CN203812861U - Manipulator structure - Google Patents
Manipulator structure Download PDFInfo
- Publication number
- CN203812861U CN203812861U CN201420223500.7U CN201420223500U CN203812861U CN 203812861 U CN203812861 U CN 203812861U CN 201420223500 U CN201420223500 U CN 201420223500U CN 203812861 U CN203812861 U CN 203812861U
- Authority
- CN
- China
- Prior art keywords
- track
- portable plate
- robot manipulator
- manipulator structure
- fixed head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Manipulator (AREA)
Abstract
The utility model provides a manipulator structure. An active plate (2) of the manipulator structure is provided with multiple recessed tracks (3). The multiple tracks (3) are in non-parallel arrangements, and a movable suction pole (4) is mounted in every track (3). The multiple movable suction poles (4) are respectively connected with a driving adjusting part (1). The driving adjusting part (1) is a structure which can drive multiple movable suction poles (4) to move up and down along the multiple tracks (3) respectively. The manipulator structure has high automation degree, and the adjustment of space among the movable suction poles can be achieved without manual manipulation of workers; the manipulator structure has high adjustment precision, and a servo motor can finish different space adjustment of the movable suction poles only in one second; and the manipulator structure has strong expansibility, different quantity of movable suction poles can be expanded according to actual production requirement.
Description
Technical field
The utility model belongs to semi-conductive production process equipment technical field, more particularly, relates to a kind of robot manipulator structure.
Background technology
In production process of semiconductor, the supplied materials of semiconductor chip is generally all contained in equally spaced pallet, and shipment mode is to be also placed in equally spaced pallet or braid.Therefore in semiconductor production, the application that uses manipulator that semiconductor chip is carried from equally spaced pallet or braid is very extensive.Because single manipulator cannot meet the needs of present large-scale production, the general cooperative mode of multiple manipulators that adopts of current semiconductor equipment.Existing semiconductor equipment mainly contains three kinds of modes: the mode of 1) manually adjusting, manually unclamp the screw on soup stick by instrument, and move left and right the position that needs arrive, and then manually tighten fixed screw.Defect and the weak point of this structure are: spended time is longer, adjust precision inadequate; 2) automatic regulative mode at a slow speed, the robot device of which, allows this device be adjusted to one by one the position needing by row's manipulator is set.Defect and the weak point of this structure are: precision is higher, but speed is too slow, spended time is long by 3) mode of fast automatic adjusting, the device of this structure, two manipulators are fixed on a belt, belt can move left and right under the drive of motor and belt pulley, therefore can impartially adjust manipulator spacing.Its defect and weak point are: although precision is high, speed is also fast, and the quantity of manipulator very little, is only limit 2 manipulators.
Utility model content
Technical problem to be solved in the utility model is: for the deficiencies in the prior art, provide a kind of simple in structure, can realize quickly and easily multiple movable soup stick gap adjustment, thereby meet the robot manipulator structure of the requirement to movable soup stick different spacing in production process of semiconductor.
Solve above-described technical problem, the technical scheme that the utility model is taked is:
The utility model is a kind of robot manipulator structure, described robot manipulator structure comprises driving adjustment member, portable plate, the recessed track of multiple tracks is set on portable plate, between multiple tracks track, be set to the structure of non-parallel layout, a movable soup stick is installed respectively in each track, and multiple movable soup sticks are connected with driving adjustment member respectively, drive adjustment member to be set to the structure that can drive multiple movable soup sticks to move up and down along each track.
Described robot manipulator structure also comprises fixed head, fixed head is flexibly connected with portable plate, drive adjustment member to be connected with portable plate, drive adjustment member to be set to the structure that can drive the relative fixed head of portable plate to move up and down, the fluting of one horizontal arrangement is set on fixed head, horizontal slide rail is installed in fluting, laterally on slide rail, multiple slide blocks are installed in activity, slide block rearward end is inlaid in respectively in a track, and a movable soup stick is installed respectively by each slip front portion.
Described driving adjustment member comprises servomotor, screw mandrel, screw mandrel one end is connected with servomotor, the screw mandrel other end is set to the structure through the silk hole on portable plate, servomotor is connected with the driver that can control servomotor start and stop and positive and negative rotation, the structure that servomotor can drive respectively portable plate to move up and down while being set to positive and negative rotation.
Described per pass track comprises respectively track upper end and track bottom, and between the track upper end of every twice track, distance is set to be greater than the structure of distance between two track bottoms.
Described track is set to " one " character form structure, the left part of described fixed head and right part arrange respectively a upper and lower slide rail, in two described upper and lower slide rails, be arranged on respectively on two upper sliding blocks, two upper sliding blocks are connected with portable plate left part and right part respectively.
The card column portion that a protrusion is set respectively in the rearward end of described each slide block, each slide block is installed in multiple tracks by card column portion respectively.
Described robot manipulator structure also comprises a fixing soup stick, and fixing soup stick is connected with fixed head left part.
Adopt the technical solution of the utility model, can obtain following beneficial effect:
Robot manipulator structure described in the utility model, can realize portable plate moves up and down with respect to fixed head, in the time driving adjustment member to drive portable plate to move up and down, the multiple slide blocks that are inlaid in multiple tracks move up and down along track respectively, because track is set to non-parallel structure, in the time that portable plate moves downward, between multiple slide blocks in different tracks, distance is dwindled, when portable plate moves upward, between multiple slide blocks in different tracks, distance increases, because multiple movable soup sticks are connected with multiple slide blocks respectively, like this, between multiple slide blocks when change of distance, reached the problem that regulates distance between multiple movable soup sticks.Structure of the present utility model, automaticity is high, when adjusting activity soup stick spacing, without operation manually, is automatically adjusted by driving adjustment member completely; Degree of regulation is high.The mode that adopts portable plate, fixed head, servomotor, leading screw, slide rail and slide block to work in coordination, adjusts precision and can reach 0.02mm, thereby guarantee to even out precision.Speed is fast.Servomotor only need just can complete the conversion of each movable soup stick different spacing size in one second, and completed the adjustment of spacing between multiple movable soup sticks simultaneously; Autgmentability is strong.Can be according to producing actual needs, the movable soup stick of expansion varying number, the scope of application of raising the utility model device.
Brief description of the drawings
Mark in the each accompanying drawing of this specification expressed content and figure is made to brief description below:
Fig. 1 is the overall structure schematic diagram of robot manipulator structure described in the utility model;
Fig. 2 be robot manipulator structure described in the utility model fixed head face structural representation;
Fig. 3 be robot manipulator structure described in the utility model portable plate face structural representation;
Fig. 4 is the backsight structural representation of the fixed head of robot manipulator structure described in the utility model;
Accompanying drawing acceptance of the bid note is respectively: 1, drive adjustment member; 2, portable plate; 3, track; 4, movable soup stick; 5, fixed head; 6, fluting; 7, horizontal slide rail; 8, slide block; 9, servomotor; 10, screw mandrel; 11, driver; 12, track upper end; 13, track bottom; 14, upper and lower slide rail; 15, upper sliding block; 16, card column portion; 17, fixing soup stick.
Embodiment
Contrast accompanying drawing below, by the description to embodiment, embodiment of the present utility model is described in further detail as effect and the operation principle etc. of the mutual alignment between the shape of related each member, structure, each several part and annexation, each several part:
As shown in accompanying drawing 1-accompanying drawing 4, the utility model is a kind of robot manipulator structure, described robot manipulator structure comprises driving adjustment member 1, portable plate 2, the recessed track of multiple tracks 3 is set on described portable plate 2, is set to the structure of non-parallel layout between multiple tracks track 3, each track 3 is interior installs respectively a movable soup stick 4, multiple movable soup sticks 4 are connected with driving adjustment member 1 respectively, drive adjustment member 1 to be set to the structure that can drive multiple movable soup sticks 4 to move up and down along each track 3.Like this, in the time driving adjustment member 1 to drive portable plate 2 to move up and down, the multiple slide blocks 8 that are inlaid in multiple tracks 3 move up and down along track 3 respectively, because track 3 is set to non-parallel structure, in the time that portable plate 2 moves downward, between multiple slide blocks 8 in different tracks 3, distance is dwindled, when portable plate 2 moves upward, between multiple slide blocks in different tracks 3, distance increases, because multiple movable soup sticks 4 are connected with multiple slide blocks 8 respectively, like this, between multiple slide blocks 8, when change of distance, reached the problem that regulates distance between multiple movable soup sticks 4.
Described robot manipulator structure also comprises fixed head 5, fixed head 5 is flexibly connected with portable plate 2, drive adjustment member 1 to be connected with portable plate 2, drive adjustment member 1 to be set to the structure that can drive the relative fixed head 5 of portable plate 2 to move up and down, the fluting 6 of one horizontal arrangement is set, the horizontal slide rail 7 of fluting 6 interior installation, the laterally multiple slide blocks 8 of movable installation on slide rail 7 on fixed head 5, slide block 8 rearward end are inlaid in respectively in a track 3, and each slide block 8 leading sections are installed respectively a movable soup stick 4.
Described per pass track 3 comprises respectively track upper end 12 and track bottom 13, and between the track upper end 12 of every twice track 3, distance is set to be greater than the structure of distance between two track bottoms 13.Such structure setting, in the time driving adjustment member to drive portable plate to move up and down with respect to fixed head, multiple slide blocks move from the top down, during respectively from the track upper end 12 of track separately to the 13 directions motion of track bottom, because distance between the track upper end 12 of every twice track 3 is greater than distance between two track bottoms 13, like this, slide block is in motion process, distance between slide block is a process from large to small, and the process that between the multiple movable soup stick that is connected respectively of multiple slide block, distance is constantly dwindled, in like manner, when slide block moves from track bottom 13 to track upper end 12, distance between multiple slide blocks is a process of changing from small to big, distance constantly becomes large process and between the multiple movable soup stick that is connected respectively of multiple slide block, slide block is when along rail moving, move freely along cross track simultaneously.
Described driving adjustment member 1 comprises servomotor 9, screw mandrel 10, screw mandrel 10 one end are connected with servomotor 9, screw mandrel 10 other ends are set to the structure through the silk hole on portable plate 2, servomotor 9 is connected with the driver 11 that can control servomotor 9 start and stop and positive and negative rotation, the structure that servomotor 9 can drive respectively portable plate 2 to move up and down while being set to positive and negative rotation.Servomotor 9 drives screw mandrel 10 to rotate, and in the time that servomotor 9 drives screw mandrel 10 forward, portable plate 2 moves upward with respect to fixed head 5, and when servomotor 9 drives screw mandrel 10 to reverse, portable plate 2 moves downward with respect to fixed head 5.
Described track 3 is set to " one " character form structure, the left part of described fixed head 5 and right part arrange respectively a upper and lower slide rail 14, two described upper and lower slide rails 14 are interior to be arranged on respectively on two upper sliding blocks 15, and two upper sliding blocks 15 are connected with portable plate 2 left parts and right part respectively.
The card column portion 16 of a protrusion is set respectively in the rearward end of described each slide block 8, and each slide block 8 is installed in multiple tracks 3 by card column portion 16 respectively.
Described robot manipulator structure also comprises a fixing soup stick 17, and fixing soup stick 17 is connected with fixed head 5 left parts.
Robot manipulator structure described in the utility model, can realize portable plate moves up and down with respect to fixed head, in the time driving adjustment member to drive portable plate to move up and down, the multiple slide blocks that are inlaid in multiple tracks move up and down along track respectively, because track is set to non-parallel structure, in the time that portable plate moves downward, between multiple slide blocks in different tracks, distance is dwindled, when portable plate moves upward, between multiple slide blocks in different tracks, distance increases, because multiple movable soup sticks are connected with multiple slide blocks respectively, like this, between multiple slide blocks when change of distance, reached the problem that regulates distance between multiple movable soup sticks.Structure of the present utility model, automaticity is high, when adjusting activity soup stick spacing, without operation manually, is automatically adjusted by driving adjustment member completely; Degree of regulation is high.The mode that adopts portable plate, fixed head, servomotor, leading screw, slide rail and slide block to work in coordination, adjusts precision and can reach 0.02mm, thereby guarantee to even out precision.Speed is fast.Servomotor only need just can complete the conversion of each movable soup stick different spacing size in one second, and completed the adjustment of spacing between multiple movable soup sticks simultaneously; Autgmentability is strong.Can be according to producing actual needs, the movable soup stick of expansion varying number, the scope of application of raising the utility model device.
By reference to the accompanying drawings the utility model is carried out to exemplary description above; obviously the concrete realization of the utility model is not subject to the restrictions described above; as long as the various improvement that adopted method design of the present utility model and technical scheme to carry out; or without improving, design of the present utility model and technical scheme are directly applied to other occasions, all in protection range of the present utility model.
Claims (7)
1. a robot manipulator structure, it is characterized in that: described robot manipulator structure comprises driving adjustment member (1), portable plate (2), on described portable plate (2), the recessed track of multiple tracks (3) is set, between multiple tracks track (3), be set to the structure of non-parallel layout, a movable soup stick (4) is installed respectively in each track (3), multiple movable soup sticks (4) are connected with driving adjustment member (1) respectively, drive adjustment member (1) to be set to the structure that can drive multiple movable soup sticks (4) to move up and down along each track (3).
2. robot manipulator structure according to claim 1, it is characterized in that: described robot manipulator structure also comprises fixed head (5), fixed head (5) is flexibly connected with portable plate (2), drive adjustment member (1) to be connected with portable plate (2), drive adjustment member (1) to be set to drive portable plate (2) structure that fixed head (5) moves up and down relatively, the fluting (6) of one horizontal arrangement is set on fixed head (5), horizontal slide rail (7) is installed in fluting (6), the laterally upper movable multiple slide blocks (8) of installing of slide rail (7), slide block (8) rearward end is inlaid in respectively in a track (3), each slide block (8) leading section is installed respectively a movable soup stick (4).
3. robot manipulator structure according to claim 2, it is characterized in that: described driving adjustment member (1) comprises servomotor (9), screw mandrel (10), screw mandrel (10) one end is connected with servomotor (9), screw mandrel (10) other end is set to the structure through the silk hole on portable plate (2), servomotor (9) is connected with the driver (11) that can control servomotor (9) start and stop and positive and negative rotation, the structure that servomotor (9) can drive respectively portable plate (2) to move up and down while being set to positive and negative rotation.
4. robot manipulator structure according to claim 3, it is characterized in that: described per pass track (3) comprises respectively track upper end (12) and track bottom (13), between the track upper end (12) of every twice track (3), distance is set to be greater than the structure of distance between two track bottoms (13).
5. robot manipulator structure according to claim 4, it is characterized in that: described track (3) is set to " one " character form structure, left part and the right part of described fixed head (5) arrange respectively a upper and lower slide rail (14), in described two upper and lower slide rails (14), be arranged on respectively two upper sliding blocks (15) upper, two upper sliding blocks (15) are connected with portable plate (2) left part and right part respectively.
6. robot manipulator structure according to claim 5, it is characterized in that: the card column portion (16) of a protrusion is set respectively in the rearward end of described each slide block (8), and each slide block (8) is installed in multiple tracks (3) by card column portion (16) respectively.
7. robot manipulator structure according to claim 6, is characterized in that: described robot manipulator structure also comprises a fixing soup stick (17), and fixing soup stick (17) is connected with fixed head (5) left part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420223500.7U CN203812861U (en) | 2014-05-04 | 2014-05-04 | Manipulator structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420223500.7U CN203812861U (en) | 2014-05-04 | 2014-05-04 | Manipulator structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203812861U true CN203812861U (en) | 2014-09-03 |
Family
ID=51451580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420223500.7U Expired - Fee Related CN203812861U (en) | 2014-05-04 | 2014-05-04 | Manipulator structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203812861U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105223387A (en) * | 2015-10-12 | 2016-01-06 | 昆山鸿志犀自动化机电设备有限公司 | Roll adjustment module, roll adjustment are held concurrently translating device and application apparatus |
-
2014
- 2014-05-04 CN CN201420223500.7U patent/CN203812861U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105223387A (en) * | 2015-10-12 | 2016-01-06 | 昆山鸿志犀自动化机电设备有限公司 | Roll adjustment module, roll adjustment are held concurrently translating device and application apparatus |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104626282B (en) | A kind of sheet material porous full automatic processing device and processing method thereof | |
| CN104308323B (en) | Numerical control flat plate/round pipe cutting system | |
| CN104608206A (en) | Automatic processing auxiliary fixture for plates and processing method thereof | |
| CN104608218B (en) | A kind of plank full-automatic slot device and processing method thereof | |
| CN203919412U (en) | A kind of pitch-row automatic positioning equipment of glass drilling machine | |
| CN204365944U (en) | Three axle rivet drivers | |
| CN204585435U (en) | A kind of plank grooving apparatus being convenient to locate | |
| CN203720657U (en) | Electric-control walking mechanism of strip steel coating quality on-line detector | |
| CN104608216A (en) | Automatic beveled-edge board slotting device and machining method thereof | |
| CN203812861U (en) | Manipulator structure | |
| CN204585415U (en) | A kind of sheet material automatic positioning equipment | |
| CN204585400U (en) | A kind of full-automatic board two dimension drilling equipment | |
| CN205684793U (en) | A kind of large-scale universal milling machine | |
| CN104608217A (en) | Easy-to-position board slotting device and production method thereof | |
| CN104626285A (en) | Full-automatic two-dimensional beveled plate drilling device and machining method thereof | |
| CN202805320U (en) | Automatic tapping device for foam sponge | |
| CN202897460U (en) | Workpiece positioning device | |
| CN204585414U (en) | A kind of sheet material processes auxiliary mould automatically | |
| CN203254159U (en) | Work table structure of one-way numerically-controlled automatic glass drilling machine | |
| CN103203634A (en) | Operating platform structure of unidirectional numerical-control automatic glass drilling machine | |
| CN204585436U (en) | A kind of hypotenuse plank automatic slotting device | |
| CN204155863U (en) | Circuit breaker assembling line product specification automatic dialing unit | |
| CN203738502U (en) | Full-automatic numerical control gear grinding machine | |
| CN203739439U (en) | Execution mechanism of marking machine | |
| CN203696390U (en) | Automatic assembling machine for gantry U-shaped rib |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140903 Termination date: 20150504 |
|
| EXPY | Termination of patent right or utility model |