CN203772766U

CN203772766U - Device for realizing small-angle X-ray diffraction function

Info

Publication number: CN203772766U
Application number: CN201420046741.9U
Authority: CN
Inventors: 季振国; 席俊华; 刘永强
Original assignee: Hangzhou Dianzi University
Current assignee: Hangzhou Dianzi University
Priority date: 2014-01-24
Filing date: 2014-01-24
Publication date: 2014-08-13
Anticipated expiration: 2024-01-24

Abstract

The utility model discloses a device for realizing small-angle X-ray diffraction (SAXRD) function. The device for realizing SAXRD function comprises an X-ray light source, an X-ray exit slit, a sample platform, an X-ray reception slit, an X-ray detector, a worm and gear lifting device and a step motor, wherein the X-ray light source, the sample platform and the X-ray detector are arranged in a same plane; the X-ray exit slit is arranged on the X-ray light source; the X-ray reception slit is arranged on the X-ray detector; the lower bottom surface of the sample platform is connected with the worm and gear lifting device; the worm and gear lifting device is driven by the step motor. Through an adjustment method of transforming a common XRD (X-Ray Diffraction) diffraction instrument and matching the disclosed sample platform, the X-ray light source and the X-ray detector, the device is capable of realizing the SAXRD function on common XRD diffraction instruments with extremely low cost.

Description

A kind of device of realizing small angle X-ray diffraction function

Technical field

The utility model relates to the analysis and testing technology of material, relates in particular to a kind of device of realizing small angle X-ray diffraction function.

Background technology

Small angle X-ray diffraction (SAXRD) is a kind of material analysis measuring technology, has important application in nano material, macromolecular material, biological macromolecule material and membraneous material field.Different from common X-ray diffraction technology (XRD), the having relatively high expectations of the matching requirements of SAXRD to instrument and operative skill, and because signal is weak thereby need stronger x-ray source.Therefore, early stage SAXRD completes in Synchrotron Radiation.Along with the development of X-ray tube and weak X-ray detection technology, can in common laboratory, carry out SAXRD experiment at present.But the requirement of the matching requirements of SAXRD to instrument and operative skill is still very high.The price of separate unit SAXRD equipment is generally all more than 1,000,000 yuan, and debugging is very difficult, is not difficult to obtain perfect SAXRD spectrogram through the operating personnel of professional training.

Summary of the invention

The utility model, for the deficiencies in the prior art, has proposed a kind of device of realizing small angle X-ray diffraction function.

A kind of device of realizing small angle X-ray diffraction function comprises that X ray light source, X ray exit slit, sample stage, X ray receive slit, X-ray detector, turbine and worm jacking gear and step motor.

Described X ray light source, sample stage, X-ray detector are arranged in same plane, X ray light source is provided with X ray exit slit, X-ray detector is provided with X ray and receives slit, the bottom surface of sample stage connects turbine and worm jacking gear, and turbine and worm jacking gear drives by step motor.

Angle, the X ray that the width of described X ray exit slit and sample stage center O are opened receives the width of slit and the angle that sample stage center O is opened is all less than or equal to 0.01 degree;

Described sample stage height is accurately adjustable, and step-length is less than or equal to 0.01mm.

A kind of method that realizes small angle X-ray diffraction function: specifically comprise the following steps:

Step 1: diffraction instrument is set and enters non-linkage pattern, be i.e. incident angle α and emergence angle β independence adjustable mode;

Step 2: fall sample stage, make the X ray sending from X-ray tube exit slit can unobstructedly reach reception slit; Regulate incident angle α and emergence angle β, the signal of receiver is maximized, write down maximal value M;

Step 3: Quality control platform lifting step motor, promote gradually sample stage, make the signal of receiver be less than or equal to 0.5M;

Step 4: regulate incident angle α and emergence angle β, the signal of receiver is maximized; If the maximal value now recording is less than or equal to 0.5M, enter step 5; Otherwise repeating step four, until maximal value is less than or equal to 0.5M;

Step 5: setting into firing angle α is 0, setting out firing angle β is 0;

Step 6: diffractometer is set and enters linkage pattern, i.e. α=beta model, sample stage arranges work and completes, and diffractometer can carry out little angle XRD test.

The beneficial effects of the utility model: by transforming common XRD diffractometer device, be equipped with the control method of sample stage, X source and the detector of our proposition, cost that can be extremely low is realized the function of SAXRD on common XRD diffractometer; The method the utility model proposes has the advantages that device is simple, precision is high, simple to operate, and cost performance is high.

Brief description of the drawings

Fig. 1 is the structural representation of a kind of device of realizing small angle X-ray diffraction function of the utility model;

Fig. 2 is the SAXRD spectral line obtaining from thermal oxide silicon chip sample in the utility model embodiment.

Embodiment

As shown in Figure 1, a kind of device of realizing small angle X-ray diffraction function comprises that X ray light source 1, X ray exit slit 2, sample stage 3, X ray receive slit 4, X-ray detector 5, turbine and worm jacking gear 6 and step motor 7.

Described X ray light source 1, sample stage 3, X-ray detector 5 are arranged in same plane, on X ray light source 1, be provided with X ray exit slit 2, X-ray detector 5 is provided with X ray and receives slit 4, the bottom surface of sample stage 3 connects turbine and worm jacking gear 6, and turbine and worm jacking gear 6 drives by step motor 7.

Angle, the X ray that the width of described X ray exit slit 2 and sample stage center O are opened receives the width of slit 4 and the angle that sample stage center O is opened is all less than or equal to 0.01 degree;

The angle that described sample stage height degree of regulation numerical value and outgoing and reception slit width form is all less than or equal to 0.01 degree.

Embodiment

Utilize the dry-oxygen oxidation technique different silica membranes of a slice thickness of having grown on silicon chip.Accompanying drawing 2 has provided the small angle X-ray diffraction curve that utilizes the apparatus and method of this patent proposition to collect at common X-ray diffractometer.From figure, can observe significantly the oscillation of intensity forming due to interference effect.From formula can calculate the thickness of silicon dioxide layer in sample and be respectively 3.5nm.Visible, sample stage jacking gear and method that we propose can realize SAXRD function completely on common XRD spectrometer.

Claims

1. realize a device for small angle X-ray diffraction function, comprise that X ray light source, X ray exit slit, sample stage, X ray receive slit, X-ray detector, turbine and worm jacking gear and step motor;

It is characterized in that: described X ray light source, sample stage, X-ray detector are arranged in same plane, X ray light source is provided with X ray exit slit, X-ray detector is provided with X ray and receives slit, the bottom surface of sample stage connects turbine and worm jacking gear, and turbine and worm jacking gear drives by step motor.

2. a kind of device of realizing small angle X-ray diffraction function according to claim 1, is characterized in that: the angle that the width of described X ray exit slit and sample stage center O are opened is less than or equal to 0.01 degree.

3. a kind of device of realizing small angle X-ray diffraction function according to claim 1, is characterized in that: described X ray receives the width of slit and the angle that sample stage center O is opened is less than or equal to 0.01 degree.

4. a kind of device of realizing small angle X-ray diffraction function according to claim 1, is characterized in that: described sample stage height can fine adjustment, and step-length is less than or equal to 0.01mm.