CN203768453U - Belt breakage failure alarm detection device of film-plating rotating cathode - Google Patents
Belt breakage failure alarm detection device of film-plating rotating cathode Download PDFInfo
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- CN203768453U CN203768453U CN201420082865.2U CN201420082865U CN203768453U CN 203768453 U CN203768453 U CN 203768453U CN 201420082865 U CN201420082865 U CN 201420082865U CN 203768453 U CN203768453 U CN 203768453U
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- belt
- encoder
- rotating
- speed
- rotating cathode
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- Control Of Electric Motors In General (AREA)
Abstract
The utility model discloses a belt breakage failure alarm detection device of a film-plating rotating cathode. The device comprises a rotating target, a rotating motor, an encoder, a prompter and a control system, wherein the rotating target and the rotating motor are in transmission through a belt; the rotating motor is connected with a frequency changer, and the frequency changer is connected with the control system; the frequency changer drives the rotating motor and monitors the current rotating speed of the rotating motor; the encoder detects the speed of the belt and is fixed through fixing members, and a front end roller of the encoder is in contact with the belt; a signal line of the encoder is electrically connected with a signal terminal of the frequency changer; the prompter is connected with the control system. According to the belt breakage failure alarm detection device of the film-plating rotating cathode, through additionally arranging the encoder which is used for detecting the speed of the belt in real time, the speed of the belt reflects the speed of the rotating target, once the belt is broken, the speed of the belt can not be detected by the encoder, the condition that the transmission is in failure is shown, an alarm is issued timely, a power supply of the rotating cathode is cut off, and then, the target can be excellently protected from being damaged.
Description
Technical field
The utility model relates to a kind of proofing unit, in particular a kind of plated film rotating cathode belt fracture fault alarm proofing unit.
Background technology
Cathode sputtering is an of paramount importance procedure during plated film is produced, and the quality of its sputter quality directly has influence on the structural of coated product rete.Rotating cathode is compared with planar cathode, rotating cathode can improve the rate of utilization of target and reduce the possibility of falling slag, therefore rotating cathode extensively applies on coating film production line, rotating cathode type of drive is that variable-frequency motor is main transmission, with belt driven rotary, rotating cathode rotation that needs to remain a constant speed in the process of work, to ensure the homogeneity of sputter, but in actual production process, rotating cathode occurs because bearing necrosis causes the situation that pulley belt is pulled off sometimes, after belt fracture, rotary target stops operating, because Controlling System is that fault using variable-frequency motor is as alarm set point, and in fact variable-frequency motor is still being worked, therefore, system is not sent any failure warning, staff can not pinpoint the problems in time, and when rotary target is in the situation that stopping operating and do not cut off the electricity supply, the region of sputter can focus on some positions of target, if cut off the electricity supply not in time, can cause target to burn out, bring loss economically, possibility damage equipment when serious, consequence is hardly imaginable.
Therefore, prior art has yet to be improved and developed.
Summary of the invention
The purpose of this utility model is to provide a kind of plated film rotating cathode belt fracture fault alarm proofing unit, is intended to solve existing rotating cathode because bearing necrosis causes can not giving the alarm in time after belt fracture, burns out the technical problem of rotary target.
The technical solution of the utility model is as follows: a kind of plated film rotating cathode belt fracture fault alarm proofing unit, wherein, comprise rotary target material, rotating machine, encoder, prompting device and Controlling System, and described rotary target material and rotating machine pass through belt transmission; Rotating machine is connected with frequency transformer, and frequency transformer is connected with Controlling System; Transducer drive rotating machine, frequency transformer is monitored the rotating speed of rotating machine at that time; Encoder detects the speed of belt, and encoder is fixed by mounting block, and encoder front end roller contacts with belt; Code device signal line is electrically connected with frequency transformer signal terminal; Prompting device is connected with Controlling System.
Described plated film rotating cathode belt fracture fault alarm proofing unit, wherein, described encoder also comprises the setting device of adjusting mounting block position.
Described plated film rotating cathode belt fracture fault alarm proofing unit, wherein, described prompting device is pilot lamp or hummer.
The beneficial effects of the utility model: the utility model is by providing a kind of plated film rotating cathode belt fracture fault alarm proofing unit; this plated film rotating cathode belt fracture fault alarm proofing unit detects the speed of belt in real time by increasing by an encoder; the speed of belt reflect the speed of rotary target material; once after belt fracture; encoder can't detect the speed of belt; illustrate that transmission is out of order; give the alarm in time; cut off rotating cathode power supply, can protect well target to avoid damaging.
Brief description of the drawings
Fig. 1 is the structural representation of plated film rotating cathode belt fracture fault alarm proofing unit in the utility model.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, clear and definite, referring to the accompanying drawing embodiment that develops simultaneously, the utility model is further described.
As shown in Figure 1, be the structural representation of plated film rotating cathode belt fracture fault alarm proofing unit in the utility model.Described plated film rotating cathode belt fracture fault alarm proofing unit comprises rotary target material 100, rotating machine 200, encoder 300, prompting device and Controlling System 400, and described rotary target material 100 and rotating machine 200 are by belt 210 transmissions, rotating machine 200 is connected with frequency transformer 500, and frequency transformer 500 is connected with Controlling System 400, frequency transformer 500 is for driving rotating machine 200, and in the time that rotating machine 200 is worked, frequency transformer 500 can also be used for monitoring the rotating speed of rotating machine 200 at that time, encoder 300 is for detection of the speed of belt 210, and encoder 300 is fixed by mounting block, and encoder 300 front end rollers contact with belt 210, encoder 300 signal wires are electrically connected with frequency transformer 500 signal terminals, prompting device is connected with Controlling System 400: in the time that rotary target material 100 is worked under rotating machine 200 drives by belt 210, the pulse signal of encoder 300 feeds back to frequency transformer 500, compare with the speed of rotating machine 200, in the time that the speed of rotating machine 200 and the actual speed difference detecting exceed the difference range that frequency transformer 500 sets, frequency transformer 500 gives the alarm signal to Controlling System 400, Controlling System 400 is controlled the high-voltage power supply of automatically cutting off rotary target material 100, Controlling System 400 is controlled and is triggered prompting device, remind staff's device fails, reach the object that prevents that rotary target material 100 from burning out.
Described rotary target material 100 is connected with high-voltage power supply, excites the Particles Moving on rotary target material 100 to deposit on anode by high-voltage power supply, completes the sputter procedure of rotating cathode.
Described prompting device can be pilot lamp, can be also hummer, can also be other suggestion devices.
Because belt 210 is tough gonosomes, after life-time service, have relaxation phenomenon, thereby cause encoder 300 to have the phenomenon of skidding, cause the data of detection inaccurate, wrong report mistake, therefore encoder 300 also comprises the setting device of adjusting mounting block position, anchor designs becomes position adjustable, thereby can adjust according to the rate of tension appropriateness of belt the position of encoder 300: when the lax encoder 300 front end wheel slips that cause occur belt 210, adjust the position of mounting block by setting device, thereby adjust the position of encoder 300 and front end roller, ensure not contacting and can skid between encoder 300 front end rollers and belt 210.
This plated film rotating cathode belt fracture fault alarm proofing unit detects the speed of belt in real time by increasing by an encoder; the speed of belt reflect the speed of rotary target material; once after belt fracture; encoder can't detect the speed of belt; illustrate that transmission is out of order; give the alarm in time, cut off rotating cathode power supply, can protect well target to avoid damaging.
Should be understood that; application of the present utility model is not limited to above-mentioned giving an example; for those of ordinary skills, can be improved according to the above description or convert, all these improvement and conversion all should belong to the protection domain of the utility model claims.
Claims (3)
1. a plated film rotating cathode belt fracture fault alarm proofing unit, is characterized in that, comprises rotary target material, rotating machine, encoder, prompting device and Controlling System, and described rotary target material and rotating machine pass through belt transmission; Rotating machine is connected with frequency transformer, and frequency transformer is connected with Controlling System; Transducer drive rotating machine, frequency transformer is monitored the rotating speed of rotating machine at that time; Encoder detects the speed of belt, and encoder is fixed by mounting block, and encoder front end roller contacts with belt; Code device signal line is electrically connected with frequency transformer signal terminal; Prompting device is connected with Controlling System.
2. plated film rotating cathode belt fracture fault alarm proofing unit according to claim 1, is characterized in that, described encoder also comprises the setting device of adjusting mounting block position.
3. plated film rotating cathode belt fracture fault alarm proofing unit according to claim 2, is characterized in that, described prompting device is pilot lamp or hummer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420082865.2U CN203768453U (en) | 2014-02-26 | 2014-02-26 | Belt breakage failure alarm detection device of film-plating rotating cathode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420082865.2U CN203768453U (en) | 2014-02-26 | 2014-02-26 | Belt breakage failure alarm detection device of film-plating rotating cathode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203768453U true CN203768453U (en) | 2014-08-13 |
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ID=51285663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420082865.2U Expired - Fee Related CN203768453U (en) | 2014-02-26 | 2014-02-26 | Belt breakage failure alarm detection device of film-plating rotating cathode |
Country Status (1)
| Country | Link |
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| CN (1) | CN203768453U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109358205A (en) * | 2018-11-15 | 2019-02-19 | 力博重工科技股份有限公司 | High-precision conveyer speed measuring device |
| CN109455464A (en) * | 2018-12-25 | 2019-03-12 | 承德石油高等专科学校 | A kind of long-distance transportation machine belt detection device for operation trouble and method |
-
2014
- 2014-02-26 CN CN201420082865.2U patent/CN203768453U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109358205A (en) * | 2018-11-15 | 2019-02-19 | 力博重工科技股份有限公司 | High-precision conveyer speed measuring device |
| CN109455464A (en) * | 2018-12-25 | 2019-03-12 | 承德石油高等专科学校 | A kind of long-distance transportation machine belt detection device for operation trouble and method |
| CN109455464B (en) * | 2018-12-25 | 2023-11-24 | 承德石油高等专科学校 | Belt operation fault detection device and method for long-distance conveyor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 528000 Guangdong province Foshan Gaoming Cangjiang Industrial Park East rich town Patentee after: GUANGDONG SOUTH BRIGHT GLASS TECHNOLOGIES CO.,LTD. Address before: 528000 Guangdong province Foshan Gaoming Cangjiang Industrial Park East rich town Patentee before: GUANGDONG SOUTH BRIGHT GLASS TECHNOLOGY Co.,Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140813 |