CN104005001A - Graphite binding technology for sleeve target - Google Patents
Graphite binding technology for sleeve target Download PDFInfo
- Publication number
- CN104005001A CN104005001A CN201410270154.2A CN201410270154A CN104005001A CN 104005001 A CN104005001 A CN 104005001A CN 201410270154 A CN201410270154 A CN 201410270154A CN 104005001 A CN104005001 A CN 104005001A
- Authority
- CN
- China
- Prior art keywords
- target
- sleeve
- graphite
- stainless steel
- graphite paper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 46
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 46
- 239000010439 graphite Substances 0.000 title claims abstract description 46
- 238000005516 engineering process Methods 0.000 title claims abstract description 26
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 29
- 239000010935 stainless steel Substances 0.000 claims abstract description 29
- 239000002184 metal Substances 0.000 claims abstract description 20
- 229910052751 metal Inorganic materials 0.000 claims abstract description 20
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 14
- 239000003292 glue Substances 0.000 claims description 13
- 229910052738 indium Inorganic materials 0.000 claims description 7
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 abstract description 4
- 230000001070 adhesive effect Effects 0.000 abstract description 4
- 238000012795 verification Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010998 test method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000002860 competitive effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- 239000010963 304 stainless steel Substances 0.000 description 1
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 230000003319 supportive effect Effects 0.000 description 1
Abstract
The invention discloses a graphite binding technology for a sleeve target. The graphite binding technology for the sleeve target comprises the steps that a stainless steel lining tube and the sleeve target are turned until the stainless steel lining tube and the sleeve target are round and the outer diameter of the stainless steel lining tube and the inner diameter of the sleeve target respectively reach a certain value; the sleeve target is wrapped in a heating mantle, and the sleeve target is heated; the inner wall of the sleeve target is coated with well molten metal; three pieces of graphite paper is placed on a dedicated platform to be heated, wherein the thickness of each piece of graphite paper is 1.5mm; the three pieces of graphite paper are coated with the well molten metal; a copper wire gauze is placed on the graphite paper; the other face of the copper wire gauze is placed on the target sleeve coated with the metal; the heating mantle is cooled until the metal is solidified, and the heating mantel is fixed well; finally, the target bound to the graphite paper is screwed into the stainless steel tube, three gap sections between the graphite paper and the stainless steel tube are filled with high-temperature conductive adhesive. By the adoption of the graphite binding technology for the sleeve target, the conductive performance and the heat conducting performance of the target are improved, and the attachment degree of the obtained target to the lining tube which the target is bound to reaches 90%; the sleeve target has certain ductility, and is good in electric conductivity and thermal conductivity and low in cost.
Description
Technical field
The present invention relates to field of semiconductor manufacture, relate in particular to a kind of sleeve target graphite binding technology.
Background technology
In semi-conductor industry, target material assembly is to be made up of the backboard that meets the target of sputtering performance and be combined, have some strength with described target.Traditional indium binding technology, makes the on the high side of target, thereby makes the corresponding raising of production cost of the industry of the target application such as flat-panel screens, storer and optical coating.
Summary of the invention
The object of the present invention is to provide a kind of better effects if, electrical and thermal conductivity performance is better and have a novel graphite binding technology of certain ductility.
For achieving the above object, the invention provides a kind of sleeve target graphite binding technology, it is characterized in that, comprise the steps,
1) stainless steel tube binding: select stainless steel tube as bushing pipe, external diameter car circle to certain diameter is bound;
2) sleeve target binding: sleeve target internal diameter car circle to certain diameter is bound;
3) in step 2) wrap up heat packs on gained target sleeve, target sleeve is heated to 300 degree left and right; The metal having melted is coated in to target sleeve lining with ultrasonic bonding machine;
4) be that 1.5mm graphite paper is placed on dedicated platform by 3 thickness, heating graphite paper is to 300 degree left and right; The metal having melted is coated on graphite paper; Copper wire gauze is put on graphite paper; Again the other one side of copper wire gauze is put on the target sleeve that has been coated with metal; Heat packs is cooled to metal-cured, fixes;
5) finally the target of having bound graphite paper is screwed in step 1) gained stainless steel tube, the intersegmental gap of graphite paper and stainless steel tube 3 is used high-temperature electric conduction glue to fill.
Described when binding step 1) bushing pipe or step 2) target and backboard between joint portion without bubble, bonding rate is greater than 90%; The thickness of binding material is 2～3mm.
Described target is AZO, ITO, NbOx or MoNb.
Described metal is indium, tin or silver.
Described copper wire gauze is the copper wire gauze that the copper wire of two 0.06mm diameters is formed by stacking.
Described step 5), for using acetone wiping stainless steel surface to carry out after oil removing, is evenly coated with the wide 1.5-2cm of last layer, the high-temperature electric conduction glue of thickness 2-3cm on stainless steel outside surface circumference trisection line; Finally the target target of having bound graphite paper is inserted in stainless steel tube, its high-temperature electric conduction glue figure layer is just arranged in three intersegmental gaps of graphite paper.
The product that the arbitrary described method of the present invention obtains.
Structure of title compound of the present invention is shown in Fig. 1.Wherein 1 is stainless steel, and 2 is graphite paper, and 3 is target, and 4 is high-temperature electric conduction glue, and 5 is copper wire gauze.
The present invention's metal used can be low with fusing point, and electrical and thermal conductivity is good, as indium, tin or silver.
The present invention's high-temperature electric conduction glue used is used for further fixing stainless steel and target such as AZO.Because metal heat-expansion shrinkage is obvious, thereby can depart from due to temperature Change and stainless steel, and conductive resin ductility is good, can make up the problem of metal heat-expansion shrinkage.
The present invention's copper wire gauze used plays a supportive role, and target in use can rupture, because copper wire gauze and target are fixed, even if target fracture also there will not be the problem coming off.
The width of the present invention's high-temperature electric conduction glue used between graphite paper is 1.5-2cm, and the smaller the better within the scope of this, too greatly monolithic conductive thermal conductivity is bad, the too little fixed action that do not have, therefore the present invention, through contriver's test of many times, after considering, finally selectes 1.5-2cm.
The inventive method sleeve rotating target, can form the binding of AZO, ITO, NbOx, MoNb sleeve target series product, by the indium binding technology breaking traditions, significantly reduce the price of high-end target, effectively improve China's sputtering target material competitive power in the international market.And will the production cost as the industry of the target application such as flat-panel screens, storer and optical coating effectively be reduced, thus promote the structural adjustment of target application industry, the integration competitive power and the level that promote industry are had to vital role.
Adopt the inventive method can replace traditional painting tin mode, increase target conduction, thermal conductivity.Adopt the product target of the inventive method gained to fit tightly 90% with binding bushing pipe; There is certain ductility simultaneously; Electrical and thermal conductivity is good.Meanwhile, use the cost of graphite low.
Brief description of the drawings
Fig. 1 is the product schematic diagram that adopts graphite binding technology of the present invention to obtain.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Be exemplary below by the embodiment being described with reference to the drawings, be intended to for explaining the present invention, and can not be interpreted as limitation of the present invention.Unreceipted concrete technology or condition person in embodiment, according to the described technology of the document in this area or condition or carry out according to product description.The unreceipted person of production firm of agents useful for same or instrument, being can be by the conventional products of commercial acquisition.
embodiment 1
1) stainless steel tube binding: select 304 stainless steel tubes of L800*OD133*ID125mm as bushing pipe, external diameter car circle is bound to OD133mm; Joint portion when binding between target and backboard is without bubble, and bonding rate is greater than 90%; The thickness of binding material is 2～3mm.
2) sleeve target binding: select AZO as sleeve target, internal diameter car circle is bound to 135.42mm; Joint portion when binding between target and backboard is without bubble, and bonding rate is greater than 90%; The thickness of binding material is 2～3mm.
3) in step 2) wrap up heat packs on gained AZO sleeve, AZO sleeve is heated to 300 degree left and right; The indium metal having melted is coated in to AZO sleeve lining with ultrasonic bonding machine;
4) be that 1.5mm graphite paper is placed on dedicated platform by 3 thickness, heating graphite paper is to 300 degree left and right; The indium metal having melted is coated on graphite paper; Copper wire gauze (thickness is 1.2mm) is put on graphite paper; Again the other one side of copper wire gauze is put on the AZO sleeve that has been coated with metal; Heat packs is cooled to metal-cured, fixes;
5) carry out after oil removing with acetone wiping stainless steel surface, on stainless steel outside surface circumference trisection line, be evenly coated with the wide 1.8cm of last layer, the high-temperature electric conduction glue of thickness 2-3cm; Finally the AZO target of having bound graphite paper is inserted in stainless steel tube, its high-temperature electric conduction glue figure layer is just arranged in three intersegmental gaps of graphite paper.
Bonding force verification method: reference standard GB9796-1988 bonding properties test method.
Reach respectively 20MPa, 25MPa, 27Mpa through the bonding force of test of many times target and all meet the >15Mpa that binding technology requires.》
High temperature resistant verification method: the target of having bound is placed in heat rod, and heat by heat packs target outside.Whether continuous heating to 300 DEG C, observe target and depart from stainless steel.
Through this product of test of many times, in the time being heated to 300 DEG C, target does not have break-off completely.
Degree of adhesion verification method: use water logging ultrasonic wave detector to measure the degree of adhesion of target.All be greater than 90% through repeatedly measuring this products with adhesive degree, meet binding technology requirement.
embodiment 2
Target is ITO, and metal is tin, and every section of width of high-temperature electric conduction glue is 2cm.
Other steps are with embodiment 1.
Bonding force verification method: reference standard GB9796-1988 bonding properties test method.
Reach respectively 20MPa, 25MPa, 27Mpa through the bonding force of test of many times target and all meet the >15Mpa that binding technology requires.》
High temperature resistant verification method: the target of having bound is placed in heat rod, and heat by heat packs target outside.Whether continuous heating to 300 DEG C, observe target and depart from stainless steel.
Through this product of test of many times, in the time being heated to 300 DEG C, target does not have break-off completely.
Degree of adhesion verification method: use water logging ultrasonic wave detector to measure the degree of adhesion of target.All be greater than 90% through repeatedly measuring this products with adhesive degree, meet binding technology requirement.
embodiment 3
Target is NbOx, and metal is silver, and every segment length of high-temperature electric conduction glue is 1.5cm.
Other steps are with embodiment 1.
Bonding force verification method: reference standard GB9796-1988 bonding properties test method.
Reach respectively 20MPa, 25MPa, 27Mpa through the bonding force of test of many times target and all meet the >15Mpa that binding technology requires.》
High temperature resistant verification method: the target of having bound is placed in heat rod, and heat by heat packs target outside.Whether continuous heating to 300 DEG C, observe target and depart from stainless steel.
Through this product of test of many times, in the time being heated to 300 DEG C, target does not have break-off completely.
Degree of adhesion verification method: use water logging ultrasonic wave detector to measure the degree of adhesion of target.All be greater than 90% through repeatedly measuring this products with adhesive degree, meet binding technology requirement.
Although illustrated and described embodiments of the invention above, be understandable that, above-described embodiment is exemplary, can not be interpreted as limitation of the present invention, those of ordinary skill in the art can change above-described embodiment within the scope of the invention in the situation that not departing from principle of the present invention and aim, amendment, replacement and modification.
Claims (7)
1. a sleeve target graphite binding technology, is characterized in that, comprise the steps,
1) stainless steel tube binding: select stainless steel tube as bushing pipe, external diameter car circle to certain diameter is bound;
2) sleeve target binding: sleeve target internal diameter car circle to certain diameter is bound;
3) in step 2) wrap up heat packs on gained target sleeve, target sleeve is heated to 300 degree left and right; The metal having melted is coated in to target sleeve lining with ultrasonic bonding machine;
4) be that 1.5mm graphite paper is placed on dedicated platform by 3 thickness, heating graphite paper is to 300 degree left and right; The metal having melted is coated on graphite paper; Copper wire gauze is put on graphite paper; Again the other one side of copper wire gauze is put on the target sleeve that has been coated with metal; Heat packs is cooled to metal-cured, fixes;
5) finally the target of having bound graphite paper is screwed in step 1) gained stainless steel tube, the intersegmental gap of graphite paper and stainless steel tube 3 is used high-temperature electric conduction glue to fill.
2. graphite binding technology described in claim 1, is characterized in that, described when binding step 1) bushing pipe or step 2) target and backboard between joint portion without bubble, bonding rate is greater than 90%; The thickness of binding material is 2～3mm.
3. graphite binding technology described in claim 1, is characterized in that, described target is AZO, ITO, NbOx or MoNb.
4. graphite binding technology described in claim 1, is characterized in that, described metal is indium, tin or silver.
5. graphite binding technology described in claim 1, is characterized in that, described copper wire gauze is the copper wire gauze that the copper wire of two 0.06mm diameters is formed by stacking.
6. graphite binding technology described in claim 1, is characterized in that, described step 5), for using acetone wiping stainless steel surface to carry out after oil removing, is evenly coated with the wide 1.5-2cm of last layer, the high-temperature electric conduction glue of thickness 2-3cm on stainless steel outside surface circumference trisection line; Finally the target of having bound graphite paper is inserted in stainless steel tube, its high-temperature electric conduction glue figure layer is just arranged in three intersegmental gaps of graphite paper.
7. the product that the arbitrary described method of claim 1-6 obtains.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410270154.2A CN104005001B (en) | 2014-06-18 | 2014-06-18 | A kind of sleeve target graphite binding technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410270154.2A CN104005001B (en) | 2014-06-18 | 2014-06-18 | A kind of sleeve target graphite binding technology |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104005001A true CN104005001A (en) | 2014-08-27 |
| CN104005001B CN104005001B (en) | 2016-09-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410270154.2A Active CN104005001B (en) | 2014-06-18 | 2014-06-18 | A kind of sleeve target graphite binding technology |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104005001B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106032568A (en) * | 2015-03-19 | 2016-10-19 | 汉能新材料科技有限公司 | Sputtering target and binding method thereof |
| CN108486540A (en) * | 2018-05-16 | 2018-09-04 | 上海大学 | A kind of rotary target material binding method |
| CN110129755A (en) * | 2019-06-05 | 2019-08-16 | 深圳市华星光电技术有限公司 | Magnetic control spattering target and magnetic control sputtering device |
| CN110373643A (en) * | 2019-08-21 | 2019-10-25 | 东莞市欧莱溅射靶材有限公司 | A kind of ITO rotary target binding method |
| CN110453187A (en) * | 2019-08-21 | 2019-11-15 | 东莞市欧莱溅射靶材有限公司 | A kind of ITO target pipe and titanium penstock bind pretreated method |
| CN111778486A (en) * | 2019-04-04 | 2020-10-16 | 领凡新能源科技(北京)有限公司 | Rotating target material, and binding method and device for rotating target material |
| CN111926296A (en) * | 2020-07-15 | 2020-11-13 | 先导薄膜材料（广东）有限公司 | Rotary target binding method |
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| JPS6462462A (en) * | 1987-09-01 | 1989-03-08 | Nippon Mining Co | Target assembly parts for ceramics sputtering |
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2014
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106032568A (en) * | 2015-03-19 | 2016-10-19 | 汉能新材料科技有限公司 | Sputtering target and binding method thereof |
| CN108486540A (en) * | 2018-05-16 | 2018-09-04 | 上海大学 | A kind of rotary target material binding method |
| CN108486540B (en) * | 2018-05-16 | 2019-07-02 | 上海大学 | A kind of rotary target material binding method |
| CN111778486A (en) * | 2019-04-04 | 2020-10-16 | 领凡新能源科技(北京)有限公司 | Rotating target material, and binding method and device for rotating target material |
| CN110129755A (en) * | 2019-06-05 | 2019-08-16 | 深圳市华星光电技术有限公司 | Magnetic control spattering target and magnetic control sputtering device |
| CN110129755B (en) * | 2019-06-05 | 2021-08-24 | Tcl华星光电技术有限公司 | Magnetron sputtering target material and magnetron sputtering device |
| CN110373643A (en) * | 2019-08-21 | 2019-10-25 | 东莞市欧莱溅射靶材有限公司 | A kind of ITO rotary target binding method |
| CN110453187A (en) * | 2019-08-21 | 2019-11-15 | 东莞市欧莱溅射靶材有限公司 | A kind of ITO target pipe and titanium penstock bind pretreated method |
| CN111926296A (en) * | 2020-07-15 | 2020-11-13 | 先导薄膜材料（广东）有限公司 | Rotary target binding method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104005001B (en) | 2016-09-07 |
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