Low frequency demagnetization damping noise abatement protective cover
Technical field
The utility model relates to a kind of low frequency demagnetization damping noise abatement protective cover, for precision equipments such as the needs electron microscope (EMS) that magnetic field, vibrations and noise protect, eliminate or weaken to external world, mask aligner, nulcear magnetic resonance (NMR) (MRI).
Background technology
Electron microscope is high-velocity electrons imagings under electromagnetic lens effect, conventionally even observes under 1,000,000 times at tens thousand of times.Electron microscope, due to its feature such as directly perceived, convenient, is widely used in the field such as material, life science.
Because the charged particle beam flying in electron microscope lens barrel is very easily subject to external interference, thus the scalloping that makes to obtain distortion, and various types of electron microscopes have certain requirement to surrounding environment as magnetic field, vibration and noise.Although magnetic field, vibrations and noise can not make electron microscope itself be damaged, proper motion track that all can interference fringe beam of charged particles, affects the experimental result of electron microscope, makes it can not reach due precision.
The electron microscope of different manufacturers is different to the requirement of surrounding environment.Even same producer but the different electron microscope of model is also different to the requirement of surrounding environment, not unified standard.Electron microscope manufacturer all can, before electron microscope is installed, carry out special detection to the place that electron microscope will be installed.If surrounding environment can not meet the requirements, should take appropriate measures and solve or improve.
In prior art, generally all need to set up the special sealing room of electron microscope, but this existing sealing room is all generally immovable building, and floor space is larger, building cost is higher; And the place of opening the door in room easily exists gap, easily cause the magnetic line of force to leak, thereby affect the accuracy of detection of electron microscope.
Utility model content
The utility model is the weak point existing in above-mentioned prior art for avoiding, a kind of low frequency demagnetization damping noise abatement protection is provided, for the precision equipment protection of low frequency magnetic field, vibrations and noise jamming to external world such as electron microscope, with guarantee electron microscope operational environment sealing, improve by the accuracy of detection of safeguard and serviceability.
The utility model be technical solution problem by the following technical solutions.
Low frequency demagnetization damping noise abatement protective cover, its design feature is, comprises the square cabinet that is hexahedron, is provided with one deck and makes magnetic masking layer by permeability magnetic material on the outer surface of described square cabinet; On the sidewall of described square cabinet, be provided with one or more cabinet doors of outwards opening, on described cabinet door, be provided with one or more door handles; The Men Bianchu of described cabinet door is provided with multiple waveguide mouths;
The internal face of described square cabinet is porous aluminium sheet; Between described porous aluminium sheet and described magnetic masking layer, be provided with the sound absorbing layer that macromolecule sound-absorbing material is made; The end face of described square cabinet is provided with multiple ventilating openings, is all embedded with a ventilating fan in each ventilating opening of described multiple ventilating openings.
The design feature of the utility model low frequency demagnetization damping noise abatement protective cover is also:
The bottom of described cabinet door is provided with an air inlet, on described air inlet, is provided with screen pack.
On the base plate of described square cabinet, be provided with for described square cabinet being fixed on to ground bolt hole by bolt.
On the base plate of described square cabinet, be provided with waveguide mouth, in described waveguide mouth, be provided with waveguide mouth cork.
In described square cabinet, dispose a set of active low frequency demagnetizer.
Compared with the prior art, the utility model beneficial effect is embodied in:
Low frequency demagnetization damping noise abatement protective cover of the present utility model has the technical characterstic of the following aspects.
1) ensure that electron microscope is not disturbed by external electromagnetic and noise circumstance, reduce external shock environmental interference;
2) can keep the basic setup in former room, not because secondary decoration causes waste, avoid the damage to building integral structure completely;
3) volume miniaturization (be only existing magnetic screen volume 20 to a thirtieth), changing site operation is factory process and on-the-spot assembling fast.Another advantage of volume miniaturization be greatly reduce to valuable careat take (integrated scheme itself to careat only take for existing magnetic screen scheme ten to 1/15th);
4) product modular, can need flexible combination collocation according to difference;
5) cost performance improves, and absolute price declines, and reduces user's acquisition cost.According to measuring and calculating, the price of single magnetic screen pattern is about 1/3rd of existing magnetic screen price; After having combined the function of damping and noise reduction, price is reduced to below 1/5th of existing enhancement of environment scheme especially;
6) good looking appearance is generous.Product is cube case structure, and around all there is dodge gate at four sides with handled easily and maintenance.Appearance is electrostatic spraying baking vanish.
Low frequency demagnetization damping noise abatement protective cover of the present utility model, need the precision instrument class of demagnetization, damping, noise abatement for electron microscope, mask aligner, nulcear magnetic resonance (NMR) etc., have can effectively ensure electron microscope be not subject to extraneous low frequency magnetic field, vibrations noise interference, improve equipment accuracy of detection and performance, be convenient to the advantages such as the low and good looking appearance of miniaturization, conveniently moving, cost is generous.
Brief description of the drawings
Fig. 1 is the front view of low frequency demagnetization damping noise abatement protective cover of the present utility model.
Fig. 2 is low frequency demagnetization damping noise abatement protective cover vertical view of the present utility model.
Fig. 3 is the schematic internal view of low frequency demagnetization damping noise abatement protective cover of the present utility model.
Fig. 4 is the base plate of low frequency demagnetization damping noise abatement protective cover of the present utility model and the sectional drawing of sidewall.
In Fig. 1~Fig. 4, label is: 1 square cabinet, 2 magnetic masking layers, 3 sound absorbing layers, 4 porous aluminium sheets, 5 cabinet doors, 6 door handles, 7 waveguide mouths, 8 ventilating openings, 9 ventilating fans, 10 base plates, 11 electron microscope bases, 12 electron microscopes, 13 air inlets, 14 screen packs, 15 bolts hole, 16 waveguide mouth corks, 17 damping devices.
Below pass through embodiment, and the utility model is described in further detail by reference to the accompanying drawings.
Embodiment
Referring to Fig. 1~Fig. 4, low frequency demagnetization damping noise abatement protective cover, it comprises the square cabinet 1 that is hexahedron, is provided with one deck and makes magnetic masking layer 2 by permeability magnetic material on the outer surface of described square cabinet 1; On the sidewall of described square cabinet 1, be provided with one or more cabinet doors 5 of outwards opening, on described cabinet door 5, be provided with one or more door handles 6; The Men Bianchu of described cabinet door 5 is provided with multiple waveguide mouths 7;
The internal face of described square cabinet 1 is porous aluminium sheet 4; Between described porous aluminium sheet 4 and described magnetic masking layer 2, be provided with the sound absorbing layer 3 that macromolecule sound-absorbing material is made; The end face of described square cabinet 1 is provided with multiple ventilating openings 8, and each ventilating openings 8 of described multiple ventilating openings 8 is interior is all embedded with a ventilating fan 9.
The bottom of described cabinet door 5 is provided with an air inlet 13, on described air inlet 13, is provided with screen pack 14.
On the base plate 10 of described square cabinet 1, be provided with for described square cabinet 1 being fixed on to ground bolt hole 15 by bolt.
On the base plate 10 of described square cabinet 1, be provided with waveguide mouth 7, in described waveguide mouth 7, be provided with waveguide mouth cork 16.
In described square cabinet 1, dispose a set of active low frequency demagnetizer, for eliminating NEAR DC, quasi-dc magnetic fields (claiming again D.C. magnetic field).
Base plate, top board and the sidewall of square cabinet included three layers, and outermost layer is the magnetic masking layer that permeability magnetic material is made, intermediate layer be the housing made of sound-absorbing material as sound absorbing layer, innermost layer is the porous aluminium sheet for reducing environmental noise.On sidewall, be provided with the cabinet door of external-open, can facilitate the carrying out of the work such as operation, maintenance and the maintenance of electron microscope.Outward swinging door makes to open the door to close the door does not affect the equipment work in cabinet door.Sound-absorbing material is mainly macromolecular material asbestos etc., and other,, as cork etc., is also macromolecular material.Described square cabinet 1 is for placing the space of the equipment such as electron microscope, and electron microscope 12 and electron microscope base 11 are electron microscope part, and described bottom is arranged on the base plate 10 of described square cabinet 1 by damping device 17.
For convenience of operation, maintenance and the maintenance of electron microscope, can on of a square cabinet sidewall or multiple sidewall, offer cabinet door.The appearance of square cabinet is the baking vanish layer of electrostatic spraying baking vanish.
Length is generally 1.2~3.8m, determines according to equipment, and handle for opening door position and the direction of opening the door are also determined by equipment.
On the place of opening the door, air inlet and ventilating opening and base plate, be provided with many places waveguide mouth, can guarantee that the magnetic line of force in shield can be not excessive.
According to the special mechanism of low frequency electromagnetic shielding (adopting parallel circuits shunting for the magnetic-field component of low frequency electromagnetic field), adopt magnetic conductive material, for the equipment airtight rectangular hexahedron of tailoing, low frequency electromagnetic can be disturbed be reduced to original below 1/20th.All the joint of perforate and Ge Men and framework is waveguide mouth, can guarantee that the magnetic line of force in shield can be not excessive.All the joint of perforate and Ge Men and framework is waveguide mouth.
The rectangular hexahedron bottom surface of special processing guarantees that the resonance of rectangular hexahedron can be transmitted to electron microscope gets on, and can also add magnetic vibration reducing module, if desired to improve vibration environment; Also active low frequency demagnetizer be can add for elimination or NEAR DC, quasi-dc magnetic fields (claiming again D.C. magnetic field) reduced.
Airtight rectangular hexahedron inner surface is porous aluminium sheet, and its inner macromolecule sound-absorbing material in addition, can reduce ambient noise 18~28 decibels, improves noise circumstance.