has all fallen within the application's claims limited range.

As in Figure 2-4, a kind of semiconductor test mechanical arm, comprises robot body 1, balancing weight 2, synchronizing wheel 3, Timing Belt 4.In order to realize the overload protection of mechanical arm, Timing Belt 4 selects HTD8M Timing Belt.Two synchronizing wheels 3 are arranged on same axis fixing, and synchronizing wheel 3 is with tooth, engages with Timing Belt 4, and the motion of Timing Belt 4 can accurately be controlled.Robot body 1, balancing weight 2 are separately positioned on the both sides of synchronizing wheel 3, and the two ends of Timing Belt 4 connect robot body 1 respectively, balancing weight 2 forms a fixed pulley structure.Specifically in connected mode, select pressing plate and the composite joint mode be threaded.Often organize pressing plate to be made up of one piece of light face pressing plate, 5, one piece of flank of tooth pressing plate 6.When Timing Belt 4 is connected with robot body 1, the toothed one side of Timing Belt 4 engages with flank of tooth pressing plate 6, and the another side of Timing Belt 4 is pushed down by light face pressing plate 5, the end of common clamping Timing Belt 4.Pressing plate is fixed on robot body 1 by bolt presses again, and Timing Belt 4 is connected on balancing weight 2 by same mode.

During test, robot body 1 end connects measuring head, then the weight increasing balancing weight 2 makes synchronizing wheel 3 both sides reach balance.When needing, vertical external force is applied to robot body 1, make it move along vertical direction.Because Timing Belt 4 engages with synchronizing wheel 3, there is not sliding phenomenon in the motion of measuring head, can accurately control.On the other hand, HTD8M Timing Belt nominal load is 5768N, and breaking load is 24680N.HTD8M Timing Belt replaces original steel wire rope; specified total load is 11536N; fracture total load is about 49360N; the rupture pull force comparing steel wire rope reduces widely; protect mechanical arm injury-free when pulling force is excessive with the fracture of HTD8M Timing Belt; the effect of an overload protection can be played, avoid loss.

Claims

1. a semiconductor test mechanical arm, comprise robot body (1), balancing weight (2), it is characterized in that: also comprise synchronizing wheel (3), Timing Belt (4), described synchronizing wheel (3) engages with described Timing Belt (4), and described robot body (1), described balancing weight (2) are separately positioned on synchronizing wheel (3) both sides and are connected by described Timing Belt (4).

2. a kind of semiconductor test mechanical arm according to claim 1, it is characterized in that: the end of described Timing Belt (4) is clamped by clamping plate, described clamping plate are separately fixed on described robot body (1), described balancing weight (2) by bolt presses.

3. a kind of semiconductor test mechanical arm according to claim 2, it is characterized in that: described clamping plate comprise light face clamping plate (5), flank of tooth clamping plate (6), described flank of tooth clamping plate (6) are engaged with described Timing Belt (4).

4. according to a kind of semiconductor test mechanical arm in claim 1-3 described in any one, it is characterized in that: described Timing Belt (4) is HTD8M Timing Belt.