CN203904448U - Graphite binding target product - Google Patents
Graphite binding target product Download PDFInfo
- Publication number
- CN203904448U CN203904448U CN201420322922.XU CN201420322922U CN203904448U CN 203904448 U CN203904448 U CN 203904448U CN 201420322922 U CN201420322922 U CN 201420322922U CN 203904448 U CN203904448 U CN 203904448U
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- target
- graphite
- copper wire
- target product
- graphite paper
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Abstract
The utility model discloses a graphite binding target product which comprises a target (3), a copper wire net (5), graphite paper (2) and a stainless steel pipe (1), wherein the target (3) and the copper wire net (5) are solidified through molten metal and are connected; the graphite paper (2) is divided into three equal parts by three sections of high-temperature conductive adhesives (4); the graphite paper (2) is solidified through the molten metal and is connected to the copper wire net (5); the target (3), the copper wire net (5) and the graphite paper (2) which are connected together are screwed into the stainless steel pipe (1). The novel graphite binding target product is high in close fit degree of liner tube binding and relatively good in electric conduction and heat conduction properties, and has certain ductility.
Description
Technical field
The utility model relates to semiconductor applications, relates in particular to a kind of graphite binding target product.
Background technology
In semi-conductor industry, target material assembly is to consist of the backboard that meets the target of sputtering performance and be combined, have some strength with described target.Traditional indium binding technology, makes the on the high side of target, thereby makes the corresponding raising of production cost of the industry of the target application such as flat-panel screens, storer and optical coating.
Utility model content
It is a kind of high with binding bushing pipe degree of fitting tightly that the purpose of this utility model is to provide, and electrical and thermal conductivity performance is better and have a novel graphite binding target product of certain ductility.
For achieving the above object, the utility model provides a kind of graphite binding target product, it is characterized in that, comprises target (3); Copper wire gauze (5); Both solidify rear connection by molten metal; Graphite paper (2), it links together after being divided into impartial three parts by three sections of high-temperature electric conduction glue (4); Graphite paper (2) is connected on copper wire gauze (5) after solidifying by molten metal; Stainless steel tube (1); The target linking together (3), copper wire gauze (5) and graphite paper (2) screw in stainless steel tube (1).
Described metal is indium, tin or silver.
Described target is AZO, ITO, NbOx or MoNb.
The width of described high-temperature electric conduction glue is 1.5-2cm, and thickness is 2-3cm.
Described copper wire gauze is the copper wire gauze that the copper wire of two 0.06mm diameters is formed by stacking.
Described graphite paper is that 3 thickness are 1.5mm graphite paper.
The utility model metal used can be low with fusing point, and electrical and thermal conductivity is good, as indium, tin or silver.
The utility model high-temperature electric conduction glue used is used for further fixedly stainless steel and AZO target.Because metal heat-expansion shrinkage is obvious, thereby can depart from due to temperature Change and stainless steel, and conductive resin ductility is good, can make up the problem of metal heat-expansion shrinkage.
The utility model copper wire gauze used plays a supportive role, and target in use can rupture, because copper wire gauze and target are fixed, even if target fracture also there will not be the problem coming off.
The length of the utility model high-temperature electric conduction glue used between graphite paper is 1.5-2cm, the smaller the better within the scope of this, too greatly monolithic conductive thermal conductivity is bad, the too little fixed action that do not have, therefore the utility model is through utility model people test of many times, after considering, finally select 1.5-2mm.
The utility model method sleeve rotating target, can form the binding of AZO, ITO, NbOx, MoNb sleeve target series product, by the indium binding technology breaking traditions, significantly reduce the price of high-end target, effectively improve China's sputtering target material competitive power in the international market.And will the production cost as the industry of the target application such as flat-panel screens, storer and optical coating effectively be reduced, thus promote the structural adjustment of target application industry, to promoting integration competitive power and the level of industry, there is vital role.
The utility model method can replace traditional painting tin mode, increases target conduction, thermal conductivity.Adopt the product target of the utility model method gained to fit tightly 90% with binding bushing pipe; There is certain ductility simultaneously; Electrical and thermal conductivity is good.
The utility model product structure is shown in Fig. 1.Wherein 1 is stainless steel, and 2 is graphite paper, and 3 is target, and 4 is high-temperature electric conduction glue, and 5 is copper wire gauze.
Accompanying drawing explanation
Fig. 1 is the product schematic diagram that the utility model graphite obtains.
Embodiment
Describe embodiment of the present utility model below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, be intended to for explaining the utility model, and can not be interpreted as restriction of the present utility model.Unreceipted concrete technology or condition person in embodiment, according to the described technology of the document in this area or condition or carry out according to product description.The unreceipted person of production firm of agents useful for same or instrument, being can be by the conventional products of commercial acquisition.
embodiment 1
1) stainless steel tube binding: select 304 stainless steel tubes of L800*OD133*ID125mm as bushing pipe, external diameter car circle is bound to OD133mm; Joint portion during binding between target and backboard is without bubble, and bonding rate is greater than 90%; The thickness of binding material is 2～3mm.
2) sleeve target binding: select AZO as sleeve target, internal diameter car circle is bound to 135.42mm; Joint portion during binding between target and backboard is without bubble, and bonding rate is greater than 90%; The thickness of binding material is 2～3mm.
3) in step 2) wrap up heat packs on gained AZO sleeve, AZO sleeve is heated to 300 degree left and right; With ultrasonic bonding machine, the indium metal having melted is coated in to AZO sleeve lining;
4) by 3 thickness, be that 1.5mm graphite paper is placed on dedicated platform, heating graphite paper is to 300 degree left and right; The indium metal having melted is coated on graphite paper; Copper wire gauze (thickness is 1.2mm) is put on graphite paper; Again the other one side of copper wire gauze is put on the AZO sleeve that has been coated with metal; Heat packs is cooled to metal-cured, fixes;
5) with acetone wiping stainless steel surface, carry out after oil removing, on stainless steel outside surface circumference trisection line, be evenly coated with the wide 1.8cm of last layer, the high-temperature electric conduction glue of thickness 2-3cm; Finally the AZO target of having bound graphite paper is inserted in stainless steel tube, its high-temperature electric conduction glue figure layer is just arranged in three intersegmental gaps of graphite paper.Structure of title compound is shown in Fig. 1.
Bonding force verification method: reference standard GB9796-1988 bonding properties test method.
Through the bonding force of test of many times target, reach respectively 20MPa, 25MPa, 27Mpa and all meet the >15Mpa that binding technology requires.》
High temperature resistant verification method: the target of having bound is placed in heat rod, and heat by heat packs target outside.Whether continuous heating to 300 ℃, observe target and depart from stainless steel.
Through this product of test of many times, when being heated to 300 ℃, target does not have break-off completely.
Degree of adhesion verification method: use water logging ultrasonic wave detector to measure the degree of adhesion of target.Through repeatedly measuring this products with adhesive degree, be all greater than 90%, meet binding technology requirement.
embodiment 2
Target is ITO, and metal is tin, and every section of width of high-temperature electric conduction glue is 2cm.Other steps are with embodiment 1.
Bonding force verification method: reference standard GB9796-1988 bonding properties test method.
Through the bonding force of test of many times target, reach respectively 20MPa, 25MPa, 27Mpa and all meet the >15Mpa that binding technology requires.》
High temperature resistant verification method: the target of having bound is placed in heat rod, and heat by heat packs target outside.Whether continuous heating to 300 ℃, observe target and depart from stainless steel.
Through this product of test of many times, when being heated to 300 ℃, target does not have break-off completely.
Degree of adhesion verification method: use water logging ultrasonic wave detector to measure the degree of adhesion of target.Through repeatedly measuring this products with adhesive degree, be all greater than 90%, meet binding technology requirement.
embodiment 3
Target is NbOx, and metal is silver, and every segment length of high-temperature electric conduction glue is 1.5cm.
Other steps are with embodiment 1, and every segment length of high-temperature electric conduction glue is 1.5cm.
Bonding force verification method: reference standard GB9796-1988 bonding properties test method.
Through the bonding force of test of many times target, reach respectively 20MPa, 25MPa, 27Mpa and all meet the >15Mpa that binding technology requires.》
High temperature resistant verification method: the target of having bound is placed in heat rod, and heat by heat packs target outside.Whether continuous heating to 300 ℃, observe target and depart from stainless steel.
Through this product of test of many times, when being heated to 300 ℃, target does not have break-off completely.
Degree of adhesion verification method: use water logging ultrasonic wave detector to measure the degree of adhesion of target.Through repeatedly measuring this products with adhesive degree, be all greater than 90%, meet binding technology requirement.
Although illustrated and described embodiment of the present utility model above, be understandable that, above-described embodiment is exemplary, can not be interpreted as restriction of the present utility model, those of ordinary skill in the art can change above-described embodiment in the situation that not departing from principle of the present utility model and aim in scope of the present utility model, modification, replacement and modification.
Claims (6)
1. a graphite binding target product, is characterized in that, comprises target (3); Copper wire gauze (5); Both solidify rear connection by molten metal; Graphite paper (2), it links together after being divided into impartial three parts by three sections of high-temperature electric conduction glue (4); Graphite paper (2) is connected on copper wire gauze (5) after solidifying by molten metal; Stainless steel tube (1); The target linking together (3), copper wire gauze (5) and graphite paper (2) screw in stainless steel tube (1).
2. graphite binding target product described in claim 1, is characterized in that, described metal is indium, tin or silver.
3. graphite binding target product described in claim 1, is characterized in that, described target is AZO, ITO, NbOx or MoNb.
4. graphite binding target product described in claim 1, is characterized in that, the width of described high-temperature electric conduction glue is 1.5-2cm, and thickness is 2-3cm.
5. graphite binding target product described in claim 1, is characterized in that, described copper wire gauze is the copper wire gauze that the copper wire of two 0.06mm diameters is formed by stacking.
6. graphite binding target product described in claim 1, is characterized in that, described graphite paper is that 3 thickness are 1.5mm graphite paper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420322922.XU CN203904448U (en) | 2014-06-18 | 2014-06-18 | Graphite binding target product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420322922.XU CN203904448U (en) | 2014-06-18 | 2014-06-18 | Graphite binding target product |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203904448U true CN203904448U (en) | 2014-10-29 |
Family
ID=51778740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420322922.XU Expired - Fee Related CN203904448U (en) | 2014-06-18 | 2014-06-18 | Graphite binding target product |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203904448U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104005001A (en) * | 2014-06-18 | 2014-08-27 | 厦门映日新材料科技有限公司 | Graphite binding technology for sleeve target |
-
2014
- 2014-06-18 CN CN201420322922.XU patent/CN203904448U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104005001A (en) * | 2014-06-18 | 2014-08-27 | 厦门映日新材料科技有限公司 | Graphite binding technology for sleeve target |
| CN104005001B (en) * | 2014-06-18 | 2016-09-07 | 芜湖映日科技有限公司 | A kind of sleeve target graphite binding technology |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141029 Termination date: 20170618 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |