CN203813960U - MEMS microphone acoustic structure - Google Patents

MEMS microphone acoustic structure Download PDF

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Publication number
CN203813960U
CN203813960U CN201420096738.8U CN201420096738U CN203813960U CN 203813960 U CN203813960 U CN 203813960U CN 201420096738 U CN201420096738 U CN 201420096738U CN 203813960 U CN203813960 U CN 203813960U
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CN
China
Prior art keywords
acoustics
microphone
acoustic
mems microphone
cavity
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Expired - Lifetime
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CN201420096738.8U
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Chinese (zh)
Inventor
叶菁华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yutaixin Microelectronics Technology Shanghai Co Ltd
Zilltek Technology Corp
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Yutaixin Microelectronics Technology Shanghai Co Ltd
Zilltek Technology Corp
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Priority to CN201420096738.8U priority Critical patent/CN203813960U/en
Application granted granted Critical
Publication of CN203813960U publication Critical patent/CN203813960U/en
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Expired - Lifetime legal-status Critical Current

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Abstract

The utility model relates to the technical field of voice processing equipment and particularly relates to a microphone. An MEMS microphone acoustic structure comprises a first layer structure and a second layer structure located on the first layer structure, the first layer structure and the second layer structure form a microphone acoustics cavity, the microphone acoustics cavity is provided with a first acoustics through hole for acquiring a sound signal, an acoustics component is disposed in the microphone acoustics cavity, and the acoustics component is provided with at least two second acoustics through holes. On the basis of the prior art, secondary processing is performed on the sound signal, high-frequency upward can be effectively inhabited, and flat frequency response is obtained; and the MEMS microphone acoustic structure cannot change the single volume of the microphone, so a peripheral sound leading rubber sleeve does not need to be changed, and implementation is easy.

Description

A kind of MEMS microphone acoustic construction
Technical field
The utility model relates to speech processing device technical field, is specifically related to a kind of microphone.
Background technology
Development along with Technology of Mobile Multimedia, people are also more and more higher to the requirement of speech quality, in transfer voice design, MEMS(Micro Electro Mechanical System Microphone, MEMS condenser microphone) microphone techniques is compared due to the size with Bao Er little with the microphone of conventional art, high reliability, high temperature resistantly wait excellent characteristic and be widely used, yet existing MEMS microphone structure in use, voice signal enters microphone acoustics cavity after a diffraction occurs acoustics through hole, after being received by the transducer of microphone acoustics inside cavity, realize electricity output, above-mentioned acoustic construction adopts single order acoustic model, its frequency response is uneven, there is high frequency perk, for hope, obtain the application scenario of flat frequency response, the MEMS microphone acoustic construction of prior art is restricted.
Utility model content
The purpose of this utility model is, a kind of MEMS microphone acoustic construction is provided, and solves above technical problem.
The technical problem that the utility model solves can realize by the following technical solutions:
A kind of MEMS microphone acoustic construction, it is characterized in that, comprise ground floor structure and be positioned at the structural second layer structure of described ground floor, described ground floor structure and described second layer structure form a microphone acoustics cavity, described microphone acoustics cavity is provided with one for obtaining the first acoustics through hole of voice signal, in described microphone acoustics cavity, be provided with an acoustic member, described acoustic member is provided with at least two the second acoustics through holes.
The utility model is by microphone acoustics cavity, acoustic member being set, and voice signal, through the first acoustics through hole and the second acoustics through hole, is realized re-diffraction, on the basis of existing technology, voice signal is carried out to aftertreatment, can effectively suppress high frequency perk, obtain flat frequency response.The utility model can not change microphone monomer volume simultaneously, and peripheral hardware leading note gum cover need not be changed, and is easy to realize.
Preferably, described acoustic member is provided with a plurality of described the second acoustics through holes, and a plurality of described the second acoustics through holes form an array structure on described acoustic member.
Preferably, described the first acoustics through hole is positioned at the side of described microphone acoustics cavity, by described ground floor structure and described second layer textural association, is formed.
Preferably, described acoustic member is mounted on the surface, inside of described microphone acoustics cavity.
Preferably, described acoustic member adopts the acoustic member that silica-base material is made.
Preferably, described acoustic member is positioned at described the first acoustics through hole, is mounted on the surface, inside of described microphone acoustics cavity.
Preferably, at least a portion of described the first acoustics through hole is covered by described acoustic member.
Preferably, ground connection after described acoustic member and described ground floor structure or the electrical connection of described second layer structure.
Preferably, described the first acoustics through hole adopts circle or square structure.
Preferably, in described microphone acoustics cavity, be provided with a transducer and application-specific integrated circuit (ASIC) module, the signal output part of described transducer connects described application-specific integrated circuit (ASIC) module, and described transducer and application-specific integrated circuit (ASIC) module are arranged in described ground floor structure.
Preferably, the utility model is applied in portable mobile termianl.
Beneficial effect: owing to adopting above technical scheme, the utility model by arranging acoustic member in microphone acoustics cavity, voice signal is through the first acoustics through hole and the second acoustics through hole, realize re-diffraction, on the basis of existing technology, voice signal is carried out to aftertreatment, can effectively suppress high frequency perk, obtain flat frequency response; The utility model can not change microphone monomer volume simultaneously, and peripheral hardware leading note gum cover need not be changed, and is easy to realize.
Accompanying drawing explanation
Fig. 1 is system configuration schematic diagram of the present utility model;
Fig. 2 is the structural representation of acoustic member of the present utility model.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, rather than whole embodiment.Embodiment based in the utility model, the every other embodiment that those of ordinary skills obtain under the prerequisite of not making creative work, belongs to the scope that the utility model is protected.
It should be noted that, in the situation that not conflicting, embodiment and the feature in embodiment in the utility model can combine mutually.
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail, but not as restriction of the present utility model.
With reference to Fig. 1, a kind of MEMS microphone acoustic construction, comprise ground floor structure 1 and be positioned at the second layer structure 2 in ground floor structure 1, ground floor structure 1 forms a microphone acoustics cavity with second layer structure 2, microphone acoustics cavity is provided with one for obtaining the first acoustics through hole 3 of voice signal, in microphone acoustics cavity, be provided with an acoustic member 4, acoustic member 4 is provided with at least two the second acoustics through holes 14.
The utility model by arranging acoustic member 4 in microphone acoustics cavity, voice signal is through the first acoustics through hole 3 and the second acoustics through hole 14, realize re-diffraction, on the basis of existing technology, voice signal is carried out to aftertreatment, can effectively suppress high frequency perk, obtain flat frequency response.The utility model can not change microphone monomer volume simultaneously, and peripheral hardware leading note gum cover need not be changed, and is easy to realize.
As further improvement of the utility model, on acoustic member 4, can be provided with a plurality of the second acoustics through holes 14, according to needing, a plurality of the second acoustics through holes 14 are formed to an array structure or other particular arrangement forms on acoustic member 4.Along with ANC(Active Noise Control in mobile phone, active noise is controlled) application of technology, require microphone limit bandwidth at very narrow spectral range, thereby the second acoustics through hole 14 should be as far as possible little, to guarantee to obtain frequency response as well as possible.
The acoustic member 4 that acoustic member 4 of the present utility model adopts silica-base material to make.
As further improvement of the utility model, the first acoustics through hole 3 is positioned at the side of microphone acoustics cavity, forms the microphone of a side sound inlet, and the first acoustics through hole 3 can adopt circle or square structure.The first acoustics through hole 3 is combined by ground floor structure 1 and second layer structure 2.Or microphone acoustics cavity is a multiple-layer stacked structure, the first acoustics through hole 3 by multiple-layer stacked textural association, formed or multiple-layer stacked mechanism on perforate form.When microphone acoustics cavity comprises three-decker and four-layer structure, the first acoustics through hole 3 can be to be formed by ground floor structure, Ji Siceng mechanism of second layer structure Ji Sanceng mechanism common combination.
As a kind of preferred embodiment, acoustic member 4 is positioned at the first acoustics through hole 3 places, is mounted on the surface, inside of microphone acoustics cavity; At least a portion of the first acoustics through hole 3 is covered by acoustic member 4.
As a kind of preferred embodiment, acoustic member 4 and ground floor structure 1 or the rear ground connection of second layer structure 2 electrical connection.
As a kind of preferred embodiment, in microphone acoustics cavity, be provided with a transducer 5 and application-specific integrated circuit (ASIC) module 6, the signal output part of transducer 5 connects application-specific integrated circuit (ASIC) module 6, and transducer 5 and application-specific integrated circuit (ASIC) module 6 are arranged in ground floor structure 1.Microphone acoustics cavity of the present utility model is the external shell of MEMS microphone.
The utility model can be applied to portable mobile termianl, as smart mobile phone, panel computer etc. require in higher place voice signal.Acoustics intercepts does not affect voice signal in passband, can solve on electric and install the indeterminable phase difference problem of low pass filter additional.By changing acoustic member 4 of the present utility model, can suppress high-frequency information so that frequency spectrum reaches demand, avoid uttering long and high-pitched sounds.
The foregoing is only the utility model preferred embodiment; not thereby limit execution mode of the present utility model and protection range; to those skilled in the art; should recognize that being equal to that all utilization the utility model specifications and diagramatic content done replace and the resulting scheme of apparent variation, all should be included in protection range of the present utility model.

Claims (9)

1. a MEMS microphone acoustic construction, it is characterized in that, comprise ground floor structure and be positioned at the structural second layer structure of described ground floor, described ground floor structure and described second layer structure form a microphone acoustics cavity, described microphone acoustics cavity is provided with one for obtaining the first acoustics through hole of voice signal, in described microphone acoustics cavity, be provided with an acoustic member, described acoustic member is provided with at least two the second acoustics through holes.
2. a kind of MEMS microphone acoustic construction according to claim 1, is characterized in that, described acoustic member is provided with a plurality of described the second acoustics through holes, and a plurality of described the second acoustics through holes form an array structure on described acoustic member.
3. a kind of MEMS microphone acoustic construction according to claim 1, is characterized in that, described the first acoustics through hole is positioned at the side of described microphone acoustics cavity, by described ground floor structure and described second layer textural association, is formed.
4. a kind of MEMS microphone acoustic construction according to claim 1, is characterized in that, the acoustic member that described acoustic member adopts silica-base material to make.
5. a kind of MEMS microphone acoustic construction according to claim 1, is characterized in that, described acoustic member is positioned at described the first acoustics through hole, is mounted on the surface, inside of described microphone acoustics cavity.
6. a kind of MEMS microphone acoustic construction according to claim 5, is characterized in that, at least a portion of described the first acoustics through hole is covered by described acoustic member.
7. a kind of MEMS microphone acoustic construction according to claim 1, is characterized in that, ground connection after described acoustic member and described ground floor structure or the electrical connection of described second layer structure.
8. a kind of MEMS microphone acoustic construction according to claim 3, is characterized in that, described the first acoustics through hole adopts circle or square structure.
9. a kind of MEMS microphone acoustic construction according to claim 1, it is characterized in that, in described microphone acoustics cavity, be provided with a transducer and application-specific integrated circuit (ASIC) module, the signal output part of described transducer connects described application-specific integrated circuit (ASIC) module, and described transducer and application-specific integrated circuit (ASIC) module are arranged in described ground floor structure.
CN201420096738.8U 2014-03-04 2014-03-04 MEMS microphone acoustic structure Expired - Lifetime CN203813960U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420096738.8U CN203813960U (en) 2014-03-04 2014-03-04 MEMS microphone acoustic structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420096738.8U CN203813960U (en) 2014-03-04 2014-03-04 MEMS microphone acoustic structure

Publications (1)

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CN203813960U true CN203813960U (en) 2014-09-03

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104902409A (en) * 2014-03-04 2015-09-09 钰太芯微电子科技(上海)有限公司 MEMS microphone acoustic structure
US9936584B2 (en) 2015-06-09 2018-04-03 Zilltek Technology (Shanghai) Corp. Printed circuit board, waterproof microphone and production process thereof
WO2018126151A1 (en) * 2016-12-30 2018-07-05 Knowles Electronics, Llc Microphone assembly with authentication

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104902409A (en) * 2014-03-04 2015-09-09 钰太芯微电子科技(上海)有限公司 MEMS microphone acoustic structure
US9936584B2 (en) 2015-06-09 2018-04-03 Zilltek Technology (Shanghai) Corp. Printed circuit board, waterproof microphone and production process thereof
WO2018126151A1 (en) * 2016-12-30 2018-07-05 Knowles Electronics, Llc Microphone assembly with authentication
CN110100259A (en) * 2016-12-30 2019-08-06 美商楼氏电子有限公司 Microphone assembly with certification
US11163521B2 (en) 2016-12-30 2021-11-02 Knowles Electronics, Llc Microphone assembly with authentication

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Granted publication date: 20140903