CN204115788U - Ultrasonic flow meter - Google Patents
Ultrasonic flow meter Download PDFInfo
- Publication number
- CN204115788U CN204115788U CN201420508413.6U CN201420508413U CN204115788U CN 204115788 U CN204115788 U CN 204115788U CN 201420508413 U CN201420508413 U CN 201420508413U CN 204115788 U CN204115788 U CN 204115788U
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- Prior art keywords
- piezoelectric element
- straight pipe
- flow meter
- thickness
- discoideus piezoelectric
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
- G01F1/662—Constructional details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
- G01F1/667—Arrangements of transducers for ultrasonic flowmeters; Circuits for operating ultrasonic flowmeters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/001—Means for regulating or setting the meter for a predetermined quantity
- G01F15/003—Means for regulating or setting the meter for a predetermined quantity using electromagnetic, electric or electronic means
Abstract
The utility model provides a kind of ultrasonic beam to high frequency efficiently and stably receives and dispatches and play the ultrasonic flow meter of the excellent estimating precision of the mensuration number of times based on frequent.For ultrasonic flow meter (100), the discoideus piezoelectric element (141) of pottery system is stacked and be located between the acoustic impedance matching layer (142) of glass epoxy resin and the vibration absorbing layer (143) of silicon rubber, the thickness (d1) of acoustic impedance matching layer (142) is set as thinner than the thickness (d2) of discoideus piezoelectric element (141), the thickness (d3) of vibration absorbing layer (143) is set as thicker than the thickness (d2) of discoideus piezoelectric element (141), thus acoustic impedance matching layer (142) successfully propagates towards the pipeline end sealing area (111a) of straight pipe (110) ultrasonic beam produced from discoideus piezoelectric element (141).
Description
Technical field
The utility model relates to the ultrasonic flow meter of following mistiming mode, this ultrasonic flow meter according to the ultrasonic beam produced from piezoelectric element from measuring time that the upstream side of conduit is transmitted to downstream and the mistiming of time being transmitted to upstream side from downstream, obtain the fluid velocity measured in conduit, this fluid velocity is multiplied by the sectional area of straight pipe thus the flow obtained at straight Flow In A Circular Tube, particularly relate to for being determined at semiconductor, the device of the grinding/cleaning of silicon wafer is carried out in the manufacturing process of liquid crystal, the various liquids used in liquid crystal mfg. apparatus etc., food production line, raw material in chemical production line, storage, the ultrasonic flow meter of the liquid such as the liquid processed in mixed processes.
Background technology
In the past, as the ultrasonic flow meter of mistiming mode, have following ultrasonic flow meter, namely, possess: the flow detector main body be made up of resin, it is formed with the circulation flow path of the measurement circulation flow path comprising the flow measuring fluid in a part for the circulation flow path for fluid circulation, and contains sensor unit; And a pair ultrasound piezoelectric element, they are configured to clamping and measure circulation flow path and mutually opposing (such as, patent documentation 1).
And the sensor unit of the flow detector main body in this supersonic flow amount detector is made up of such as lower component, the discoideus ultrasound piezoelectric element namely, by pottery formed; Be configured at the acoustic matching layer of the front surface of ultrasound piezoelectric element; Surround the side of ultrasound piezoelectric element and the housing at rear; The O type circle of rubber; And the wire that the fluororesin to be connected with ultrasound piezoelectric element covers.
Look-ahead technique document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2011-38862 publication (particularly claim 1, with reference to Fig. 1)
But, although the acoustic matching layer of the sensor unit in existing supersonic flow amount detector is configured at the front surface of ultrasound piezoelectric element, but there are the following problems: when ultrasonic beam is by acoustic matching layer, acoustic vibration is absorbed by acoustic matching layer thus signal intensity is died down, and the S/N of ultrasonic transmission/reception compares deterioration thus brings obstruction to flow measurement.
In addition, there are the following problems: because the bending two ends portion that fluid is measuring circulation flow path produces sinuous flow whirlpool, and bring obstruction to the propagation of ultrasonic beam because of the action of this sinuous flow whirlpool, so when signal intensity is more weak, the S/N of ultrasonic transmission/reception compares deterioration further thus makes estimating precision produce error.
Also there are the following problems: due in existing supersonic flow amount detector, the suitable time is needed to the acoustic vibration of ultrasound piezoelectric element decays, and the generation number of times of the time per unit of ultrasonic beam cannot be increased, so the transmitting-receiving of ultrasonic beam is not efficient, the raising of the estimating precision of the mensuration number of times based on frequent cannot be realized.
Utility model content
Therefore, the utility model is for solving above-mentioned prior art problem, and namely, the purpose of this utility model is provide a kind of ultrasonic beam to high frequency stably to receive and dispatch efficiently and play the ultrasonic flow meter of the excellent estimating precision of the mensuration number of times based on frequent.
The utility model of this technical scheme 1 is the ultrasonic flow meter of following mistiming mode, possesses: the straight pipe of fluororesin, and it is for determined fluid circulation; Inflow pipe, it is communicated with the inflow angle specified with one end of this straight pipe; Effuser, it is communicated with the outflow angle specified with the other end of above-mentioned straight pipe; A pair inflow side measures head and outflow side mensuration head, and they extend respectively in one end of above-mentioned straight pipe and the other end, and mutually opposing; and the discoideus piezoelectric element of pottery system, it is present in the inside that this inflow side measures head and outflow side mensuration head respectively, and the central shaft along above-mentioned straight pipe alternately carries out the transmitting-receiving of ultrasonic beam, the mistiming of the time being transmitted to downstream according to the ultrasonic beam produced by above-mentioned discoideus piezoelectric element from the upstream side of above-mentioned straight pipe and the time being transmitted to upstream side from downstream, obtain the fluid velocity in above-mentioned straight pipe, this fluid velocity is multiplied by the sectional area of straight pipe thus the flow obtained at straight Flow In A Circular Tube, the feature of above-mentioned ultrasonic flow meter is, the discoideus piezoelectric element of above-mentioned pottery system, be configured in the mode of the orthogonality of center shaft relative to above-mentioned straight pipe, and it is stacked and be located between the acoustic impedance matching layer in the face of the glass epoxy resin of the pipeline end sealing area formed respectively in one end of above-mentioned straight pipe and the other end and the vibration absorbing layer of the silicon rubber in the face of above-mentioned discoideus piezoelectric element, the thickness of above-mentioned acoustic impedance matching layer is set to thinner than the thickness of above-mentioned discoideus piezoelectric element, the thickness of above-mentioned vibration absorbing layer is set to thicker than the thickness of above-mentioned discoideus piezoelectric element.
The utility model of this technical scheme 2 is except the structure of the ultrasonic flow meter by recording except the scheme of possessing skills 1, the thickness of the pipeline end sealing area formed at above-mentioned straight pipe is set to thicker than the thickness of above-mentioned discoideus piezoelectric element, solves above-mentioned problem.
The utility model of this technical scheme 3 is except the structure of the ultrasonic flow meter by recording except the scheme of possessing skills 2, make acoustic impedance matching layer relative to the pipeline end sealing area of above-mentioned straight pipe be close to that the glycerin layer be integrated is arranged at above-mentioned straight pipe between pipeline end sealing area and acoustic impedance matching layer, solve above-mentioned problem.
The utility model of this technical scheme 4 is that except the structure of the ultrasonic flow meter by recording except the scheme of possessing skills 3, the bore of above-mentioned straight pipe and the diameter of discoideus piezoelectric element are set to roughly the same, solves above-mentioned problem.
The utility model of this technical scheme 5 is except the structure of the ultrasonic flow meter by recording except the scheme of possessing skills 4, keep the cylindric holding member of the periphery of above-mentioned discoideus piezoelectric element to possess being arranged at above-mentioned inflow side to measure head and outflow side measures the sound blank part allowing the acoustic vibration of the central shaft along above-mentioned discoideus piezoelectric element of discoideus piezoelectric element in head, solve above-mentioned problem.
The utility model of this technical scheme 6 is except the structure of the ultrasonic flow meter by recording except the scheme of possessing skills 5, by towards above-mentioned discoideus piezoelectric element elastic force press cylindric holding member cover measured in measuring head and outflow side in above-mentioned inflow side the open end that capitiform becomes by spinning, solve above-mentioned problem.
The utility model of this technical scheme 7 is except the structure of the ultrasonic flow meter by recording except the scheme of possessing skills 6, above-mentioned inflow pipe and effuser are configured with " コ " shape from equidirectional in one end of above-mentioned straight pipe and the other end, and with above-mentioned straight circular pipe communicated, solve above-mentioned problem.
The utility model of this technical scheme 8 is except the structure of the ultrasonic flow meter by recording except the scheme of possessing skills 6, above-mentioned inflow pipe and effuser are configured to mutually different from the other end in one end of above-mentioned straight pipe, and with above-mentioned straight circular pipe communicated, solve above-mentioned problem.
The utility model of this technical scheme 9 is except the structure of the ultrasonic flow meter by recording except the scheme of possessing skills 7 or technical scheme 8, when above-mentioned discoideus piezoelectric element is formed as thickness is 1mm, diameter is 10mm and be 2MHz by the frequency setting of above-mentioned ultrasonic beam, the thickness of above-mentioned acoustic impedance matching layer is set to 0.5mm, and the thickness of above-mentioned vibration absorbing layer is set to 4mm, solve above-mentioned problem.
[effect of utility model]
Ultrasonic flow meter of the present utility model is by possessing the straight pipe of the fluororesin for determined fluid circulation, the inflow pipe be communicated with the inflow angle specified with one end of this straight pipe, the effuser be communicated with the outflow angle specified with the other end of straight pipe, extend respectively in one end of straight pipe and the other end and a pair mutually opposing inflow side mensuration head and outflow side mensuration head, and be present in above-mentioned inflow side respectively and measure head and outflow side and measure the inside of head and alternately carry out the discoideus piezoelectric element of the pottery of the transmitting-receiving of ultrasonic beam along the central shaft of straight pipe, thus can not only according to the ultrasonic beam produced from discoideus piezoelectric element from the time that the upstream side of straight pipe is transmitted to downstream and the mistiming of time being transmitted to upstream side from downstream, obtain the fluid velocity in straight pipe, and on this fluid velocity, be multiplied by the sectional area of straight pipe thus the flow obtained at straight Flow In A Circular Tube, and following peculiar effect can be played.
Namely, according to the ultrasonic flow meter of the utility model of this technical scheme 1, be configured in the mode of the orthogonality of center shaft relative to straight pipe by the discoideus piezoelectric element of pottery, and it is stacked and be located between the acoustic impedance matching layer in the face of the glass epoxy resin of the pipeline end sealing area formed respectively in one end of straight pipe and the other end and the vibration absorbing layer of the silicon rubber in the face of discoideus piezoelectric element, thus acoustic impedance matching layer periodically relaxes the sudden turn of events of the acoustic impedance easily produced between discoideus piezoelectric element and the pipeline end sealing area of straight pipe, therefore acoustic impedance matching layer can successfully propagate towards the pipeline end sealing area of straight pipe the ultrasonic beam produced from discoideus piezoelectric element, and due to vibration absorbing layer the acoustic vibration of discoideus piezoelectric element decayed in early days and absorb, so head can be measured in inflow side and outflow side measures the mutual of head, increase the generation number of times of the time per unit of ultrasonic beam significantly, consequently, can to ultrasonic beam efficiently and stably receive and dispatch, and the precision that can improve based on measuring the mensuration mean value that number of times increases.
And, be set to thinner than the thickness of discoideus piezoelectric element by the thickness of acoustic impedance matching layer, thus make the diffuse reflection of the pipeline end sealing area at the acoustic impedance straight pipe different from discoideus piezoelectric element tail off and make waveform stabilization, therefore, it is possible to make the transmitting-receiving stabilization of ultrasonic beam.On the other hand, when the thickness of the discoideus piezoelectric element of the Thickness Ratio of acoustic impedance matching layer is thick, due to when ultrasonic beam is by acoustic impedance matching layer, acoustic vibration is absorbed thus signal intensity is died down, so the S/N of ultrasonic transmission/reception compares significantly deterioration thus makes estimating precision worsen.
In addition, be set to thicker than the thickness of discoideus piezoelectric element by the thickness of vibration absorbing layer, thus acoustic vibration can carry out convergence in early days to send ensuing ultrasound wave, therefore the mensuration number of times along with the generation number of times of the time per unit of ultrasonic beam can increase significantly, and can improve response significantly and measure the precision of mean value.On the other hand, when the thickness of the discoideus piezoelectric element of the Thickness Ratio of vibration absorbing layer is thin, because acoustic vibration does not restrain in early days, thus ensuing ultrasound wave cannot be sent, so tail off along with the mensuration number of times of the generation number of times of the time per unit of ultrasonic beam, thus make response and measure the deteriorated accuracy of mean value.
According to the ultrasonic flow meter of the utility model of this technical scheme 2, the effect that the utility model that can not only play technical scheme 1 plays, and be set to thicker than the thickness of discoideus piezoelectric element by the thickness of the pipeline end sealing area formed at straight pipe, thus suppress the model deformation of passing in time of the pipeline end sealing area be pressed with constant pressing force from discoideus piezoelectric element, and make discoideus piezoelectric element relative configuration relation be each other maintained chronically on center shaft with central axis, and discoideus piezoelectric element is configured in the mode faced by parallel to each other each other, and suppress the chemical substance of the determined fluid easily produced because of the characteristic of fluororesin to the infiltration in the fluororesin of pipeline end sealing area, therefore, it is possible to successfully guarantee the propagation of the ultrasonic beam in pipeline end sealing area, and estimating precision can be maintained chronically.On the other hand, when the thickness of the discoideus piezoelectric element of Thickness Ratio of the pipeline end sealing area that straight pipe is formed is thin, the shape passed the in time distortion of the pipeline end sealing area that easy generation is pressed from discoideus piezoelectric element with constant pressing force, and when measuring for a long time, the chemical substance of determined fluid infiltrates in the fluororesin of pipeline end sealing area because of the characteristic of fluororesin, therefore bring obstacle to the propagation of the ultrasonic beam in pipeline end sealing area, thus estimating precision is worsened.
According to the ultrasonic flow meter of the utility model of this technical scheme 3, the effect that the utility model that can not only play technical scheme 2 plays, and be arranged between the pipeline end sealing area of acoustic impedance matching layer and straight pipe by making acoustic impedance matching layer be close to relative to the pipeline end sealing area of straight pipe the glycerin layer be integrated, thus eliminate the mutual gap easily produced because of pipeline end sealing area and the acoustic impedance matching layer surfaceness each other of straight pipe, therefore, it is possible to make the raising of the degree of being close to of both sides and make the transmitting-receiving of ultrasonic beam raise the efficiency.
According to the ultrasonic flow meter of the utility model of this technical scheme 4, the effect that the utility model that can not only play technical scheme 3 plays, and be set to roughly the same by the bore of straight pipe and the diameter of discoideus piezoelectric element, thus the ultrasonic beam that produces from discoideus piezoelectric element can not be made, diffuse reflection in straight pipe and amplitude reserving fully, and then alternately carry out the transmitting-receiving of ultrasonic beam, therefore, it is possible to measure the mutual of head at inflow side mensuration head and outflow side, with good sensitivity, ultrasonic beam is received and dispatched.
According to the ultrasonic flow meter of the utility model of this technical scheme 5, the effect that the utility model that can not only play technical scheme 4 plays, and be arranged in inflow side mensuration head and outflow side mensuration head by the cylindric holding member of the periphery keeping discoideus piezoelectric element, thus bring the mode of obstruction can not to the vibration of discoideus piezoelectric element, relative to acoustic impedance matching layer reliably setting circle plate piezoelectric element, therefore, it is possible to carry out stable flow measurement chronically, and as flowmeter, excellent permanance can be played.
And, sound blank part is possessed by cylindric holding member, thus allow the acoustic vibration of discoideus piezoelectric element and amplification is carried out to it, therefore, it is possible to measure the mutual of head at inflow side mensuration head and outflow side, with good sensitivity, ultrasonic beam is sent.
According to the ultrasonic flow meter of the utility model of this technical scheme 6, the effect that the utility model that can not only play technical scheme 5 plays, and measured in measuring head and outflow side in inflow side the open end that capitiform becomes by spinning by cover, thus press towards discoideus piezoelectric element elastic force and reliably keep cylindric holding member, and absorb according to spinning degree elastic force the internal stress easily produced at discoideus piezoelectric element, therefore, it is possible to carry out stable flow measurement chronically, and as flowmeter, excellent permanance can be played.
According to the ultrasonic flow meter of the utility model of this technical scheme 7, the effect that the utility model that can not only play technical scheme 6 plays, and be configured from equidirectional with " コ " shape in one end of straight pipe and the other end by inflow pipe and effuser, thus the inflow pipe in metering work region and effuser are minimized relative to the installing space of straight pipe, therefore can also easily avoid with other peripheral equipments interference is set, and excellent operability can be played.
According to the ultrasonic flow meter of the utility model of this technical scheme 8, the effect that the utility model that can not only play technical scheme 6 plays, and be configured to different from each other by inflow pipe and effuser in one end of straight pipe and the other end, even if thus be in any set-up mode in metering work region, can both easily either party in inflow pipe and effuser be configured to upward, thus make the bubble of the determined fluid be easily stranded in straight pipe, either party easily from one end and the other end of straight pipe is discharged, therefore, it is possible to good sensitivity, to measure the ultrasonic beam that head and outflow side measure the bubble obstacle of the mutual generation of head in inflow side receive and dispatch based on easy.
According to the ultrasonic flow meter of the utility model of this technical scheme 9, outside the effect that the utility model that can not only play technical scheme 7 or technical scheme 8 plays, and by being 1mm discoideus piezoelectric element being formed as thickness, diameter be 10mm and be 2MHz by the frequency setting of ultrasonic beam when, the thickness of acoustic impedance matching layer is set as 0.5mm, and the thickness of vibration absorbing layer is set as 4mm, thus make acoustic impedance matching layer suppress the impact of the larger difference of the acoustic impedance between discoideus piezoelectric element and pipeline end sealing area, thus make stable wave travel, therefore, it is possible to send ultrasonic beam with good sensitivity.On the other hand, if the Thickness Ratio 0.5mm of acoustic impedance matching layer is thin, then the effect of acoustic impedance matching layer dies down, and the impact of the larger difference of the acoustic impedance between discoideus piezoelectric element and pipeline end sealing area remains, and can not propagate stable waveform, on the other hand, if the thickness of acoustic impedance matching layer is more than 0.5mm, then, when ultrasonic beam is by acoustic impedance matching layer, acoustic vibration is absorbed by acoustic impedance matching layer, signal intensity dies down, and the S/N of ultrasonic transmission/reception compares deterioration thus estimating precision is worsened.
Accompanying drawing explanation
Fig. 1 is the front section view of the overview of the ultrasonic flow meter represented as the first embodiment of the present utility model.
Fig. 2 is the major part enlarged drawing of the inflow side of the ultrasonic flow meter represented by the Reference numeral 2 of Fig. 1.
The figure of hyperacoustic waveform that Fig. 3 (A), (B) receive when being and representing the magnitude relationship of the thickness and the thickness of discoideus piezoelectric element that change acoustic impedance matching layer to compare.
The figure of hyperacoustic waveform that Fig. 4 (A), (B) receive when being and representing the magnitude relationship of the thickness and the thickness of discoideus piezoelectric element that change vibration absorbing layer to compare.
Fig. 5 is the front section view of the overview of the ultrasonic flow meter represented as the second embodiment of the present utility model.
Fig. 6 is the front section view of the overview of the ultrasonic flow meter represented as the 3rd embodiment of the present utility model.
Fig. 7 is the front section view of the overview of the ultrasonic flow meter represented as the 4th embodiment of the present utility model.
The explanation of Reference numeral:
100,200,300,400 ... ultrasonic flow meter; 110,210,310,410 ... straight pipe; 111,211,311,411 ... one end; 111a ... pipeline end sealing area; 112,212,312,412 ... the other end; 120,220,320,420 ... inflow pipe; 130,230,330,430 ... effuser; 140,240,340,440 ... inflow side measures head; 141 ... discoideus piezoelectric element; 141a ... periphery; 142 ... acoustic impedance matching layer; 143 ... vibration absorbing layer; 144 ... glycerin layer; 145 ... open end; 146 ... cylindric holding member; 147 ... substrate; 148 ... O type circle; 149 ... cover; 150,250,350,450 ... outflow side measures head; C ... central shaft; D1 ... the thickness of acoustic impedance matching layer; D2 ... the thickness of discoideus piezoelectric element; D3 ... the thickness of vibration absorbing layer; D4 ... the thickness of pipeline end sealing area; L ... wire; R1 ... the bore of straight pipe; R2 ... the diameter of discoideus piezoelectric element; S ... sound blank part.
Embodiment
Ultrasonic flow meter of the present utility model is following ultrasonic flow meter, its concrete mode is any, that is, above-mentioned ultrasonic flow meter is the ultrasonic flow meter of following mistiming mode, this ultrasonic flow meter possesses: the straight pipe of fluororesin, and it is for determined fluid circulation, inflow pipe, it is communicated with the inflow angle specified with one end of this straight pipe, effuser, it is communicated with the outflow angle specified with the other end of straight pipe, a pair inflow side measures head and outflow side measures head, and they extend respectively in one end of straight pipe and the other end and mutually opposing, and the discoideus piezoelectric element of pottery system, it is present in the inside that above-mentioned inflow side measures head and outflow side mensuration head respectively, and along the central shaft of above-mentioned straight pipe, alternately carry out the transmitting-receiving of ultrasonic beam, ultrasonic flow meter and according to the ultrasonic beam produced from discoideus piezoelectric element from the time that the upstream side of straight pipe is transmitted to downstream and the mistiming of time being transmitted to upstream side from downstream, obtain the fluid velocity in straight pipe, this fluid velocity is multiplied by the sectional area of straight pipe thus the flow obtained at straight Flow In A Circular Tube, in above-mentioned ultrasonic flow meter, the discoideus piezoelectric element of pottery system configures in the mode of the orthogonality of center shaft relative to straight pipe, and it is stacked and be located between the acoustic impedance matching layer in the face of the glass epoxy resin of the pipeline end sealing area formed respectively in one end of straight pipe and the other end and the vibration absorbing layer of the silicon rubber in the face of above-mentioned discoideus piezoelectric element, the thickness of acoustic impedance matching layer is set as thinner than the thickness of discoideus piezoelectric element, the thickness of vibration absorbing layer is set as thicker than the thickness of discoideus piezoelectric element, stably the ultrasonic beam of high frequency is received and dispatched efficiently, thus the excellent estimating precision played based on the mensuration number of times of frequent.
Namely, for the straight pipe in ultrasonic flow meter of the present utility model, the concrete mode of communicating of inflow pipe and effuser, as long as one end and the other end that can be arranged on straight pipe extend and the mode of communicating of a pair mutually opposing inflow side mensuration head and outflow side mensuration head respectively, any mode of communicating, such as the inflow angle of the regulation of the inflow pipe be communicated with one end of straight pipe, the outflow angle of the regulation of the effuser be communicated with the other end of straight pipe, as long as do not produce excessive sinuous flow whirlpool in one end of straight pipe and the other end or produce circulation obstacle, with 30 °, 45 °, 90 ° are waited any angle be communicated with, in addition, for inflow pipe and effuser relative to straight pipe configuration layout too, inflow pipe with " コ " shape configures from equidirectional from effuser in one end of straight pipe and the other end or configures in the mutually different mode that " Z " shape is such.
For the concrete material of straight pipe, inflow pipe and effuser that ultrasonic flow meter of the present utility model uses, as long as the fluorine-type resin of resistance to chemical reagents, thermotolerance, permanance, the transparency, good electric performance, particularly when using PFA (tetrafluoroethene perfluoroalkyl vinyl ether co-polymer), because not only directly the mouldability of pipe is excellent, and the velocity of sound in PFA postpones than the velocity of sound of determined fluid, therefore, it is possible to avoid ultrasonic beam to be passed to the pipelines such as straight pipe and become the situation of noise source, therefore preferably.
For the concrete material of the acoustic impedance matching layer that ultrasonic flow meter of the present utility model uses, as long as the sudden turn of events of the acoustic impedance easily produced between discoideus piezoelectric element and the pipeline end sealing area of straight pipe periodically can be relaxed thus the material of successfully propagate ultrasound waves bundle, such as being more preferably the mode of the density of the intermediate degree becoming discoideus piezoelectric element and straight pipe density each other, being mixed into less bubble and glass epoxy resin etc. that density is adjusted when making epoxy resin immerse glass fabric.
In addition, as the determined fluid measured by ultrasonic flow meter of the present utility model, such as, be the liquid such as various liquids, food production line, raw material in chemical production line, storage, the liquid that processes in mixed processes used in the device of the grinding/cleaning carrying out silicon wafer in the manufacturing process of semiconductor, liquid crystal, liquid crystal mfg. apparatus.
[embodiment 1]
Below, based on Fig. 1 ~ Fig. 4, the ultrasonic flow meter 100 as the first embodiment of the present utility model is described.
Here, Fig. 1 is the front section view of the overview of the ultrasonic flow meter 100 represented as the first embodiment, Fig. 2 is the major part enlarged drawing of the inflow side of the ultrasonic flow meter 100 represented by the Reference numeral 2 of Fig. 1, Fig. 3 (A) is the figure of hyperacoustic waveform received by discoideus piezoelectric element 141 when representing that the thickness d 1 of acoustic impedance matching layer 142 is thinner than the thickness d 2 of discoideus piezoelectric element 141, Fig. 3 (B) is the figure of hyperacoustic waveform received by discoideus piezoelectric element 141 when representing that the thickness d 1 of acoustic impedance matching layer 142 is thicker than the thickness d 2 of discoideus piezoelectric element 141, Fig. 4 (A) is the figure of hyperacoustic waveform received by discoideus piezoelectric element 141 when representing that the thickness d 3 of vibration absorbing layer 143 is thicker than the thickness d 2 of discoideus piezoelectric element 141, Fig. 4 (B) is the figure of hyperacoustic waveform received by discoideus piezoelectric element 141 when representing that the thickness d 3 of vibration absorbing layer 143 is thinner than the thickness d 2 of discoideus piezoelectric element 141.
As shown in Figure 1, the straight pipe 110 possessing the fluororesin be made up of PFA as the ultrasonic flow meter 100 of the first embodiment of the present utility model, the inflow pipe 120 of fluororesin be made up of PFA, the effuser 130 be made up of PFA, a pair inflow side measure 140 and outflow side measure 150 and be also referred to as the discoideus piezoelectric element 141 of pottery of piezoelectric element.
Wherein, straight pipe 110 is set to the liquid communication of the example being provided as determined fluid.
In addition, inflow pipe 120 arranges as to be communicated with the inflow angle specified with one end 111 of straight pipe 110.
Similarly, effuser 130 arranges as to be communicated with the outflow angle specified with the other end 112 of straight pipe 110.
In the present embodiment, inflow pipe 120 is communicated with 90 degree with one end 111 of straight pipe 110, effuser 130 also from inflow pipe 120 phase the same side, be communicated with 90 degree with the other end 112 of straight pipe 110, straight pipe 110, inflow pipe 120 and effuser 130 are configured to " コ " shape.
In addition, straight pipe 110, inflow pipe 120 and effuser 130 are one-body molded by fluororesin.
A pair inflow side measure 140 and outflow side measure 150 and arrange as to extend respectively in one end 111 of straight pipe 110 and the other end 112 and mutually opposing.
In addition, inflow side measure 140 and outflow side measure 150 also one-body molded with straight pipe 110, inflow pipe 120 and effuser 130, and to be made up of the PFA that mouldability is excellent.
Discoideus piezoelectric element 141 be set to be present in respectively inflow side measure 140 and outflow side measure 150 inside, and along the central shaft C of straight pipe 110, alternately carry out the transmitting-receiving of ultrasonic beam.
And, ultrasonic flow meter 100 is configured to, by with inflow side measure 140 and outflow side measure the operational parts such as a 150 not shown transducer be electrically connected, the mistiming of the time being transmitted to downstream according to the ultrasonic beam produced from discoideus piezoelectric element 141 from the upstream side of straight pipe 110 and the time being transmitted to upstream side from downstream, obtain the liquid velocity in straight pipe 110, and on this liquid velocity, be multiplied by the sectional area of straight pipe 110, thus obtain the flow of the determined liquid of flowing in straight pipe 110.
In the present embodiment, due to inflow side measure 140 structure and outflow side measure 150 structure identical, so use Fig. 2 to be described the structure that inflow side measures 140, omit the detailed description that outflow side measures the structure of 150.
As shown in Figure 2, the inside measuring 140 in inflow side is provided with the O type circle 148 of the discoideus piezoelectric element 141 of pottery system, the acoustic impedance matching layer 142 of glass epoxy resin, the vibration absorbing layer 143 of silicon rubber, glycerin layer 144, the cylindric holding member 146 of fluororesin, substrate 147 and rubber, and is installed with cover 149 being formed at the open end 145 that inflow side measures 140.
Discoideus piezoelectric element 141 is configured in the mode orthogonal relative to the central shaft C of straight pipe 110, and as the discoideus piezoelectric element 141 of transmitter side, by the electric signal (voltage) sent here via wire L from substrate 147, with flexural resonance frequency vibration, ultrasonic beam is sent.On the other hand, be configured to as the discoideus piezoelectric element 141 of receiver side, receive the ultrasonic beam sent here from the discoideus piezoelectric element of transmitter side thus vibrate, and via wire L, electric signal (voltage) being sent to substrate 147.
The pipeline end sealing area 111a of acoustic impedance matching layer 142 in the face of being formed in one end 111 of straight pipe 110, and be equipped between pipeline end sealing area 111a and discoideus piezoelectric element 141.
Between the acoustic impedance that the acoustic impedance of acoustic impedance matching layer 142 is set in pipeline end sealing area 111a and the acoustic impedance of discoideus piezoelectric element 141.
In a word, acoustic impedance matching layer 142 makes the ultrasonic beam sent from discoideus piezoelectric element 141 well through pipeline end sealing area 111a, in the mode of the intermediate density of the density of the density and pipeline end sealing area 111a that become discoideus piezoelectric element 141, make minute bubbles be mixed into glass thus carried out the thinner layer of density adjustment, and for relaxing the sudden turn of events of the acoustic impedance between discoideus piezoelectric element 141 and pipeline end sealing area 111a.
Vibration absorbing layer 143 is equipped on the opposition side of acoustic impedance matching layer 142 side of discoideus piezoelectric element 141.Vibration absorbing layer 143 has viscoelasticity, and is set to for stoping vibration in early days.In addition, vibration absorbing layer 143 also has the discoideus piezoelectric element 141 of covering thus prevents the effect of discoideus piezoelectric element 141 deterioration caused by air, moisture.
Glycerin layer 144 is formed by the glycerine be applied between pipeline end sealing area 111a and acoustic impedance matching layer 142.
Cylindric holding member 146 keeps substrate 147 in inside, and front end abuts with the periphery 141a of discoideus piezoelectric element 141.
O type circle 148 is equipped between cylindric holding member 146 and cover 149.O type circle 148 is for the padded coaming by remaining prescribed level to the pressing force of discoideus piezoelectric element 141.
In order to Continued depression O type circle 148, cover 149 has thread structure.
Be configured to by adjusting pressing force relative to carrying out spinning at an inflow side mensuration 140 open end 145 pairs of cover 149 formed.
In the present embodiment, as described above, pottery system discoideus piezoelectric element 141 configure in the mode orthogonal relative to the central shaft C of straight pipe 110, and stacked and be located in the face of one end 111 of straight pipe 110 formed pipeline end sealing area 111a glass epoxy resin acoustic impedance matching layer 142 and in the face of discoideus piezoelectric element 141 silicon rubber vibration absorbing layer 143 between.
Thus, acoustic impedance matching layer 142 periodically relaxes the sudden turn of events of the acoustic impedance easily produced between discoideus piezoelectric element 141 and the pipeline end sealing area 111a of straight pipe 110.
In addition, vibration absorbing layer 143 makes the acoustic vibration of discoideus piezoelectric element 141 decay and be absorbed in early days.
Further, the thickness d 1 (that is, thickness is 0.5mm) of acoustic impedance matching layer 142 is set as thinner than the thickness d 2 (that is, thickness is 1mm) of discoideus piezoelectric element 141.
Thus, as shown in Fig. 3 (A), tail off in the diffuse reflection of the pipeline end sealing area 111a of the acoustic impedance straight pipe 110 different from discoideus piezoelectric element 141, and waveform when discoideus piezoelectric element 141 receives is stablized with perfect spindle.
In a word, due to signal intensity can be made to be sufficient intensity, the S/N ratio making ultrasonic transmission/reception is enough height, and estimating precision can be made to improve, so when for there being sinuous flow whirlpool to produce ultrasonic flow meter 100 of type on the stream of determined liquid, especially effectively.
Here, time representation when the discoideus piezoelectric element 141 of transmitter side be have sent ultrasonic beam by the transverse axis of Fig. 3 (A) is 0, and the longitudinal axis represents and have received ultrasonic beam by the discoideus piezoelectric element 141 of receiver side and the size of the electric signal (voltage) produced.
In addition, the waveform of " perfect spindle " refers to the waveform as shown in Fig. 3 (A), the amplitude of vibration increases monotonously thus to peaking, then decays monotonously, and represent that the line (not shown) of the change of amplitude is fusiform waveform.
The change of preferred amplitude increases as quickly as possible, and decays as quickly as possible.
This is because by making the discoideus piezoelectric element 141 of receiver side receive ultrasonic beam time ripple be " perfect spindle ", thus can peak value based on waveform time time, voltage be time etc. at the center of regulation above time period, measure the time to the moment that the discoideus piezoelectric element 141 of receiver side receives ultrasonic beam from the discoideus piezoelectric element 141 of transmitter side sends ultrasonic beam accurately, consequently, the precision of flow measurement can be improved.
On the other hand, as a reference, when the thickness d 1 of acoustic impedance matching layer 142 is thicker than the thickness d 2 of discoideus piezoelectric element 141, as shown in Fig. 3 (B), when ultrasonic beam is by acoustic impedance matching layer 142, acoustic vibration is the overwhelming majority absorbed, thus signal intensity dies down, the amplitude of vibration does not carry out increasing/decaying monotonously, and becomes and do not know that peak value is in the waveform of the confusion of where completely.
Therefore, the S/N of ultrasonic transmission/reception than significantly deterioration, thus makes flow measurement deteriorated accuracy.
In addition, in the present embodiment, the thickness d 3 (that is, thickness is 4mm) of vibration absorbing layer 143 is set as thicker than the thickness d 2 (that is, thickness is 1mm) of discoideus piezoelectric element 141.
Thus, as shown in Fig. 4 (A), acoustic vibration can be made to restrain in early days, thus ensuing ultrasound wave is sent.
On the other hand, as a reference, when the thickness d 3 of vibration absorbing layer 143 is thinner than the thickness d 2 of discoideus piezoelectric element 141, as shown in Fig. 4 (B), the absorption of vibrations of being undertaken by vibration absorbing layer 143 is insufficient, acoustic vibration does not restrain in early days, thus cannot send ensuing ultrasound wave.
Therefore, tail off along with the mensuration number of times of ultrasonic beam at the generation number of times of time per unit, the deteriorated accuracy of response and mensuration mean value.
Be back to Fig. 2, other technologies feature is described.
In the present embodiment, be set as thicker than the thickness d 2 (that is, thickness is 1mm) of discoideus piezoelectric element 141 in the thickness d 4 (that is, thickness is 3mm) of the pipeline end sealing area 111a of straight pipe 110 formation.
Thus, the model deformation of passing in time of killer tube terminal sealing area 111a and make discoideus piezoelectric element 141,141 relative configuration relation long term maintenance each other on center shaft with central axis, and by discoideus piezoelectric element each other 141,141 be configured in parallel to each other in the face of and suppress the chemical substance of the liquid easily produced because of the characteristic of fluororesin to the infiltration in the fluororesin of pipeline end sealing area 111a.
On the other hand, as a reference, when the thickness d 4 of the pipeline end sealing area 111a being formed at straight pipe 110 is thinner than the thickness d 2 of discoideus piezoelectric element 141, the pipeline end sealing area 111a be pressed by constant pressing from discoideus piezoelectric element 141 as time goes by, easy generation model deformation, thus the discoideus piezoelectric element depth of parallelism is each other deteriorated, and when measuring for a long time, the chemical substance of liquid is because the characteristic infiltration of fluororesin is in the fluororesin of pipeline end sealing area 111a.
Therefore, bring obstacle to the propagation of the ultrasonic beam of pipeline end sealing area 111a, thus estimating precision is worsened.
In the present embodiment, as described above, glycerin layer 144 is arranged between the pipeline end sealing area 111a of acoustic impedance matching layer 142 and straight pipe 110.
And glycerin layer 144 makes acoustic impedance matching layer 142 be close to relative to the pipeline end sealing area 111a of straight pipe 110 to be integrated.
Thus, the gap to each other being caused by the pipeline end sealing area 111a of straight pipe 110 and acoustic impedance matching layer 142 surfaceness each other and easily produced is eliminated.
In addition, in the present embodiment, the bore r1 of straight the pipe 110 and diameter r2 of discoideus piezoelectric element 141 is set as roughly the same.
Here, " roughly the same " refers to that both differences are less than 2mm size.
Thus, the ultrasonic beam produced from discoideus piezoelectric element 141 can not carry out diffuse reflection but amplitude fully in straight pipe 110, thus alternately carries out the transmitting-receiving of ultrasonic beam.
Cylindric holding member 146 be arranged at inflow side measure 140 and outflow side measure in 150, and only to abut with periphery 141a in the mode of the periphery 141a keeping discoideus piezoelectric element 141.
Thus, bring the mode of obstruction reliably to be located relative to acoustic impedance matching layer 142 by discoideus piezoelectric element 141 can not to the vibration of discoideus piezoelectric element 141.
Further, cylindric holding member 146 possesses sound blank part S.
Thus, the acoustic vibration of discoideus piezoelectric element 141 is allowed to and carries out amplification.
That is, cylindric holding member 146 carries out the mode vibrated with the central portion of discoideus piezoelectric element 141, only presses the periphery 141a of discoideus piezoelectric element 141.
Cover 149 spinning measures the open end 145 of 140 in inflow side.
Thus, press cylindric holding member 146 towards discoideus piezoelectric element 141 elastic force, thus reliably keep cylindric holding member 146.
Further, absorb easily at the internal stress that discoideus piezoelectric element 141 produces according to spinning degree elastic force.
In addition, in the present embodiment, cover 149 presses cylindric holding member 146 via the O type circle 148 of elastic deformation towards discoideus piezoelectric element 141.
Thus, cylindric holding member 146 abuts with the periphery 141a of discoideus piezoelectric element 141 thus makes the size of the pressing force of this periphery of pressing 141a become suitable size.
Here, " suitable size " refers to and does not cause negative effect to the vibration of discoideus piezoelectric element 141 and can to the size of the pressing force that discoideus piezoelectric element 141 positions.
Inflow pipe 120 and effuser 130 are configured from equidirectional with " コ " shape with the other end 112 in one end 111 of straight pipe 110.
Thus, the inflow pipe 120 in metering work region is minimized relative to the installing space of straight pipe 110 with effuser 130.
In addition, in the present embodiment, when discoideus piezoelectric element 141 being formed as thickness is 1mm, diameter (r2) for 10mm and be 2MHz by the frequency setting of ultrasonic beam, the thickness d 1 of acoustic impedance matching layer 142 is set as 0.5mm, and the thickness d 3 of vibration absorbing layer 143 is set as 4mm.
Thus, acoustic impedance matching layer 142 suppresses the impact of the larger difference of the acoustic impedance between discoideus piezoelectric element 141 and pipeline end sealing area 111a, thus stable waveform is propagated.
On the other hand, as a reference, when discoideus piezoelectric element 141 being formed as thickness is 1mm, diameter (r2) for 10mm and be 2MHz by the frequency setting of ultrasonic beam, if the thickness d 1 of acoustic impedance matching layer 142 is thinner than 0.5mm, then the effect of acoustic impedance matching layer 142 dies down, the impact of the larger difference of the acoustic impedance between discoideus piezoelectric element 141 and pipeline end sealing area 111a remains, thus counteracts the propagation of stable waveform.On the other hand, if the thickness d 1 of acoustic impedance matching layer 142 is more than 0.5mm, then when ultrasonic beam is by acoustic impedance matching layer 142, acoustic vibration is absorbed by acoustic impedance matching layer 142, thus signal intensity dies down, the S/N of ultrasonic transmission/reception than deterioration, and makes estimating precision reduce.
For the ultrasonic flow meter 100 of the first embodiment of the present utility model obtained like this, the discoideus piezoelectric element 141 of pottery system is configured in the mode orthogonal relative to the central shaft C of straight pipe 110, and it is stacked and be located between the acoustic impedance matching layer 142 in the face of the glass epoxy resin of the pipeline end sealing area (111a) formed respectively in one end 111 of straight pipe 110 and the other end 112 and the vibration absorbing layer 143 of the silicon rubber in the face of discoideus piezoelectric element 141, the thickness d 1 of acoustic impedance matching layer 142 is set as thinner than the thickness d 2 of discoideus piezoelectric element 141, the thickness d 3 of vibration absorbing layer 143 is set as thicker than the thickness d 2 of discoideus piezoelectric element 141, thus acoustic impedance matching layer 142 can make the ultrasonic beam from discoideus piezoelectric element 141 generation, pipeline end sealing area 111a successfully towards straight pipe 110 propagates, and can measure in inflow side 140 with outflow side measure 150 mutual, ultrasonic beam is increased significantly at the generation number of times of time per unit, consequently, can efficiently and stably ultrasonic beam is received and dispatched, thus the precision of response and mensuration mean value can be made to improve significantly.
In addition, by the thickness d 4 of the pipeline end formed at straight pipe 110 sealing area 111a is set as thicker than the thickness d 2 of discoideus piezoelectric element 141, successfully can guarantee the propagation of the ultrasonic beam of pipeline end sealing area 111a, and estimating precision can be maintained chronically.
And, between the pipeline end sealing area 111a being arranged at acoustic impedance matching layer 142 and straight pipe 110 by the pipeline end sealing area 111a making acoustic impedance matching layer 142 relative to straight pipe 110 being close to the glycerin layer 144 be integrated, thus the degree of being close to of both sides can be made to improve and the transmitting-receiving efficiency of ultrasonic beam is improved.
In addition, by the bore r1 of straight the pipe 110 and diameter r2 of discoideus piezoelectric element 141 is set as roughly the same, thus can measure in inflow side 140 with outflow side measure 150 mutual, with good sensitivity, ultrasonic beam is received and dispatched.
And, by the cylindric holding member 146 of the periphery 141a keeping discoideus piezoelectric element 141 possess be arranged at inflow side measure 140 and outflow side to measure in 150 and to allow the sound blank part S along the acoustic vibration of the discoideus piezoelectric element 141 of the central shaft C of discoideus piezoelectric element 141, thus stable flow measurement can be carried out chronically, and as flowmeter, excellent permanance can be played, can measure in inflow side 140 with outflow side measures 150 mutual, with good sensitivity transmission ultrasonic beam.
In addition, by by cover 149 spinning in measure in inflow side 140 and outflow side measure 150 open end 145 formed, thus stable flow measurement can be carried out chronically, and as flowmeter, excellent permanance can be played.
Further, by inflow pipe 120 and effuser 130 one end 111 at straight pipe 110 is configured with " コ " shape from equidirectional with the other end 112, thus can also avoid with other peripheral equipments interference is set, and excellent operability can be played.
In addition, when discoideus piezoelectric element 141 being formed as thickness is 1mm, diameter (r2) for 10mm and be 2MHz by the frequency setting of ultrasonic beam, by the thickness d 1 of acoustic impedance matching layer 142 being set as 0.5mm and the thickness d 3 of vibration absorbing layer 143 being set as 4mm, thus ultrasonic beam etc. can be sent with good sensitivity, its effect is very large.
[embodiment 2]
Then, based on Fig. 5, the ultrasonic flow meter 200 as the second embodiment of the present utility model is described.
Here, Fig. 5 is the front section view of the overview of the ultrasonic flow meter 200 representing the second embodiment of the present utility model.
Ultrasonic flow meter 200 due to the second embodiment is the ultrasonic flow meters effuser 130 of the ultrasonic flow meter 100 of the first embodiment being formed at opposition side relative to the configuration of straight pipe 110, so the ultrasonic flow meter 100 of a lot of component and the first embodiment is common, therefore for common item, detailed, only marks the Reference numeral of rear two common 200 series.
In the ultrasonic flow meter 200 of the second embodiment, as shown in Figure 5, inflow pipe 220 and effuser 230 configure in the mode mutually different from the other end 212 in one end 211 of straight pipe 210.It is the ultrasonic flow meter 200 of so-called zigzag.
Thus, even if be in any set-up mode in metering work region, can both easily inflow pipe 220 and any one in effuser 230 be configured to upward, thus make easily to be stranded in the bubble in the determined liquid in straight pipe 210, easily discharge from one end 211 of straight pipe 210 with the either end the other end 212.
For the ultrasonic flow meter 200 of the second embodiment of the present utility model obtained like this, by inflow pipe 220 and effuser 230 are configured in one end 211 of straight pipe 210 mutually different from the other end 212, can send with good sensitivity and measure based on easy 240 to measure the bubble obstacle of the mutual generation of 250 ultrasonic beam etc. with outflow side in inflow side, its effect is very large.
[embodiment 3]
Then, based on Fig. 6, the ultrasonic flow meter 300 as the 3rd embodiment of the present utility model is described.
Here, Fig. 6 is the front section view of the overview of the ultrasonic flow meter 300 representing the 3rd embodiment of the present utility model.
Ultrasonic flow meter 300 due to the 3rd embodiment is that the inflow pipe 120 of the ultrasonic flow meter 100 of the first embodiment is formed as the ultrasonic flow meter of 45 degree relative to the inflow angle of straight pipe 110 and effuser 130 relative to the outflow angle of straight pipe 110, so the ultrasonic flow meter 100 of a lot of component and the first embodiment is common, therefore for common item, detailed, only marks the Reference numeral of rear two common 300 series.
In the ultrasonic flow meter 300 of the 3rd embodiment, as shown in Figure 6, inflow pipe 320 is communicated with 45 degree with one end 311 of straight pipe 310, and effuser 330 is also communicated with from the other end 312 of inflow pipe 320 phase the same side with straight pipe 310 with 45 degree.
Thus, with inflow pipe and effuser relative to straight pipe with compared with 90 degree of situations about being communicated with, the determined liquid being communicated with position can flow swimmingly, and the sinuous flow whirlpool of determined liquid diminishes, or can suppress the generation of this sinuous flow whirlpool.
Consequently, can improve the estimating precision etc. of determined liquid, its effect is very large.
[embodiment 4]
Then, based on Fig. 7, the ultrasonic flow meter 400 as the 4th embodiment of the present utility model is described.
Here, Fig. 7 is the front section view of the overview of the ultrasonic flow meter 400 representing the 4th embodiment of the present utility model.
Ultrasonic flow meter 400 due to the 4th embodiment is that the inflow pipe 220 of the ultrasonic flow meter 200 of the second embodiment is formed as the ultrasonic flow meter of 45 degree relative to the inflow angle of straight pipe 210 and effuser 230 relative to the outflow angle of straight pipe 210, so the ultrasonic flow meter 200 of a lot of component and the second embodiment is common, therefore for common item, detailed, only marks the Reference numeral of rear two common 400 series.
In the ultrasonic flow meter 400 of the 4th embodiment, as shown in Figure 7, inflow pipe 420 is communicated with 45 degree with one end 411 of straight pipe 410, and effuser 430 is communicated with from the other end 412 of inflow pipe 420 opposite side with straight pipe 410 with 45 degree.
Thus, with inflow pipe and effuser relative to straight pipe with compared with 90 degree of situations about being communicated with, the liquid being communicated with position can flow swimmingly, and the sinuous flow whirlpool of liquid diminishes, or the generation of this sinuous flow whirlpool can be suppressed, and easily inflow pipe 420 and any one in effuser 430 are configured to upward, make easily to be stranded in the bubble in the liquid in straight pipe 410, easily discharge with the either end the other end 412 from one end 411 of straight pipe 410.
Consequently, can improve the estimating precision etc. of liquid, its effect is very large.
Claims (9)
1. a ultrasonic flow meter, it is the ultrasonic flow meter of following mistiming mode, possesses:
The straight pipe of fluororesin, it is for determined fluid circulation;
Inflow pipe, it is communicated with the inflow angle specified with one end of this straight pipe;
Effuser, it is communicated with the outflow angle specified with the other end of described straight pipe;
A pair inflow side measures head and outflow side mensuration head, and they extend in one end of described straight pipe and the other end respectively, and mutually opposing; And
The discoideus piezoelectric element of pottery system, it is present in this inflow side respectively and measures the inside that head and outflow side measure head, and alternately carries out the transmitting-receiving of ultrasonic beam along the central shaft of described straight pipe,
The time being transmitted to downstream according to the ultrasonic beam produced by described discoideus piezoelectric element from the upstream side of described straight pipe and the mistiming of the time being transmitted to upstream side from downstream, obtain the fluid velocity in described straight pipe,
This fluid velocity is multiplied by the sectional area of straight pipe thus the flow obtained at straight Flow In A Circular Tube,
The feature of described ultrasonic flow meter is,
The discoideus piezoelectric element of described pottery system, be configured in the mode of the orthogonality of center shaft relative to described straight pipe, and it is stacked and be located between the acoustic impedance matching layer in the face of the glass epoxy resin of the pipeline end sealing area formed respectively in one end of described straight pipe and the other end and the vibration absorbing layer of the silicon rubber in the face of described discoideus piezoelectric element
The thickness of described acoustic impedance matching layer is set to thinner than the thickness of described discoideus piezoelectric element,
The thickness of described vibration absorbing layer is set to thicker than the thickness of described discoideus piezoelectric element.
2. ultrasonic flow meter according to claim 1, is characterized in that,
The thickness being formed at the pipeline end sealing area of described straight pipe is set to thicker than the thickness of described discoideus piezoelectric element.
3. ultrasonic flow meter according to claim 2, is characterized in that,
Make acoustic impedance matching layer relative to the pipeline end sealing area of described straight pipe be close to that the glycerin layer be integrated is arranged at described straight pipe between pipeline end sealing area and acoustic impedance matching layer.
4. ultrasonic flow meter according to claim 3, is characterized in that,
The bore of described straight pipe and the diameter of discoideus piezoelectric element are set to roughly the same.
5. ultrasonic flow meter according to claim 4, is characterized in that,
Keep the cylindric holding member of the periphery of described discoideus piezoelectric element to possess and be arranged at the sound blank part allowing the acoustic vibration of the central shaft along described discoideus piezoelectric element of discoideus piezoelectric element in described inflow side mensuration head and outflow side mensuration head.
6. ultrasonic flow meter according to claim 5, is characterized in that,
Towards described discoideus piezoelectric element elastic force press cylindric holding member cover measured in measuring head and outflow side in described inflow side the open end that capitiform becomes by spinning.
7. ultrasonic flow meter according to claim 6, is characterized in that,
Described inflow pipe and effuser are configured with " コ " shape from equidirectional in one end of described straight pipe and the other end, and with described straight circular pipe communicated.
8. ultrasonic flow meter according to claim 6, is characterized in that,
Described inflow pipe and effuser are configured to mutually different from the other end in one end of described straight pipe, and with described straight circular pipe communicated.
9. the ultrasonic flow meter according to claim 7 or 8, is characterized in that,
When described discoideus piezoelectric element is formed as thickness is 1mm, diameter is 10mm and be 2MHz by the frequency setting of described ultrasonic beam, the thickness of described acoustic impedance matching layer is set to 0.5mm, and the thickness of described vibration absorbing layer is set to 4mm.
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| JP2014-047993 | 2014-03-11 | ||
| JP2014047993A JP5548834B1 (en) | 2014-03-11 | 2014-03-11 | Ultrasonic flow meter |
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| CN105277242A (en) * | 2015-11-13 | 2016-01-27 | 中国电子科技集团公司第二十六研究所 | Ultrasonic transducer structure of ultrasonic flow meter |
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| JP5580950B1 (en) * | 2014-05-16 | 2014-08-27 | 東京計装株式会社 | Ultrasonic flow meter |
| EP3382351B1 (en) * | 2017-03-31 | 2019-10-09 | Ryusok Co., Ltd | Ultrasonic flow meter |
| JP6175206B1 (en) * | 2017-03-31 | 2017-08-02 | 株式会社琉Ｓｏｋ | Ultrasonic flow meter |
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| US5458004A (en) * | 1993-09-01 | 1995-10-17 | Krohne Messtechnik Gmbh & Co. Kg. | Volume flow meter |
| KR20040086503A (en) * | 2002-01-28 | 2004-10-11 | 마츠시타 덴끼 산교 가부시키가이샤 | Acoustic matching layer, ultrasonic transmitter/receiver, and ultrasonic flowmeter |
| JP2004029038A (en) * | 2002-01-28 | 2004-01-29 | Matsushita Electric Ind Co Ltd | Ultrasonic flowmeter |
| JP4731145B2 (en) * | 2004-09-21 | 2011-07-20 | リコーエレメックス株式会社 | Ultrasonic sensor and ultrasonic flow meter |
| JP2006275686A (en) * | 2005-03-29 | 2006-10-12 | Tokyo Keiso Co Ltd | Ultrasonic flow measuring instrument |
| EP1924121A4 (en) * | 2005-09-09 | 2017-08-16 | Murata Manufacturing Co., Ltd. | Ultrasonic sensor |
| JP5391402B2 (en) * | 2009-08-07 | 2014-01-15 | 本多電子株式会社 | Ultrasonic flow detector and ultrasonic flow meter sensor using the same |
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- 2014-03-11 JP JP2014047993A patent/JP5548834B1/en active Active
- 2014-09-04 CN CN201420508413.6U patent/CN204115788U/en active Active
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| CN105277242A (en) * | 2015-11-13 | 2016-01-27 | 中国电子科技集团公司第二十六研究所 | Ultrasonic transducer structure of ultrasonic flow meter |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2015172502A (en) | 2015-10-01 |
| KR20150106316A (en) | 2015-09-21 |
| JP5548834B1 (en) | 2014-07-16 |
| KR101759768B1 (en) | 2017-07-19 |
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