CN203834011U - Vacuum pumping interface unit for film plating machine and film plating system - Google Patents
Vacuum pumping interface unit for film plating machine and film plating system Download PDFInfo
- Publication number
- CN203834011U CN203834011U CN201420073797.3U CN201420073797U CN203834011U CN 203834011 U CN203834011 U CN 203834011U CN 201420073797 U CN201420073797 U CN 201420073797U CN 203834011 U CN203834011 U CN 203834011U
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- China
- Prior art keywords
- filtering net
- interface
- coating equipment
- cavity
- described body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005086 pumping Methods 0.000 title claims abstract description 15
- 238000007747 plating Methods 0.000 title abstract description 9
- 239000012634 fragment Substances 0.000 claims abstract description 22
- 238000000151 deposition Methods 0.000 claims abstract description 4
- 238000001914 filtration Methods 0.000 claims description 61
- 238000000576 coating method Methods 0.000 claims description 59
- 239000011248 coating agent Substances 0.000 claims description 58
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 239000011521 glass Substances 0.000 description 19
- 239000000463 material Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 230000000740 bleeding effect Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
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- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
Abstract
The utility model discloses a vacuum pumping interface unit which comprises a body and a filter screen, wherein the body is of a cylindrical structure with an opening end and a seal end; an interface is formed in the side wall of the body; the opening end is connected with the film plating machine, so that the body and a cavity of the film plating machine are communicated; the interface is connected with vacuum pumping equipment; the filter screen is provided with an accommodating cavity and a gap and is accommodated inside the body; the part, provided with the gap, of the filter screen is fixedly arranged on the inner wall of the opening end of the body along the circumferential direction of the body and is used for communicating the accommodating cavity of the filter screen with the cavity of the film plating machine; the part, which is far away from the gap, of the filter screen is placed between the interface and the seal end and is used for depositing fragments entering into the accommodating cavity. The utility model further provides a film plating system which has relatively high production efficiency.
Description
Technical field
The utility model relates to glass coating technical field, particularly relates to a kind of coating equipment with vacuumizing interface arrangement and coating system.
Background technology
Under the impact of many factors, TFT(Thin Film Transistor, thin film transistor) glass easily produces and breaks, and then drop in vacuum cavity in coating process.In quantity-produced process, because the vacuum tightness of entering sheet chamber and slice chamber of vacuum plating unit is lower, need to improve at short notice into the vacuum tightness of sheet chamber and slice chamber with vacuum extractor.And the filtering net that the bleeding point place of traditional vacuum plating unit arranges is plane.In the process of bleeding fast, air-flow can be extracted into bleeding point place glass fragment, is deposited on filtering net.And the glass fragment being deposited on filtering net can block filtering net, and then affect pumping speed.The cleaning glass fragment that needs often to unpack could vacuumize normally, delays the normal production time and increases workload, thereby causing the production efficiency of vacuum plating unit low.
Utility model content
Based on this, be necessary to provide a kind of and have compared with the coating equipment of high efficiency with vacuumizing interface arrangement and coating system.
A kind of coating equipment, with vacuumizing interface arrangement, comprising:
Body, for having the tubular structure of opening end and blind end, and the sidewall of described body is provided with interface, and described opening end is for being connected with coating equipment, so that described body is communicated with the cavity of coating equipment, described interface is used for being connected with vaccum-pumping equipment;
Filtering net, there is container cavity and breach, be placed in described body, described filtering net tool part jaggy is along on the inwall of the opening end that is circumferentially fixed on described body of described body, for the container cavity of described filtering net and the cavity of coating equipment are communicated with, described filtering net away from the part of described breach between described interface and described blind end, for depositing the fragment entering in described container cavity.
In an embodiment, described filtering net contacts away from the part of described breach and the blind end of described body therein.
Therein in an embodiment, the distance of blind end is described body length described in described interface distance 1/3～1/2.
In an embodiment, described filtering net is identical with the shape of described body therein, and the outer wall of described filtering net mates and contacts with the inwall of described body.
In an embodiment, described body and described filtering net are cylindrical therein.
A kind of coating system, comprising:
Coating equipment, has cavity;
Vaccum-pumping equipment; And
Above-mentioned coating equipment is with vacuumizing interface arrangement, and described opening end is connected on described coating equipment, and the container cavity of described body and described filtering net and the cavity of described coating equipment are communicated with; Described interface is connected with described vaccum-pumping equipment by pump-line;
Wherein, described body is positioned on vertical direction in described coating system.
In an embodiment, described filtering net contacts away from the part of described breach and the blind end of described body therein.
Therein in an embodiment, the distance of blind end is described body length described in described interface distance 1/3～1/2.
In an embodiment, described filtering net is identical with the shape of described body therein, and the outer wall of described filtering net mates and contacts with the inwall of described body.
In an embodiment, described body and described filtering net are cylindrical therein.
While adopting above-mentioned coating equipment to work with the coating system that vacuumizes interface arrangement, for example, while producing coated glass.The fragment of the materials such as glass is along with air-flow enters in filtering net, and is deposited in the part of filtering net away from breach.Thereby in quantity-produced process, there will not be the fragment of the materials such as glass to block the situation of filtering net.The fragment of the materials such as cleaning glass does not need to unpack halfway.Only need to be after a production cycle finish, when equipment downtime maintenance, unpack, will be deposited on the fragment sucking-off of the materials such as glass in filtering net with suction cleaner.Therefore,, in quantity-produced process, above-mentioned coating system has higher production efficiency.
Brief description of the drawings
Fig. 1 is the structural representation of the coating system of an embodiment.
Embodiment
For the ease of understanding the utility model, below with reference to relevant drawings, the utility model is described more fully.In accompanying drawing, provide preferred embodiment of the present utility model.But the utility model can be realized with multiple different form, is not limited to embodiment described herein.On the contrary, providing the object of these embodiment is to make to the understanding of disclosure of the present utility model more thoroughly comprehensively.
It should be noted that, when element is called as " being fixed on " another element, it can be directly on another element or also can have an element placed in the middle.When an element is considered to " connection " another element, it can be directly connected to another element or may have centering elements simultaneously.
Unless otherwise defined, all technology that use are herein identical with the implication that belongs to the common understanding of those skilled in the art of the present utility model with scientific terminology.The term using in specification sheets of the present utility model herein, just in order to describe the object of specific embodiment, is not intended to be restriction the utility model.Term as used herein " and/or " comprise one or more relevant Listed Items arbitrarily with all combinations.
As shown in Figure 1, the coating system 10 of an embodiment, comprises that coating equipment 100, vaccum-pumping equipment 200 and coating equipment are with vacuumizing interface arrangement 300.
Coating equipment 100 has cavity 110.In the present embodiment, coating equipment 100 comprise into sheet chamber, coating chamber and slice chamber.Coating equipment 100 has multiple cavitys 110, is respectively the cavity forming into sheet chamber, the cavity of coating chamber formation and the cavity that slice chamber forms.
In the present embodiment, vaccum-pumping equipment 200 is vacuum pump.Be appreciated that in other embodiments, vaccum-pumping equipment 200 can be also other equipment that can vacuumize.
Coating equipment, with vacuumizing interface arrangement 300, comprises body 310 and filtering net 320.
Body 310 is for having the tubular structure of opening end 312 and blind end 314.The sidewall of body 310 is provided with interface 316.Opening end 312 is for being connected with coating equipment 100, so that body 310 is communicated with the cavity 110 of coating equipment 100.Interface 316 is for being connected with vaccum-pumping equipment 300.
Filtering net 320 has container cavity (figure is mark not) and breach (figure is mark not).Filtering net 320 is placed in body 310.Filtering net 320 tool part jaggy is along on the inwall of the opening end that is circumferentially fixed on body 310 312 of body 310, for the container cavity of filtering net 320 and the cavity 110 of coating equipment 100 are communicated with.Filtering net 320 away from the part 322 of breach between interface 316 and blind end 314, for depositing the fragment entering in container cavity.In the present embodiment, the fragment entering in container cavity is glass fragment.Be appreciated that in other embodiments, the fragment entering in container cavity can be also potsherd etc.
Above-mentioned coating equipment is connected on coating equipment 100 with the opening end 312 vacuumizing in interface arrangement 300, and the container cavity of body 310 and filtering net 320 is all communicated with the cavity 110 of coating equipment 100.Interface 316 is connected with vaccum-pumping equipment 200 by pump-line 210.In the present embodiment, body 310 is positioned on vertical direction in coating system 10, to enter fragment in the container cavity of filtering net 320 under the effect of own wt, is deposited in the container cavity of filtering net 320.
Further, in the present embodiment, filtering net 320 contacts away from the part of breach and the blind end 314 of body 310.In the time that the fragment electrodeposition substances such as glass are in filtering net 320, the blind end 314 of body 310 can play certain supporting role to filtering net 320.And then can effectively protect filtering net 320, increase the work-ing life of filtering net 320.
Further, in the present embodiment, interface 316 is 1/3～1/2 of body 310 length apart from the distance of blind end 314.Thereby make filtering net 320 there is enough spaces and deposit the fragment materials such as glass.
Further, in the present embodiment, filtering net 320 is identical with the shape of body 310, and the outer wall of filtering net 320 mates and contacts with the inwall of body 310.Filtering net 320 has definite structure, thereby even if make at filtering net 320 under compared with the effect of air flow, also there will not be filtering net 320 to be positioned at the problem of the inwall contact at interface 315 places.Also be can not be subject to resistance in the process of the fragment materials such as glass in the container cavity that enters filtering net 320.
Further, in the present embodiment, body 310 is all cylindrical with filtering net 320.Be appreciated that in his embodiment, body 310 can all become cuboid with filtering net 320.
While adopting above-mentioned coating equipment to work with the coating system 10 that vacuumizes interface arrangement 300, for example, while producing coated glass.The fragment of the materials such as glass is along with air-flow enters in filtering net 320, and is deposited in the part of filtering net 320 away from breach.Thereby in quantity-produced process, there will not be the fragment of the materials such as glass to block the situation of filtering net 320.The fragment of the materials such as cleaning glass does not need to unpack halfway.Only need to be after a production cycle finish, when equipment downtime maintenance, unpack, will be deposited on the fragment sucking-off of the materials such as glass in filtering net with suction cleaner.Therefore,, in quantity-produced process, above-mentioned coating system 10 has higher production efficiency.
The above embodiment has only expressed several embodiment of the present utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model the scope of the claims.It should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise utility, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.
Claims (10)
1. coating equipment, with vacuumizing an interface arrangement, is characterized in that, comprising:
Body, for having the tubular structure of opening end and blind end, and the sidewall of described body is provided with interface, and described opening end is for being connected with coating equipment, so that described body is communicated with the cavity of coating equipment, described interface is used for being connected with vaccum-pumping equipment;
Filtering net, there is container cavity and breach, be placed in described body, described filtering net tool part jaggy is along on the inwall of the opening end that is circumferentially fixed on described body of described body, for the container cavity of described filtering net and the cavity of coating equipment are communicated with, described filtering net away from the part of described breach between described interface and described blind end, for depositing the fragment entering in described container cavity.
2. coating equipment according to claim 1, with vacuumizing interface arrangement, is characterized in that, described filtering net contacts away from the part of described breach and the blind end of described body.
3. coating equipment according to claim 2, with vacuumizing interface arrangement, is characterized in that, the distance of blind end is described body length described in described interface distance 1/3～1/2.
4. coating equipment according to claim 2, with vacuumizing interface arrangement, is characterized in that, described filtering net is identical with the shape of described body, and the outer wall of described filtering net mates and contacts with the inwall of described body.
5. coating equipment according to claim 4, with vacuumizing interface arrangement, is characterized in that, described body and described filtering net are cylindrical.
6. a coating system, is characterized in that, comprising:
Coating equipment, has cavity;
Vaccum-pumping equipment; And
Coating equipment as claimed in claim 1 is with vacuumizing interface arrangement, and described opening end is connected on described coating equipment, and the container cavity of described body and described filtering net and the cavity of described coating equipment are communicated with; Described interface is connected with described vaccum-pumping equipment by pump-line;
Wherein, described body is positioned on vertical direction in described coating system.
7. coating system according to claim 6, is characterized in that, described filtering net contacts away from the part of described breach and the blind end of described body.
8. coating system according to claim 7, is characterized in that, the distance of blind end is described body length described in described interface distance 1/3～1/2.
9. coating system according to claim 7, is characterized in that, described filtering net is identical with the shape of described body, and the outer wall of described filtering net mates and contacts with the inwall of described body.
10. coating system according to claim 9, is characterized in that, described body and described filtering net are cylindrical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420073797.3U CN203834011U (en) | 2014-02-20 | 2014-02-20 | Vacuum pumping interface unit for film plating machine and film plating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420073797.3U CN203834011U (en) | 2014-02-20 | 2014-02-20 | Vacuum pumping interface unit for film plating machine and film plating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203834011U true CN203834011U (en) | 2014-09-17 |
Family
ID=51511878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420073797.3U Expired - Lifetime CN203834011U (en) | 2014-02-20 | 2014-02-20 | Vacuum pumping interface unit for film plating machine and film plating system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203834011U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107841724A (en) * | 2017-11-03 | 2018-03-27 | 江西合力泰科技有限公司 | Coating machine and film plating process |
| CN115478251A (en) * | 2021-05-26 | 2022-12-16 | 苏州中磐激光科技有限公司 | Optical vacuum coating machine |
-
2014
- 2014-02-20 CN CN201420073797.3U patent/CN203834011U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107841724A (en) * | 2017-11-03 | 2018-03-27 | 江西合力泰科技有限公司 | Coating machine and film plating process |
| CN115478251A (en) * | 2021-05-26 | 2022-12-16 | 苏州中磐激光科技有限公司 | Optical vacuum coating machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140917 |