CN203999919U - Quartz stove tube pressure detection interface - Google Patents
Quartz stove tube pressure detection interface Download PDFInfo
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- CN203999919U CN203999919U CN201420349403.2U CN201420349403U CN203999919U CN 203999919 U CN203999919 U CN 203999919U CN 201420349403 U CN201420349403 U CN 201420349403U CN 203999919 U CN203999919 U CN 203999919U
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- pressure detection
- detection interface
- stove tube
- quartz stove
- pressure
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Abstract
The utility model discloses a kind of Quartz stove tube pressure detection interface, relate to diffusion furnace automatic pressure-balancing device technique field.The utility model comprises pressure detection interface body, described pressure detection interface body comprises the pressure reduction sleeved being connected with differential pressure pickup and the pressure detection connecting joint being connected with the Quartz stove tube pressure detection mouth of pipe, internal welding at described pressure detection connecting joint is connected to the pressure detection interface sleeve coinciding with pressure reduction sleeved medullary ray, pressure reduction sleeved and pressure detection interface sleeve form the pipe passage of sealing, and described pressure detection interface sleeve gap is socketed in the inwall of pressure detection interface.When the utility model has been avoided Quartz stove tube work, metaphosphoric acid is deposited in the problem that the pressure detection mouth of pipe causes it to be corroded and to damage, reduce the frequency that Quartz stove tube failure rate and maintenance are changed, extended the work-ing life of Quartz stove tube, reduced production cost.
Description
Technical field
The utility model relates to the automatic pressure-balancing device technique field of diffusion furnace.
Background technology
Diffusion furnace is a kind of semiconductor manufacturing equipment, is mainly used in doping process, in crystal silicon solar energy battery is produced, is unique implantation equipment especially, is, in manufacturing process, the raising of the generation of PN junction, efficiency of conversion is played to conclusive key equipment.
In crystal silicon solar energy battery preparation process, diffusion technique refers to that the mode of adulterating by high temperature forms at matrix silicon chip surface the PN junction that one deck has certain junction depth and density gradient, requirement reaction tubes interior temperature is stablized, stablize gas field, Quartz stove tube is wherein for diffusion technique process, deposit the instrument of silicon chip, therefore very crucial to the pressure detection of Quartz stove tube.In the production of polysilicon solar cell, the pressure detection of the Quartz stove tube using in diffusing procedure is by pressure detection interface and tracheae, Quartz stove tube to be detected to the mouth of pipe to couple together with the differential pressure pickup on equipment.Because the bore of existing pressure detection interface is large, and the bore that connects differential pressure pickup interface is little, therefore in the process of using, metaphosphoric acid is easy to be deposited in Quartz stove tube pressure detection mouth of pipe place, the frequency that pressure detection pipe is corroded damage is very high, increased the expense that Quartz stove tube was bought and keeped in repair in workshop, shop maintenance cost is increased.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of Quartz stove tube pressure detection interface, while having avoided Quartz stove tube work, metaphosphoric acid is deposited in the problem that the pressure detection mouth of pipe causes it to be corroded and to damage, reduced the frequency that Quartz stove tube failure rate and maintenance are changed, extend the work-ing life of Quartz stove tube, reduced production cost.
For solving the problems of the technologies described above, technical solution adopted in the utility model is: a kind of Quartz stove tube pressure detection interface, comprise pressure detection interface body, described pressure detection interface body comprises the pressure reduction sleeved being connected with differential pressure pickup and the pressure detection connecting joint being connected with the Quartz stove tube pressure detection mouth of pipe, internal welding at described pressure detection connecting joint is connected to the pressure detection interface sleeve coinciding with pressure reduction sleeved medullary ray, pressure reduction sleeved and pressure detection interface sleeve form the pipe passage of sealing, described pressure detection interface sleeve gap is socketed in the inwall of pressure detection interface.
The length of described pressure detection interface sleeve is not more than the length of pressure detection interface.
The internal diameter of described pressure detection interface sleeve is 10～20mm, and external diameter is 15～23 mm.
Described pressure detection interface sleeve is silica tube.
The beneficial effect that adopts technique scheme to produce is: this pressure detection interface sleeve is socketed in the inwall of the pressure detection pipe of Quartz stove tube, Quartz stove tube is played to the effect of protection, while having avoided Quartz stove tube work, metaphosphoric acid is deposited in the problem that the pressure detection mouth of pipe causes it to be corroded and to damage; And then reduced because Quartz stove tube damages the disorderly closedown maintenance frequency causing, extended the work-ing life of Quartz stove tube, also improved accordingly production efficiency; Also the expense that has reduced maintenance expense and replacing Quartz stove tube, greatly reduces production cost simultaneously.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the structural representation of Quartz stove tube;
In figure: 1, pressure reduction sleeved; 2, pressure detection connecting joint; 3, pressure detection interface sleeve; 4, pressure detection interface; 5, Quartz stove tube.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
In the production of polysilicon solar cell, the pressure detection of the Quartz stove tube that diffusing procedure is used is by pressure detection interface and tracheae, diffusion furnace tube to be detected to the mouth of pipe to couple together with the differential pressure pickup on equipment.Because the bore of existing pressure detection interface is large, and the bore that connects differential pressure pickup is little, therefore in use, metaphosphoric acid is easily deposited in Quartz stove tube pressure detection mouth of pipe place, make the pressure detection pipe disconnected frequency that is corroded very high, increase the expense that Quartz stove tube was bought and keeped in repair in workshop, greatly increased Workshop Production cost.
This adaptation is novel is the improvement to existing pressure detection interface, specifically the internal welding at described pressure detection connecting joint 2 is connected to the pressure detection interface sleeve 3 coinciding with pressure reduction sleeved 1 medullary ray, pressure reduction sleeved 1 and pressure detection interface sleeve 3 form the pipe passage of sealing, the inwall that described pressure detection interface sleeve 3 gaps are socketed in pressure detection interface 4, plays the effect of protection to pressure detection interface; The length of described pressure detection interface sleeve 3 is not more than the length of pressure detection interface 4; The internal diameter of described pressure detection interface sleeve 3 is 10～20mm, and external diameter is 15～23 mm, preferred internal diameter 15mm, and external diameter 20mm, and to keep the wall thickness of pressure detection interface sleeve 3 be 2.5mm; Described pressure detection interface sleeve 3 is for adopting the quartzy tubing identical with pressure detection interface body material, high temperature resistant, corrosion-resistant, thermal stability is good.
The utility model pressure detection interface sleeve 3 is socketed in the inwall of Quartz stove tube 5 pressure detection interfaces 4; the pressure detection mouth of pipe 4 of Quartz stove tube 5 is played to the effect of protection; avoided the corrosion of pressure detection interface 4; reduce Quartz stove tube 5 and damaged the frequency of changing; extend the work-ing life of Quartz stove tube 5, reduced production cost.
Precaution: because pressure detection interface sleeve 3 and pressure detection interface 4 are affixed, must regular maintenance, just can avoid two quartz member cannot separate because of corrosion; When installing and pulling down, the operation of being careful, avoids its damage.The length of pressure detection interface sleeve 3 can not surpass the total length of Quartz stove tube pressure detection interface 4, if it is interior a lot of to extend into boiler tube, makes Quartz stove tube pressure detection interface easily broken.
Claims (4)
1. a Quartz stove tube pressure detection interface, comprise pressure detection interface body, described pressure detection interface body comprises the pressure reduction sleeved (1) being connected with differential pressure pickup and the pressure detection connecting joint (2) being connected with Quartz stove tube (5) pressure detection interface (4), it is characterized in that: the internal welding at described pressure detection connecting joint (2) is connected to the pressure detection interface sleeve (3) coinciding with pressure reduction sleeved (1) medullary ray, pressure reduction sleeved (1) and pressure detection interface sleeve (3) form the pipe passage of sealing, described pressure detection interface sleeve (3) gap is socketed in the inwall of pressure detection interface (4).
2. Quartz stove tube pressure detection interface according to claim 1, is characterized in that: the length of described pressure detection interface sleeve (3) is not more than the length of pressure detection interface (4).
3. Quartz stove tube pressure detection interface according to claim 2, is characterized in that: the internal diameter of described pressure detection interface sleeve (3) is 10～20mm, and external diameter is 15～23 mm.
4. Quartz stove tube pressure detection interface according to claim 3, is characterized in that: described pressure detection interface sleeve (3) is silica tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420349403.2U CN203999919U (en) | 2014-06-27 | 2014-06-27 | Quartz stove tube pressure detection interface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420349403.2U CN203999919U (en) | 2014-06-27 | 2014-06-27 | Quartz stove tube pressure detection interface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203999919U true CN203999919U (en) | 2014-12-10 |
Family
ID=52039947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420349403.2U Expired - Fee Related CN203999919U (en) | 2014-06-27 | 2014-06-27 | Quartz stove tube pressure detection interface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203999919U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115126583A (en) * | 2022-07-18 | 2022-09-30 | 潍柴动力股份有限公司 | Fault diagnosis method and system for double-path particle catcher |
-
2014
- 2014-06-27 CN CN201420349403.2U patent/CN203999919U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115126583A (en) * | 2022-07-18 | 2022-09-30 | 潍柴动力股份有限公司 | Fault diagnosis method and system for double-path particle catcher |
| CN115126583B (en) * | 2022-07-18 | 2024-01-12 | 潍柴动力股份有限公司 | Dual-path particle catcher fault diagnosis method and system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141210 Termination date: 20170627 |