CN203940826U - A kind of electric magnetic railings ruler structure - Google Patents
A kind of electric magnetic railings ruler structure Download PDFInfo
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- CN203940826U CN203940826U CN201420393140.5U CN201420393140U CN203940826U CN 203940826 U CN203940826 U CN 203940826U CN 201420393140 U CN201420393140 U CN 201420393140U CN 203940826 U CN203940826 U CN 203940826U
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- grid line
- induction
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- conduction
- railings ruler
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Abstract
The utility model is a kind of electric magnetic railings ruler structure, comprise electric magnetic railings ruler blade, conduction grid line, induction grid line, inducing probes, conduction grid line and induction grid line are all engraved on electric magnetic railings ruler blade, and two conduction grid line setting parallel to each other, some induction grid lines are parallel to each other to be arranged between two conduction grid lines, the two ends of induction grid line connect two parallel wire grid lines, the both positive and negative polarity of direct supply connects two parallel conduction grid lines by wire respectively, for two parallel conduction grid lines and induction grid line provide electric power generating composition loop, inducing probes is installed in the top of induction grid line, and inducing probes is conducted electricity the side of grid line and is moved upward along being parallel to, micro-potentiometry circuit is connected with inducing probes and potential reference point respectively, micro-potentiometry circuit is also connected with acquisition control system.The utility model reliability is high, and measuring accuracy is high, can detect the displacement of Nano grade, can read and be less than optical wavelength pitch, can measure swiftly passing object displacement, direction and speed thereof.
Description
Technical field
The utility model is a kind of electric magnetic railings ruler structure, belongs to the innovative technology of electric magnetic railings ruler structure.
Background technology
Displacement transducer has been widely used in the fields such as precision measurement, automatic location, tracking and testing and optical information processing.The size of the quality of displacement transducer, the height of precision, cost, the height of manufacture efficiency will directly affect precision and the performance of surveying instrument.The displacement measurement sensor of current extensive utilization has grating scale and magnetic railings ruler.
Utilize grating to carry out displacement measurement and will be traced to eighties of last century fifties, in asking when quite long, only be applied to the mensuration of spectral analysis and optical wavelength as diffraction element by astronomer and physicist, starting is most Moire fringe (Moire fringes) technology based on double grating, its pitch is in about 20um, and precision is generally several microns, but along with the progress of manufacturing technology, O.8um present grating pitch can reach, and resolving power reaches lnm.In production, manufacturing development, play the part of key player.Nano level grating measuring is to adopt diffraction grating, and grating pitch is lum or 0.8um, and the width of grid line and light wavelength are very approaching, produce diffraction and interference and can form Moire fringe, and the principle of its measurement claims principle of interference.The diffraction grating chi of present stage is mainly increment type grating scale.The measuring principle of increment type grating is transmitted through a grating scale kinematic pair by light source, when two grating scale relative motions, can form Morie fringe, this Morie fringe is counted, segmented, obtain the displacement variable in the cycle, and determine the absolute position of complete cycle by the reference point of setting on grating, in increment type grating displacement measuring system, should first set a reference point, this reference point marker is zero-bit, and absolute displacement amount is by obtaining the relative displacement of reference point is cumulative.Increment type grating sensor has that simple in structure, mechanical mean lifetime is long, reliability is high, antijamming capability is strong, long transmission distance, precision are higher, low cost and other advantages, but also there is deficiency, increment type grating sensor can only output shaft rotation relative position, each power-off or need to set reference point while again starting shooting, there is certain subdivision error in synchronous signal processing mode.Add in industry at modern machine, mostly adopt grating sensor to carry out position feedback device.Because grating scale can carry out closed-loop control to system, reduce the error that the reasons such as ball-screw thermal deformation cause, improve machining precision, so current medium-to-high grade digital control system adopts grating scale as displacement of the lines feedback element more and more.
The development of China's grating digital readout technology is transformed traditional machine industry as starting point from the eighties in last century taking digital display technology, at present, be installed on the whole dependence on import of absolute grating scale that the advanced CNC closed-loop is used, this has become one of technology " bottleneck " of restriction China high-grade, digitally controlled machine tools development.It is 3m that the maximum of domestic closed glass grating scale is measured length, have ± 15 μ m of accuracy, ± 10 μ m, ± 5 μ m and ± 3 μ m, and resolving power has 5 μ m, 1 μ m and 0.1 μ m, and speed is 60m/min, is mainly used in hand digit display lathe.The displacement measurement of realizing range millimeters up to a hundred, nanometer resolution, only has part laser interference class and grating class displacement measuring instrument to be competent at.But the requirement harshness of laser interferometer to environmental baseline, causes application limited.Though and raster pattern length measuring apparatus has shaped article, mainly from offshore company, these products are not only expensive, the high-precision product of part exists many restrictions to the sale of CHINESE REGION.
Technical at nano measurement, owing to being subject to the restriction of a lot of technology, as:
1) hardware condition restriction, high line is counted the grating of big-length and is scribed difficulty, and being embodied in survey length is exactly the contradiction of measurement resolution and range; The precision of scribing of measuring accuracy and grating has direct relation, is therefore subject to the impact of grating processing technology larger; The performance of optical grating measuring system is closely related with its physical construction of carrying, and accurate mechanical system is the important guarantee that grating measuring method realizes nano measurement, and 1,000 times of above electronic fine-grained methods and technology ripe not enough, need further research.
2) precondition that random phase difference stripe signal count fine point-score uses is that signal processing system can be carried out real-time follow-up to the variation of stripe signal, taking sinusoidal signal as Segmentation Model.In the time containing second harmonic, third harmonic, ground unrest and circuit noise etc. in stripe signal, the sine of signal can variation, causes segmenting accuracy and reduces.Therefore also need to aspect raising stripe signal quality, more study.
3) due to real-time measurement, Moire fringe number system calculated amount is larger, so measuring speed need to improve, this can be by adopting high-performance processor and Optimization Software structure to realize.
Therefore, if the grid line that adopts the method for traditional Moire fringe or image acquisition to remove to read nano-scale is more difficult, therefore the grid line that the technology based on current wants to read nano-scale can utilize the advantage under the scale effect of nano material, adopts the mode of electromagnetic induction to remove to read grid line.
Inductance type transducer is to utilize electromagnetic induction principle tested non electrical quantity (as displacement, pressure, flow, vibration etc.) to be converted to the variation of self-induction of loop coefficient L or coefficient of mutual inductance M, be converted to again the variable quantity output of relevant voltage or electric current through metering circuit, thereby realize conversion and the measurement of non electrical quantity to electric weight.
Grid line is made into conduction grid line, grid line can produce toroidal magnetic field, in the time that a conducting probe is switched on grid line top through one, probe cutting magnetic induction answers line can produce electric potential difference, can read grid line position through the relative potential change situation on micro-potentiometry circuit amplification detection probe.
Summary of the invention
The purpose of this utility model is to consider the problems referred to above and provides a kind of reliability high, the electric magnetic railings ruler structure that measuring accuracy is high.The utility model is convenient and practical, the displacement of Nano grade can be detected, and the utility model is simple to operate, can read and be less than optical wavelength pitch, can measure swiftly passing object displacement, direction and speed thereof.
The technical solution of the utility model is: electric magnetic railings ruler structure of the present utility model, include electric magnetic railings ruler blade, conduction grid line, induction grid line, inducing probes, micro-potentiometry circuit, acquisition control system, direct supply, conduction grid line and induction grid line are all engraved on electric magnetic railings ruler blade, and two conduction grid line setting parallel to each other, some induction grid lines are parallel to each other to be arranged between two conduction grid lines, the two ends of induction grid line connect two parallel wire grid lines, the both positive and negative polarity of direct supply connects two parallel conduction grid lines by wire respectively, for two parallel conduction grid lines and induction grid line provide electric power generating composition loop, inducing probes is installed in the top of induction grid line, and inducing probes is conducted electricity the side of grid line and is moved upward along being parallel to, micro-potentiometry circuit respectively with inducing probes, potential reference point and acquisition control system are connected.
The utility model
advantage be:electric magnetic railings ruler of the present utility model is based on electromagnetic induction principle, employing includes electric magnetic railings ruler blade, article two, conduction grid line, induction grid line, direct supply, the structure of inducing probes, wherein two conduction grid lines are respectively anodal grid line and negative pole grid line, electricity magnetic railings ruler blade is used for scribing conduction grid line, anodal grid line is used for connecing positive source, negative pole grid line is used for connecing power cathode, induction grid line connects anodal grid line and negative pole grid line, for generation of annular electromagnetic field, direct supply is for forming voltage difference between anodal grid line and negative pole grid line, thereby making to respond on grid line has electric current to pass through, the electromagnetic field of inducing probes for producing on detection sensor grid line, in the time that induction grid line is of a size of nano-scale, can produce scale effect, therefore it is minimum that the toroidal magnetic field that two adjacent induction grid lines produce interferes with each other impact, inducing probes is every when once responding to grid line, can cut the annular magnetic line of induction of induction grid line, and therefore inducing probes can produce micro-electric current, form a pulse signal, the displacement of probe nano rank can be detected by this pulse signal.The utility model is that a kind of design is ingenious, function admirable, and convenient and practical electric magnetic railings ruler structure, the utility model is simple to operate, convenient and practical, and measuring accuracy is high.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model electricity magnetic railings ruler structure;
Fig. 2 is the front elevation of the utility model electricity magnetic railings ruler structure;
Fig. 3 is the left view of the utility model electricity magnetic railings ruler structure;
Fig. 4 is the vertical view of the utility model electricity magnetic railings ruler structure.
Embodiment
Embodiment:
Structural representation of the present utility model as shown in Figure 1, electric magnetic railings ruler structure of the present utility model, include electric magnetic railings ruler blade 1, conduction grid line 2, induction grid line 3, inducing probes 5, micro-potentiometry circuit 7, acquisition control system 8, direct supply 13, conduction grid line 2 and induction grid line 3 are all engraved on electric magnetic railings ruler blade 1, and two conduction grid line 2 setting parallel to each other, some induction grid lines 3 are parallel to each other to be arranged between two conduction grid lines 2, the two ends of induction grid line 3 connect two parallel wire grid lines 2, the both positive and negative polarity of direct supply 13 connects two parallel conduction grid lines 2 by wire respectively, for two parallel conduction grid lines 2 and induction grid line 3 provide electric power generating composition loop, inducing probes 5 is installed in the top of induction grid line 3, and inducing probes 5 is conducted electricity the side of grid line 2 and is moved upward along being parallel to, micro-potentiometry circuit 7 by signal wire respectively with inducing probes 5, potential reference point 11 and acquisition control system 8 are connected.
In the present embodiment, the diameter of above-mentioned induction grid line 3 is less than and conducts electricity the diameter of grid line 2.Therefore the resistance of responding to grid line is greater than and conducts electricity the resistance of grid line, and making to conduct electricity grid line can short circuit.Angle 15 between above-mentioned induction grid line 3 and conduction grid line 2 is not equal to 90 °, respond to grid line 3 and conduction grid line 2 out of plumb, therefore when responding to grid line and having electric current to pass through, the annular magnetic induction producing component on perpendicular to conduction grid line direction is non-vanishing, when inducing probes is when moving in conduction grid line direction, can produce the motion of cutting magnetic induction line, therefore in inducing probes, can produce potential change, form the variation of a physical quantity.Above-mentioned induction grid line 3 is to make of magnetic material.Above-mentioned electric magnetic railings ruler blade 1 be with non magnetic and be non-conducting material make.The diameter of above-mentioned some induction grid lines 3 is identical, and some induction grid lines 3 are parallel to each other, facilitates identification and the processing of signal, and in the present embodiment, the distance between induction grid line 3 is equidistant.The both positive and negative polarity of above-mentioned direct supply 13 connects two optional positions on parallel conduction grid line 2 by wire respectively.
In the present embodiment, inducing probes is to be made by conductive material, and diameter dimension is Nano grade.All grid lines are all nano-scales, and under nanometer size effect, the electromagnetic field producing between grid line and grid line can not interact.
Above-mentioned electric magnetic railings ruler blade 1 is for the substrate as conduction grid line 2 and induction grid line 3, induction grid line 3 is equivalent to be connected in parallel on the resistance between conduction grid line 2, above-mentioned micro-potentiometry circuit 7 is connected with inducing probes 5 by signal wire 6, is connected by signal wire 10 with potential reference point 11 simultaneously.
principle of work of the present utility model is as follows:
In the time that direct supply 13 is electrified stream to conduction grid line 2 by wire 12 and wire 14, electric current flows through induction grid line 3 and forms loop, according to Ampere's law, induction grid line 3 produces toroidal magnetic field, because the angle 15 between induction grid line 3 and conduction grid line 2 is not equal to 90 °, respond to grid line 3 and conduction grid line 2 out of plumb, so induction grid line 3 produce while having electric current to pass through lines of magnetic induction 4 non-vanishing perpendicular to the component in conduction grid line 2 directions, do to be parallel to above induction grid line 3 when inducing probes 5 and conduct electricity the side of grid line 2 while moving upward, inducing probes 5 two ends can produce electric potential difference, if the average magnetic induction intensity perpendicular to conduction grid line is B, if probe actual induction length average out to L, v is the movement velocity of probe, E is magnetic induction electromotive force, from E=BLV, when probe moves on induction grid line, probe two ends can produce potential change, utilize micro-potentiometry circuit, a potential reference initial point is set, the potential change of detector probe one end and this reference origin, can obtain induced signal, and in the time that probe is middle through two induction grid lines, potential change on probe is not detected, therefore when probe moves above grid chi, can produce 010101 .... binary signal, therefore can record the relative position of probe, simultaneously, if when probe counter motion, micro-potentiometry circuit will detect contrary electromotive force, therefore system can also judge probe motion direction.
Claims (7)
1. an electric magnetic railings ruler structure, it is characterized in that including electric magnetic railings ruler blade (1), conduction grid line (2), induction grid line (3), inducing probes (5), micro-potentiometry circuit (7), acquisition control system (8), direct supply (13), conduction grid line (2) and induction grid line (3) are all engraved on electric magnetic railings ruler blade (1), and two conduction grid line (2) setting parallel to each other, some induction grid lines (3) are parallel to each other to be arranged between two conduction grid lines (2), the two ends of induction grid line (3) connect two parallel wire grid lines (2), the both positive and negative polarity of direct supply (13) connects two parallel conduction grid lines (2) by wire respectively, be that two parallel conduction grid lines (2) and induction grid line (3) provide electric power generating composition loop, inducing probes (5) is installed in the top of induction grid line (3), and inducing probes (5) moves upward along the side that is parallel to conduction grid line (2), micro-potentiometry circuit (7) respectively with inducing probes (5), potential reference point (11) and acquisition control system (8) are connected.
2. electric magnetic railings ruler structure according to claim 1, is characterized in that the diameter of above-mentioned induction grid line (3) is less than the diameter of conduction grid line (2).
3. electric magnetic railings ruler structure according to claim 1, is characterized in that the angle (15) between above-mentioned induction grid line (3) and conduction grid line (2) is not equal to 90 °.
4. electric magnetic railings ruler structure according to claim 1, is characterized in that above-mentioned induction grid line (3) is to make of magnetic material.
5. electric magnetic railings ruler structure according to claim 1, is characterized in that above-mentioned electric magnetic railings ruler blade (1) is to make of non magnetic and non-conducting material.
6. according to the electric magnetic railings ruler structure described in claim 1 to 5 any one, it is characterized in that the diameter of above-mentioned some induction grid lines (3) is identical, some induction grid lines (3) are parallel to each other and equidistant.
7. electric magnetic railings ruler structure according to claim 6, is characterized in that the both positive and negative polarity of above-mentioned direct supply (13) connects two optional positions on parallel conduction grid line (2) by wire respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420393140.5U CN203940826U (en) | 2014-07-16 | 2014-07-16 | A kind of electric magnetic railings ruler structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420393140.5U CN203940826U (en) | 2014-07-16 | 2014-07-16 | A kind of electric magnetic railings ruler structure |
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| Publication Number | Publication Date |
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| CN203940826U true CN203940826U (en) | 2014-11-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201420393140.5U Withdrawn - After Issue CN203940826U (en) | 2014-07-16 | 2014-07-16 | A kind of electric magnetic railings ruler structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104132609A (en) * | 2014-07-16 | 2014-11-05 | 广东工业大学 | Electromagnetic grid ruler structure and displacement information reading method thereof |
-
2014
- 2014-07-16 CN CN201420393140.5U patent/CN203940826U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104132609A (en) * | 2014-07-16 | 2014-11-05 | 广东工业大学 | Electromagnetic grid ruler structure and displacement information reading method thereof |
| CN104132609B (en) * | 2014-07-16 | 2017-07-07 | 广东工业大学 | A kind of electric magnetic railings ruler structure and its displacement information read method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20141112 Effective date of abandoning: 20170707 |
|
| AV01 | Patent right actively abandoned |